CN110937451A - Tape sticking apparatus - Google Patents
Tape sticking apparatus Download PDFInfo
- Publication number
- CN110937451A CN110937451A CN201910846516.0A CN201910846516A CN110937451A CN 110937451 A CN110937451 A CN 110937451A CN 201910846516 A CN201910846516 A CN 201910846516A CN 110937451 A CN110937451 A CN 110937451A
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- China
- Prior art keywords
- tape
- unit
- belt
- roller pair
- sticking
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H37/00—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
- B65H37/04—Article or web delivery apparatus incorporating devices for performing specified auxiliary operations for securing together articles or webs, e.g. by adhesive, stitching or stapling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H20/00—Advancing webs
- B65H20/02—Advancing webs by friction roller
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/26—Registering, tensioning, smoothing or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
- B65H35/04—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators
- B65H35/06—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators from or with blade, e.g. shear-blade, cutters or perforators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
Abstract
Provided is a tape application device capable of easily setting a tape in accordance with a predetermined path. A tape application device (1) is provided with: a feeding unit (20) that feeds out the tape (200); a sticking unit (40) for sticking the tape (200) to the workpiece (100); a cutting unit (50) which cuts the tape (200); a tape winding unit (60) that winds the tape (200); and a plurality of conveying rollers (70) for conveying the tape (200), wherein the tape sticking apparatus (1) comprises, on a path (72) on which the tape (200) is disposed: a plurality of sensors that detect the presence or absence of the belt (200); and a plurality of lamps which are lighted by the control unit (90) along with the signals from the sensors. When the belt (200) is installed, the control unit (90) lights a lamp provided at a position where the belt is to be passed next in accordance with a signal from the sensor.
Description
Technical Field
The present invention relates to a tape joining apparatus for joining a protective tape to one surface of a work such as a semiconductor wafer.
Background
In the case of joining a tape such as a protective tape to a work such as a semiconductor wafer, it is necessary to apply tension to the tape so as not to cause wrinkles in the tape and to join the tape, and therefore a joining device is used in which joining is performed by a transport unit including a plurality of rollers from a feeding unit to a winding unit (see, for example, patent document 1).
Patent document 1: japanese patent laid-open publication No. 2015-82642
However, in the adhesive sheet device disclosed in patent document 1, when the roll itself around which the tape is wound is replaced or when the tape breaks, the tape needs to be passed through the respective conveying units in a predetermined order and route by an operator. In this case, since the sticking apparatus shown in patent document 1 has many conveying units to pass through, the operation of passing the tape in a predetermined order and path is complicated, and the order and path of passing the tape may be mistaken.
Disclosure of Invention
The present invention has been made in view of the above problems, and an object thereof is to provide a tape sticking apparatus capable of easily setting a tape in accordance with a predetermined path.
In order to solve the above problems, a tape joining apparatus according to the present invention is a tape joining apparatus for joining a tape to one surface of a workpiece, the tape joining apparatus including: a feeding unit that feeds out the tape wound in a roll shape; a sticking unit that sticks the tape supplied from the feeding unit to the workpiece; a cutting unit that cuts an unnecessary portion of the tape after the tape has been attached to the workpiece; a tape winding unit that winds the tape cut by the cutting unit; and a plurality of transport rollers arranged between the feeding unit and the tape winding unit and transporting the tape, wherein the transport rollers further include: a plurality of sensors that detect the presence or absence of a band; and a plurality of lamps which are turned on by a control unit in accordance with a signal from the sensor, wherein when an operator sets a belt from the feeding unit to the belt take-up unit, the control unit turns on the lamps which are set at positions where the belt is to be passed by the operator next in accordance with the signal from the sensor.
In the tape joining apparatus, the sensor may include a light projecting section and a light receiving section, and the tape joining apparatus may detect a shift of the tape in accordance with a change in the amount of received light.
The present invention has an effect that a belt can be easily installed according to a predetermined path.
Drawings
Fig. 1 is a side sectional view schematically showing a schematic configuration of a tape application device according to embodiment 1.
Fig. 2 is a perspective view of a tape to be attached to a workpiece by the tape attaching apparatus according to embodiment 1.
Fig. 3 is a sectional view taken along the line III-III in fig. 2.
Fig. 4 is a perspective view schematically showing a 2 nd roller pair of the tape application device shown in fig. 1.
Fig. 5 is a side sectional view schematically showing a detection display unit of the tape application apparatus shown in fig. 1.
Fig. 6 is a side sectional view schematically showing a state where the applying unit of the tape applying apparatus shown in fig. 1 applies the tape to the work and the ring frame.
Fig. 7 is a side sectional view schematically showing a state where the cutting unit of the tape application device shown in fig. 1 cuts the tape.
