CN112468111B - Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment - Google Patents
Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment Download PDFInfo
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Abstract
The invention discloses a method for improving the nonlinear performance of an acoustic wave filter, the filter, a multiplexer and communication equipment. In the method, the acoustic wave filter comprises a plurality of piezoelectric acoustic wave resonators, and at least 1 group of parallel split resonators is included therein, the method comprising one or more of: the structures of the connecting lines of all resonators in the parallel split resonator group are different, so that nonlinear components generated by all resonators are at least partially offset; changing the area and/or shape of each resonator in the parallel split resonator group to at least partially cancel out the nonlinear components generated by each resonator; conductors are added to the filter to at least partially cancel out the nonlinear components generated by the resonators.
Description
Technical Field
The present invention relates to the field of filter technology, and in particular, to a method for improving the nonlinear performance of an acoustic wave filter, a multiplexer, and a communication device.
Background
The resonator in the filter generates a nonlinear component when a radio frequency signal is input, and the nonlinear component pair causes the performance of a communication system to be deteriorated. In the prior art, through nonlinear splitting of resonators, radio-frequency signals respectively pass through upper and lower electrodes of two split resonators, and nonlinear components generated are identical in amplitude and opposite in phase, so that the nonlinear components can be eliminated. Parallel splitting is one of the ways. Fig. 1 is a schematic diagram of a resonator topology in a prior art filter. Fig. 2 is a schematic diagram of a parallel split of resonators in a filter according to the prior art. As shown in fig. 2, the resonator 102 in fig. 1 may be split into the resonators 102a and 102b connected in parallel in fig. 2 by way of example, and similarly, the resonator 113 in fig. 1 may be split into two resonators 113a and 113b connected in parallel.
In the parallel splitting, because the electromagnetic environments around the two parallel-split resonators are different, the amplitude and the phase of two nonlinear signals are changed, the amplitude equality cannot be realized, and the phases are opposite, so that the nonlinear signals are completely eliminated.
Disclosure of Invention
In view of this, the present invention provides a method for improving the nonlinear performance of an acoustic wave filter, and an acoustic wave filter, a multiplexer, and a communication device, which have the advantages of good performance, low cost, and wide application.
The invention provides the following technical scheme:
a method of improving the nonlinear performance of an acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators and at least 1 group of parallel split resonators, the method comprising one or more of: making the structures of the resonator connecting lines in the parallel split resonator group different so as to at least partially offset nonlinear components generated by the resonators; differentiating the area and/or shape of each resonator in the group of parallel split resonators to at least partially cancel out the nonlinear components generated by each resonator; conductors are added to the filter to at least partially cancel out the nonlinear components generated by the resonators.
Optionally, the structure of the resonator connection line includes one or more of the following: the position of the connecting line, the length of the connecting line, the width of the connecting line, the shape and the area of the connecting line.
Optionally, there are 2 resonators in the parallel split resonator group, where a first conductor is near a first resonator; the step of adding a conductor comprises: a second conductor is added to the vicinity of a second resonator of the 2 resonators, and the electromagnetic environment formed by the second conductor and the second resonator is made similar to the electromagnetic environment formed by the first conductor and the first resonator.
Optionally, the electromagnetic environment is one or more of: capacitance or mutual inductance between the connection line and the conductor near each resonator in the group of parallel split resonators; capacitance or mutual inductance between each resonator in the parallel split resonator group and the conductor near the resonator; coupling capacitance or mutual inductance generated by a substrate or a substrate of the acoustic wave filter.
Optionally, the second conductor is connected in the same manner as the first conductor.
Optionally, the at least 1 group of parallel split resonators is directly connected to a signal input or output of the acoustic wave filter.
Optionally, the step of adding conductors in the filter comprises: adding conductors in the vicinity of one or more resonators in the parallel split resonator group, the added conductors for placing each resonator in the parallel split resonator group in a similar electromagnetic environment.
