CN109787581A - The filter based on bulk acoustic wave resonator with band logical and high pass dual function - Google Patents
The filter based on bulk acoustic wave resonator with band logical and high pass dual function Download PDFInfo
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- CN109787581A CN109787581A CN201811432738.XA CN201811432738A CN109787581A CN 109787581 A CN109787581 A CN 109787581A CN 201811432738 A CN201811432738 A CN 201811432738A CN 109787581 A CN109787581 A CN 109787581A
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- acoustic wave
- bulk acoustic
- wave resonator
- inductance
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
Abstract
The present invention proposes that a kind of filter based on bulk acoustic wave resonator with band logical and high pass dual function, including a series arm and N parallel branch, N are the positive integer more than or equal to 3, in which: includes N+1 series connection bulk acoustic wave resonator in series arm；Include 1 inductance and 1 bulk acoustic wave resonator in parallel in every parallel branch, inductance first end is connected between two adjacent series connection bulk acoustic wave resonators in series arm, inductance second end is connect with the first end of the bulk acoustic wave resonator in parallel in the parallel branch where the inductance, the second end of bulk acoustic wave resonator in the parallel branch is connect with electricity ground level, and flying capcitor is connected between parallel branch.The filter is cascaded using bulk acoustic wave resonator and inductance to be formed height and roll-offs band logical and high-pass filter.
Description
Technical field
The present invention relates to technical field of microelectronic devices, a kind of particularly base with band logical and high pass dual function
In the filter of bulk acoustic wave resonator.
Background technique
With the development of society, people to mobile communication, satellite positioning, navigation, mobile Internet application etc. demands increasingly
It is vigorous, the bandwidth assignment in wireless telecommunications is required also more to improve day.The division of wireless telecommunications frequency band is showed intensively
The characteristics of property, high-frequency and precipitous bandwidth.For meet demand, wireless telecommunication system is towards multi-functional, multiband, the side of multi-protocols
To development.It such as needs currently to combine GSM, CDMA, WCDMA, GPS, WIFI different communication frequency range function in wireless telecommunications
On a product, this proposes higher challenge to the radio-frequency front-end in wireless telecommunications system.Especially because package size
It increasingly minimizes, frequency channels resource day is more crowded, and different communication bands interval is more close, to guarantee each system worked well
And do not interfere with each other, this requires filter therein to be capable of providing excellent filtering performance, realizes the low damage to receiving and transmitting signal
Consumption and high isolation.
In various types of filters, thin-film bulk acoustic wave filter generates resonance using the piezoelectric effect of piezo-electric crystal.
Since resonance is generated by mechanical wave, rather than electromagnetic wave, as resonance source, the wavelength of mechanical wave is shorter than electromagnetic wavelength by 105Times.
Therefore, the relatively traditional electromagnetic filter size of the resonator volume of thin-film bulk acoustic wave filter and its composition significantly reduces.
On the other hand, since the crystal orientation growth of piezo-electric crystal can be controlled well at present, the loss of resonator is minimum, and quality factor are high,
Cope with the requirement of the somewhat complex designs such as abrupt transition band and low insertion loss.Since the size that bulk accoustic wave filter has is small, high
It roll-offs, the characteristics such as filter with low insertion loss, is widely used in communication system as the filter of core.
But currently, traditional single bulk accoustic wave filter can only have a frequency band.To meet the multifrequency such as carrier wave polymerization
The needs that band works at the same time, a solution technology are that parallel branch in parallel using multiple bulk accoustic wave filters, different has not
Same frequency range.However, the device thus manufactured increases device size, device complexity is increased, so that product yield and system
This is caused to have different degrees of deterioration.In addition, even if can realize different filtering in same filter using above-mentioned technology
Frequency band, it is contemplated that the filter in each branch is often bandpass filter, for can realize simultaneously in same filter
The small size low-cost technologies of band logical and high pass filter function not yet propose effective solution at present.
Summary of the invention
In order to realize band logical and high pass filter function simultaneously in same filter, the present invention propose it is a kind of have band logical and
The filter based on bulk acoustic wave resonator of high pass dual function.
