CN110760812A - Coating device and coating method for outer surface of hemispherical glass - Google Patents
Coating device and coating method for outer surface of hemispherical glass Download PDFInfo
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- CN110760812A CN110760812A CN201911214911.3A CN201911214911A CN110760812A CN 110760812 A CN110760812 A CN 110760812A CN 201911214911 A CN201911214911 A CN 201911214911A CN 110760812 A CN110760812 A CN 110760812A
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- 238000000576 coating method Methods 0.000 title claims abstract description 102
- 239000011521 glass Substances 0.000 title claims abstract description 89
- 239000011248 coating agent Substances 0.000 title claims abstract description 84
- 230000007246 mechanism Effects 0.000 claims abstract description 106
- 239000007888 film coating Substances 0.000 claims abstract description 64
- 238000009501 film coating Methods 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 41
- 230000008569 process Effects 0.000 claims abstract description 27
- 230000001105 regulatory effect Effects 0.000 claims description 13
- 230000001276 controlling effect Effects 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 12
- 239000010408 film Substances 0.000 description 10
- 230000001133 acceleration Effects 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 239000002923 metal particle Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000006750 UV protection Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
- C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention relates to a coating device and a coating method for the outer surface of hemispherical glass, wherein the device comprises: coating a film cavity; the film coating mechanism is arranged in the film coating cavity and is used for sequentially performing a film coating process on the plurality of circular rings; the adjustable fixing mechanism is arranged on the film coating cavity and can adjust the position of the film coating cavity according to the film coating position of the hemispherical glass; and the rotating mechanism is pivoted with the adjustable fixing mechanism, can be driven by the adjustable fixing mechanism to adjust the position of the rotating mechanism, is used for being connected with the hemispherical glass to drive the hemispherical glass to rotate during a film coating process, and controls the plurality of circular rings to sequentially face the film coating mechanism by rotating around the pivoting end of the rotating mechanism so as to sequentially perform the film coating process on the plurality of circular rings. The invention divides the hemispherical glass into a plurality of ring surfaces, and carries out the film coating process on the plurality of ring surfaces in sequence, thereby ensuring that the whole film coating process can be completed only by one cathode.
Description
Technical Field
The invention relates to a film coating device and a film coating method, in particular to a film coating device and a film coating method for the outer surface of hemispherical glass.
Background
With the increase of national economy, the market demands on the glass industry are increasing, and the demand on the glass forms is increasing, wherein the demand on the glass forms comprises the special demand on the semi-spherical glass.
Meanwhile, in order to improve the performance of the glass, the surface of the glass is coated by a magnetron sputtering process in the prior art, so that the glass has the characteristics of high glossiness, oxidation resistance, acid and alkali resistance, ultraviolet resistance and the like, and can be well protected.
In the process of implementing the invention, the inventor finds that the prior art has at least the following problems:
due to the particularity of the hemispherical glass, the outer surface of the whole glass is a spherical surface, and when magnetron sputtering coating is carried out, a cathode tool in a magnetron sputtering device in the prior art cannot meet the coating requirement, and a specially-made cathode tool is needed, so that the manufacturing cost is increased, and the film thickness cannot be ensured to be uniform and stable during coating.
Disclosure of Invention
In order to solve the technical problems in the prior art, the embodiment of the invention provides a coating device and a coating method for the outer surface of hemispherical glass. The specific technical scheme is as follows:
in a first aspect, a coating device for the outer surface of hemispherical glass is provided, which is used for dividing the hemispherical glass into a plurality of torus and sequentially performing a coating process, wherein the coating device for the outer surface of hemispherical glass comprises:
coating a film cavity;
the film coating mechanism is arranged in the film coating cavity and is used for sequentially performing a film coating process on the plurality of circular rings;
the adjustable fixing mechanism is arranged on the film coating cavity and can adjust the position of the film coating cavity according to the film coating position of the hemispherical glass; and
the rotating mechanism is pivoted with the adjustable fixing mechanism and can be driven by the adjustable fixing mechanism to adjust the position of the rotating mechanism, and the rotating mechanism is used for being connected with the hemispherical glass to drive the hemispherical glass to rotate during a film coating process, controlling the plurality of circular rings to sequentially face the film coating mechanism by rotating around the pivoting end of the rotating mechanism, and sequentially performing the film coating process on the plurality of circular rings.