Optionally, the added conductors are located at one or more of: a layer in which the upper electrode or the lower electrode of the resonator is located; a substrate or baseplate of the filter; the inside or outside of the package structure of the filter.
Optionally, the number of resonators in the parallel split resonator group is an even number.
An acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators and at least 1 group of parallel split resonators, wherein: the connecting lines of at least 2 resonators in the parallel split resonator group have different structures and are used for at least partially offsetting nonlinear components generated by the at least 2 resonators.
Optionally, the structure of the resonator wiring includes one or more of the following: the position of the connecting line, the length of the connecting line, the width of the connecting line, the shape and the area of the connecting line.
An acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators and at least 1 group of parallel split resonators, wherein: in the parallel split resonator group, at least 2 resonators have different areas and/or shapes, and the areas and/or shapes are used for at least partially canceling nonlinear components generated by the at least 2 resonators.
An acoustic wave filter comprises a plurality of piezoelectric acoustic wave resonators and at least 1 parallel split resonator group, wherein in the acoustic wave filter, at least 1 parallel split resonator group is arranged, and all resonators in the parallel split resonator group are in the same electromagnetic environment.
Optionally, the group of parallel split resonators has added conductors located at one or more of: a layer in which the upper electrode or the lower electrode of the resonator is located; a substrate or baseplate of a filter; inside or outside the package structure of the filter.
Optionally, the at least 1 set of parallel split resonators is located at a signal output of the acoustic wave filter.
Optionally, the number of resonators in the parallel split resonator group is an even number.
Optionally, in the parallel split resonator group, a common end of each resonator is connected to the same side of another polygonal resonator.
A multiplexer comprises the acoustic wave filter.
A communication device comprising an acoustic wave filter according to the present invention.
According to the technical scheme of the invention, through changing the connection structure, the area and/or the shape of the resonators, the arrangement of the conductors and the like, the nonlinear components generated by the parallel split resonators in the acoustic wave filter can be improved, and finally, the nonlinear performance of the filter can be improved. The mode is flexible to change, and almost has no influence on the size, the cost and the design scheme of the filter; the influence caused by coupling of other structures such as a substrate and the like on a chip layout can be eliminated.
Drawings
For purposes of illustration and not limitation, the present invention will now be described in accordance with its preferred embodiments, particularly with reference to the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a filter topology according to the prior art;
figure 2 is a schematic diagram according to the parallel splitting of resonators in the filter of figure 1;
FIG. 3 is a cross-sectional view of two resonators split in parallel;
figure 4 is a cross-sectional view of two resonators split in parallel with a wire nearby;
FIG. 5 is a cross-sectional view of two resonators split in parallel with a resonator disposed thereabout;
FIGS. 6a to 6f are schematic diagrams illustrating the configuration of varying electromagnetic environments at different positions in the device;
figure 7a shows a device plan view of a parallel split resonator of a first embodiment of the invention with improved non-linear performance;
figure 7b shows a device plan view of a parallel split resonator of a second embodiment of the invention with improved non-linear performance;
figure 7c shows a device plan view of a parallel split resonator of a third embodiment of the present invention to improve nonlinear performance;
figure 7d shows a device plan view of a parallel split resonator of a fourth embodiment of the present invention to improve nonlinear performance.
Detailed Description
In the embodiment of the present invention, in a design for improving nonlinearity by splitting a parallel resonator in a filter, when the electromagnetic environments around two resonators split in parallel resonators are different (possibly due to the presence of other resonators or routing or the presence of other structures), it is necessary to adjust a connection line of one resonator, including adjusting the position, length, width, area, shape, and the like of the connection line to ensure that nonlinear components flowing through the two resonators have the same amplitude and are in opposite phases, so as to better eliminate nonlinear components and improve nonlinear performance of the filter, which is described in detail below.
