TWI666128B - Measuring fixture - Google Patents

Abstract

A measuring fixture includes a measuring base, a mold release component, an inflatable component, and a measuring component. The mold release assembly is disposed on the measurement base, wherein the mold release assembly includes a mold release ring and a plurality of pushers, and the push members correspond to the mold release ring. The inflatable component is arranged on the measurement base for inflating the mold release component, so that the pushing member pushes the mold release ring to a reference position. The measurement component is disposed on the mold release component, and is used to measure whether the mold release ring is located at the reference position.

Description

Measuring fixture

The invention relates to a jig, and in particular to a measuring jig.

In the nano-imprinting process, a metal mold is usually used for imprinting. The metal mold includes a substrate and an imprint layer provided on the substrate, and the imprint layer has an imprint pattern, so that the imprint pattern can be transferred to the workpiece to be imprinted by pressing the metal mold. Because the material of the workpiece is thin, if the operator manually separates the workpiece from the metal mold directly after the imprinting, the workpiece may be cracked. Therefore, a common practice is to separate the stamped workpiece from the metal mold with the assistance of a mold release assembly.

Furthermore, the mold release assembly includes a mold release ring and a plurality of pushers, and the mold release ring and the push members surround the periphery of the metal mold and the workpiece, but do not interfere with the embossing action of the metal mold and the workpiece. After the imprinting is completed, the pushing member pushed by the gas further pushes the mold release ring to move toward the workpiece, so that the mold release ring further pushes the workpiece. In this way, the workpiece pushed by the release ring is gradually separated from the metal mold from the periphery to the middle.

It can be seen that, when the metal mold needs to be replaced or cleaned, the mold release component usually needs to be disassembled from the imprinter table. However, the action of removing the mold release assembly may affect the horizontal height of the mold release ring, and the horizontal height of the mold release ring will affect the result of separating the workpiece from the metal mold. That is, if the horizontal height of the release ring is uneven, the workpiece separated from the metal mold gradually from the periphery to the middle by the release ring will be separated faster on one side, and the workpiece will be easily broken. Happening.

The invention provides a measuring jig, which can be used for measuring the horizontal height of a mold release component, so that the mold release component has an accurate calibration result.

The measurement jig of the present invention includes a measurement base, a mold release assembly, an inflatable assembly, and a measurement assembly. The mold release assembly is disposed on the measurement base, wherein the mold release assembly includes a mold release ring and a plurality of pushers, and the push members correspond to the mold release ring. The inflatable component is arranged on the measurement base for inflating the mold release component, so that the pushing member pushes the mold release ring to a reference position. The measurement component is disposed on the mold release component, and is used to measure whether the mold release ring is located at the reference position.

In an embodiment of the present invention, the above-mentioned pushing member is arranged around the mold ring.

In one embodiment of the present invention, the above-mentioned pushing members are dispersedly arranged at equal intervals around the mold release ring.

In an embodiment of the present invention, the above-mentioned mold release assembly includes a mold release base, and the mold release ring and the pushing member are disposed on the mold release base.

In an embodiment of the present invention, the aforesaid inflatable component is inflated to the mold release component, so that the pushing member synchronously pushes the mold release ring to the reference position.

In an embodiment of the present invention, the above-mentioned inflatable component includes an inflatable switch and an inflatable port. The inflation switch is disposed on the measurement base and is electrically connected to the inflation port, and the inflation port is used to inflate the periphery of the pushing member, so that the pushing member pushes the release ring to the reference position.

In an embodiment of the present invention, the mold release component and the measurement component are detachably assembled on the measurement base, and the mold release component is disposed between the measurement base and the measurement component.

In an embodiment of the present invention, the measurement component includes a rotating ring and at least one measurement component. The measuring member is disposed on the rotating ring to measure the horizontal heights of a plurality of parts of the mold ring by rotating the rotating ring relative to the mold ring.

In an embodiment of the present invention, the number of the measurement elements includes a plurality of measurement elements, and the measurement elements are disposed on the rotating ring at an equal interval.

According to an embodiment of the present invention, the measurement device includes a dial indicator.

Based on the above, in the measurement jig of the present invention, the mold release component is disposed on the measurement base, the inflatable component is disposed on the measurement base, and the measurement component is disposed on the mold release component. In this way, the inflatable component is inflated to the mold release component, so that the pushing member pushes the mold release ring to the reference position, and then the measurement component measures whether the mold release ring is located at the reference position. According to this, the measuring jig provided by the present invention can be used to measure the horizontal height of the mold release component, so that the mold release component has an accurate calibration result.