Filter based on bulk acoustic wave resonator proposed by the present invention with band logical and high pass dual function, including one
Series arm and N parallel branch, N are the positive integer more than or equal to 3, in which: include N+1 concatermer in the series arm
Acoustic resonator；Include 1 inductance and 1 bulk acoustic wave resonator in parallel, the inductance first end in every parallel branch
It is connected between two adjacent series connection bulk acoustic wave resonators in the series arm, the inductance second end and the inductance institute
Parallel branch in bulk acoustic wave resonator in parallel first end connection, second of the bulk acoustic wave resonator in the parallel branch
End is connect with electricity ground level.
Optionally, in the series arm, the series resonance frequency of each series connection bulk acoustic wave resonator is identical.
Optionally, each bulk acoustic wave resonator in parallel in the parallel branch has mass loading, each parallel resonator
Added mass loading thickness is not same value.
Optionally, the parallel resonance frequency and series arm of each bulk acoustic wave resonator in parallel in affiliated parallel branch are each
The series resonance frequency difference of series connection bulk acoustic wave resonator is within 10MHz.
Optionally, there is mutual inductance between the inductance in the adjacent parallel branch.
Optionally, the filter includes single capacitor, the capacitor be connected across inductance in one group of adjacent parallel branch with
Between the tie point of bulk acoustic wave resonator.
Optionally, the filter may include multiple capacitors, and each capacitor is connected across in the adjacent parallel branch of each group
Between inductance and the tie point of bulk acoustic wave resonator.
Optionally, the inductance, capacitor are realized with integrated passive devices technique.
Optionally, the inductance in each parallel branch meets following formula: Li>1/ω2CiWherein, i is from 1 to N
Positive integer, LiIndicate the inductance value of inductance described in i-th parallel branch, ω indicates High Pass Filter Cutoff Frequency, CiIt indicates
The capacitance of the equivalent capacity of parallel resonator described in i-th parallel branch.
From the foregoing, it will be observed that the filtering based on bulk acoustic wave resonator proposed by the present invention with band logical and high pass dual function
Device is cascaded to form height and roll-off band logical and high-pass filter with bulk acoustic wave resonator and inductance, by series resonator, parallel resonator
And inductance, capacitor form, there are mutual inductances between the inductance of each parallel branch, while having to the selection of each inductance value
It asks, when meeting certain condition, height can be formed simultaneously and roll-offed band logical and high-pass filter.
Detailed description of the invention
Attached drawing for a better understanding of the present invention, does not constitute an undue limitation on the present invention.Wherein:
Fig. 1 is bulk acoustic wave resonator performance diagram；
Fig. 2 is the filter based on bulk acoustic wave resonator with band logical and high pass dual function of the embodiment of the present invention
Topology diagram；
Fig. 3 is that the filter based on bulk acoustic wave resonator with band logical and high pass dual function of the embodiment of the present invention exists
Working frequency is higher than the equivalent circuit diagram under the conditions of parallel resonance frequency；
Fig. 4 is bonding line packaging effect figure；
Fig. 5 (a) is the filtering based on bulk acoustic wave resonator with band logical and high pass dual function of the embodiment of the present invention
The insertion loss figure of device, Fig. 5 (b) are the partial enlarged view of Fig. 5 (a)；
Fig. 6 is the filter based on bulk acoustic wave resonator with band logical and high pass dual function of the embodiment of the present invention
Return loss plot.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be machine
Tool connection, is also possible to be electrically connected；It can be directly connected, two members can also be can be indirectly connected through an intermediary
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
Fig. 1 is bulk acoustic wave resonator performance diagram.There are two resonance frequency points, respectively a series resonance for syntonizer
Point and a parallel resonant point, series resonance point is in left side, resonance frequency fs, parallel resonant point is in right side, resonance frequency
Rate is fp, between series connection and parallel resonance frequency point, resonator shows as inductance characteristic, and series connection and parallel resonance frequency point it
Outside, resonator shows as capacitance characteristic.When growth has mass loading on resonator, resonant frequency is moved down, simultaneously such as Fig. 1
Connection resonance frequency is moved to f 'p, series resonance frequency is moved to f 's, grow the resonator for having mass loading and non-growth quality be negative
The resonator collective effect of load, shaping filter.