Figure 3 shows a device plan view of a prior art parallel split resonator. As shown in fig. 3, there are two resonators 310A and 310B in parallel, with a wire 320 and a via 330 in the vicinity. The two resonators have the same area and the same shape. When the amplitudes of the nonlinear components generated by the two paths of the two resonators 310A and 310B are the same and the phases are opposite, the nonlinear components can be cancelled, and the nonlinear performance is improved. The structure in the above figure is a parallel split structure, and may be present in the series branches of the filter, or in the parallel branches. When the signal appears on the series branch, the A end and the B end are respectively connected to the middle of the adjacent left and right series resonators, or one end of the signal is connected with input or output, and the other end of the signal is connected with the adjacent series resonators; when the parallel resonant branch is present, one of the terminals a and B is connected to a node (which may be an input node or an output node, or may be an intermediate node in the series branch) of the series branch, and the other terminal is connected to the ground line. Preferably, when the terminals a and/or B are connected to the resonator and the resonator has a polygonal shape, the terminals a and/or B are the same side of the resonator at the corresponding connection. The same preferences apply to the remaining embodiments of the invention.
In practice there are often adjacent wires or resonators around two parallel split resonators in the whole device. As shown in fig. 4, a connection line 340 exists around the two parallel split resonators 310A and 310B, and since the inductive coupling values generated by the connection line 340 and the two resonators 310A and 310B are not equal, the nonlinear components generated on the two resonators 310A and 310B are not equal, and thus the nonlinear components cannot be completely cancelled. As shown in fig. 5, there are other resonators 350 around the two parallel split resonators 310A and 310B, and since the inductive coupling values generated by the resonator 350 and the two resonators 310A and 310B are not equal, the nonlinear components generated on the two resonators 310A and 310B are not equal, and thus the nonlinear components are difficult to be completely cancelled.
The wiring 340 or other resonator 350 of fig. 4 and 5 is essentially a structure that alters the electromagnetic environment. The electromagnetic environment is mainly formed by electromagnetic interactions between conductors, such as: capacitance or mutual inductance between the connection line and a conductor near the resonator; capacitance or mutual inductance between the resonator and a conductor in the vicinity of the resonator (in sufficient proximity to cause capacitive or mutual inductance effects on device performance); coupling capacitance or mutual inductance generated by the substrate or substrate of the acoustic wave filter. The structure that alters the electromagnetic environment may be present in a wide variety of locations on the device. In fig. 6a to 6f, 610 denotes a substrate, 620 denotes a package wafer, 630 denotes a resonator wafer, and 601 denotes a structure for changing an electromagnetic environment. The structure 601 that changes the electromagnetic environment has an unequal electromagnetic effect on the two resonators 310A and 310B on the resonator wafer 630, resulting in unequal nonlinear components generated on the two resonators 310A and 310B, and thus the nonlinear components cannot be completely cancelled. The structure 601 that alters the electromagnetic environment may be located inside the package wafer 620 as shown in fig. 6a, or at the surface of the package wafer 620 as shown in fig. 6b, or inside the resonator wafer 630 as shown in fig. 6c, or inside the substrate 610 as shown in fig. 6d, or at the surface of the substrate 610 as shown in fig. 6 e. If the device is not packaged with a package wafer as shown in fig. 6f, but the resonant wafer is directly packaged with the substrate, the structure 601 for changing the electromagnetic environment can be flexibly disposed inside the substrate 610, the surface of the substrate 610, or inside the resonant wafer 630. In these embodiments, the presence of the structure 601 that changes the electromagnetic environment changes the nonlinear components generated by the two resonators, and when the parallel split structure is used, the effect of nonlinear cancellation is deteriorated, resulting in deterioration of the nonlinear performance of the filter.
To overcome the above-mentioned drawbacks of the prior art, embodiments of the present invention provide a method for improving the nonlinear performance of an acoustic wave filter. Specific examples are set forth below in conjunction with the accompanying drawings.
Figure 7a shows a device plan view of a parallel split resonator of a first embodiment of the present invention with improved non-linear performance. The parallel split resonator of this embodiment is based on the device shown in fig. 4, and mainly adjusts the shape of the connection line 320 around the resonator 310B, so that the nonlinear components generated by the resonators at least partially cancel.
