CN110823055A - Measuring jig - Google Patents
Measuring jig Download PDFInfo
- Publication number
- CN110823055A CN110823055A CN201810915679.5A CN201810915679A CN110823055A CN 110823055 A CN110823055 A CN 110823055A CN 201810915679 A CN201810915679 A CN 201810915679A CN 110823055 A CN110823055 A CN 110823055A
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- Prior art keywords
- assembly
- ring
- measuring
- measurement
- base
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
Abstract
A measuring jig comprises a measuring base, a mold release assembly, an inflation assembly and a measuring assembly. The demolding assembly is arranged on the measuring base and comprises a demolding ring and a plurality of pushing pieces, and the pushing pieces correspond to the demolding ring. The inflation assembly is arranged on the measuring base and used for inflating to the demoulding assembly, so that the pushing piece pushes the demoulding ring to a reference position. The measuring assembly is arranged on the stripping assembly and used for measuring whether the stripping ring is located at the reference position.
Description
Technical Field
The present invention relates to a jig, and more particularly, to a measuring jig.
Background
In the nanoimprint process, a metal mold is generally used for imprinting. The metal mold comprises a substrate and an imprinting layer arranged on the substrate, wherein the imprinting layer is provided with an imprinting pattern, so that the imprinting pattern can be transferred to a workpiece to be imprinted by pressing of the metal mold. Since the material of the workpiece is thin, if an operator directly and manually separates the workpiece from the metal mold after the imprinting is completed, the workpiece may be cracked. Therefore, it is common practice to separate the stamped workpiece from the metal mold with the aid of a stripper assembly.
More specifically, the demolding assembly comprises a demolding ring and a plurality of pushing pieces, wherein the demolding ring and the pushing pieces surround the periphery of the metal mold and the workpiece, but do not interfere with the stamping action of the metal mold and the workpiece. After the stamping is finished, the pushing piece pushed by the gas further pushes the stripper ring to move towards the direction of the workpiece, so that the stripper ring further pushes the workpiece. Thus, the work pushed by the mold release ring is gradually separated from the metal mold from the periphery toward the center.
Therefore, when the metal mold needs to be replaced or cleaned, the mold release assembly usually needs to be detached from the imprint machine. However, the action of disassembling the stripper assembly may affect the level of the stripper ring, which will affect the result of separating the workpiece from the metal mold. That is, if the level of the mold release ring is not uniform, the work piece gradually separated from the die from the periphery to the center by the pushing of the mold release ring is separated from one side thereof more quickly, and the work piece is likely to be cracked.
Disclosure of Invention
The invention provides a measuring jig which can be used for measuring the horizontal height of a die-separating assembly, so that the die-separating assembly has an accurate calibration result.
The measuring jig comprises a measuring base, a mold release assembly, an inflation assembly and a measuring assembly. The demolding assembly is arranged on the measuring base and comprises a demolding ring and a plurality of pushing pieces, and the pushing pieces correspond to the demolding ring. The inflation assembly is arranged on the measuring base and used for inflating to the demoulding assembly, so that the pushing piece pushes the demoulding ring to a reference position. The measuring assembly is arranged on the stripping assembly and used for measuring whether the stripping ring is located at the reference position.
In an embodiment of the invention, the pushing member is disposed around the stripper ring.
In an embodiment of the invention, the pushing members are disposed around the stripper ring at equal intervals.
In an embodiment of the invention, the mold detaching assembly includes a mold detaching base, and the mold detaching ring and the pushing member are disposed on the mold detaching base.
In an embodiment of the invention, the gas charging assembly is charged to the stripper assembly, so that the pusher synchronously pushes the stripper ring to the reference position.
In an embodiment of the invention, the inflation assembly includes an inflation switch and an inflation opening. The inflation switch is arranged on the measuring base and electrically connected to the inflation inlet, and the inflation inlet is used for inflating to the periphery of the pushing piece, so that the pushing piece pushes the stripper ring to the reference position.