Fig. 8 is a side sectional view schematically showing a detection display unit of the tape application apparatus of embodiment 2.
Description of the reference symbols
1: a tape application device; 20: a delivery unit; 40: a pasting unit; 50: a cutting unit; 60: a tape take-up unit; 70: a conveying roller; 72: a path; 84: a sensor; 85: a lamp; 86: a light emitting element (light projecting section); 87: a light receiving element (light receiving section); 90: a control unit; 100: a workpiece; 101: a back surface (one surface); 200: a belt.
Detailed Description
A mode (embodiment) for carrying out the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include those that can be easily conceived by those skilled in the art, and substantially the same ones. The following structures may be combined as appropriate. Various omissions, substitutions, and changes in the structure may be made without departing from the spirit of the invention.
[ embodiment 1]
A tape application device according to embodiment 1 of the present invention will be described with reference to the drawings. Fig. 1 is a side sectional view schematically showing a schematic configuration of a tape application device according to embodiment 1. Fig. 2 is a perspective view of a tape to be attached to a workpiece by the tape attaching apparatus according to embodiment 1. Fig. 3 is a sectional view taken along the line III-III in fig. 2. Fig. 4 is a perspective view schematically showing a 2 nd roller pair of the tape application device shown in fig. 1. Fig. 5 is a side sectional view schematically showing a detection display unit of the tape application apparatus shown in fig. 1.
The tape application apparatus 1 shown in fig. 1 of embodiment 1 is an apparatus for applying a tape 200 to a back surface 101, which is one surface of a workpiece 100. In embodiment 1, the object 100 to which the tape 200 is attached by the tape bonding apparatus 1 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer having a substrate made of silicon, sapphire, gallium arsenide, or the like. The object 100 is formed with devices in regions defined by a plurality of lines to be divided on the front surface 102, which is the other surface of the substrate. Examples of the Device include an Integrated Circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), and an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary metal oxide Semiconductor). In embodiment 1, the tape application device 1 applies the tape 200 to the back surface of the front surface 102 of the workpiece 100 on the back surface side, but in the present invention, the tape 200 may be applied to the front surface 102 of the workpiece 100.
The tape 200 to be attached to the back surface 101 of the workpiece 100 by the tape attaching apparatus 1 according to embodiment 1 includes: a base material layer made of a synthetic resin having light-shielding properties; and an adhesive layer laminated on the base material layer and attached to the workpiece 100. In embodiment 1, as shown in fig. 2 and 3, the tape 200 is formed as a long sheet-like member, and wound in a roll shape with a release paper 201 attached to an adhesive layer. In embodiment 1, the tape 200 is wound in a roll shape so that the release paper 201 is positioned on the inner peripheral side. In addition, the release paper 201 protects the adhesive layer of the tape 200. In embodiment 1, the tape 200 is attached to the back surface 101 of the workpiece 100 and the ring frame 103 having an inner diameter larger than that of the workpiece 100 by sequentially peeling the release paper 201 from the end portion by the tape attaching apparatus 1, and the tape 200 is cut between the inner edge and the outer edge of the ring frame 103 and attached to the workpiece 100 and the ring frame 103.
The tape joining apparatus 1 joins the tape 200 to the workpiece 100, and the tape joining apparatus 1 is an apparatus which joins the tape 200 to the back surface 101 of the workpiece 100 and the ring frame 103 and cuts the tape 200 between the inner edge and the outer edge of the ring frame 103. As shown in fig. 1, the tape joining apparatus 1 includes an apparatus base 2, a chuck table 10, a feeding unit 20, a release paper winding unit 30, a joining unit 40, a cutting unit 50, a tape winding unit 60, a plurality of conveying rollers 70, and a control unit 90.
The device base 2 supports each part of the tape sticking device 1. In embodiment 1, the upper surface of the apparatus base 2 is disposed parallel to both the X-axis direction (parallel to the horizontal direction) and the Y-axis direction (parallel to the horizontal direction and perpendicular to the X-axis direction).
The chuck table 10 is provided at the center of the upper surface of the apparatus base 2 in the X-axis direction, and has a holding surface 11 on which the workpiece 100 and the ring frame 103 are placed in parallel to both the X-axis direction and the Y-axis direction. The chuck table 10 sucks and holds the workpiece 100 placed on the holding surface 11 and the ring frame 103 by a suction source not shown. The chuck table 10 is provided to be movable up and down in a Z-axis direction perpendicular to both the X-axis direction and the Y-axis direction by a Z-axis moving mechanism, not shown.
