TW201816391A - Detecting equipment - Google Patents

Abstract

A detecting equipment includes a base, an annular fixture, a horizontal adjusting assembly, a supporting annular body, a first image capturing device and a second image capturing device. The annular fixture disposes on the base. The annular fixture is used for fix an object to be tested. The horizontal adjusting assembly includes a fixing base, a movable base and a horizontal adjusting element. The fixing base fixes below the annular fixture. The movable base lock with the fixing base by horizontal adjusting element. The supporting annular body fixes on the movable base. The supporting annular body is used for support the object to be tested. The first image capturing device and the second image capturing device respectively fix above the annular fixture and below the annular fixture. At least one horizontal adjusting element is able to rotate relative to the fixing base to adjust horizon of the movable base.

Description

Testing Equipment

The present invention relates to a detecting device, and more particularly to a detecting device for a dual detecting lens.

In a general semiconductor process, when a plurality of crystal grains are formed on the surface of the wafer, processes such as spot measurement, detection, and classification of the crystal grains are generally continued. Among them, the detection process mainly uses the detection lens to scan the die, and judges whether the die itself is defective according to the captured image.

Wafer inspection is divided into one-way detection and two-way detection according to requirements. The part of the unidirectional detection is to flatten the wafer on the carrying platform and capture the image of the upper surface of the wafer through the detecting lens located above the wafer. Since the entire surface of the wafer is supported by the carrying platform, the wafer is flat without affecting the quality of the inspection. The part of the two-way detection is to sandwich the outer edge of the wafer through the fixture, and to capture images of the upper and lower surfaces of the wafer through the detection lenses located on the upper and lower sides of the wafer. Since the outer edge of the wafer is only supported, the center is not supported, so the center of the wafer will be slightly concave, so that the wafer is no longer flat and will affect the quality of inspection. Therefore, how to avoid the unevenness of the wafer and affect the quality of the detection is one of the problems that the developer should solve.

The present invention provides a detecting device for solving the problem that the wafer is no longer flat and affects the quality of detection in the conventional two-way detection.

The detecting device disclosed in one embodiment of the present invention comprises a base, an annular fixture, a horizontal adjustment component, a support ring body, a first image capturing device and a second image capturing device. The ring fixture is movably disposed on the base. The ring fixture is used to fix a sample to be tested. The level adjusting component comprises a fixing seat, a movable seat and at least three horizontal adjusting members. The mount is fixed to the base and under the ring fixture. The movable seat is attached to the fixed seat through at least three horizontal adjustment members. The support ring is fixed to the movable seat. The support ring body is away from one side of the movable seat for supporting the object to be tested, and has a light transmission port. The first image capturing device is fixed above the annular fixture. The second image capturing device is fixed under the annular fixture. The second image capturing device faces the first image capturing device through the light transmitting port of the support ring body. Wherein at least one of the at least three horizontal adjustment members is rotatable relative to the fixed seat to adjust the level of the movable seat.

According to the detecting device of the above embodiment, the level of the movable seat and the supporting ring body are adjusted through the three horizontal adjusting members, and at least one horizontal adjusting member adjusts the positional relationship between the movable seat and the fixed seat through the locking manner, Adjust the level of the movable seat and the support ring with minimal components and minimal space.

The above description of the present invention and the following description of the embodiments are intended to illustrate and explain the principles of the invention, and to provide a further explanation of the scope of the invention.

Please refer to Figure 1 to Figure 5. 1 is a front elevational view of a detecting apparatus according to a first embodiment of the present invention. 2 is a perspective view of the horizontal adjustment assembly and the support ring of FIG. 1. Figure 3 is an exploded perspective view of Figure 2. Figure 4 is a top plan view of Figure 2. Figure 5 is a cross-sectional view taken along line 5-5 of Figure 4;

The detecting device 10 of the embodiment includes a base 100, a rotating table 200, an annular fixture 300, a horizontal adjusting component 400, a supporting ring body 500, a first image capturing device 600, and a second image. The device 700, an assembly ring body 800, a light source 850, two limiting plate members 910, and a plurality of coupling members 920 are taken.

The rotary table 200 is rotatably provided to the base 100. In addition, the rotary table 200 can be slidable by a linear drive device with respect to the base 100 in one or two dimensions.