In an embodiment of the invention, the mold release component and the measuring component are detachably assembled on the measuring base, and the mold release component is disposed between the measuring base and the measuring component.
In an embodiment of the invention, the measuring assembly includes a rotating ring and at least one measuring member. The measuring piece is arranged on the rotating ring so as to measure the horizontal heights of a plurality of local parts of the demoulding ring by rotating the rotating ring relative to the demoulding ring.
In an embodiment of the invention, the number of the measuring members includes a plurality of measuring members, and the measuring members are distributed on the rotating ring at equal intervals.
In an embodiment of the invention, the measuring component includes a dial indicator.
Based on the above, in the measuring jig of the present invention, the mold releasing assembly is disposed on the measuring base, the inflating assembly is disposed on the measuring base, and the measuring assembly is disposed on the mold releasing assembly. Therefore, the inflation assembly inflates air to the demolding assembly, so that the pushing piece pushes the demolding ring to the reference position, and then the measurement assembly measures whether the demolding ring is located at the reference position. Therefore, the measuring jig provided by the invention can be used for measuring the horizontal height of the die-separating assembly, so that the die-separating assembly has an accurate calibration result.
In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
Fig. 1 is a perspective view of a measurement tool according to an embodiment of the invention.
Fig. 2 is a partially exploded view of the metrology tool of fig. 1.
Detailed Description
Fig. 1 is a perspective view of a measurement tool according to an embodiment of the invention. Fig. 2 is a partially exploded view of the metrology tool of fig. 1. Referring to fig. 1 and fig. 2, in the present embodiment, the measuring tool 100 includes a measuring base 110, a mold release assembly 120, an inflation assembly 130, and a measuring assembly 140. The mold release assembly 120 is disposed on the metrology base 110. The inflation assembly 130 is disposed on the measurement base 110 and is used for inflating to the mold release assembly 120. The measurement assembly 140 is disposed on the mold-releasing assembly 120. Thus, the mold release assembly 120 can be applied to a nanoimprint process (e.g., mounted on an imprint machine (not shown)) to assist in separating a workpiece (not shown) from a metal mold (not shown), and the mold release assembly 120 is measured and calibrated through the measuring tool 100 before or after being mounted on the imprint machine.
Specifically, the demolding assembly 120 includes a demolding seat 122, a demolding ring 124, and a plurality of pushing members 126, wherein the demolding ring 124 and the pushing members 126 are disposed on the demolding seat 122, and the pushing members 126 correspond to the demolding ring 124. The stripper ring 124 is annular, and the pushers 126 are circumferentially disposed around the stripper ring 124, and more particularly, the pushers 126 are distributed around the stripper ring 124 at equal intervals, and an inner side 126a of each pusher 126 corresponds to the stripper ring 124, and an outer side 126b of each pusher 126 corresponds to an air passage (not shown) on the stripper seat 122. More specifically, fig. 2 illustrates the mold release ring 124 and the plurality of pushing members 126 assembled in the mold release seat 122 by disassembling the mold release seat 122 into two combined parts 122a and 122b, but the mold release assembly 120 can be actually used as an assembly (i.e., the inner components of the mold release assembly 120 do not need to be disassembled during the use process) and then assembled directly to the platen as an auxiliary for separating the workpiece from the metal mold or assembled directly to the measuring tool 100 for measurement, and the invention is not limited to the specific embodiment of the mold release seat 122, which can be various suitable shapes for disposing the mold release ring 124 and the pushing members 126, so that it can be used as an assembly of the assembly.
