CN110995197A - Acoustic wave filter device with adjustable suppression - Google Patents

Acoustic wave filter device with adjustable suppression Download PDF

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Publication number
CN110995197A
CN110995197A CN201911212787.7A CN201911212787A CN110995197A CN 110995197 A CN110995197 A CN 110995197A CN 201911212787 A CN201911212787 A CN 201911212787A CN 110995197 A CN110995197 A CN 110995197A
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acoustic wave
suppression
wave resonator
parallel
resonator
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CN201911212787.7A
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Chinese (zh)
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杨骐玮
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Wuhan Yanxi Micro Devices Co ltd
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Wuhan Yanxi Micro Devices Co ltd
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Priority to CN201911212787.7A priority Critical patent/CN110995197A/en
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters

Abstract

The invention provides an adjustable-suppression sound wave filter device, which comprises a plurality of series sound wave resonators, wherein the end point of each series sound wave resonator is connected with a parallel sound wave resonator and then grounded; the device also comprises at least one suppression and regulation acoustic wave resonator, wherein one end of the suppression and regulation acoustic wave resonator is connected with any one of the series resonators, the other end of the suppression and regulation acoustic wave resonator is connected with the rear end of any one of the parallel acoustic wave resonators, and any one of the series resonators is not connected with any one of the parallel acoustic wave resonators; the position of the suppression frequency point in the device is changed by changing the area and/or the thickness of the suppression adjustment acoustic wave resonator. The invention can improve the performance index of the filter by adding the suppression and adjustment acoustic wave resonator.

