TW202007545A - Measuring fixture - Google Patents
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- TW202007545A TW202007545A TW107125571A TW107125571A TW202007545A TW 202007545 A TW202007545 A TW 202007545A TW 107125571 A TW107125571 A TW 107125571A TW 107125571 A TW107125571 A TW 107125571A TW 202007545 A TW202007545 A TW 202007545A
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Abstract
Description
本發明是關於一種治具,且特別是關於一種量測治具。The invention relates to a jig, and in particular to a measuring jig.
在奈米壓印製程中,通常使用金屬模具進行壓印。所述金屬模具包括基板以及設置於基板上的壓印層,而所述壓印層上具有壓印圖案,如此可透過金屬模具的壓制而將壓印圖案轉印至待壓印的工件上。由於工件的材質較薄,在壓印完成後,若操作者直接手動從金屬模具上分離工件,則可能導致工件產生破裂。因此,常見作法是藉由離模組件的輔助將壓印完的工件從金屬模具上分離。In the nano-imprinting process, metal molds are usually used for imprinting. The metal mold includes a substrate and an embossed layer provided on the substrate, and the embossed layer has an embossed pattern, so that the embossed pattern can be transferred to the workpiece to be embossed through the pressing of the metal mold. Because the material of the workpiece is thin, if the operator directly separates the workpiece from the metal mold after the imprinting is completed, the workpiece may be broken. Therefore, the common practice is to separate the stamped workpiece from the metal mold with the aid of the mold release assembly.
更進一步地說,離模組件包括離模環與多個推動件,離模環與推動件環繞於金屬模具與工件的周邊,但不干涉金屬模具與工件的壓印動作。待壓印完畢後,受到氣體推動的推動件進而推動離模環往工件的方向移動,使離模環進一步推動工件。如此,受到離模環推動的工件從周圍往中間逐漸地從金屬模具上分離。Furthermore, the mold release assembly includes a mold release ring and a plurality of pushers. The mold release ring and pushers surround the periphery of the metal mold and the workpiece, but do not interfere with the stamping action of the metal mold and the workpiece. After the imprinting is completed, the pushing member pushed by the gas pushes the mold release ring to move toward the workpiece, so that the mold release ring further pushes the workpiece. In this way, the workpiece pushed by the mold release ring is gradually separated from the metal mold from the surrounding to the middle.
由此可知,當需更換金屬模具或清洗金屬模具時,通常需要將離模組件也從壓印機台上拆卸。然而,拆卸離模組件的動作可能影響離模環的水平高度,而離模環的水平高度將影響工件從金屬模具上分離的結果。亦即,若離模環的水平高度不均,將使得受到離模環的推動而從周圍往中間逐漸地從金屬模具上分離的工件於其中一邊分離的較快,進而使工件容易產生破裂的情況。It can be seen that when the metal mold needs to be replaced or the metal mold is cleaned, it is usually necessary to disassemble the mold release assembly from the imprinting machine table. However, the action of removing the mold release assembly may affect the level of the mold release ring, and the level of the mold release ring will affect the separation of the workpiece from the metal mold. That is, if the horizontal height of the mold release ring is uneven, the workpiece that is gradually separated from the metal mold from the surrounding to the middle by the mold release ring will be separated faster on one side, thereby making the workpiece prone to cracking. Happening.
本發明提供一種量測治具,可用於量測離模組件的水平高度,使得離模組件具有精確的校準結果。The invention provides a measuring jig, which can be used to measure the horizontal height of a mold release component, so that the mold release component has an accurate calibration result.
本發明的量測治具包括一量測基座、一離模組件、一充氣組件以及一量測組件。離模組件設置於量測基座,其中離模組件包括一離模環與多個推動件,且推動件對應於離模環。充氣組件設置於量測基座上,用以充氣至離模組件,使得推動件將離模環推動至一基準位置。量測組件設置於離模組件上,用以量測離模環是否位於基準位置。The measuring jig of the present invention includes a measuring base, a mold release component, an inflatable component, and a measuring component. The mold release assembly is disposed on the measurement base, wherein the mold release assembly includes a mold release ring and a plurality of pushers, and the pushers correspond to the mold release ring. The inflatable component is arranged on the measuring base for inflating to the mold release component, so that the pushing member pushes the mold release ring to a reference position. The measurement component is arranged on the mold release component, and is used for measuring whether the mold release ring is located at the reference position.