Furthermore, when the mold release assembly 120 is assembled to the imprint station, the mold release seat 122 is located at one side of the mold, such that the mold release ring 124 and the pushing member 126 surround the periphery of the mold and the workpiece, but do not interfere with the imprint operation of the mold and the workpiece. Therefore, the metal mold assembled to the stamping machine can stamp a workpiece placed on the fixture (chuck), and after stamping is completed, gas is provided to the demolding assembly 120 through a gas charging assembly (not shown) on the stamping machine, so that the outer side 126b of each pushing member 126 is pushed by the gas to move relative to the demolding seat 122, and further, the inner side 126a of each pushing member 126 pushes the demolding ring 124 to move towards the workpiece by utilizing the lever principle, so that the demolding ring 124 further pushes the workpiece. In this manner, the workpiece pushed by the stripper ring 124 is gradually separated from the metal mold from the periphery toward the center.
Since the stripper assembly 120 is assembled to the platen as an assembly and the stripper seat 122 is located at one side of the mold such that the stripper ring 124 and the pusher 126 surround the periphery of the mold and the workpiece, the stripper assembly 120 is usually disassembled from the platen when the mold needs to be replaced or cleaned. However, the action of disassembling the stripper assembly 120 may affect the level of the stripper ring 124, which would affect the result of separating the workpiece from the metal mold 124. Thus, the horizontal height calibration of the stripper assembly 120 (and in particular the stripper ring 124) is typically performed anew prior to reassembling the stripper assembly 120 onto the imprint tool. Even if the mold-separating assembly 120 is calibrated, the calibration result is further measured to determine whether the level of the mold-separating assembly 120 is up to the required level. Therefore, the mold-releasing assembly 120 can be further applied to the measurement tool 100 of the present embodiment for measurement.
In the present embodiment, the inflation assembly 130 is disposed on the measurement base 110, the separation assembly 120 and the measurement assembly 140 are detachably assembled on the measurement base 110, and the separation assembly 120 is disposed between the measurement base 110 and the measurement assembly 140. That is, the measuring tool 100 includes three parts as shown in fig. 2, namely, a measuring base 110 and an inflating assembly 130 disposed thereon, a mold releasing assembly 120 detachably assembled on the measuring base 110, and a measuring assembly 140 detachably assembled on the measuring base 110 and the mold releasing assembly 120. Thus, after the mold-separating assembly 120 is detached from the aforementioned platen, it can be directly disposed on the measuring base 110 as an assembly (for example, a pair of rails 112 is disposed on the measuring base 110 for the mold-separating assembly 120 to slide in the mold-separating base 122, but the invention is not limited thereto), and the mold-separating assembly 120 is further connected to the air-charging assembly 130. Then, the measuring assembly 140 is further disposed on the mold-separating assembly 120, such that the mold-separating assembly 120 is disposed between the measuring base 110 and the measuring assembly 140, thereby measuring the level of the mold-separating assembly 120 (particularly, the mold-separating ring 124).
In detail, in the present embodiment, the inflation assembly 130 includes an inflation switch 132 and an inflation port 134. The inflation switch 132 is disposed on the measurement base 110 and electrically connected to the inflation port 134 for controlling whether to inflate (i.e. provide gas) through the inflation port 134. In the case where the demolding assembly 120 is disposed on the measuring base 110, the gas filling port 134 of the gas filling assembly 130 corresponds to the demolding assembly 120, and particularly corresponds to the periphery of the pushing member 126. In this manner, gas charging port 134 of gas charging assembly 130 can be used to charge the periphery of pusher 126 such that pusher 126 pushes stripper ring 124 to the datum position.
In the present embodiment, the reference position refers to a position of the ejector ring 124 corresponding to the periphery of the workpiece and located at a single level when the ejector assembly 120 is assembled to the platen. After the stripper ring 124 is used to separate the workpiece from the metal mold, the stripper ring 124 is in the operating position and can be readjusted to the reference position by the metrology tool 100 and perform metrology calibration. Therefore, in the case that the stripper assembly 120 is disposed on the measuring base 110, the gas-filling assembly 130 fills gas into the stripper assembly 120, so that the pusher 126 synchronously pushes the stripper ring 124 to the reference position, and the stripper ring 124 is adjusted to a single level. That is, each pusher 126 is moved by the same amount of gas from the gas-filling assembly 130, so that the ejector ring 124 is moved in the same position. However, in the case that the local portion of the mold-releasing ring 124 is at a different level relative to other local portions, the gas amount corresponding to the local portion may be strengthened by the gas-filling element 130 to adjust the local level to be the same as the other local portions.