In a first possible implementation manner of the first aspect, the coating chamber is a spherical structure.
In a second possible implementation manner of the first aspect, a slide way is further disposed in the coating cavity, the slide way is disposed along an inner wall of the coating cavity, the adjustable fixing mechanism is disposed on the slide way, and the position of the adjustable fixing mechanism is adjusted by sliding along the slide way.
With reference to the second possible implementation manner of the first aspect, in a third possible implementation manner of the first aspect, the adjustable fixing mechanism includes:
one end of the first adjustable fixing rod is connected with the slideway and can slide along the slideway; and
one end of the second adjustable fixed rod is fixedly connected with the other end of the first adjustable fixed rod, and the other end of the second adjustable fixed rod is pivoted with the rotating mechanism.
In a fourth possible implementation manner of the first aspect, the plating mechanism includes:
the cathode is arranged in the coating cavity; and
and the power supply is connected with the cathode and is used for electrifying the cathode when the coating process is carried out.
In a fifth possible implementation form of the first aspect, the rotation mechanism comprises:
one end of the speed-adjustable motor rotating rod is pivoted with the adjustable fixing mechanism, and the other end of the speed-adjustable motor rotating rod is used for being connected with the hemispherical glass during a film coating process; and
the speed regulating motor is connected with the rotating rod of the speed regulating motor, and the speed regulating motor can drive the hemispherical glass to rotate through the rotating rod of the speed regulating motor.
In a second aspect, a method for coating the outer surface of hemispherical glass is provided, which comprises the following steps:
(a) dividing the hemispherical glass into a plurality of circular rings, and installing the circular rings on a rotating mechanism;
(b) adjusting the position of the adjustable fixing mechanism to enable one of the circular ring surfaces to correspond to the position of the film coating mechanism;
(c) starting the rotating mechanism to drive the hemispherical glass to rotate at uniform speed, and enabling a torus to rotate at a fixed position above the film coating mechanism all the time;
(d) adjusting the rotating speed of the rotating mechanism, starting the film coating mechanism, and performing a film coating process on a torus; and
(e) and (d) repeating the steps (b) to (d), and sequentially performing a film coating process on the plurality of circular ring surfaces until the plurality of circular ring surfaces are completely coated.
In a first possible implementation of the second aspect, the plurality of torus has the same width.
In a second possible implementation manner of the second aspect, when the plurality of torus are sequentially subjected to the film coating process, the film coating cavity is in a vacuum state.
In a third possible implementation manner of the second aspect, when the plurality of circular rings are sequentially subjected to the film coating process, distances between the plurality of circular rings and the film coating mechanism are the same.
Compared with the prior art, the invention has the advantages that:
according to the invention, the hemispherical glass is divided into the plurality of circular rings, and the plurality of circular rings are sequentially subjected to the film coating process, so that the whole film coating process can be completed only by one cathode, the film coating method is simple, the problem that the film coating mode of the hemispherical glass in the prior art is complex is effectively solved, and the steps of the hemispherical glass film coating method are simplified; in the coating process, only one speed regulating motor is needed to complete the rotation process, and the coating cost is reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural view of an apparatus for coating an outer surface of hemispherical glass according to an embodiment of the present invention.
FIG. 2 is a flow chart illustrating the steps of a method for coating the outer surface of a hemispherical glass according to a second embodiment and a third embodiment of the present invention.
FIG. 3 is a schematic view of a hemispherical glass divided into a plurality of torus according to the second embodiment of the present invention.
FIG. 4 is a schematic view of a coating apparatus for coating an outer surface of a hemispherical glass according to three embodiments of the present invention.