The ring fixture 300 is fixed to the rotary table 200 such that the ring fixture 300 is movably disposed on the base 100. The ring fixture 300 is used to fix a sample to be tested, and the object to be tested is, for example, a wafer. Further, in the present embodiment, the annular jig 300 is fixed to the rotary table 200 by, for example, a jig (not shown), so that the annular jig 300 is easily fixed to the rotary table 200 or removed from the rotary table 200.

The level adjusting assembly 400 includes a fixing base 410, a movable seat 420 and three horizontal adjusting members 430a and 430b. The fixing base 410 is fixed to the base 100 and located under the annular fixture 300. The movable seat 420 is locked to the fixing base 410 through at least three horizontal adjusting members 430a and 430b.

In the present embodiment, the three horizontal adjustment members 430a, 430b include two first horizontal adjustment members 430a and one second horizontal adjustment member 430b. Each of the first horizontal adjustment members 430a includes a first fixing bolt 430a1 and an elastic member 430a2. The first fixing bolt 430 a1 passes through the movable seat 420 and is locked to the fixing base 410 . The elastic member 430a2 is, for example, a compression spring, and is interposed between the fixing base 410 and the movable seat 420. The second level adjusting member 430b includes a second fixing bolt 430b1, a first universal joint 430b2 and a second universal joint 430b3. The second fixing bolt 430b1 is disposed through the movable seat 420 and is locked to the fixing base 410. The first universal joint 430b2 is fixed to the second fixing bolt 430b1. The second universal joint 430b3 is fixed to the movable seat 420 and rotatably connected to the first universal joint 430b2.

In this embodiment, the two first level adjusting members 430a are located on the same side of the movable seat 420, and the second horizontal adjusting member 430b is located on the opposite side of the movable seat 420. The first fixing bolts 430a1 of the two first level adjusting members 430a are rotatable relative to the fixing base 410 to be turned or loosened. When the first fixing bolt 430a1 of the two first level adjusting members 430a is relatively loose, one side of the movable seat 420 is supported by the first universal joint 430b2 of the second horizontal adjusting member 430b, and the other side of the movable seat 420 It is supported by the elastic member 430a2 to raise the level. On the other hand, when the first fixing bolt 430a1 of the second horizontal adjusting member 430a is relatively tight, one side of the movable seat 420 is supported by the first universal joint 430b2 of the second horizontal adjusting member 430b, and the movable seat 420 is another. One side is pressed by the first fixing bolt 430a1 to lower the level. In this way, the horizontal inclination of the movable seat 420 can be adjusted through the tightness of the first fixing bolts 430a1 of the two first level adjusting members 430a.

It should be noted that the first level adjusting members 430a and 430b are not used to limit the present invention. In other embodiments, the horizontal tilting degree of the movable seat 420 can also be adjusted through other forms of horizontal adjusting members. Other forms of horizontal adjustment members are, for example, bolts and nuts that are screwed together. The bolts are passed through the movable seat and are locked to the fixed seat. The nut is pivoted to the movable seat and screwed to the bolt. In this way, when the user turns the nut, the level of the movable seat 420 can be adjusted.

In addition, in the present embodiment, the number of the horizontal adjustment members is three, but not limited thereto, and in other embodiments, it may be four or more.

The support ring 500 is fixed to the movable seat 420 through the assembly ring 800. In detail, the support ring body 500 includes a light collecting section 510 and a support section 520. The light collecting section 510 has a first side 511 and a second side 512 opposite to each other. The first side 511 of the light collecting section 510 is fixed to the movable seat 420 through the assembly ring body 800. The second side 512 of the light collecting section 510 is coupled to the support section 520, and the inner diameter of the first side 511 is larger than the inner diameter of the second side 512. For example, the light collecting section 510 of the embodiment has a hollow cone shape. A side of the support section 520 away from the light collecting section 510 surrounds a light transmitting opening 521, and the supporting section 520 is away from one side of the light collecting section 510 for supporting the object to be tested. In addition, the fixing base 410 of the embodiment can also be combined with the lifting adjustment mechanism to enable the supporting ring body 500 to be lifted and lowered relative to the base 100 to adjust the supporting force of the supporting ring body 500 to be tested.