The feeding unit 20 sequentially feeds the tape 200 wound in a roll shape from the end portion onto the holding surface 11 of the chuck table 10 provided on the apparatus base 2. The feeding unit 20 is disposed at one end portion of the apparatus base 2 in the X axis direction in embodiment 1. The feeding unit 20 is formed in a cylindrical shape having an axis parallel to the Y-axis direction, and is provided to be rotatable about the axis. The feeding unit 20 is provided with the tape 200 wound in a roll shape around the outer circumferential surface thereof.
The release paper winding unit 30 winds the release paper 201 peeled off from the tape 200 fed out from the feeding unit 20. The release paper winding unit 30 is disposed below the feeding unit 20 in embodiment 1. The release paper winding unit 30 is formed in a cylindrical shape having an axis parallel to the Y-axis direction, and rotates around the axis by a driving device such as a motor not shown, thereby winding the release paper 201 peeled from the tape 200 on the outer peripheral surface.
The attaching unit 40 attaches the tape 200 supplied from the feeding unit 20 to the holding surface 11 of the chuck table 10 to the workpiece 100 and the ring frame 103 sucked and held by the holding surface 11 of the chuck table 10. The pasting unit 40 is disposed above the holding surface 11 of the chuck table 10. The pasting unit 40 includes: an adhesion roller 41 formed in a cylindrical shape having an axis parallel to the Y-axis direction; and a roller support member 42 that supports the pasting roller 41 to be rotatable about the axial center and is provided to be movable in the X-axis direction and the Z-axis direction by a movement mechanism, not shown. The joining unit 40 moves in the X-axis direction while being lowered by the moving mechanism, and joins the tape 200 to the ring frame 103 and the workpiece 100 held by the chuck table 10 raised by the Z-axis moving mechanism.
After the tape 200 is attached to the workpiece 100 and the ring frame 103, the cutting unit 50 cuts an unnecessary portion of the tape 200. In embodiment 1, the unnecessary portion of the tape 200 is a portion of the tape 200 attached to the ring frame 103 on the outer circumferential side of the portion between the inner edge and the outer edge of the ring frame 103. The cutting unit 50 is disposed above the holding surface 11 of the chuck table 10, and is provided to be movable up and down in the Z-axis direction independently of the attaching unit 40 by a Z-axis moving mechanism not shown.
In embodiment 1, the cutting unit 50 includes: a rotating shaft 51 disposed at the center of the holding surface 11 of the chuck table 10 and rotated around the axis by a driving device such as a motor not shown; an arm 52 extending from the rotation shaft 51 toward the outer edge in parallel with the holding surface 11 of the chuck table 10; and a cutter 53 attached to the tip of the arm 52, extending downward from the arm 52, and capable of cutting the belt 200 between the inner edge and the outer edge of the ring frame 103. The axis of the rotating shaft 51 is parallel to the Z-axis direction.
The cutting unit 50 rotates the rotary shaft 51 around the axis in a state of being lowered by the Z-axis moving mechanism, so that the cutter 53 cuts into the tape 200 between the inner edge and the outer edge of the ring frame 103 held by the chuck table 10 raised by the Z-axis moving mechanism, and cuts the portion of the tape 200 attached to the workpiece 100 and the ring frame 103 from unnecessary portions. In embodiment 1, the tape application apparatus 1 cuts the tape 200 by rotating the cutter 53 of the cutting unit 50 around the axis of the rotating shaft 51, but in the present invention, the tape 200 may be cut by rotating the holding surface 11 of the chuck table 10 around the axis parallel to the Z-axis direction in a state where the cutter 53 cuts into the tape 200 between the inner edge and the outer edge of the ring frame 103.
The tape winding unit 60 winds up the unnecessary portion of the tape 200, which is partially cut off by the cutting unit 50 and attached to the workpiece 100 and the ring frame 103. The take-up unit 60 is disposed on the other end portion of the apparatus base 2 in the X-axis direction in embodiment 1. The tape winding unit 60 is formed in a cylindrical shape having an axis parallel to the Y-axis direction, and rotates around the axis by a driving device such as a motor not shown, thereby winding the tape 200 around the outer circumferential surface.
The plurality of conveying rollers 70 are disposed between the feeding unit 20 and the winding unit 60, convey the tape 200 from the feeding unit 20 to the winding unit 60, and apply tension to the tape 200 in order to prevent the tape 200 from slackening. The plurality of conveyance rollers 70 are formed in a cylindrical shape having an axis parallel to the Y-axis direction and are provided to be rotatable about the axis.
In embodiment 1, the conveying roller 70 is a pair of conveying rollers 70 constituting a roller pair 71, and the tape joining apparatus 1 includes a plurality of (three in the embodiment) roller pairs. In the present specification, the three roller pairs 71 are denoted by a 1 st roller pair 71 (hereinafter, referred to as 71-1), a 2 nd roller pair 72 (hereinafter, referred to as 71-2), and a 3 rd roller pair 71 (hereinafter, referred to as 71-3) in this order from the feeding unit 20 side.