在本發明的一實施例中,上述的推動件環繞地設置於離模環的周圍。In an embodiment of the invention, the above-mentioned pushing member is circumferentially arranged around the mold release ring.
在本發明的一實施例中,上述的推動件等間距地分散配置於離模環的周圍。In an embodiment of the present invention, the above-mentioned pushing members are distributed around the mold ring at equal intervals.
在本發明的一實施例中,上述的離模組件包括一離模座,離模環與推動件設置於離模座上。In an embodiment of the invention, the above mold release assembly includes a mold release base, and the mold release ring and the pushing member are disposed on the mold release base.
在本發明的一實施例中,上述的充氣組件充氣至離模組件,使得推動件同步將離模環推動至基準位置。In an embodiment of the present invention, the above-mentioned inflation assembly inflates the mold release assembly, so that the pushing member simultaneously pushes the mold release ring to the reference position.
在本發明的一實施例中,上述的充氣組件包括一充氣開關以及一充氣口。充氣開關設置於量測基座上並電性連接於充氣口,而充氣口用以充氣至推動件的周邊,以使得推動件將離模環推動至基準位置。In an embodiment of the invention, the above-mentioned inflation assembly includes an inflation switch and an inflation port. The inflation switch is disposed on the measurement base and electrically connected to the inflation port, and the inflation port is used to inflate to the periphery of the pushing member, so that the pushing member pushes the mold release ring to the reference position.
在本發明的一實施例中,上述的離模組件以及量測組件可拆卸地組裝於量測基座上,而離模組件設置於量測基座與量測組件之間。In an embodiment of the invention, the mold release assembly and the measurement assembly are detachably assembled on the measurement base, and the mold release assembly is disposed between the measurement base and the measurement assembly.
在本發明的一實施例中,上述的量測組件包括一旋轉環以及至少一量測件。量測件設置於旋轉環上,以藉由旋轉環相對於離模環旋轉而量測離模環的多個局部的水平高度。In an embodiment of the invention, the above measurement assembly includes a rotating ring and at least one measurement element. The measuring piece is arranged on the rotating ring to measure the partial horizontal heights of the mold release ring by rotating the rotary ring relative to the mold release ring.
在本發明的一實施例中,上述的量測件的數量包括多個,等間距地分散配置於旋轉環上。In an embodiment of the present invention, the number of the above-mentioned measuring elements includes a plurality of measuring elements, which are distributed on the rotating ring at equal intervals.
在本發明的一實施例中,上述的量測件包括千分表。In an embodiment of the invention, the above-mentioned measuring device includes a dial indicator.
基於上述,在本發明的量測治具中,離模組件設置於量測基座,充氣組件設置於量測基座上,且量測組件設置於離模組件上。如此,充氣組件充氣至離模組件,使得推動件將離模環推動至基準位置,而後量測組件量測離模環是否位於基準位置。據此,本發明提供的量測治具可用於量測離模組件的水平高度,使得離模組件具有精確的校準結果。Based on the above, in the measuring jig of the present invention, the mold release assembly is provided on the measurement base, the inflatable component is provided on the measurement base, and the measurement assembly is provided on the mold release assembly. In this way, the inflatable component is inflated to the mold release component, so that the pushing member pushes the mold release ring to the reference position, and then the measuring component measures whether the mold release ring is at the reference position. Accordingly, the measuring jig provided by the present invention can be used to measure the level of the mold release assembly, so that the mold release assembly has accurate calibration results.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the embodiments are specifically described below in conjunction with the accompanying drawings for detailed description as follows.