In addition, the assembly ring body 800 has a mounting slope 810 on one side of the light collecting section 510. The light collecting section 510 covers the mounting slope 810 of the assembly ring body 800, and the light source 850 is stacked on the mounting slope 810. The light source 850 is used to emit a light, and the light is emitted toward the light transmission port 521.

The limiting plate member 910 has a first opening 911 and a second opening 912. The aperture of the second opening 912 is larger than the aperture of the first opening 911. One of the two coupling members 920 is disposed through the first opening 911 and is locked to the fixing base 410. The other of the two coupling members 920 is slidably located in the second opening 912 and is locked to the movable seat 420.

The first image capturing device 600 is fixed above the annular fixture 300. The second image capturing device 700 is fixed under the annular fixture 300 and aligned with the first image capturing device 600 through the light transmission port of the support ring.

In this embodiment, the first image capturing device 600 is concentric with the second image capturing device 700. In addition, the first image capturing device 600 can be further configured with a driving member to adjust the position of the first image capturing device 600 through the driving member, and ensure that the first image capturing device 600 is coaxial with the second image capturing device 700. heart. As a result, the detection quality of the detecting device 10 can be improved.

Please refer to Figure 3 and Figure 6. Figure 6 is a schematic view showing the use of the detecting device of Figure 1.

Actually, during the detection, the support section 520 of the support ring 500 supports the wafer 20 via the film 30 to prevent the support section 520 from directly contacting the wafer 20 and causing damage to the wafer 20. When the wafer 20 supported by the support section 520 of the support ring body 500 is not horizontal with respect to the first image capturing device 600 and the second image capturing device 700, the first fixing of the first horizontal adjusting member 430a can be transmitted. Adjustment of the bolt 430a1 adjusts the level of the support section 520 of the support ring 500. For example, if the horizontal height of the support section 520 of the support ring body 500 near the first horizontal adjustment member 430a is lower than the other side, the first horizontal adjustment member 430a can be rotated in the direction indicated by the arrow a. A fixing bolt 430a1. And the movable seat 420 is pushed by the elastic member 430a2 with the first universal joint 430b2 of the second horizontal adjusting member 430b as a fulcrum and rotated in the direction indicated by the arrow b, thereby adjusting the supporting ring body 500 through the movable seat 420. The level of the support section 520.

On the contrary, if the horizontal height of the support section 520 of the support ring body 500 near the first horizontal adjustment member 430a is higher than the other side, the first fixing of the first horizontal adjustment member 430a can be rotated in the direction indicated by the arrow c. Bolt 430a1. And the movable seat 420 is circulated by the first universal joint 430b2 of the second horizontal adjusting member 430b as a fulcrum by the pressing of the first fixing bolt 430a1, and is rotated in the direction indicated by the arrow d, thereby adjusting the support ring through the movable seat 420. The level of the support section 520 of the body 500.

In this embodiment, whether the horizontal adjustment is completed or not can be viewed through actual shooting. Moreover, after the horizontal adjustment of the support section 520 of the support ring body 500 is completed, each of the joint members 920 can be respectively locked to the fixed seat 410 and the movable seat 420 to fix the positional relationship between the fixed seat 410 and the movable seat 420.

In the above embodiment, the light collecting section 510 is formed as a hollow cone, but is not limited thereto. Please refer to Figure 7. Figure 7 is a schematic cross-sectional view of a support ring body in accordance with a second embodiment of the present invention. The shape of the light collecting section 510' of this embodiment is a hollow sphere. That is to say, the light collecting effect of the collecting section 510' is similar to that of the integrating sphere.

According to the detecting device of the above embodiment, the level of the movable seat and the supporting ring body are adjusted through the three horizontal adjusting members, and at least one horizontal adjusting member adjusts the positional relationship between the movable seat and the fixed seat through the locking manner, Adjust the level of the movable seat and the support ring with minimal components and minimal space.

While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The patent protection scope of the invention is subject to the definition of the scope of the patent application attached to the specification.