In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view of a measurement jig according to an embodiment of the present invention. FIG. 2 is a partial exploded view of the measuring jig of FIG. 1. Please refer to FIG. 1 and FIG. 2. In this embodiment, the measurement jig 100 includes a measurement base 110, a mold release component 120, an inflatable component 130, and a measurement component 140. The mold release assembly 120 is disposed on the measurement base 110. The inflatable component 130 is disposed on the measurement base 110 for inflating the mold release component 120. The measurement component 140 is disposed on the mold release component 120. In this way, the mold release assembly 120 can be applied in the nano-imprinting process (such as installation on an imprinting machine table (not shown)) and the auxiliary workpiece (not shown) is separated from the metal mold (not shown). And before or after installation on the imprinting machine table, the measurement mold assembly 100 is used to measure the mold module 120 and perform calibration.

Specifically, the mold release assembly 120 includes a mold release base 122, a mold release ring 124, and a plurality of pushers 126. The mold release ring 124 and the push member 126 are disposed on the mold release base 122, and the push member 126 corresponds to the release模 环 124。 Mould ring 124. The mold release ring 124 has an annular shape, and the pushers 126 are arranged around the mold release ring 124. In particular, the pushers 126 are dispersedly arranged around the mold release ring 124 at an equal interval, and the inside of each pusher 126 126 a corresponds to the mold release ring 124, and an outer side 126 b of each pushing member 126 corresponds to an air passage (not shown) on the mold release 122. Furthermore, in FIG. 2, the mold release seat 122 is disassembled into two combined parts 122 a and 122 b to show the mold release ring 124 and a plurality of pushers 126 assembled in the mold release seat 122, but the mold release assembly 120 In fact, it can be used as a component that can be assembled (that is, it is not necessary to disassemble its internal components during the use of the mold release module 120), and then directly assembled to the stamping machine as an aid to separate the workpiece from the metal mold. Or directly assembled to the measuring jig 100 for measurement, and the present invention does not limit the specific implementation of the mold release base 122, which can be various suitable shapes for setting the mold release ring 124 and the pushing member 126, so that It can be used as a component that can be assembled.

Furthermore, when the mold release assembly 120 is assembled to the imprinting machine table, the mold release base 122 is located on one side of the metal mold, so that the mold release ring 124 and the pushing member 126 surround the periphery of the metal mold and the workpiece, but not Interfering with the embossing action of the metal mold and the workpiece. In this way, the metal mold assembled to the imprinting machine table can emboss the workpiece placed on the chuck, and after the imprinting is completed, the gas is supplied through the inflatable component (not shown) on the imprinting machine table. To the mold release assembly 120, the outer side 126b of each pusher 126 is pushed by the gas to move relative to the mold release base 122, and then the inner side 126a of each pusher 126 is used to push the release ring 124 toward the workpiece using the principle of lever The movement causes the mold release ring 124 to further push the workpiece. In this way, the workpiece pushed by the mold release ring 124 is gradually separated from the metal mold from the periphery to the middle.

Since the mold release assembly 120 is assembled on the imprinting machine table as an assemblable component, and the mold release seat 122 is located on one side of the metal mold, the mold release ring 124 and the pushing member 126 surround the periphery of the metal mold and the workpiece. Therefore, when the metal mold needs to be replaced or the metal mold needs to be cleaned, the mold release assembly 120 usually needs to be disassembled from the imprinter table. However, the action of disassembling the mold release assembly 120 may affect the horizontal height of the mold release ring 124, and the horizontal height of the mold release ring 124 will affect the result of separating the workpiece from the metal mold. In this way, before the mold release assembly 120 is reassembled on the imprinter table, the mold release assembly 120 (especially the mold release ring 124) is usually re-calibrated. Even when the release module 120 is calibrated, the calibration results need to be further measured to confirm whether the horizontal height of the release module 120 meets the requirements. Therefore, the mold release assembly 120 can further apply the measurement jig 100 described in this embodiment for measurement.

In this embodiment, the inflatable component 130 is disposed on the measurement base 110, the mold release component 120 and the measurement component 140 are detachably assembled on the measurement base 110, and the mold release component 120 is disposed on the measurement Between the base 110 and the measurement component 140. That is, as shown in FIG. 2, the measurement jig 100 includes three parts, that is, a measurement base 110 and an inflatable component 130 provided thereon, and a mold release assembly detachably assembled on the measurement base 110. 120, and a measurement assembly 140 detachably assembled on the measurement base 110 and the mold release assembly 120. In this way, after the mold release assembly 120 is detached from the imprinter table, it can be directly installed on the measurement base 110 as a component that can be assembled (for example, a pair of rails 112 are provided on the measurement base 110). The mold release module 120 is slid in by the mold release seat 122, but the present invention is not limited thereto, and the mold release module 120 is further connected to the inflatable component 130. Then, the measurement module 140 is further disposed on the mold release module 120, so that the mold release module 120 is disposed between the measurement base 110 and the measurement module 140, and the mold release module 120 (particularly the The height of the die ring 124).