圖1是本發明的一實施例的量測治具的立體圖。圖2是圖1的量測治具的局部分解圖。請參考圖1與圖2,在本實施例中,量測治具100包括量測基座110、離模組件120、充氣組件130以及量測組件140。離模組件120設置於量測基座110。充氣組件130設置於量測基座110上,用以充氣至離模組件120。量測組件140設置於離模組件120上。如此,離模組件120能夠應用於奈米壓印製程中(如安裝至壓印機台(未繪示)上)而輔助工件(未繪示)從金屬模具(未繪示)上分離,並且在安裝至壓印機台之前或之後透過量測治具100量測離模組件120並進行校準。FIG. 1 is a perspective view of a measuring jig according to an embodiment of the invention. FIG. 2 is a partial exploded view of the measuring jig of FIG. 1. Please refer to FIGS. 1 and 2. In this embodiment, the
具體而言,離模組件120包括離模座122、離模環124與多個推動件126,其中離模環124與推動件126設置於離模座122上,且推動件126對應於離模環124。離模環124呈現圓環狀,推動件126環繞地設置於離模環124的周圍,特別是,推動件126等間距地分散配置於離模環124的周圍,且每一推動件126的內側126a對應於離模環124,而每一推動件126的外側126b對應於離模座122上的空氣通道(未繪示)。更進一步地說,圖2將離模座122拆解成兩組合部分122a與122b,以顯示出組裝於離模座122內的離模環124與多個推動件126,但離模組件120實際上能夠作為可組裝式的一個組件(即在離模組件120的使用過程中不需特別拆解其內部構件),進而直接組裝至壓印機台作為將工件從金屬模具上分離的輔助,或直接組裝至量測治具100以進行量測,且本發明並不限制離模座122的具體實施方式,其可為用於設置離模環124與推動件126的各種適用形狀,使其能夠作為可組裝式的一個組件進行使用。Specifically, the
再者,在離模組件120組裝至壓印機台的情況下,離模座122位於金屬模具的一側,使得離模環124與推動件126環繞於金屬模具與工件的周邊,但不干涉金屬模具與工件的壓印動作。藉此,組裝至壓印機台的金屬模具能夠對放置於夾具(chuck)上的工件進行壓印,而待壓印完畢後,透過壓印機台上的充氣組件(未繪示)提供氣體至離模組件120,使得每一推動件126的外側126b受到氣體推動而相對於離模座122移動,進而利用槓桿原理使每一推動件126的內側126a推動離模環124往工件的方向移動,使離模環124進一步推動工件。如此,受到離模環124推動的工件從周圍往中間逐漸地從金屬模具上分離。Furthermore, in the case where the
由於離模組件120作為可組裝式的一個組件組裝至壓印機台上,且離模座122位於金屬模具的一側,使得離模環124與推動件126環繞於金屬模具與工件的周邊,因此當需更換金屬模具或清洗金屬模具時,通常也需要將離模組件120從壓印機台上拆卸。然而,拆卸離模組件120的動作可能影響離模環124的水平高度,而離模環124的水平高度將影響工件從金屬模具上分離的結果。如此,在將離模組件120重新組裝至壓印機台上之前,通常會重新對離模組件120(特別是離模環124)進行水平高度的校準。即使對離模組件120進行校準,也需進一步量測其校準結果,以確認離模組件120的水平高度是否達到需求。因此,離模組件120便可進一步應用本實施例所述的量測治具100進行量測。Since the
在本實施例中,充氣組件130設置於量測基座110上,離模組件120以及量測組件140可拆卸地組裝於量測基座110上,而離模組件120設置於量測基座110與量測組件140之間。亦即,量測治具100如圖2所示包含三個部分,即量測基座110與設置於其上的充氣組件130、可拆卸地組裝於量測基座110上的離模組件120、以及可拆卸地組裝於量測基座110與離模組件120上的量測組件140。如此,在離模組件120從前述壓印機台拆下後,能夠作為可組裝式的一個組件直接設置於量測基座110上(例如是在量測基座110上設置一對軌道112供離模組件120以離模座122滑入,但本發明不限於此),且離模組件120進一步連接於充氣組件130。而後,量測組件140進一步設置於離模組件120上,使得離模組件120設置於量測基座110與量測組件140之間,據此量測離模組件120(特別是離模環124)的水平高度。In this embodiment, the
詳細而言,在本實施例中,充氣組件130包括充氣開關132以及充氣口134。充氣開關132設置於量測基座110上並電性連接於充氣口134,用以控制是否經由充氣口134進行充氣(即提供氣體)。在離模組件120設置於量測基座110上的情況下,充氣組件130的充氣口134對應於離模組件120,特別是對應於推動件126的周邊。如此,充氣組件130的充氣口134能夠用以充氣至推動件126的周邊,使得推動件126將離模環124推動至基準位置。In detail, in this embodiment, the