Description

Acoustic wave filter device with adjustable suppression
Technical Field
The invention belongs to the technical field of acoustic wave filters, and particularly relates to an adjustable-suppression acoustic wave filter device.
Background
With the rapid development of wireless communication technology, handheld mobile communication products have been widely popularized and are developing towards miniaturization, high performance and multi-band. As a passive filter in handheld mobile communication products, plays a very important role and task therein.
At present, the filter device in the handheld mobile communication product mainly uses saw (surface active wave), baw (Bulk active wave) and fbar (film Bulk active wave), which can effectively suppress external signals in a receiving path and a transmitting path and reduce signal interference in a radio frequency link. When the communication frequency band is increased, the interference between the filters is increased, which affects the performance of the communication link. In order to reduce the interference between frequency bands, series inductance can be added in the filter connection substrate to change the change of the filter passband suppression, but the design difficulty of the filter is increased, and the product development cost is also increased.
Fig. 1 is a general ladder filter structure including a plurality of series acoustic wave resonators, and a parallel acoustic wave resonator is connected in parallel to the rear end of each series acoustic wave resonator and then grounded. Fig. 2 is a general ladder filter structure with adjustable suppression, based on fig. 1, the rear end of the parallel acoustic wave resonator is grounded after adding an inductor L1, and the position of the suppression frequency point can be adjusted by adjusting the inductance value of the inductor L1, as shown in fig. 9, L _500pH is a simulation curve when the inductance value of L1 is 500pH, L _750pH is a simulation curve when the inductance value of L1 is 750pH, L _1000pH is a simulation curve when the inductance value of L1 is 1000pH, and L _1250pH is a simulation curve when the inductance value of L1 is 1250 pH. In this case, the inductance value is generally large, so that the overall thickness after packaging increases, increasing the cost and size of the product.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: provided is an acoustic wave filter device capable of adjusting suppression, which can improve the performance index of the filter.
The technical scheme adopted by the invention for solving the technical problems is as follows: an adjustable-rejection acoustic wave filter device comprising a plurality of series acoustic wave resonators, each series acoustic wave resonator having an end connected to a parallel acoustic wave resonator and then grounded, characterized in that:
setting the end of the parallel acoustic wave resonator connected with the series acoustic wave resonator as the front end of the parallel acoustic wave resonator, and setting the end of the parallel acoustic wave resonator connected with the ground as the rear end of the parallel acoustic wave resonator;
the device also comprises at least one suppression and regulation acoustic wave resonator, wherein one end of the suppression and regulation acoustic wave resonator is connected with any one series acoustic wave resonator, the other end of the suppression and regulation acoustic wave resonator is connected with the rear end of any one parallel acoustic wave resonator, and any one series acoustic wave resonator is not connected with any one parallel acoustic wave resonator;
the position of the suppression frequency point in the device is changed by changing the area and/or the thickness of the suppression adjustment acoustic wave resonator.
According to the scheme, the rear end of the parallel acoustic wave resonator connected with the suppression and regulation acoustic wave resonator is connected with the inductor and then grounded; the position of the suppression frequency point in the device is changed by changing at least one of the inductance value of the inductor, the suppression adjustment of the area of the acoustic wave resonator and the suppression adjustment of the thickness of the acoustic wave resonator.
According to the scheme, the number of the suppression and regulation acoustic wave resonators is more than two, and the other end of each suppression and regulation acoustic wave resonator is connected with the rear end of the same parallel acoustic wave resonator.
According to the scheme, the suppression and regulation acoustic wave resonators are more than two, and at least one parallel acoustic wave resonator connected with the other end of the suppression and regulation acoustic wave resonator is different from the parallel acoustic wave resonators connected with the other ends of the suppression and regulation acoustic wave resonators.
According to the scheme, the number of the inductors is less than or equal to the number of the suppression adjustment acoustic wave resonators.
According to the scheme, a packaging structure is arranged outside the acoustic wave resonator, and the packaging structure is as follows: the flip chip is connected with the substrate or the gold wire is used for plane connection, and then the dry film or resin is used for sealing.
The invention has the beneficial effects that:
1. the position of the suppression frequency point in the device is changed by adding at least one suppression adjustment acoustic wave resonator and changing the area and/or the thickness of the suppression adjustment acoustic wave resonator, so that the performance index of the filter can be improved.
2. When there is inhibition regulation sound wave syntonizer and inductance simultaneously, the inductance value of inductance that can significantly reduce to the whole thickness of greatly reduced chip can also reduce the cost and the size of product on the basis of promoting the filter performance index.
Drawings
Fig. 1 is a schematic diagram of a general ladder filter structure.
Fig. 2 is a schematic diagram of a general tunable rejection ladder filter.