In addition, in the present embodiment, the measuring assembly 140 includes a rotating ring 142, a measuring member 144 and a base 146, wherein the rotating ring 142 is disposed on the base 146, and the measuring member 144 is disposed on the rotating ring 142. Furthermore, the present embodiment employs three measuring members 144, such as dial indicators, disposed on the rotating ring 142 at equal intervals, but the number, the disposition position and the type of the measuring members 144 can be adjusted according to the requirement, and the invention is not limited thereto. Thus, the measuring assembly 140 is directly disposed on the mold-releasing assembly 120 as an assembly with the base 146 (the base 146 may further be provided with the handle 148 to facilitate the assembly of the measuring assembly 140, but the present invention is not limited thereto), and then the measuring assembly 140 can be used to measure whether the mold-releasing ring 124 is located at a reference position, for example, the measuring member 144 can sequentially measure the levels of a plurality of parts of the mold-releasing ring 124 by rotating the rotating ring 142 relative to the mold-releasing ring 124.
Specifically, the operation steps of the measuring tool 100 are as follows. First, the stripper assembly 120 is removed from the imprint tool and placed on the metrology base 110, while the stripper ring 124 is in the operative position for separating the workpiece from the mold. Next, the mold release assembly 120 is connected to the plenum assembly 130, and the measurement assembly 140 is disposed on the mold release assembly 120. Since the die-separating seat 122 of the die-separating assembly 120 is originally provided with an inflation channel (not shown) for allowing gas to pass through in the platen to drive the pushing member and the die-separating ring to push the workpiece to separate from the metal mold, during the operation of the measuring tool 100, the inflation port 134 of the inflation assembly 130 may also be connected to the inflation channel in the die-separating assembly 120, and further corresponds to the periphery of the pushing member 126. With all of the above components assembled, the release assembly 120 is inflated via the inflation port 134 by depressing the inflation switch 132. Thereby, the pushing member 126 further pushes the stripper ring 124 by the pushing of the gas, so that the stripper ring 124 returns to the reference position from the operating position.
After the stripper ring 124 returns to the reference position, the level of the corresponding portion of the stripper ring 124 is first measured by the measuring member 144 of the measuring assembly 140. After confirming that the value on the measuring member 144 meets the requirement, i.e., the level of the portion of the mold-releasing ring 124 corresponding to the measuring member 144 meets the requirement, the rotating ring 142 is moved, so that the measuring member 144 is rotated relative to the mold-releasing ring 124 by the rotating ring 142, and then moved to the next portion corresponding to the mold-releasing ring 124. At this time, it is observed whether the measuring member 144 has a value change, if so, it indicates that the part of the mold release ring 124 is located at a different level from the previous part, and the level adjustment needs to be performed again, and if not, it indicates that the part of the mold release ring 124 and the previous part are located at the same level. The rotating ring 142 is continuously moved such that the measuring member 144 sequentially measures the local levels of the mold ring 124, thereby determining whether the mold ring 124 is located at the same level, i.e. determining whether the mold ring 124 is located at the reference position accurately.
When the level of the part of the stripper ring 124 needs to be adjusted again, the above-mentioned operation of pushing the pusher 126 to the stripper ring 124 by the inflation assembly 130 can be performed again, and then the above-mentioned operation of measuring the stripper ring 124 by the measurement assembly 140 can be performed again. In addition, after it is confirmed that the stripper ring 124 is precisely located at the reference position, the metrology assembly 140 is first detached from the stripper assembly 120, and then the stripper assembly 120 is detached from the metrology base 110. Since the measuring unit 140 and the stripping unit 120 are each used as a single unit that can be assembled, the assembling and disassembling of the measuring unit 140 and the stripping unit 120 is easy. The adjusted and calibrated release assembly 120 may be reassembled to the imprint tool for reuse in an imprint process to assist in separating the imprinted workpiece from the metal mold.