FIG. 5 is a schematic structural view of a hemispherical glass outer surface coating apparatus according to three embodiments of the present invention when coating a B-ring surface.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
In an embodiment of the present invention, please refer to fig. 1, which shows a schematic structural diagram of a coating apparatus 1 for an outer surface of a hemispherical glass according to an embodiment of the present invention. Hemisphere glass surface coating device 1 is used for being divided into a plurality of anchor rings 21 with hemisphere glass 2, carries out coating process in proper order, and 2 outer surface coating device 1 of hemisphere glass include coating film cavity 3, coating film mechanism 4, adjustable fixed establishment 5 and rotary mechanism 6, wherein:
the coating chamber 3 is mainly used for providing a vacuum coating space for the coating process of the hemispherical glass 2, and there is no special requirement for the selection of the structure of the coating chamber 3 in this embodiment, and the coating chamber may be selected according to the routine choice of those skilled in the art, for example, it is a spherical structure.
The coating mechanism 4 is arranged in the coating cavity 3, and the coating mechanism 4 is used for sequentially performing a coating process on the plurality of circular rings 21. Referring to fig. 1 again, the coating mechanism 4 disclosed in this embodiment includes a cathode 41 and a power source (not shown), the cathode 41 is disposed in the coating cavity 3, and the length of the cathode 41 is preferably the same as the width L of the circular ring surface 21, but not limited thereto. The cathode 41 is typically internally provided with a permanent magnet or electromagnet, a magnetic field can penetrate the metal sputtering target on the surface of the cathode, and a power source is connected to the cathode 41 for energizing the cathode 41.
When a coating process is carried out, the coating cavity 3 is in a vacuum state, reactive gas is introduced into the coating cavity 3, the cathode 41 is electrified by the power supply, electrons are emitted from the surface of the anode under the action of an electric field, the energy of the electrons is rapidly increased under the acceleration of the electric field, the gas molecules in the space of the surface area of the cathode 41 are collided by high-energy electrons, the gas molecules are ionized, positively charged particles are collided to the surface of the cathode 41 at a high speed under the acceleration of the electric field, metal particles are knocked out, and meanwhile, a large amount of secondary electrons are generated due to the collision of the particles on the surface of a target, and the electrons become high-energy electrons under the acceleration of the electric field, so that the conductive. Among them, the metal particles which are discharged from the target surface by the positively charged particles are deposited on the torus 21 to form a thin film.
The adjustable fixing mechanism 5 is arranged on the film coating cavity 3, and the position of the adjustable fixing mechanism 5 can be adjusted according to the film coating position of the hemispherical glass 2. Referring to fig. 1 again, the coating chamber 3 disclosed in this embodiment is further provided with a slide 31, the slide 31 is disposed along an inner wall of the coating chamber 3, the adjustable fixing mechanism 5 is disposed on the slide 31, and the position of the adjustable fixing mechanism 5 is adjusted by sliding along the slide 31, but not limited thereto. The adjustable fixing mechanism 5 further disclosed in this embodiment includes a first adjustable fixing rod 51 and a second adjustable fixing rod 52, wherein one end of the first adjustable fixing rod 51 is connected to the slideway 31 and can slide along the slideway 31, one end of the second adjustable fixing rod 52 is fixedly connected to the other end of the first adjustable fixing rod 51, and the other end of the second adjustable fixing rod 52 is pivotally connected to the rotating mechanism 6, but not limited thereto.
The rotating mechanism 6 is pivoted with the adjustable fixing mechanism 5. Referring to fig. 1 again, the rotating mechanism 6 disclosed in this embodiment includes a speed-adjustable motor rotating rod 61 and a speed-adjustable motor (not shown in the figure), one end of the speed-adjustable motor rotating rod 61 is pivotally connected to the adjustable fixing mechanism 5, the other end of the speed-adjustable motor rotating rod 61 is used for being connected to the hemispherical glass 2 during a coating process, the speed-adjustable motor is connected to the speed-adjustable motor rotating rod 61, and the speed-adjustable motor can drive the hemispherical glass 2 to rotate through the speed-adjustable motor rotating rod 61, but not limited thereto.