The conveyance roller 70 constituting the 1 st roller pair 71-1 is disposed between the feeding unit 20 and the chuck table 10 and below the feeding unit 20. The conveying roller 70 constituting the 1 st roller pair passes the tape 200 in a state in which the release paper 201 is stuck, which is fed out from the feeding unit 20, between the outer peripheral surfaces thereof, thereby peeling the release paper 201 from the tape 200. The conveyance roller 70 constituting the 1 st roller pair 71-1 feeds the release paper 201 peeled from the tape 200 to the release paper winding unit 30, and feeds the tape 200 from which the release paper 201 has been peeled toward the 2 nd roller pair 71-2 with the adhesive layer facing downward.
The conveyance roller 70 constituting the 2 nd roller pair 71-2 is disposed between the 1 st roller pair 71-1 and the chuck table 10 and below the 1 st roller pair 71-1. As shown in fig. 4, the conveying roller 70 constituting the 2 nd roller pair feeds the tape 200 fed from the 1 st roller pair 71-1 parallel to the holding surface 11 of the chuck table 10 onto the holding surface 11 in the X-axis direction by passing the tape 200 between the outer peripheral surfaces thereof.
The conveying roller 70 constituting the 3 rd roller pair 71-3 is disposed between the chuck table 10 and the tape take-up unit 60 and below the tape take-up unit 60. The conveying roller 70 constituting the 3 rd roller pair feeds out the tape 200 fed out from the 3 rd roller pair 71-3 toward the tape take-up unit 60 by passing the tape 200 between the outer peripheral surfaces thereof.
In this way, the tape joining apparatus 1 includes the 1 st roller pair 71-1, the 2 nd roller pair 71-2, and the 3 rd roller pair 71-3, and the path 72 for setting the tape 200 is configured from the feeding unit 20 to the tape winding unit 60 via the plurality of conveying rollers 70. Fig. 4 representatively shows a 2 nd roller pair 71-2 of the 1 st roller pair 71-1, the 2 nd roller pair 71-2 and the 3 rd roller pair 71-3, and the 1 st roller pair 71-1 and the 3 rd roller pair 71-3 have the same structure as the 2 nd roller pair 71-2. As shown in fig. 4, the conveying roller 70 constituting each of the roller pairs 71-1, 71-2, 71-3 includes: a cylindrical support shaft 73 supported by the device base 2; and a cylindrical rotating roller 74 rotatably provided on the outer peripheral surface of the support shaft 73.
Further, the tape application apparatus 1 further includes a plurality of detection display units 80 on the path 72. The detection display unit 80 detects the tape 200, and displays the detection result of the tape 200 in accordance with an instruction from the control unit 90. The detection display unit 80 is provided at intervals along the moving direction of the belt 200 along the path 72. In embodiment 1, the detection display unit 80 is provided at the following positions: a position between the feeding unit 20 and the 1 st roller pair 71-1 and near the 1 st roller pair 71-1; a position between the 1 st roller pair 71-1 and the release paper winding unit 30 and near the 1 st roller pair 71-1; between the 1 st roller pair 71-1 and the 2 nd roller pair 71-2, between the 2 nd roller pair 71-2 and the 3 rd roller pair 71-3 and near the 2 nd roller pair 71-2; a position between the 2 nd roller pair 71-2 and the 3 rd roller pair 71-3 and near the 3 rd roller pair 71-3; between the 3 rd roller pair 71-3 and the tape take-up unit 60 and near the 3 rd roller pair 71-3.
As shown in fig. 4, each detection and display unit 80 has a unit body 81, and the unit body 81 is provided at the tip of the support member 75 attached to the support shaft 73 of the conveying roller 70. In embodiment 1, as shown in fig. 5, the unit main body 81 has a pair of parallel portions 82 and a connecting portion 83 connecting one end portions of the parallel portions 82 to each other, and is formed in a letter "コ" shape, as viewed in the cross-sectional direction of the belt 200. When the belt 200 passes through the regular position of the path 72, as shown in fig. 5, the unit main body 81 positions the belt 200 between the pair of parallel portions 82.