在本實施例中,所述基準位置是指將離模組件120組裝至壓印機台時離模環124對應於工件的周邊且位於單一水平高度的位置。在離模環124用於將工件從金屬模具上分離之後,離模環124位於操作位置,而能夠透過量測治具100重新調整至基準位置並進行量測校準。因此,在離模組件120設置於量測基座110的情況下,充氣組件130充氣至離模組件120,使得推動件126同步將離模環124推動至基準位置,進而使離模環124調整至單一水平高度。亦即,每一推動件126受到充氣組件130的氣體推動後的移動量相同,使得離模環124所移動的位置相同。然而,在離模環124的局部相對於其他局部處於不同水平高度的情況下,可藉由充氣組件130加強對應所述局部的氣體量,以調整所述局部的水平高度至與其他局部相同,上述實施方式可依據需求調整,本發明不以此為限制。In this embodiment, the reference position refers to a position where the
另外,在本實施例中,量測組件140包括旋轉環142、量測件144以及座體146,其中旋轉環142設置於座體146上,而量測件144設置於旋轉環142上。更進一步地說,本實施例採用三個量測件144,例如是千分表,而等間距地分散配置於旋轉環142上,但量測件144的數量、配置位置與種類可依據需求調整,本發明不以此為限制。如此,量測組件140作為可組裝式的一個組件直接以座體146設置於離模組件120上(所述座體146還可另設有把手148以便於量測組件140的組裝,但本發明不限於此),而後量測組件140能夠用以量測離模環124是否位於基準位置,例如使量測件144藉由旋轉環142相對於離模環124旋轉而依序量測離模環124的多個局部的水平高度。In addition, in the present embodiment, the measuring
具體而言,量測治具100的操作步驟如下。首先,將從壓印機台上拆下離模組件120設置於量測基座110上,此時的離模環124已用於將工件從金屬模具上分離而位於操作位置。接著,將離模組件120連接充氣組件130,並將量測組件140設置於離模組件120上。由於離模組件120的離模座122內原本即設有在壓印機台中用於使氣體通過來驅動推動件與離模環推動工件從金屬模具上分離的充氣通道(未繪示),故在量測治具100的操作過程中,充氣組件130的充氣口134也可連接於離模組件120中的前述充氣通道,進而對應於推動件126的周圍。在上述組件都已組裝完成的情況下,按壓充氣開關132而經由充氣口134對離模組件120進行充氣。藉此,推動件126藉由氣體的推動而進一步推動離模環124,使離模環124從操作位置回復至基準位置。Specifically, the operation procedure of the measuring
在離模環124回復至基準位置之後,藉由量測組件140上的量測件144首先量測離模環124上對應的局部的水平高度。在確認量測件144上的數值符合需求,即離模環124上對應於量測件144的局部的水平高度符合需求之後,移動旋轉環142,使得量測件144藉由旋轉環142而相對於離模環124旋轉,進而移動至對應於離模環124的下一個局部。此時,觀察量測件144是否產生數值變化,若有,則表示離模環124的此局部與前一局部位於不同水平高度,而需重新進行水平高度的調整,若否,則表示離模環124的此局部與前一局部都位於同一水平高度。如此持續移動旋轉環142,使得量測件144依序量測離模環124上的多個局部的水平高度,藉此得知離模環124的整體是否均位於同一水平高度,即得知離模環124是否精準地位於基準位置。After the
在離模環124的局部需重新進行水平高度的調整時,可例如再次執行前述藉由充氣組件130使推動件126推動離模環124的動作,而後再次執行前述藉由量測組件140量測離模環124的動作。此外,當確認完離模環124精準地位於基準位置之後,首先將量測組件140從離模組件120上拆下,而後將離模組件120從量測基座110上拆下。由於量測組件140與離模組件120都是各自作為可組裝式的一個組件進行使用,故量測組件140與離模組件120的組裝與拆卸變得容易。經由調整與校準後的離模組件120便可重新組裝至壓印機台,而再次用於壓印製程中輔助將壓印完的工件從金屬模具上分離。When the level of the
綜上所述,在本發明的量測治具中,離模組件設置於量測基座,充氣組件設置於量測基座上,且量測組件設置於離模組件上。其中,離模組件的離模環於壓印機台中用以將工件從金屬模具上分離而處於操作位置。如此,在離模組件安裝於量測基座並連接至充氣組件與量測組件的情況下,充氣組件充氣至離模組件,使得推動件將離模環推動至基準位置,而後量測組件量測離模環是否位於基準位置。藉此,離模環能夠重新恢復至基準位置,而再次應用於壓印機台中。據此,本發明提供的量測治具可用於量測離模組件的水平高度,使得離模組件具有精確的校準結果。In summary, in the measuring jig of the present invention, the mold release component is provided on the measurement base, the inflatable component is provided on the measurement base, and the measurement component is provided on the mold release component. Among them, the mold release ring of the mold release assembly is used in the imprinting machine to separate the workpiece from the metal mold to be in the operating position. In this