CN101249938A - Pneumatic micro-nano imprint demoulding structure - Google Patents
Pneumatic micro-nano imprint demoulding structure Download PDFInfo
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- CN101249938A CN101249938A CNA2008100598753A CN200810059875A CN101249938A CN 101249938 A CN101249938 A CN 101249938A CN A2008100598753 A CNA2008100598753 A CN A2008100598753A CN 200810059875 A CN200810059875 A CN 200810059875A CN 101249938 A CN101249938 A CN 101249938A
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- 229920000642 polymer Polymers 0.000 claims abstract description 52
- 238000007789 sealing Methods 0.000 claims abstract description 6
- 230000006378 damage Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 12
- 239000002086 nanomaterial Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- BYXHQQCXAJARLQ-ZLUOBGJFSA-N Ala-Ala-Ala Chemical compound C[C@H](N)C(=O)N[C@@H](C)C(=O)N[C@@H](C)C(O)=O BYXHQQCXAJARLQ-ZLUOBGJFSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The invention discloses a nano imprint demoulding structure based on air driving, wherein a polymer clamping casing is arranged on a work bench, a mould plate is arranged at the lower end of the clamping casing, a plunger is arranged on the upper end surface of the mould plate, a sleeve is fixedly connected with the clamping casing, the sleeve and the plunger move from up to down, thereby the mould plate can move from up to down in the clamping casing, a sliding passage arranged on the lower end surface of the mould plate is provided with a spring and a slide block, a mould clamping air passage connected to the clamping casing is led into the slide passage via the mould plate, thereby the slide block can slide in the slide passage on the lower end surface of the mould plate, a demoulding air passage is switched in from the clamping casing and passes through the mould plate, and a sealing ring is arranged on the lower end surface of the clamping casing. The nano imprint demoulding structure is capable of demoulding smoothly, and stress of the polymer and the mould is uniform, further damages of the microstructure imprinted can be reduced to the minimum, the mould can be protested, and the cost of imprinting can be reduced.
Description
Technical field
The present invention relates to micro-nano process technology, especially relate to a kind of based on pneumatic micro-nano imprint demolding structure.
Background technology
Micro-nano hot-forming be a kind of method that can prepare micro nano structure in enormous quantities, its technological process mainly comprises (1) mould preparation, adopts technology such as dry etching or wet etching to make the mould of micro nano structure as the parent that duplicates; (2) mould and polymer are put into the impression equipment, be heated to after vacuumizing more than the softening temperature of polymer, pressurization makes the micro-nano structure on the mould be transferred to polymer surfaces, then pressurize a period of time, cool off again the micro-structural on the polymer fixed-type, release pressure and vacuum; (3) isolating polymer and mould can obtain micro-structural with the concavo-convex complementation of mould at polymer surfaces.Its whole process flow schematic diagram as shown in Figure 7.
In micro-nano imprint, (hereinafter referred to as the demoulding) operation of separating of mould and polymer is that last procedure of whole hot padding process also is a procedure of most critical.This operation is the Main Stage of hot padding defective generation and finally is present stage.Because the thermal stress that refrigerating work procedure caused vertically acts on the die cavity side wall surface, and there is certain roughness in the contact-making surface of polymer and mould, produce the mechanical friction mechanical resistance on its surface and hinder the demoulding.Tightr between mould and polymer contact-making surface simultaneously owing to contact gear ratio, have bigger Molecular Adsorption power between contact-making surface, make the demoulding difficult more.Stripping means at present commonly used has two kinds of hand-stripping and automatic demouldings.Hand-stripping just is meant that the micro-structural of will duplicate and mould take off from the impression equipment, by manpower it is separated.And automatic demoulding is meant and adopts a device that designs to realize the separation of polymer and mould.Hand-stripping causes the damage of micro-nano structure owing to introduce easily the stripping direction error, so can only be less demanding to quality and be to use in the micro-structural demoulding of low depth-to-width ratio.Automatic demoulding mechanism commonly used is made with reference to the mould emptier in macroscopical equipment in the micro-nano imprint equipment at present.By two fixed blocks polymer is clamped, spurred mould then, thereby realize separating.This automatic demoulding structure does not redesign according to the micro nano structure machining characteristics, make and have a very big problem in actual use, when separating, cause micro-structural that very big distortion takes place exactly easily, thereby the micro-structural that impresses is damaged.