Fig. 2 is the filter based on bulk acoustic wave resonator with band logical and high pass dual function of the embodiment of the present invention
Topology diagram.As shown in Fig. 2, the filter is made of series resonator, parallel resonator and inductance, capacitor.It needs
Bright, all series resonators and parallel resonator in the filter are all sandwich structure, by top electrode, lower electrode
It is formed with intermediate piezoelectric layer, has an air chamber below lower electrode, to form acoustics total reflection boundary.Series resonator packet
Include S1, S2, S3, S4.Parallel resonator includes P1, P2, P3, but the parallel resonator needs to add mass loading, to drop
Its low series parallel resonance frequency.And inductance includes L1, L2, L3, each inductance needs and then corresponding parallel resonator is connected
Ground connection, is formed together parallel branch.In addition, there is mutual inductance M1 between inductance L1 and L2, and they are connected with parallel resonator
Connected a capacitor Cx between connecting pin, has mutual inductance M2 between inductance L2 and L3.
It should be noted that each bulk acoustic wave resonator in parallel in parallel branch has mass loading, each parallel resonance
Mass loading thickness added by device is not same value.Mass loading thickness is different, can be conducive to improve Insertion Loss and standing wave.
The parallel resonance frequency and string of each bulk acoustic wave resonator in parallel in parallel branch belonging to it should also be noted that,
Connection branch respectively connect bulk acoustic wave resonator series resonance frequency it is more approximate, such as difference is within 10MHz.
When series resonator work is in series resonance point, and parallel resonator work is just constituted in parallel resonance frequency point
Bandpass filter, and an inductance of connecting on parallel resonator, thus it is possible to vary the series resonance frequency point of parallel resonator, therefore
Can widen the bandwidth of bandpass filter, and the mutual inductance between inductance, and be connected across in one group of adjacent parallel branch inductance with
Capacitor between the tie point of bulk acoustic wave resonator can improve Out-of-band rejection and roll-off.In addition, can also be wrapped in the filter
The tie point for being connected across inductance and bulk acoustic wave resonator in the first, second parallel branch containing multiple capacitors, such as first capacitor
Between, second capacitor is connected across between the inductance in second, third parallel branch and the tie point of bulk acoustic wave resonator, etc.
Deng.
And when working frequency is higher than the parallel resonance frequency of these resonators, resonator shows as capacitance characteristic, series connection
Resonator S1, S2, S3, S4 are equivalent to capacitor C01, C02, C03, C04, parallel resonator P1, P2, P3 be equivalent to capacitor C1, C2,
C3, the filter equivalent circuit being consequently formed are Fig. 3, this can be equivalent to high-pass filter, it should be noted that each branch in parallel
The inductance on road is required to meet Li>1/ω2Ci, wherein i is from 1 to the positive integer N, LiIndicate institute in i-th parallel branch
The inductance value of inductance is stated, ω indicates High Pass Filter Cutoff Frequency, CiIndicate parallel resonator described in i-th parallel branch
The capacitance of equivalent capacity.
Fig. 4 is bonding line packing forms, and wherein bulk acoustic wave series resonator S1, S2, S3, S4 are integrated on chip 02, body
Sound wave parallel resonator p1, p2, p3 are integrated on chip 04, three inductance L1, L2, L3 and capacitor Cx integrated passive devices
IPD (integrated passive devices) technique is realized, and is integrated on chip 03.IPD technique have high integration,
The features such as small size, high q-factor, can integrate very well with bulk acoustic wave resonator.Chip 02,03,04 passes through bonding line mode collection again
At on PCB 01.To illustrate that the mutual inductance between inductance L1, L2, L3 passes through the distance between they control.