In summary, in the measuring fixture of the present invention, the mold releasing assembly is disposed on the measuring base, the inflating assembly is disposed on the measuring base, and the measuring assembly is disposed on the mold releasing assembly. Wherein the stripper ring of the stripper assembly is in the press station for separating the workpiece from the metal mold in the operative position. Therefore, under the condition that the demolding assembly is arranged on the measuring base and connected to the air charging assembly and the measuring assembly, the air charging assembly is charged to the demolding assembly, so that the pushing piece pushes the demolding ring to the reference position, and then the measuring assembly measures whether the demolding ring is located at the reference position. Therefore, the mold release ring can be restored to the reference position again and is applied to the imprinting machine again. Therefore, the measuring jig provided by the invention can be used for measuring the horizontal height of the die-separating assembly, so that the die-separating assembly has an accurate calibration result.
Although the present invention has been described with reference to the above embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention.
Reference numerals
100: measuring jig
110: measuring base
112: track
120: mold release assembly
122: die separating seat
122a, 122 b: combined parts
124: mould release ring
126: pusher member
126 a: inner side
126 b: outside side
130: inflation assembly
132: inflation switch
134: air charging port
140: measuring assembly
142: rotating ring
144: measuring piece
146: base body
148: handle bar
Claims (10)
1. A measurement jig includes:
a measuring base;
the mold release assembly is arranged on the measuring base and comprises a mold release ring and a plurality of pushing pieces, and the pushing pieces correspond to the mold release ring;
the inflation assembly is arranged on the measuring base and used for inflating the demolding assembly so that the pushing pieces push the demolding ring to a reference position; and
and the measuring assembly is arranged on the mold release assembly and used for measuring whether the mold release ring is positioned at the reference position.
2. The measurement tool of claim 1, wherein the stripper ring is annular, and the plurality of pushers are circumferentially disposed around the stripper ring.
3. The metrology tool of claim 1, wherein the plurality of pushers are distributed around the stripper ring at equal intervals.
4. The metrology tool of claim 1, wherein the lift-off assembly comprises a lift-off base, the lift-off ring and the plurality of pushers being disposed on the lift-off base.
5. The metrology tool of claim 1, wherein the gas-filled assembly is inflated to the stripper assembly such that the plurality of pushers simultaneously push the stripper ring to the datum position.
6. The measurement fixture of claim 1, wherein the inflation assembly comprises an inflation switch and an inflation port, the inflation switch is disposed on the measurement base and electrically connected to the inflation port, and the inflation port is used for inflating to the periphery of the plurality of pushing members, so that the plurality of pushing members push the stripper ring to the reference position.
7. The measurement fixture of claim 1, wherein the demolding assembly and the measurement assembly are detachably assembled on the measurement base, and the demolding assembly is disposed between the measurement base and the measurement assembly.
8. The metrology tool of claim 1, wherein the metrology assembly comprises a rotating ring and at least one metrology member disposed on the rotating ring to measure the local levels of the lift ring by rotating the rotating ring relative to the lift ring.
9. A metrology tool as claimed in claim 8 wherein the number of metrology members comprises a plurality, equally spaced apart on the ring.
10. The measurement tool of claim 8, wherein the measurement piece comprises a dial indicator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810915679.5A CN110823055B (en) | 2018-08-13 | 2018-08-13 | Measuring jig |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810915679.5A CN110823055B (en) | 2018-08-13 | 2018-08-13 | Measuring jig |
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| Publication Number | Publication Date |
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| CN110823055A true CN110823055A (en) | 2020-02-21 |
| CN110823055B CN110823055B (en) | 2022-04-22 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810915679.5A Active CN110823055B (en) | 2018-08-13 | 2018-08-13 | Measuring jig |
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|---|---|
| CN110823055B (en) | 2022-04-22 |
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