Summary of the invention
In order to obtain high-quality micro-nano structure, the demoulding defective when avoiding impressing, the object of the present invention is to provide a kind of based on pneumatic micro-nano imprint demolding structure, the Pneumatic demould mechanism that can avoid micro-structural distortion when the demoulding, to occur even destroy.
The technical solution adopted for the present invention to solve the technical problems is as follows:
Polymer is housed on the workbench of still unsegregated mould and polymer clamps cover, template is installed in polymer and clamps the lower end of cover and face mould, piston is equipped with in the template upper surface, sleeve and polymer clamp cover and are connected, after sleeve and piston match, moving up and down of sleeve and piston, template is clamped in the cover at polymer to move up and down, the template lower surface is provided with slideway, spring and slide block are housed in the slideway, after the mold cramping air flue clamps the cover access from polymer, insert in the slide block by template, slide block is slided in the slideway of template lower surface, after demoulding air flue clamps the cover access from polymer, demoulding air flue passes from template, and sealing ring is installed on the lower surface that polymer clamps cover.
The useful effect that the present invention has is:
Innovation part of the present invention has been to adopt the Pneumatic demould method, and this is different from traditional mechanical force fully and spurs the method that mould carries out the demoulding by force.Effectively reduced the problem that polymer micro-structural that knockout course causes distortion occurs and is out of shape even destroys by designed device for clamping mould and demolding structure.
Owing to adopted pneumatic stripping means, can guarantee that knockout course is steady, polymer and mould are stressed evenly; Make the destruction of the micro-structural that impression is good in the knockout course reduce to minimum, mould also can well be protected, and has reduced the cost of impression.In addition, gas can also rely on its little molecule, thereby is penetrated into the contact-making surface of mould and polymer, form a gas film at its contact-making surface, can effectively reduce the molecule adhesion effect between mould and polymer, finally reduce its mutual knockout press, reduce the demoulding and destroy.
Description of drawings
Fig. 1 a is a structural principle front view of the present invention; Fig. 1 b is a structural principle vertical view of the present invention.
Fig. 2 is that the A-A-A of Fig. 1 b is to revolved sectional view.
Fig. 2 is a workflow diagram of the present invention to Fig. 6.
Fig. 7 is whole imprint process schematic flow sheet.
Among the figure: the 1-workbench, the 2-polymer, the 3-spring, the 4-slide block, the 5-template, 6-mold cramping air flue, the 7-polymer clamps cover, 8-sleeve, 9-piston, 10-demoulding air flue, 11-sealing ring, 12-mould.
The specific embodiment
The present invention is further illustrated below in conjunction with accompanying drawing and implementation process.
As Fig. 1 a, Fig. 1 b, shown in Figure 2, structure of the present invention is as follows: polymer is housed on the workbench 1 of still unsegregated mould 12 and polymer 2 clamps cover 7, template 5 is installed in polymer and clamps the lower end of cover 7 and face mould 12, piston 9 is equipped with in template 5 upper surfaces, sleeve 8 and polymer clamp cover 7 and are connected, after sleeve 8 matches with piston 9, sleeve 8 moves up and down with piston 9, template 5 is clamped in the cover 7 at polymer to move up and down, template 5 lower surfaces are provided with slideway, spring 3 and slide block 4 are housed, after mold cramping air flue 6 clamps cover 7 accesses from polymer, in template 5 and access slide block 4 in the slideway, slide block 4 is slided in template 5 lower surface slideways, rely on the pulling force of spring to be in releasing orientation during unaerated, in air flue, inject Compressed Gas after, thereby slide block just overcomes the pulling force clamping mold of spring.After demoulding air flue 10 clamped cover 7 accesses from polymer, demoulding air flue 10 passed from template 5, and sealing ring 11 is installed on the lower surface that polymer clamps cover 7.
Pneumatic demould mechanism clamps the space that cover constitutes a sealing by polymer, injects Compressed Gas by demoulding air flue then, utilizes the isotone principle promotion mould of fluid to separate stably with polymer, can effectively avoid polymer distortion to occur.