Specifically, in this embodiment, the inflatable component 130 includes an inflatable switch 132 and an inflatable port 134. The inflation switch 132 is disposed on the measurement base 110 and is electrically connected to the inflation port 134 to control whether inflation is performed through the inflation port 134 (that is, to provide gas). In a case where the mold release assembly 120 is disposed on the measurement base 110, the inflation port 134 of the inflatable assembly 130 corresponds to the mold release assembly 120, and particularly corresponds to the periphery of the pushing member 126. In this way, the inflation port 134 of the inflation component 130 can be used to inflate to the periphery of the pushing member 126, so that the pushing member 126 pushes the mold release ring 124 to the reference position.

In this embodiment, the reference position refers to a position where the mold release ring 124 corresponds to the periphery of the workpiece and is located at a single horizontal height when the mold release assembly 120 is assembled to the imprinter table. After the mold release ring 124 is used to separate the workpiece from the metal mold, the mold release ring 124 is located in the operating position, and can be readjusted to the reference position through the measurement jig 100 to perform measurement calibration. Therefore, when the mold release assembly 120 is disposed on the measurement base 110, the inflatable component 130 is inflated to the mold release assembly 120, so that the pusher 126 synchronously pushes the mold release ring 124 to the reference position, and then the mold release ring 124 Adjusted to a single horizontal height. That is, the amount of movement of each pushing member 126 after being pushed by the gas of the inflatable component 130 is the same, so that the positions moved from the die ring 124 are the same. However, in the case where the part of the mold release ring 124 is at a different level with respect to other parts, the gas amount corresponding to the part can be strengthened by the inflatable component 130 to adjust the horizontal height of the part to be the same as the other parts. The above embodiments may be adjusted according to requirements, and the present invention is not limited thereto.

In addition, in this embodiment, the measurement component 140 includes a rotation ring 142, a measurement member 144, and a base 146. The rotation ring 142 is disposed on the base 146, and the measurement member 144 is disposed on the rotation ring 142. Furthermore, in this embodiment, three measuring elements 144 are used, such as a dial indicator, and are arranged on the rotating ring 142 at equal intervals. However, the number, arrangement position and type of the measuring elements 144 can be adjusted according to requirements. The present invention is not limited thereto. In this way, the measurement assembly 140 is a component that can be assembled directly on the mold release assembly 120 with a base 146 (the base 146 can also be provided with a handle 148 to facilitate the assembly of the measurement assembly 140, but this The invention is not limited to this), and then the measuring component 140 can be used to measure whether the mold release ring 124 is located at a reference position, for example, the measurement piece 144 is sequentially measured by the rotation ring 142 relative to the mold release ring 124 to measure the mold release. The horizontal heights of the multiple parts of the ring 124.

Specifically, the operation steps of the measuring jig 100 are as follows. First, the mold release assembly 120 is removed from the imprinter table and set on the measurement base 110. At this time, the mold release ring 124 has been used to separate the workpiece from the metal mold and is located in the operating position. Next, the mold release module 120 is connected to the inflatable component 130, and the measurement module 140 is set on the mold release module 120. Since the mold release seat 122 of the mold release assembly 120 is originally provided with an inflation channel (not shown) in the imprinter table for driving gas through to drive the pusher and the mold release ring to push the workpiece away from the metal mold, Therefore, during the operation of the measuring jig 100, the inflation port 134 of the inflation component 130 can also be connected to the aforementioned inflation channel in the mold release assembly 120, and then corresponds to the periphery of the pushing member 126. When the above components are all assembled, the inflation switch 132 is pressed to inflate the mold release assembly 120 through the inflation port 134. Thereby, the pushing member 126 further pushes the mold release ring 124 by the pushing of the gas, so that the mold release ring 124 returns from the operation position to the reference position.

After the mold release ring 124 returns to the reference position, the corresponding local height on the mold release ring 124 is first measured by the measuring element 144 on the measurement assembly 140. After confirming that the value on the measuring member 144 meets the requirements, that is, the horizontal level of the part corresponding to the measuring member 144 on the mold ring 124 meets the requirements, move the rotating ring 142 so that the measuring member 144 is relatively opposed by the rotating ring 142. The mold release ring 124 rotates, and then moves to the next part corresponding to the mold release ring 124. At this time, observe whether the measuring member 144 has a numerical change. If there is, it indicates that this part of the mold release ring 124 is at a different level from the previous part, and the level adjustment needs to be performed again. This part of the ring 124 is at the same level as the previous part. In this way, the rotating ring 142 is continuously moved, so that the measuring member 144 sequentially measures the horizontal heights of a plurality of local parts on the die ring 124, thereby knowing whether the entire part of the die ring 124 is located at the same level, that is, the Whether the die ring 124 is accurately positioned at the reference position.