As shown in fig. 5, the detection display unit 80 includes: a sensor 84 provided in the unit main body 81; and a lamp 85 provided in the unit body 81. The sensor 84 detects the presence or absence of the belt 200 between the parallel portions 82 of the unit main body 81, that is, at a regular position of the path 72. In embodiment 1, the sensor 84 includes: a light emitting element 86 as a light projecting portion provided on one of the pair of parallel portions 82 and emitting light 300 toward the other; and a light receiving element 87 as a light receiving part provided on the other of the pair of parallel parts 82 and receiving the light 300 irradiated from the light emitting element 86. The light 300 emitted from the light emitting element 86 is almost shielded by the tape 200 at the regular position of the path 72 and is limited to be received by the light receiving element 87. The light receiving element 87 of the sensor 84 outputs a signal (specifically, a voltage value proportional to the light amount) indicating the light receiving amount of the light 300 irradiated from the light emitting element 86 to the control unit 90, thereby detecting the presence or absence of the band 200 at the regular position of the path 72.
The lamp 85 is provided on the outer surface of the unit main body 81, and is turned on by the control unit 90 in response to a signal indicating the amount of light 300 received from the light receiving element 87 of the sensor 84. In embodiment 1, the lamp 85 is a so-called LED lamp including a known LED (light emitting Diode). The lamp 85 can be turned on, off, and blink in accordance with a command from the control unit 90. In this way, the tape application apparatus 1 is provided with a plurality of detection and display units 80 including the sensor 84 and the lamp 85 at intervals along the path 72 of the tape 200.
In addition, in the present specification, the detection display unit 80 provided between the feeding unit 20 and the 1 st roller pair 71-1 is denoted by reference numeral 80-1, the detection display unit 80 provided between the 1 st roller pair 71-1 and the peeling paper winding unit 30 is denoted by reference numeral 80-2, the detection display unit 80 provided between the 1 st roller pair 71-1 and the 2 nd roller pair 71-2 is denoted by reference numeral 80-3, the detection display unit 80 provided between the 2 nd roller pair 71-2 and the 3 rd roller pair 71-3 and disposed at a position closer to the 2 nd roller pair 71-2 is denoted by reference numeral 80-4, the detection display unit 80 provided between the 2 nd roller pair 71-2 and the 3 rd roller pair 71-3 and disposed at a position closer to the 3 rd roller pair 71-3 is denoted by reference numeral 80-5, and the detection display unit 80 provided between the 3 rd roller pair 71-3 and the tape winding unit 60 is denoted by reference numeral 80-1 80-6, and is denoted by reference numeral 80 without distinguishing the detection display units 80 from each other.
The control unit 90 controls the above-described components of the tape sticking apparatus 1 to cause the tape sticking apparatus 1 to perform a sticking operation of the tape 200 to the workpiece 100 and the ring frame 103. In addition, the control unit 36 is a computer. The control unit 36 has: an arithmetic processing device having a microprocessor such as a Central Processing Unit (CPU); a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory); and an input/output interface device. The arithmetic processing device of the control unit 36 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs a control signal for controlling the tape application apparatus 1 to the above-described components of the tape application apparatus 1 via the input/output interface device.
In addition, the control unit 90 is connected to: a display unit 91 including a liquid crystal display device or the like for displaying a state of a machining operation, an image, or the like; an input unit 92 for use by an operator in registering machining content information and the like; and a notification unit 93 that notifies the operator using at least one of sound and light. The input unit 92 is configured by at least one of an external input device such as a touch panel and a keyboard provided in the display unit 91.
At the time of tape installation when the operator, i.e., the operator, sets the tape 200 from the feeding unit 20 to the tape winding unit 60 along the path 72 after the replacement of the tape 200 in the feeding unit 20, the control unit 90 causes the operator to sequentially turn on the lamp 85 of the detection display unit 80 provided at the position where the tape 200 is to be passed next in accordance with the signal indicating the received light amount of the light 300 from the light receiving element 87 from the sensor 84. The tape setting timing is a timing at which the tape sticking apparatus 1 sets the tape 200 along the above-described path 72 by the operator in the order of the feeding unit 20, the conveying roller 70 of each of the roller pairs 71-1, 71-2, 71-3, and the tape take-up unit 60. That is, the control unit 90 sequentially turns on the lamps 85 of the detection display unit 80 in the order in which the belt 200 should pass between the parallel portions 82.
Specifically, the control unit 90 stores in advance information corresponding to the order in which the tape 200 passes through the respective roller pairs 71-1, 71-2, 71-3 and the respective winding units 30, 60 when the tape 200 is set on the path 72, that is, the order in which the tape 200 passes through the parallel portions 82 of the unit main bodies 81 of the plurality of detection and display units 80. The control unit 90 lights the lamp 85 of the detection display unit 80, which should pass through the parallel portion 82 first, of the belt 200 at the belt setting timing. When it is determined that the belt 200 has passed through the normal position between the parallel portions 82 of the unit main body 81 of the detection display unit 80 in which the lamps 85 are turned on, based on the signal indicating the amount of light received by the light receiving element 87 of the detection display unit 80 in which the lamps 85 are turned on, the control unit 90 turns off the lamps 85 of the detection display unit 80 in which the belt 200 has passed between the parallel portions 82, and then turns on the lamps 85 of the detection display unit 80 in which the belt 200 should pass between the parallel portions 82.