The course of work of the present invention is as follows:
1) open pulsometer, pneumaticpiston 9 is promoted to the peak of stroke, still unsegregated mould 12 and polymer 2 are positioned on the workbench 1, fall then that polymer clamps cover 7 and template 5 arrives state shown in Figure 3.
2) opening mold clamps air flue 6 valves, injects Compressed Gas by mold cramping air flue 6 and makes that behind the slide block clamping mold, closing molding clamps air flue 6 valves, as shown in Figure 4.
3) open demoulding air flue 10 valves, inject Compressed Gas by demoulding air flue 10, mild promotion mould separates with polymer, as shown in Figure 5.
4) finally finish the separation of polymer and mould, as shown in Figure 6.The fixed form position discharges in the demoulding air flue and the gas in the mold cramping air flue, thereby discharges mould.
5) polymer is clamped cover and lift to the range place, take out mould and polymer, finish whole separation.
Fig. 2 is a workflow diagram of the present invention to Fig. 6.
Claims (1)
1, a kind of based on pneumatic micro-nano imprint demolding structure, it is characterized in that: polymer is housed on the workbench (1) of still unsegregated mould (12) and polymer (2) clamps cover (7), template (5) is installed in polymer and clamps the lower end of cover (7) and face mould (12), piston (9) is equipped with in template (5) upper surface, sleeve (8) and polymer clamp cover (7) and are connected, after sleeve (8) matches with piston (9), sleeve (8) moves up and down with piston (9), template (5) is clamped in the cover (7) at polymer to move up and down, template (5) lower surface is provided with slideway, spring (3) and slide block (4) are housed in the slideway, after mold cramping air flue (6) clamps cover (7) access from polymer, insert in the slide block (4) by template (5), slide block (4) is slided in the slideway of template (5) lower surface, after demoulding air flue (10) clamped cover (7) access from polymer, demoulding air flue (10) passed from template (5), and sealing ring (11) is installed on the lower surface that polymer clamps cover (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810059875A CN100590064C (en) | 2008-02-26 | 2008-02-26 | Pneumatic micro-nano imprint demoulding structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810059875A CN100590064C (en) | 2008-02-26 | 2008-02-26 | Pneumatic micro-nano imprint demoulding structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101249938A true CN101249938A (en) | 2008-08-27 |
| CN100590064C CN100590064C (en) | 2010-02-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810059875A Expired - Fee Related CN100590064C (en) | 2008-02-26 | 2008-02-26 | Pneumatic micro-nano imprint demoulding structure |
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| CN (1) | CN100590064C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829772A (en) * | 2010-05-26 | 2010-09-15 | 浙江大学 | Thermoplasticity shaping and processing method of metal glass micro construction member |
| WO2012083578A1 (en) * | 2010-12-22 | 2012-06-28 | 青岛理工大学 | Device and method for nano-imprinting full wafer |
| TWI666128B (en) * | 2018-07-24 | 2019-07-21 | 奇景光電股份有限公司 | Measuring fixture |
| CN110823055A (en) * | 2018-08-13 | 2020-02-21 | 奇景光电股份有限公司 | Measuring jig |
-
2008
- 2008-02-26 CN CN200810059875A patent/CN100590064C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101829772A (en) * | 2010-05-26 | 2010-09-15 | 浙江大学 | Thermoplasticity shaping and processing method of metal glass micro construction member |
| CN101829772B (en) * | 2010-05-26 | 2011-11-02 | 浙江大学 | Thermoplasticity shaping and processing method of metal glass micro construction member |
| WO2012083578A1 (en) * | 2010-12-22 | 2012-06-28 | 青岛理工大学 | Device and method for nano-imprinting full wafer |
| US8741199B2 (en) | 2010-12-22 | 2014-06-03 | Qingdao Technological University | Method and device for full wafer nanoimprint lithography |
| TWI666128B (en) * | 2018-07-24 | 2019-07-21 | 奇景光電股份有限公司 | Measuring fixture |
| CN110823055A (en) * | 2018-08-13 | 2020-02-21 | 奇景光电股份有限公司 | Measuring jig |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100590064C (en) | 2010-02-17 |
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Granted publication date: 20100217 Termination date: 20140226 |