way, when the mold release assembly is installed on the measurement base and connected to the inflation assembly and the measurement assembly, the inflation assembly inflates to the mold release assembly, so that the pusher pushes the mold release ring to the reference position, and then measures The component measures whether the mold release ring is at the reference position. In this way, the mold release ring can be restored to the reference position again and used again in the stamping press table. Accordingly, the measuring jig provided by the present invention can be used to measure the level of the mold release assembly, so that the mold release assembly has accurate calibration results.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to the scope defined in the appended patent application.
100‧‧‧量測治具110‧‧‧量測基座112‧‧‧軌道120‧‧‧離模組件122‧‧‧離模座122a、122b‧‧‧組合部分124‧‧‧離模環126‧‧‧推動件126a‧‧‧內側126b‧‧‧外側130‧‧‧充氣組件132‧‧‧充氣開關134‧‧‧充氣口140‧‧‧量測組件142‧‧‧旋轉環144‧‧‧量測件146‧‧‧座體148‧‧‧把手100‧‧‧Measuring
圖1是本發明的一實施例的量測治具的立體圖。 圖2是圖1的量測治具的局部分解圖。FIG. 1 is a perspective view of a measuring jig according to an embodiment of the invention. FIG. 2 is a partial exploded view of the measuring jig of FIG. 1.
100‧‧‧量測治具 100‧‧‧Measuring fixture
110‧‧‧量測基座 110‧‧‧Measurement base
112‧‧‧軌道 112‧‧‧ Orbit
120‧‧‧離模組件 120‧‧‧Release module
122‧‧‧離模座 122‧‧‧Release
122a、122b‧‧‧組合部分 122a, 122b‧‧‧Combined part
124‧‧‧離模環 124‧‧‧ Release ring
126‧‧‧推動件 126‧‧‧Pushing piece
130‧‧‧充氣組件 130‧‧‧Inflatable components
132‧‧‧充氣開關 132‧‧‧Inflatable switch
134‧‧‧充氣口 134‧‧‧ Inflatable port
140‧‧‧量測組件 140‧‧‧Measurement kit
142‧‧‧旋轉環 142‧‧‧rotating ring
144‧‧‧量測件 144‧‧‧Measurement
146‧‧‧座體 146‧‧‧Body
148‧‧‧把手 148‧‧‧handle
Claims (10)
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TW107125571A TWI666128B (en) | 2018-07-24 | 2018-07-24 | Measuring fixture |
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CN110823055A (en) * | 2018-08-13 | 2020-02-21 | 奇景光电股份有限公司 | Measuring jig |
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US8215946B2 (en) * | 2006-05-18 | 2012-07-10 | Molecular Imprints, Inc. | Imprint lithography system and method |
CN100590064C (en) * | 2008-02-26 | 2010-02-17 | 浙江大学 | Pneumatic micro-nano imprint demoulding structure |
TWM545243U (en) * | 2017-04-17 | 2017-07-11 | Univ Nat Formosa | Optical rotation axis multi-freedom degree error inspection device |
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