Fig. 3 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a second embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a third embodiment of the present invention.
Fig. 6 is a schematic structural diagram of a fourth embodiment of the present invention.
Fig. 7 is a schematic structural diagram of a fifth embodiment of the present invention.
Fig. 8 is a schematic diagram of a chip package.
FIG. 9 is a graph of the out-of-band rejection of different inductance values for a general purpose suppressible ladder filter.
Fig. 10 is a diagram of out-of-band suppression effects of different areas of a suppression-adjusted acoustic wave resonator according to a third embodiment of the present invention.
Fig. 11 is a schematic structural diagram of a sixth embodiment of the present invention.
In the figure: 1. the acoustic wave filter comprises an acoustic wave filter, 2 an acoustic wave filter substrate, 3 an acoustic wave filter packaging protective cover, 4 packaging gold balls, 5 a packaging substrate, 6 a substrate output bonding pad, 7 an inductor, 8 a substrate input bonding pad and 9 an acoustic wave filter output bonding pad.
Detailed Description
The invention is further illustrated by the following specific examples and figures.
The first embodiment is as follows:
as shown in fig. 3, the acoustic wave filter device of the present embodiment includes four series acoustic wave resonators S1 to S4, a parallel acoustic wave resonator, i.e., S5 to S8, is connected behind the first to fourth series acoustic wave resonators S1 to S4, respectively, and the rear ends of the parallel acoustic wave resonators S5 to S8 are grounded. One end of the suppression and regulation acoustic wave resonator SS is connected to the grounding end of the first parallel resonator S5, the other end of the suppression and regulation acoustic wave resonator SS is connected to the connection point of the third series resonator S3 and the fourth series resonator S4, and the position of a suppression frequency point in the filter can be changed by changing the area of the suppression and regulation acoustic wave resonator SS and the thickness of the suppression and regulation acoustic wave resonator SS.
The acoustic wave resonator comprises a sandwich structure of a bottom electrode, a piezoelectric layer and a top electrode.
Example two:
as shown in FIG. 4, the acoustic wave filter device of the present embodiment includes four series acoustic wave resonators S1-S4, four parallel acoustic wave resonators S5-S8, and a suppression-regulation acoustic wave resonator SS.
The rear ends of the first to fourth series acoustic wave resonators S1-S4 are respectively connected with a parallel acoustic wave resonator, namely S5-S8, and the rear ends of the parallel acoustic wave resonators S5-S7 are grounded. One end of the suppression and regulation acoustic wave resonator SS is connected to the grounding end of the first parallel resonator S5, the other end of the suppression and regulation acoustic wave resonator SS is connected to the connection point of the fourth series resonator S4 and the end point, and the position of a suppression frequency point in the filter can be changed by changing the area of the suppression and regulation acoustic wave resonator SS and the thickness of the suppression and regulation acoustic wave resonator SS.
Example three:
as shown in fig. 5, the acoustic wave filter device of the present embodiment includes four series acoustic wave resonators S1 to S4, four parallel acoustic wave resonators S5 to S8, a suppression adjustment inductance element L, and a suppression adjustment acoustic wave resonator SS.
The rear ends of the first to fourth series acoustic wave resonators S1-S3 are respectively connected with a parallel acoustic wave resonator, namely S5-S8, the rear end of the first parallel acoustic wave resonator S5 is connected with the suppression adjustment inductance element L and then grounded, and the rear ends of the second, third and fourth parallel acoustic wave resonators S6-S8 are grounded. One end of the suppression and regulation acoustic wave resonator SS is connected to a connection point of the parallel resonator S5 and the suppression and regulation inductance element L, and the other end of the suppression and regulation acoustic wave resonator SS is connected to a connection point of the third series resonator S3 and the fourth series resonator S4.
In the embodiment, the parameters of the four series acoustic wave resonators S1-S4 and the four parallel acoustic wave resonators S5-S8 are completely the same as those of the general tunable suppression ladder filter shown in fig. 2 in the background art, except that the suppression tuning acoustic wave resonator SS is added, and the inductance value of L is 0.2 nH.
The out-of-band suppression effect of the suppression-adjusted acoustic wave resonator in different areas is shown in fig. 10, wherein SS-a1500 is that the SS area is 1500 um2The simulation curve of time, SS-A2500 curve, SS area is 2500 um2The simulation curve of time, SS-A3500 curve, SS area is 3500 um2The simulation curve of time, SS-A4500 curve, is SS area 4500 um2Simulation curve of time. As can be seen from a comparison between fig. 10 and fig. 9, the location of the out-of-passband rejection frequency point (i.e., in the figure) can be improved by adjusting the area of the suppression-adjustment acoustic wave resonator SS of this embodiment, and the value of the inductance L (from hundreds or thousands of phs to 0.2 nH) is greatly reduced, so that the height of the chip package substrate can be reduced, and the product development cost can be reduced.
The acoustic wave resonator be equipped with packaging structure outward, packaging structure is: the flip chip is connected with the substrate or the gold wire is used for plane connection, and then the dry film or resin is used for sealing.