Figure 7b shows a device plan view of a parallel split resonator of a second embodiment of the present invention to improve nonlinear performance. In the parallel split resonator of this embodiment, the shape of the connection lines at both ends of the resonator 310B is adjusted on the basis of the device shown in fig. 4, so that the nonlinear components generated by the resonators at least partially cancel each other.
Figure 7c shows a device plan view of a parallel split resonator of a third embodiment of the invention with improved non-linear performance. The parallel split resonator of this embodiment is based on the device shown in fig. 4, and the shape and size of the resonator 310B are adjusted so that the nonlinear components generated by the resonators at least partially cancel each other out.
Figure 7d shows a device plan view of a parallel split resonator of a fourth embodiment of the present invention to improve nonlinear performance. The parallel split resonator of this embodiment is additionally added with a symmetrical structure on the basis of the device shown in fig. 4, that is, a connection line 360 is added on the right side. The connection line 360 may be floating or grounded, or may have the same connection mode as the original connection line 340 on the left side, that is, the two ends of the connection line 360 are connected to the connectors at the two ends of the original connection 340, as long as it is helpful to cancel the nonlinear components generated by each resonator.
When the above scheme of the present invention is applied to an acoustic wave filter, the acoustic wave filter includes a plurality of piezoelectric acoustic wave resonators, and includes at least 1 parallel split resonator group, where at least 2 resonator lines in the parallel split resonator group have different structures, so as to at least partially cancel out nonlinear components generated by at least 2 resonators. In addition, in the parallel split resonator group, at least 2 resonators may have different areas and/or shapes, or at least 2 resonators may be in the same electromagnetic environment, and these structures are used to at least partially cancel out nonlinear components generated by at least 2 resonators. The conductor for making at least 2 resonators in the same electromagnetic environment may be disposed around the resonators (processed in the same layer as the resonators), in the substrate or base plate of the filter, or inside or outside the wafer-level package or plastic package of the filter. However, in the present invention, the conductor is not limited to the above position.
When the polygonal resonator is connected to one end of the parallel split resonator group, the common end of the resonators connected in parallel is preferably connected to the same side of the polygonal resonator. Referring to fig. 2, resonator 102a and resonator 102b are preferably connected to the same side of resonator 103, and are also preferably connected to the same side of resonator 112, so that currents flowing through resonator 102a and resonator 102b are as uniform as possible, the balance of the circuit is improved, and nonlinearities are as cancelled as possible.
According to the technical scheme of the embodiment of the invention, through changing the connection structure, the area and/or the shape of the resonators, the arrangement of the conductors and the like, the nonlinear components generated by the parallel split resonators in the acoustic wave filter can be improved, and finally the nonlinear performance of the filter can be improved. The mode is flexible to change, and almost has no influence on the size, the cost and the design scheme of the filter; the influence caused by coupling of other structures such as a substrate and the like on a chip layout can be eliminated.
The above-described embodiments should not be construed as limiting the scope of the invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions may occur depending on design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (20)
1. A method of improving the nonlinear performance of an acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators, and at least 1 of the groups of parallel split resonators, and further comprising changing the structure of an electromagnetic environment so as to cause unequal nonlinear components to be generated across the resonators in the group of parallel split resonators, the electromagnetic environment being one or more of: capacitance or mutual inductance between a connecting line and a conductor near each resonator in the parallel split resonator group, capacitance or mutual inductance between each resonator in the parallel split resonator group and the conductor near each resonator, and coupling capacitance or mutual inductance generated by a substrate or a substrate of the acoustic wave filter; characterized in that the method comprises one or more of the following:
making the structures of the resonator connecting lines in the parallel split resonator group different so as to at least partially offset nonlinear components generated by the resonators; the structure of the resonator connecting line comprises one or more of the following structures: the length of the connecting line, the width of the connecting line, the shape and the area of the connecting line;
differentiating the area and/or shape of each resonator in the group of parallel split resonators to at least partially cancel out the nonlinear components generated by each resonator;
adding a conductor in the filter to at least partially cancel out nonlinear components generated by the resonators, wherein: the parallel split resonator group comprises 2 resonators, wherein a first conductor is arranged near a first resonator, and the conductor adding step comprises the following steps: adding a second conductor to the vicinity of a second resonator of the 2 resonators, and making the electromagnetic environment formed by the second conductor and the second resonator similar to the electromagnetic environment formed by the first conductor and the first resonator; alternatively, the step of adding conductors in the filter comprises: adding conductors in the vicinity of one or more resonators in the parallel split resonator group, the added conductors for placing each resonator in the parallel split resonator group in a similar electromagnetic environment.