When it is necessary to readjust the level of the part of the mold ring 124, for example, the aforementioned action of pushing the pusher 126 by the inflating component 130 to push the mold ring 124 may be performed again, and then the aforementioned measurement by the measuring component 140 is performed again The operation of the mold release ring 124. In addition, after confirming that the mold release ring 124 is accurately located at the reference position, the measurement assembly 140 is first removed from the mold release assembly 120, and then the mold release assembly 120 is removed from the measurement base 110. Since the measurement module 140 and the mold release module 120 are each used as an assemblable component, the assembly and disassembly of the measurement module 140 and the mold release module 120 become easy. After adjusting and calibrating, the mold release assembly 120 can be reassembled to the imprinting machine, and used again in the imprinting process to assist in separating the imprinted workpiece from the metal mold.

In summary, in the measurement jig of the present invention, the mold release component is disposed on the measurement base, the inflatable component is disposed on the measurement base, and the measurement component is disposed on the mold release component. The mold release ring of the mold release component is used to separate the workpiece from the metal mold in the imprinter table and is in the operating position. In this way, when the mold release module is installed on the measurement base and connected to the inflation module and the measurement module, the inflation module is inflated to the mold release module, so that the pusher pushes the mold release ring to the reference position, and then measures The component measures whether the mold ring is in the reference position. With this, the mold release ring can be restored to the reference position and used again in the imprinting machine table. According to this, the measuring jig provided by the present invention can be used to measure the horizontal height of the mold release component, so that the mold release component has an accurate calibration result.

Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

100‧‧‧ measuring fixture

110‧‧‧Measurement base

112‧‧‧ track

120‧‧‧Release module

122‧‧‧ From the mold base

122a, 122b‧‧‧Combination

124‧‧‧ Release ring

126‧‧‧ Pusher

126a‧‧‧ inside

126b‧‧‧outside

130‧‧‧ Inflatable components

132‧‧‧ Inflatable switch

134‧‧‧ inflatable port

140‧‧‧Measuring component

142‧‧‧rotating ring

144‧‧‧Measurement piece

146‧‧‧ seat

148‧‧‧handle

FIG. 1 is a perspective view of a measurement jig according to an embodiment of the present invention. FIG. 2 is a partial exploded view of the measuring jig of FIG. 1.

Claims (10)

A measurement fixture includes: a measurement base; a mold release component disposed on the measurement base, wherein the mold release component includes a mold release ring and a plurality of pushing members, and the pushing members Corresponding to the mold release ring; an inflatable component disposed on the measurement base for inflating the mold release component so that the pushing members push the mold release ring to a reference position; and a measurement A component is disposed on the mold release component to measure whether the mold release ring is located at the reference position. The measuring jig as described in item 1 of the scope of the patent application, wherein the mold release ring has a ring shape, and the pushing members are arranged around the mold release ring. The measuring jig as described in item 1 of the scope of patent application, wherein the pushing members are arranged at equal intervals and are arranged around the mold release ring. The measuring jig as described in item 1 of the patent application scope, wherein the mold release assembly includes a mold release base, and the mold release ring and the pushing members are disposed on the mold release base. The measuring jig according to item 1 of the scope of patent application, wherein the inflatable component is inflated to the mold release component, so that the pushing members synchronously push the mold release ring to the reference position. The measuring jig according to item 1 of the scope of patent application, wherein the inflatable component includes an inflatable switch and an inflatable port, the inflatable switch is disposed on the measuring base and is electrically connected to the inflatable port, and the The inflation port is used to inflate the peripheries of the pushing members, so that the pushing members push the release ring to the reference position. The measurement jig according to item 1 of the scope of patent application, wherein the mold release module and the measurement module are detachably assembled on the measurement base, and the mold release module is disposed on the measurement base. Between the base and the measuring component. The measuring jig according to item 1 of the scope of patent application, wherein the measuring component includes a rotating ring and at least one measuring member, and the measuring member is disposed on the rotating ring, so that The parting ring is rotated to measure the horizontal heights of a plurality of parts of the parting ring. The measuring jig according to item 8 of the scope of application for a patent, wherein the number of the measuring pieces includes a plurality of the measuring pieces, and the rotating parts are arranged on the rotating ring at an equal interval. The measuring jig according to item 8 of the scope of patent application, wherein the measuring piece includes a dial indicator.