The control unit 90 repeats the lighting of the lamp 85, the detection of the belt 200, the turning off of the lamp 85, and the lighting of the lamp 85 of the next detection display unit 80 until the belt 200 passes through the belt 200 and finally should pass between the parallel portions 82 of the detection display unit 80 between the parallel portions 82. When the signal indicating the amount of light received by the light receiving element 87 is lower than a predetermined threshold value, the control unit 90 determines that the belt 200 has passed through the normal position between the parallel portions 82 as shown in fig. 5.
Next, the present specification describes a method of setting the tape 200 to the path 72 at the tape setting time. At the time of tape setting, the tape 200 wound in a roll shape and having the release paper 201 attached thereto is set in the feeding unit 20 of the tape sticking apparatus 1, and when the control unit 90 receives an input of an instruction to start setting the tape 200 from the operator, the tape sticking apparatus 1 starts the setting operation of the tape 200. In the setting operation of the belt 200, the control unit 90 lights the lamp 85 of the detection display unit 80-1. The operator pulls out the end of the tape 200 provided in the feeding unit 20, passes the tape 200 between the parallel portions 82 of the detection and display unit 80-1 in which the lamp 85 is turned on, and then passes the tape 200 between the conveying rollers 70 of the 1 st roller pair 71-1. When it is determined that the belt 200 is disposed at the regular position between the parallel portions 82 of the detection display unit 80-1, the control unit 90 turns off the lamp 85 of the detection display unit 80-1 and turns on the lamp 85 of the detection display unit 80-2.
The operator peels off the release paper 201 at the end of the tape 200 passing between the conveying rollers 70 of the 1 st roller pair 71-1, passes the peeled release paper 201 between the parallel portions 82 of the detection and display unit 80-2 where the lamp 85 is turned on, and then sets the peeled release paper in the release paper winding unit 30. When it is determined that the belt 200 is disposed at the regular position between the parallel portions 82 of the detection display unit 80-2, the control unit 90 turns off the lamp 85 of the detection display unit 80-2 and turns on the lamp 85 of the detection display unit 80-3.
The operator passes the tape 200, which has passed between the conveying rollers 70 of the 1 st roller pair 71-1 and from which the release paper 201 has been peeled, between the parallel portions 82 of the detection and display unit 80-3 in which the lamp 85 is turned on, and then passes the tape 200 between the conveying rollers 70 of the 2 nd roller pair 71-2. When it is determined that the belt 200 is disposed at the regular position between the parallel portions 82 of the detection display unit 80-3, the control unit 90 turns off the lamp 85 of the detection display unit 80-3 and turns on the lamp 85 of the detection display unit 80-4.
The operator causes the tape 200 passing between the conveying rollers 70 of the 2 nd roller pair 71-2 to pass between the parallel portions 82 of the detection display means 80-4 where the lamp 85 is turned on. When it is determined that the belt 200 is disposed at the regular position between the parallel portions 82 of the detection display unit 80-4, the control unit 90 turns off the lamp 85 of the detection display unit 80-4 and turns on the lamp 85 of the detection display unit 80-5.
The operator causes the belt 200 having passed through the regular position between the parallel portions 82 of the detection display unit 80-4 to pass between the parallel portions 82 of the detection display unit 80-5 in which the lamp 85 is turned on, and between the conveying rollers 70 of the 3 rd roller pair 71-3. When the control unit 90 determines that the belt 200 is disposed at the regular position between the parallel portions 82 of the detection display unit 80-5, the lamp 85 of the detection display unit 80-5 is turned off, and the lamp 85 of the detection display unit 80-6 is turned on.
The operator sets the tape 200 passing between the conveying rollers 70 of the 3 rd roller pair 71-3 in the tape winding unit 60 between the parallel portions 82 of the detection and display unit 80-6 in which the lamp 85 is turned on. When the control means 90 determines that the belt 200 is disposed at the proper position between the parallel portions 82 of the detection and display means 80-6, the lamp 85 of the detection and display means 80-6 is turned off to terminate the operation of disposing the belt 200.
Next, the operation of the tape 200 attachment by the tape attachment device 1 to attach the tape 200 will be described. Fig. 6 is a side sectional view schematically showing a state where the applying unit of the tape applying apparatus shown in fig. 1 applies the tape to the work and the ring frame. Fig. 7 is a side sectional view schematically showing a state where the cutting unit of the tape application device shown in fig. 1 cuts the tape. In the tape sticking operation 200, first, an operator or the like places the workpiece 100 and the ring frame 103 on the holding surface 11 of the chuck table 10 in a lowered state, registers processing content information in the control unit 90, and when the control unit 90 receives an input of a processing start instruction from the operator, the tape sticking apparatus 1 starts the sticking operation.