The present invention devises the band logical that can cover 2.5-2.65GHz frequency range and the high pass double frequency-band filtering of covering 4-8GHz
Device, the performance test results are as follows: Fig. 5 (a) is the insertion loss of the filter based on bulk acoustic wave resonator of the embodiment of the present invention
Figure, Fig. 5 (b) are the partial enlarged view of Fig. 5 (a).As shown, bandpass filter covering frequence range is 2.5-2.65GHz, insert
Damage is greater than 2.5dB, faces band and inhibits to be greater than 45dB, high-pass filter coverage area extends to 8GHz since 4GHz, and Insertion Loss is greater than
2.5dB.Two filters all have preferably with interior Insertion Loss and Out-of-band rejection, while also having and roll-offing faster.Fig. 6 is echo
Loss figure, bandpass filter is in frequency 2.5-2.65GHz, and the return loss of two ports is greater than 15dB, and high-pass filter exists
In frequency 4-8GHz, the return loss of two ports is greater than 10dB.
Above-mentioned specific embodiment, does not constitute a limitation on the scope of protection of the present invention.Those skilled in the art should be bright
It is white, design requirement and other factors are depended on, various modifications, combination, sub-portfolio and substitution can occur.It is any
Made modifications, equivalent substitutions and improvements etc. within the spirit and principles in the present invention, should be included in the scope of the present invention
Within.
Claims (11)
1. a kind of filter based on bulk acoustic wave resonator with band logical and high pass dual function, which is characterized in that including one
Series arm and N parallel branch, N are the positive integer more than or equal to 3, in which:
It include N+1 series connection bulk acoustic wave resonator in the series arm；
Comprising 1 inductance and 1 bulk acoustic wave resonator in parallel in every parallel branch, the inductance first end is connected to institute
It states between two adjacent series connection bulk acoustic wave resonators in series arm, the inductance second end is in parallel where with the inductance
The first end of bulk acoustic wave resonator in parallel in branch connects, the second end and electricity of the bulk acoustic wave resonator in the parallel branch
Ground level connection.
2. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, in the series arm, the series resonance frequency of each series connection bulk acoustic wave resonator is identical.
3. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, each bulk acoustic wave resonator in parallel in the parallel branch has mass loading.
4. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, mass loading thickness added by each parallel resonator is not same value.
5. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, the parallel resonance frequency and each concatermer of series arm of each bulk acoustic wave resonator in parallel in the parallel branch
The difference of the series resonance frequency of acoustic resonator is within 10MHz.
6. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that there is mutual inductance between the inductance in the adjacent parallel branch.
7. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, the filter includes single capacitor, which is connected across inductance and bulk acoustic wave in one group of adjacent parallel branch
Between the tie point of resonator.
8. the filter based on bulk acoustic wave resonator according to claim 7 with band logical and high pass dual function,
It is characterized in that, the filter includes multiple capacitors, and each capacitor is connected across inductance and body sound in the adjacent parallel branch of each group
Between the tie point of wave resonator.
9. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, the inductance is realized with integrated passive devices technique.
10. the filtering based on bulk acoustic wave resonator according to claim 7 or 8 with band logical and high pass dual function
Device, which is characterized in that the capacitor is realized with integrated passive devices technique.