In this embodiment, a schematic diagram of a chip package structure is shown in fig. 8, in which an acoustic wave filter 1 is disposed on an acoustic wave filter substrate 2, and is integrally packaged in a package substrate 5 and an acoustic wave filter package protective cover 3, the acoustic wave filter 1 is connected to a substrate input pad 8 through an acoustic wave filter output pad 9 and a package gold ball 4, the inductor 7 is disposed in the acoustic wave filter substrate 2, and a tail end of the inductor 7 is grounded through a substrate output pad 6. Therefore, if the inductance of the inductor 7 is small enough, the connection line of the inductor 7 is shortened, and the thickness of the package substrate 5 is greatly reduced, so that the thickness of the whole package structure is reduced, and the product development cost is reduced.
Example four:
as shown in fig. 6, the acoustic wave filter device of the present embodiment includes four series acoustic wave resonators S1 to S4, four parallel acoustic wave resonators S5 to S8, a suppression adjustment inductance element L, and a suppression adjustment acoustic wave resonator SS.
The rear ends of the first to third series acoustic wave resonators S1-S3 are respectively connected with a parallel acoustic wave resonator, namely S5-S7, the rear end of the first parallel acoustic wave resonator S5 is connected with the suppression adjustment inductance element L and then grounded, and the rear ends of the second, third and fourth parallel acoustic wave resonators S6-S8 are grounded. One end of the suppression and regulation acoustic wave resonator SS is connected to a connection point of the parallel resonator S5 and the suppression and regulation inductance element L, and the other end of the suppression and regulation acoustic wave resonator SS is connected to a connection point of the fourth series resonator S4 and an end point.
Example five:
as shown in fig. 7, the acoustic wave filter device of the present embodiment includes four series acoustic wave resonators S1 to S4, four parallel acoustic wave resonators S5 to S8, one suppression adjustment inductance element L, and two suppression adjustment acoustic wave resonators SS1 and SS.
The rear ends of the first to fourth series acoustic wave resonators S1-S4 are respectively connected with a parallel acoustic wave resonator, namely S5-S8, the rear end of the first parallel acoustic wave resonator S5 is connected with the suppression adjustment inductance element L and then grounded, and the rear ends of the second, third and fourth parallel acoustic wave resonators S6-S8 are grounded. One end of the first suppression-regulation acoustic wave resonator SS is connected to the connection point of the parallel resonator S5 and the suppression-regulation inductance element L, and the other end of the first suppression-regulation acoustic wave resonator SS is connected to the connection point of the fourth series resonator S4 and the end point. One end of the second suppression-regulation acoustic wave resonator SS1 is connected to the connection point of the parallel resonator S5 and the suppression-regulation inductance element L, and the other end of the second suppression-regulation acoustic wave resonator SS1 is connected to the connection point of the third series resonator S3 and the fourth series resonator S4. The position of the suppression frequency point in the filter can be changed by adjusting the inductance value of the suppression adjustment inductance element L, the areas of the two suppression adjustment acoustic wave resonators SS and SS1 and the thicknesses of the two suppression adjustment acoustic wave resonators SS and SS1, so that the suppression adjustment effect is achieved.
Example six:
as shown in fig. 11, the acoustic wave filter device of the present embodiment includes four series acoustic wave resonators S1 to S4, four parallel acoustic wave resonators S5 to S8, two suppression adjustment inductance elements L, L1, and two suppression adjustment acoustic wave resonators SS1 and SS.
The rear ends of the first to fourth series acoustic wave resonators S1-S4 are respectively connected with a parallel acoustic wave resonator, namely S5-S8, the rear end of the first parallel acoustic wave resonator S5 is connected with the suppression and regulation inductance element L and then grounded, the rear ends of the second and third parallel acoustic wave resonators S6-S7 are grounded, and the rear end of the fourth parallel acoustic wave resonator S8 is connected with the suppression and regulation inductance element L1 and then grounded.
One end of the first suppression-regulation acoustic wave resonator SS is connected to the connection point of the parallel resonator S8 and the suppression-regulation inductance element L1, and the other end of the first suppression-regulation acoustic wave resonator SS is connected to the connection point of the second series resonator S2 and the third series resonator S3. One end of the second suppression-regulation acoustic wave resonator SS1 is connected to the connection point of the parallel resonator S5 and the suppression-regulation inductance element L, and the other end of the second suppression-regulation acoustic wave resonator SS1 is connected to the connection point of the third series resonator S3 and the fourth series resonator S4. The position of the suppression frequency point in the filter can be changed by adjusting the inductance value of the suppression adjustment inductance element L, L1, the areas of the two suppression adjustment acoustic wave resonators SS and SS1 and the thicknesses of the two suppression adjustment acoustic wave resonators SS and SS1, so that the suppression adjustment effect is achieved.
As can be seen from the above embodiments, it is within the scope of the present invention that at least 1 of the suppression-regulation acoustic wave resonators is disposed at the rear end of any one of the series resonators and the parallel acoustic wave resonator not connected thereto.
The above embodiments are only used for illustrating the design idea and features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the content of the present invention and implement the present invention accordingly, and the protection scope of the present invention is not limited to the above embodiments. Therefore, all equivalent changes and modifications made in accordance with the principles and concepts disclosed herein are intended to be included within the scope of the present invention.