In the tape 200 attaching operation, as shown in fig. 6, the tape attaching apparatus 1 moves the attaching unit 40 in the X-axis direction while raising the chuck table 10, thereby attaching the tape 200 to the workpiece 100 and the ring frame 103. In the tape joining apparatus 1, the joining unit 40 is raised with the chuck table 10 raised, and the cutting unit 50 is lowered as shown in fig. 7, so that the tip of the cutter 53 cuts into the tape 200 between the inner edge and the outer edge of the ring frame 103. The tape application apparatus 1 rotates the rotary shaft 51 of the cutting unit 50 at least one rotation around the axis to cut the tape 200 along the circumference between the inner edge and the outer edge of the ring frame 103. The tape sticking apparatus 1 releases the suction holding of the holding surface 11 of the chuck table 10 after raising the cutting unit 50, winds the tape of the amount stuck to the single workpiece 100 and the ring frame 103 by the tape winding unit 60, moves the tape 200 by the single workpiece 100 and the ring frame 103, and then performs the sticking operation of the tape 200.
The tape sticking apparatus 1 according to embodiment 1 lights the lamps 85 of the detection display unit 80 in the order in which the tape 200 should pass between the parallel portions 82, and therefore can easily set the tape 200 depending on the lighted lamps 85, and has an effect that the tape 200 can be easily set in accordance with the predetermined path 72.
[ embodiment 2]
A tape application apparatus according to embodiment 2 of the present invention will be described with reference to the drawings. Fig. 8 is a side sectional view schematically showing a detection display unit of the tape application apparatus of embodiment 2. In fig. 8, the same portions as those in embodiment 1 are denoted by the same reference numerals, and description thereof is omitted.
The tape sticking apparatus 1 according to embodiment 2 is the same as embodiment 1 except that the control unit 90 detects a shift of the tape 200 with respect to the detection display unit 80, that is, the regular path 72, based on a change in the amount of light received by the light receiving element 87, that is, a change in the signal indicating the amount of light received, in both the setting operation of the tape 200 and the sticking operation of the tape 200. Specifically, when the signal indicating the light receiving amount of the light 300 received by the light receiving element 87 of any one of the detection display units 80 exceeds the 2 nd threshold value larger than the threshold value in both the tape 200 setting operation and the tape 200 sticking operation, the control unit 90 determines that the possibility that the tape 200 is detached from the normal position between the parallel portions 82 is high because the tape 200 is inclined with respect to the path 72 or the like as shown in fig. 8, and operates the notification unit 93 to notify the operator.
In embodiment 2, the control unit 90 may turn on and off the lamp 85 of the detection display unit 80 that is determined to have a high possibility of coming off from the regular position between the parallel portions 82 while operating the notification unit 93. In embodiment 2, the control unit 90 may stop the tape 200 setting operation and the tape 200 sticking operation of the tape sticking apparatus 1 while operating the notification unit 93.
In the tape sticking apparatus 1 according to embodiment 2, as in embodiment 1, the lamps 85 of the detection display unit 80 are turned on in the order in which the tape 200 should pass between the parallel portions 82, so that the tape 200 can be easily set depending on the turned-on lamps 85, and the tape 200 can be easily set according to the predetermined path 72.
Further, in the tape sticking apparatus 1 according to embodiment 2, when it is determined that the tape 200 is highly likely to fall off the path 72 due to, for example, an inclination, the notification unit 93 notifies that the tape 200 is highly likely to fall off, and therefore, the installation position of the tape 200 can be corrected by detecting that the tape 200 is highly likely to fall off.
In embodiment 2, the control unit 90 detects the deviation of the tape 200 from the detection display unit 80, that is, the regular path 72, based on the change in the signal indicating the amount of light 300 received by the light receiving element 87 in both the tape 200 setting operation and the tape 200 sticking operation. However, in the present invention, the control unit 90 may detect the deviation of the tape 200 from the detection display unit 80, that is, the regular path 72, based on a change in the signal indicating the amount of light 300 received by the light receiving element 87 in at least one of the tape 200 setting operation and the tape 200 attaching operation.
The present invention is not limited to the above embodiments. That is, various modifications can be made and implemented without departing from the scope of the present invention. In the above embodiment, the position of the belt 200 with respect to the unit main body 81 is detected using the sensor 84 having the light emitting element 86 and the light receiving element 87, but in the present invention, the position of the belt 200 with respect to the unit main body 81 may be detected using a back pressure sensor or a touch sensor as a sensor.