11. the filter based on bulk acoustic wave resonator according to claim 1 with band logical and high pass dual function,
It is characterized in that, the inductance in each parallel branch meets following formula: Li>1/ω2Ci
Wherein, i is from 1 to the positive integer N, LiIndicate the inductance value of inductance described in i-th parallel branch, ω indicates high
Pass filter cut off frequency, CiIndicate the capacitance of the equivalent capacity of parallel resonator described in i-th parallel branch.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811432738.XA CN109787581A (en) | 2018-11-28 | 2018-11-28 | The filter based on bulk acoustic wave resonator with band logical and high pass dual function |
| PCT/CN2019/121256 WO2020108527A1 (en) | 2018-11-28 | 2019-11-27 | Bulk acoustic resonator-based filter having dual functions of bandpass and highpass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811432738.XA CN109787581A (en) | 2018-11-28 | 2018-11-28 | The filter based on bulk acoustic wave resonator with band logical and high pass dual function |
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| CN109787581A true CN109787581A (en) | 2019-05-21 |
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| WO (1) | WO2020108527A1 (en) |
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| CN110492864A (en) * | 2019-08-09 | 2019-11-22 | 天津大学 | A kind of encapsulating structure of bulk accoustic wave filter and the manufacturing method of the filter |
| CN110995197A (en) * | 2019-12-02 | 2020-04-10 | 武汉衍熙微器件有限公司 | Acoustic wave filter device with adjustable suppression |
| CN111130499A (en) * | 2020-01-06 | 2020-05-08 | 中国电子科技集团公司第十三研究所 | Broadband film cavity acoustic resonator filter |
| CN111224634A (en) * | 2020-01-20 | 2020-06-02 | 诺思(天津)微系统有限责任公司 | Design method of low group delay fluctuation filter |
| WO2020108527A1 (en) * | 2018-11-28 | 2020-06-04 | 天津大学 | Bulk acoustic resonator-based filter having dual functions of bandpass and highpass |
| CN111431505A (en) * | 2020-04-07 | 2020-07-17 | 诺思(天津)微系统有限责任公司 | Filter, multiplexer and communication equipment |
| CN112350684A (en) * | 2020-10-29 | 2021-02-09 | 诺思(天津)微系统有限责任公司 | Acoustic wave filter, multiplexer and communication equipment |
| CN112468111A (en) * | 2020-12-07 | 2021-03-09 | 诺思(天津)微系统有限责任公司 | Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment |
| CN113536729A (en) * | 2021-07-27 | 2021-10-22 | 中国电子科技集团公司第二十六研究所 | Method for assembling and using film bulk acoustic wave resonant filter and electronic equipment |
| WO2021238970A1 (en) * | 2020-05-28 | 2021-12-02 | 诺思(天津)微系统有限责任公司 | Filter, duplexer, multiplexer, and communication device |
| CN115250128A (en) * | 2021-04-26 | 2022-10-28 | 诺思(天津)微系统有限责任公司 | Method for improving performance of duplexer, duplexer and communication equipment |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1369965A (en) * | 2001-02-07 | 2002-09-18 | 株式会社村田制作所 | Elastic surface wave filtering device |
| CN1489286A (en) * | 2002-08-06 | 2004-04-14 | 松下电器产业株式会社 | Elastic surface wave filter and electronic device using said filter |
| CN1751436A (en) * | 2003-12-01 | 2006-03-22 | 株式会社村田制作所 | Filter device |
| CN101128977A (en) * | 2005-02-28 | 2008-02-20 | 松下电器产业株式会社 | Piezoelectric filter, and duplexer and communications apparatus using the same |
| US20080252397A1 (en) * | 2007-04-11 | 2008-10-16 | Carlton Stuebing | BAW Resonator Filter Bandwidth and Out-of-Band Frequency Rejection |
| CN102916674A (en) * | 2011-08-03 | 2013-02-06 | 太阳诱电株式会社 | Acoustic wave filter |
| CN103281050A (en) * | 2013-06-17 | 2013-09-04 | 天津大学 | Film bulk acoustic wave filter |
| CN104221285A (en) * | 2012-04-10 | 2014-12-17 | 株式会社村田制作所 | Ladder-type surface acoustic wave filter |
| US20170244382A1 (en) * | 2016-02-19 | 2017-08-24 | Qorvo Us, Inc. | High power and low loss acoustic filter |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103929148B (en) * | 2013-01-11 | 2017-09-19 | 中兴通讯股份有限公司 | A kind of filter with low insertion loss piezoelectric sound wave bandpass filter and implementation method |