2. The method of claim 1, wherein the second conductor is connected in the same manner as the first conductor.
3. The method of claim 1, wherein the at least 1 set of parallel split resonators is directly connected to a signal input or output of the acoustic wave filter.
4. The method of claim 1,
the step of adding conductors in the filter is as follows: adding conductors near one or more resonators in the parallel split resonator group, the added conductors being used to bring each resonator in the parallel split resonator group into a similar electromagnetic environment;
the added conductors are located at one or more of: a layer in which the upper electrode or the lower electrode of the resonator is located; a substrate or baseplate of the filter; inside or outside the package structure of the filter.
5. The method of any of claims 1 to 4, wherein the number of resonators in the parallel split resonator group is an even number.
6. An acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators, and including at least 1 group of parallel split resonator groups, and further comprising a structure for changing an electromagnetic environment so as to cause non-linear components generated at the resonators in the parallel split resonator groups to be unequal, the electromagnetic environment being one or more of: capacitance or mutual inductance between a connecting line and a conductor near each resonator in the parallel split resonator group, capacitance or mutual inductance between each resonator in the parallel split resonator group and the conductor near each resonator, and coupling capacitance or mutual inductance generated by a substrate or a substrate of the acoustic wave filter; characterized in that in the acoustic wave filter:
the connecting lines of at least 2 resonators in the parallel split resonator group have different structures and are used for at least partially offsetting nonlinear components generated by the at least 2 resonators; the structure of the resonator connecting line comprises one or more of the following structures: length of the connecting line, width of the connecting line, shape and area of the connecting line.
7. The acoustic wave filter according to claim 6, wherein the at least 1 set of parallel split resonators is located at a signal output of the acoustic wave filter.
8. The acoustic wave filter according to claim 6, wherein the number of resonators in the parallel split resonator group is an even number.
9. The acoustic wave filter according to claim 6, wherein in the parallel split resonator group, the common end of each resonator is connected to the same side of the other polygonal resonators.
10. An acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators, and including at least 1 group of parallel split resonator groups, and further comprising a structure for changing an electromagnetic environment so as to cause non-linear components generated at the resonators in the parallel split resonator groups to be unequal, the electromagnetic environment being one or more of: capacitance or mutual inductance between a connecting line and a conductor near each resonator in the parallel split resonator group, capacitance or mutual inductance between each resonator in the parallel split resonator group and the conductor near each resonator, and coupling capacitance or mutual inductance generated by a substrate or a substrate of the acoustic wave filter; characterized in that in the acoustic wave filter:
in the parallel split resonator group, at least 2 resonators have different areas and/or shapes, and the areas and/or shapes are used for at least partially offsetting nonlinear components generated by the at least 2 resonators.
11. The acoustic wave filter according to claim 10, wherein the at least 1 set of parallel split resonators is located at a signal output of the acoustic wave filter.
12. The acoustic wave filter according to claim 10, wherein the number of resonators in the parallel split resonator group is an even number.
13. The acoustic wave filter according to claim 10, wherein in the parallel split resonator group, the common end of each resonator is connected to the same side of the other polygonal resonators.