Claims (2)
1. A tape sticking apparatus for sticking a tape to one surface of a work,
the tape joining apparatus includes:
a feeding unit that feeds out the tape wound in a roll shape;
a sticking unit that sticks the tape supplied from the feeding unit to the workpiece;
a cutting unit that cuts an unnecessary portion of the tape after the tape has been attached to the workpiece;
a tape winding unit that winds the tape cut by the cutting unit; and
a plurality of transport rollers arranged between the feeding unit and the tape winding unit for transporting the tape, wherein the transport rollers further include:
a plurality of sensors that detect the presence or absence of a band; and
a plurality of lamps which are lighted by the control unit along with the signal from the sensor,
when the operator sets the belt from the feeding unit to the belt take-up unit, the control unit turns on the lamp provided at a position where the belt is to be passed by the operator next in accordance with a signal from the sensor.
2. A tape application apparatus according to claim 1,
the sensor has a light projecting part and a light receiving part,
the tape application device detects a shift of the tape in accordance with a change in the amount of received light.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-177717 | 2018-09-21 | ||
| JP2018177717A JP2020047899A (en) | 2018-09-21 | 2018-09-21 | Tape sticking apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110937451A true CN110937451A (en) | 2020-03-31 |
Family
ID=69901693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910846516.0A Pending CN110937451A (en) | 2018-09-21 | 2019-09-09 | Tape sticking apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2020047899A (en) |
| KR (1) | KR20200034586A (en) |
| CN (1) | CN110937451A (en) |
| TW (1) | TW202013478A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111634719B (en) * | 2020-06-05 | 2021-11-02 | 安徽新锐得材料科技有限公司 | Automatic mask feeding device and folding mask machine with same |
| JP2022184119A (en) * | 2021-05-31 | 2022-12-13 | 株式会社ディスコ | Sheet sticking apparatus |
| JP2023081084A (en) | 2021-11-30 | 2023-06-09 | 株式会社ディスコ | Holding mechanism and sticking device |
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|---|---|---|---|---|
| JP2005019812A (en) * | 2003-06-27 | 2005-01-20 | Seiko Epson Corp | Tape carrying apparatus and tape carrying method |
| JP2007217147A (en) * | 2006-02-17 | 2007-08-30 | Fuji Xerox Co Ltd | Sheet-like member conveyance state detection device |
| JP2008110830A (en) * | 2006-10-30 | 2008-05-15 | Ricoh Co Ltd | Belt conveyor, image forming device, and belt shift correction method |
| JP2015082642A (en) * | 2013-10-24 | 2015-04-27 | 株式会社ディスコ | Adhesive tape sticking device |
| JP2018060970A (en) * | 2016-10-07 | 2018-04-12 | リンテック株式会社 | Sheet delivery device and delivery method |
| JP2018132344A (en) * | 2017-02-14 | 2018-08-23 | ウインテック株式会社 | Position detector |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01207943A (en) * | 1988-02-15 | 1989-08-21 | Nitto Denko Corp | Automatic apparatus for sticking semiconductor wafer |
| JP5412733B2 (en) * | 2007-03-05 | 2014-02-12 | 東レ株式会社 | Sheet take-up device |
-
2018
- 2018-09-21 JP JP2018177717A patent/JP2020047899A/en active Pending
-
2019
- 2019-08-26 KR KR1020190104303A patent/KR20200034586A/en active Search and Examination
- 2019-09-09 CN CN201910846516.0A patent/CN110937451A/en active Pending
- 2019-09-20 TW TW108133944A patent/TW202013478A/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005019812A (en) * | 2003-06-27 | 2005-01-20 | Seiko Epson Corp | Tape carrying apparatus and tape carrying method |
| JP2007217147A (en) * | 2006-02-17 | 2007-08-30 | Fuji Xerox Co Ltd | Sheet-like member conveyance state detection device |
| JP2008110830A (en) * | 2006-10-30 | 2008-05-15 | Ricoh Co Ltd | Belt conveyor, image forming device, and belt shift correction method |
| JP2015082642A (en) * | 2013-10-24 | 2015-04-27 | 株式会社ディスコ | Adhesive tape sticking device |
| JP2018060970A (en) * | 2016-10-07 | 2018-04-12 | リンテック株式会社 | Sheet delivery device and delivery method |
| JP2018132344A (en) * | 2017-02-14 | 2018-08-23 | ウインテック株式会社 | Position detector |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20200034586A (en) | 2020-03-31 |
| JP2020047899A (en) | 2020-03-26 |
| TW202013478A (en) | 2020-04-01 |
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Application publication date: 20200331 |