| CN107342749B (en) * | 2017-06-05 | 2020-08-28 | 锐迪科微电子科技（上海）有限公司 | Band-pass filter |
| CN108512526B (en) * | 2018-06-04 | 2019-10-11 | 安徽安努奇科技有限公司 | Bandwidth-limited circuit and multiplexer |
| CN109787581A (en) * | 2018-11-28 | 2019-05-21 | 天津大学 | The filter based on bulk acoustic wave resonator with band logical and high pass dual function |
-
2018
- 2018-11-28 CN CN201811432738.XA patent/CN109787581A/en active Pending
-
2019
- 2019-11-27 WO PCT/CN2019/121256 patent/WO2020108527A1/en active Application Filing
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1369965A (en) * | 2001-02-07 | 2002-09-18 | 株式会社村田制作所 | Elastic surface wave filtering device |
| CN1489286A (en) * | 2002-08-06 | 2004-04-14 | 松下电器产业株式会社 | Elastic surface wave filter and electronic device using said filter |
| CN1751436A (en) * | 2003-12-01 | 2006-03-22 | 株式会社村田制作所 | Filter device |
| CN101128977A (en) * | 2005-02-28 | 2008-02-20 | 松下电器产业株式会社 | Piezoelectric filter, and duplexer and communications apparatus using the same |
| US20080252397A1 (en) * | 2007-04-11 | 2008-10-16 | Carlton Stuebing | BAW Resonator Filter Bandwidth and Out-of-Band Frequency Rejection |
| CN102916674A (en) * | 2011-08-03 | 2013-02-06 | 太阳诱电株式会社 | Acoustic wave filter |
| CN104221285A (en) * | 2012-04-10 | 2014-12-17 | 株式会社村田制作所 | Ladder-type surface acoustic wave filter |
| CN103281050A (en) * | 2013-06-17 | 2013-09-04 | 天津大学 | Film bulk acoustic wave filter |
| US20170244382A1 (en) * | 2016-02-19 | 2017-08-24 | Qorvo Us, Inc. | High power and low loss acoustic filter |
Non-Patent Citations (3)
| Title |
|---|
| MINGKE QI: "High performance TD-SCDMA band-pass filter based on film bulk acoustic resonator technology", 《 2012 ASIA PACIFIC MICROWAVE CONFERENCE PROCEEDINGS》 * |
| 朱健: "《微米纳米技术丛书•MEMS与微系统系列 RF MEMS器件设计、加工和应用》", 31 December 2012 * |
| 蔡兆禄: "《电工基础》", 30 November 1988, 人民邮电出版社 * |
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|---|---|---|---|---|
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| CN111130499A (en) * | 2020-01-06 | 2020-05-08 | 中国电子科技集团公司第十三研究所 | Broadband film cavity acoustic resonator filter |
| CN111130499B (en) * | 2020-01-06 | 2023-05-02 | 中国电子科技集团公司第十三研究所 | Broadband film cavity acoustic resonant filter |
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| WO2021238970A1 (en) * | 2020-05-28 | 2021-12-02 | 诺思(天津)微系统有限责任公司 | Filter, duplexer, multiplexer, and communication device |
| CN112350684B (en) * | 2020-10-29 | 2021-08-10 | 诺思(天津)微系统有限责任公司 | Acoustic wave filter, multiplexer and communication equipment |
| WO2022089545A1 (en) * | 2020-10-29 | 2022-05-05 | 诺思(天津)微系统有限责任公司 | Acoustic wave filter, multiplexer, and communication device |
| CN112350684A (en) * | 2020-10-29 | 2021-02-09 | 诺思(天津)微系统有限责任公司 | Acoustic wave filter, multiplexer and communication equipment |
| CN112468111A (en) * | 2020-12-07 | 2021-03-09 | 诺思(天津)微系统有限责任公司 | Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment |
| CN112468111B (en) * | 2020-12-07 | 2022-07-12 | 诺思(天津)微系统有限责任公司 | Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment |
| CN115250128A (en) * | 2021-04-26 | 2022-10-28 | 诺思(天津)微系统有限责任公司 | Method for improving performance of duplexer, duplexer and communication equipment |
| CN115250128B (en) * | 2021-04-26 | 2023-11-24 | 诺思(天津)微系统有限责任公司 | Method for improving performance of duplexer, duplexer and communication equipment |
| CN113536729A (en) * | 2021-07-27 | 2021-10-22 | 中国电子科技集团公司第二十六研究所 | Method for assembling and using film bulk acoustic wave resonant filter and electronic equipment |
| CN113536729B (en) * | 2021-07-27 | 2022-11-01 | 中国电子科技集团公司第二十六研究所 | Method for assembling and using film bulk acoustic wave resonant filter and electronic equipment |
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| WO2020108527A1 (en) | 2020-06-04 |
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