14. An acoustic wave filter comprising a plurality of piezoelectric acoustic wave resonators, and including at least 1 group of parallel split resonator groups, and further comprising a structure for changing an electromagnetic environment so as to cause non-linear components generated at the resonators in the parallel split resonator groups to be unequal, the electromagnetic environment being one or more of: capacitance or mutual inductance between a connecting line and a conductor near each resonator in the parallel split resonator group, capacitance or mutual inductance between each resonator in the parallel split resonator group and the conductor near each resonator, and coupling capacitance or mutual inductance generated by a substrate or a substrate of the acoustic wave filter; the parallel split resonator group is characterized in that the parallel split resonator group is provided with conductors added to enable nonlinear components generated by the resonators to be at least partially offset, wherein the parallel split resonator group comprises 2 resonators, and a first conductor is arranged near a first resonator;
the added conductor is a second conductor located near a second resonator of the 2 resonators, and the electromagnetic environment formed by the second conductor and the second resonator is similar to the electromagnetic environment formed by the first conductor and the first resonator;
alternatively, the added conductor is located in the vicinity of one or several resonators in the group of parallel split resonators, the added conductor being used to bring the resonators in the group of parallel split resonators into a similar electromagnetic environment.
15. The acoustic wave filter according to claim 14, wherein the added conductors are located at one or more of:
a layer in which the upper electrode or the lower electrode of the resonator is located;
a substrate or baseplate of the filter;
inside or outside the package structure of the filter.
16. The acoustic wave filter according to claim 14 or 15, wherein the at least 1 set of parallel split resonators is located at a signal output of the acoustic wave filter.
17. The acoustic wave filter according to claim 14 or 15, wherein the number of resonators in the parallel split resonator group is an even number.
18. The acoustic wave filter according to claim 14 or 15, wherein in the parallel split resonator group, the common end of each resonator is connected to the same side of the other polygonal resonators.
19. A multiplexer comprising the acoustic wave filter according to any one of claims 6 to 18.
20. A communication device comprising the acoustic wave filter according to any one of claims 6 to 18.
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| CN202011414794.8A CN112468111B (en) | 2020-12-07 | 2020-12-07 | Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment |
| PCT/CN2021/135624 WO2022121818A1 (en) | 2020-12-07 | 2021-12-06 | Method, acoustic wave filter, multiplexer, and communication device for improving nonlinear performance |
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| CN112468111B (en) * | 2020-12-07 | 2022-07-12 | 诺思(天津)微系统有限责任公司 | Method for improving nonlinear performance, acoustic wave filter, multiplexer and communication equipment |
| CN117097297B (en) * | 2022-11-20 | 2024-04-05 | 北京芯溪半导体科技有限公司 | Filter, duplexer, multiplexer and communication equipment |
| CN117013986B (en) * | 2022-11-30 | 2024-01-26 | 北京芯溪半导体科技有限公司 | Filter, duplexer, multiplexer and communication equipment |
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| JP2007124537A (en) * | 2005-10-31 | 2007-05-17 | Kyocera Kinseki Corp | Low pass filter |
| CN101136620A (en) * | 2006-09-01 | 2008-03-05 | 富士通媒体部品株式会社 | Acoustic wave device, filter and duplexer |
| JP2013118611A (en) * | 2011-11-04 | 2013-06-13 | Taiyo Yuden Co Ltd | Duplexer, filter and communication module |
| DE102014112676A1 (en) * | 2014-09-03 | 2016-03-03 | Epcos Ag | Filter with improved linearity |
| CN109787581A (en) * | 2018-11-28 | 2019-05-21 | 天津大学 | The filter based on bulk acoustic wave resonator with band logical and high pass dual function |
| CN110995197A (en) * | 2019-12-02 | 2020-04-10 | 武汉衍熙微器件有限公司 | Acoustic wave filter device with adjustable suppression |
Also Published As
| Publication number | Publication date |
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| CN112468111A (en) | 2021-03-09 |
| WO2022121818A1 (en) | 2022-06-16 |
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