10‧‧‧Testing equipment

100‧‧‧Base

200‧‧‧Rotating table

300‧‧‧Round fixture

400‧‧‧Horizontal adjustment components

410‧‧‧ fixed seat

420‧‧‧ activity seat

430a‧‧‧First level adjustment

430a1‧‧‧First fixing bolt

430a2‧‧‧Flexible parts

430b‧‧‧Second level adjustment

430b1‧‧‧Second fixing bolt

430b2‧‧‧1st universal joint

430b3‧‧‧2nd universal joint

500‧‧‧Support ring

510‧‧‧Lighting section

511‧‧‧ first side

512‧‧‧ second side

520‧‧‧Support section

521‧‧‧Lighting mouth

600‧‧‧First image capture device

700‧‧‧Second image capture device

800‧‧‧Assembly ring

810‧‧‧Installed bevel

850‧‧‧Light source

910‧‧‧Limited plate

911‧‧‧ first opening

912‧‧‧Second opening

920‧‧‧Connected parts

1 is a front elevational view of a detecting apparatus according to a first embodiment of the present invention. 2 is a perspective view of the horizontal adjustment assembly and the support ring of FIG. 1. Figure 3 is an exploded perspective view of Figure 2. Figure 4 is a top plan view of Figure 2. Figure 5 is a cross-sectional view taken along line 5-5 of Figure 4; Figure 6 is a schematic view showing the use of the detecting device of Figure 1. Figure 7 is a schematic cross-sectional view of a support ring body in accordance with a second embodiment of the present invention.

Claims (10)

A detecting device comprising: a base; an annular jig movably disposed on the base, the annular jig for fixing a test object; a horizontal adjustment component comprising a fixed seat, a movable seat and At least three horizontal adjustment members, the fixing base is fixed to the base and located under the annular fixture, the movable seat is locked to the fixing seat through the at least three horizontal adjustment members; a support ring body is fixed to the activity a support ring body away from the side of the movable seat for supporting the object to be tested and having a light transmission port; a first image capturing device fixed on the annular fixture; and a second image The device is fixed under the annular fixture, and the second image capturing device passes through the transparent port of the support ring body toward the first image capturing device; wherein at least one of the at least three horizontal adjusting members is Rotating relative to the fixed seat to adjust the level of the movable seat. The detecting device of claim 1, wherein the at least three horizontal adjusting members comprise two first horizontal adjusting members and a second horizontal adjusting member, each of the first horizontal adjusting members comprising a first fixing bolt And an elastic member, the first fixing bolt passes through the movable seat and is locked to the fixed seat, the elastic member is sandwiched between the fixed seat and the movable seat, and the second horizontal adjusting member comprises a second fixing a bolt, a first universal joint and a second universal joint, the second fixing bolt passes through the movable seat and is locked to the fixed seat, and the first universal joint is fixed to the second fixing bolt, the first A unidirectional joint is fixed to the movable seat and rotatably connected to the first universal joint. The detecting device of claim 1, wherein the first image capturing device is concentric with the second image capturing device. The detecting device of claim 1, wherein the supporting ring body comprises a collecting section and a supporting section, the collecting section has a first side and a second side, and the collecting section is The first side is fixed to the movable seat, the second side of the light collecting section is connected to the supporting section, and an inner diameter of the first side is larger than an inner diameter of the second side. The detecting device of claim 4, further comprising an assembly ring body, wherein the first side of the light collecting segment is fixed to the movable seat through the assembly ring body. The detecting device of claim 5, further comprising at least one light source located in the supporting ring body, the light source emitting a light, and the light is emitted toward the light transmitting port. The detecting device of claim 6, wherein the assembly ring body has a mounting slope on a side of the light collecting section, the light collecting section covering the mounting slope of the assembly ring body, and The light source is stacked on the mounting slope. The detecting device of claim 1, further comprising a rotating table, the rotating table is rotatably disposed on the base, and the annular jig is fixed to the rotating table. The detecting device of claim 1, wherein the support ring body is movable up and down relative to the base. The detecting device of claim 1, further comprising a limiting plate member and a second coupling member, the limiting plate member having a first opening and a second opening, the aperture of the second opening One of the two coupling members is disposed in the first opening and is locked to the fixing seat, and the other of the two coupling members is slidably located in the second opening and is locked. At the event seat.