Claims (6)

1. An adjustable-rejection acoustic wave filter device comprising a plurality of series acoustic wave resonators, each series acoustic wave resonator having an end connected to a parallel acoustic wave resonator and then grounded, characterized in that:
setting the end of the parallel acoustic wave resonator connected with the series acoustic wave resonator as the front end of the parallel acoustic wave resonator, and setting the end of the parallel acoustic wave resonator connected with the ground as the rear end of the parallel acoustic wave resonator;
the device also comprises at least one suppression and regulation acoustic wave resonator, wherein one end of the suppression and regulation acoustic wave resonator is connected with any one series acoustic wave resonator, the other end of the suppression and regulation acoustic wave resonator is connected with the rear end of any one parallel acoustic wave resonator, and any one series acoustic wave resonator is not connected with any one parallel acoustic wave resonator;
the position of the suppression frequency point in the device is changed by changing the area and/or the thickness of the suppression adjustment acoustic wave resonator.
2. The acoustic wave filter device according to claim 1, wherein: the back end of the parallel acoustic wave resonator connected with the suppression and regulation acoustic wave resonator is grounded after being connected with an inductor; the position of the suppression frequency point in the device is changed by changing at least one of the inductance value of the inductor, the suppression adjustment of the area of the acoustic wave resonator and the suppression adjustment of the thickness of the acoustic wave resonator.
3. The acoustic wave filter device according to claim 1 or 2, characterized in that: the number of the suppression and regulation acoustic wave resonators is more than two, and the other end of each suppression and regulation acoustic wave resonator is connected with the rear end of the same parallel acoustic wave resonator.
4. The acoustic wave filter device according to claim 1 or 2, characterized in that: the suppression and regulation acoustic wave resonators are more than two, and at least one parallel acoustic wave resonator connected with the other end of the suppression and regulation acoustic wave resonator is different from the parallel acoustic wave resonators connected with the other ends of the other suppression and regulation acoustic wave resonators.
5. The acoustic wave filter device according to claim 2, wherein: the number of the inductances is less than or equal to the number of the suppression-tuned acoustic wave resonators.
6. The acoustic wave filter device according to claim 1, wherein: the acoustic wave resonator be equipped with packaging structure outward, packaging structure is: the flip chip is connected with the substrate or the gold wire is used for plane connection, and then the dry film or resin is used for sealing.
CN201911212787.7A 2019-12-02 2019-12-02 Acoustic wave filter device with adjustable suppression Pending CN110995197A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112468111A (en) * 2020-12-07 2021-03-09 诺思(天津)微系统有限责任公司 Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment

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Publication number Priority date Publication date Assignee Title
CN1489286A (en) * 2002-08-06 2004-04-14 松下电器产业株式会社 Elastic surface wave filter and electronic device using said filter
CN1619958A (en) * 2003-11-20 2005-05-25 松下电器产业株式会社 Filter using piezoelectric resonator
CN102017287A (en) * 2008-04-25 2011-04-13 维斯普瑞公司 Tunable matching network circuit topology selection
CN109787581A (en) * 2018-11-28 2019-05-21 天津大学 The filter based on bulk acoustic wave resonator with band logical and high pass dual function
CN109831176A (en) * 2018-12-05 2019-05-31 天津大学 A kind of piezoelectric acoustic-wave filter and duplexer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1489286A (en) * 2002-08-06 2004-04-14 松下电器产业株式会社 Elastic surface wave filter and electronic device using said filter
US20040085161A1 (en) * 2002-08-06 2004-05-06 Hiroshi Kushitani SAW filter and electronic device including SAW filter
CN1619958A (en) * 2003-11-20 2005-05-25 松下电器产业株式会社 Filter using piezoelectric resonator
CN102017287A (en) * 2008-04-25 2011-04-13 维斯普瑞公司 Tunable matching network circuit topology selection
CN109787581A (en) * 2018-11-28 2019-05-21 天津大学 The filter based on bulk acoustic wave resonator with band logical and high pass dual function
CN109831176A (en) * 2018-12-05 2019-05-31 天津大学 A kind of piezoelectric acoustic-wave filter and duplexer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112468111A (en) * 2020-12-07 2021-03-09 诺思(天津)微系统有限责任公司 Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment
CN112468111B (en) * 2020-12-07 2022-07-12 诺思(天津)微系统有限责任公司 Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment

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