The rotating mechanism 6 can be driven by the adjustable fixing mechanism 5 to adjust the position of the rotating mechanism, the rotating mechanism 6 is used for being connected with the hemispherical glass 2 to drive the hemispherical glass 2 to rotate during a film coating process, the rotating mechanism rotates around the pivoting end of the hemispherical glass to control the plurality of circular rings 21 to sequentially face the film coating mechanism 4, and the film coating mechanism 4 sequentially carries out the film coating process on the plurality of circular rings 21.
Referring to fig. 2, a flow chart of a method 7 for coating the outer surface of the hemispherical glass according to the second embodiment of the present invention is shown. The method 7 for coating the outer surface of the hemispherical glass comprises the following steps 701-705, wherein:
and step 701, mounting the hemispherical glass 2. The hemispherical glass 2 is divided into a plurality of circular ring surfaces 21 and attached to the rotating mechanism 6.
Specifically, please refer to fig. 3, which illustrates a schematic diagram of the hemispherical glass 2 divided into a plurality of circular rings 21 according to the second embodiment of the present invention. The hemispherical glass 2 is divided into a plurality of torus 21, for example, 2, 3 or more than 3, but not limited thereto. Preferably, the widths L of the plurality of torus 21 are the same, but not limited thereto. The hemispherical glass 2 is installed at the other end of the rotating rod 61 of the adjustable speed motor, so that it can be driven by the rotating rod 61 of the adjustable speed motor to rotate.
Specifically, the position of the adjustable fixing mechanism 5 in the coating cavity 3 is adjusted to drive the rotating mechanism 6 to move, so that the position of the hemispherical glass 2 is adjusted, and meanwhile, the rotating mechanism 6 is controlled to rotate around the pin joint end of the rotating mechanism to enable one annular surface 21 of the plurality of annular surfaces 21 to correspond to the position of the coating mechanism 4.
More specifically, the first adjustable fixing rod 51 is controlled to slide on the slideway 31 to drive the second adjustable fixing rod 52 to move, so as to drive the rotating mechanism 6 to move, the rotating mechanism 6 drives the hemispherical glass 2 to move, so as to adjust the position of the hemispherical glass 2, and meanwhile, the rotating mechanism 6 is controlled to rotate around the pivoting end thereof, so that one of the circular rings 21 corresponds to the position of the coating mechanism 4.
In step 703, the rotation mechanism 6 is started. And starting the rotating mechanism 6 to drive the hemispherical glass 2 to rotate at a uniform speed, and enabling the circular ring surface 21 to rotate at a fixed position above the coating mechanism 4 all the time.
Specifically, the speed regulating motor is started to drive the rotating rod 61 of the speed regulating motor to rotate, so that the hemispherical glass 2 is driven to rotate at the uniform speed, and one circular ring surface 21 is enabled to rotate at the fixed position above the film coating mechanism 4 all the time.
And step 704, coating. And adjusting the rotating speed of the rotating mechanism 6, starting the film coating mechanism 4, and performing a film coating process on one annular surface 21.
Specifically, the rotating speed of the rotating mechanism 6 is adjusted, the inside of the coating cavity 3 is vacuumized, the coating mechanism 4 is started, reactive gas is introduced into the vacuum chamber, the power supply energizes the cathode 41, electrons are emitted from the surface of the anode under the action of an electric field, the energy of the electrons is rapidly increased under the acceleration of the electric field, high-energy electrons collide with gas molecules in the space of the cathode surface area to ionize the gas molecules, positively charged particles impact the surface of the cathode 41 at high speed under the acceleration of the electric field to knock out metal particles, and meanwhile, because the particles collide with the surface of a target to generate a large amount of secondary electrons, the electrons become high-energy electrons under the acceleration of the electric field, so that the normal glow discharge is maintained. The metal particles, which are discharged from the target surface by the positively charged particles, are deposited on one of the circular ring surfaces 21 to form a thin film.
Specifically, the above steps 702 to 704 are repeated, the coating process is sequentially performed on the plurality of circular rings 21, and when the coating position is adjusted each time, the distances between the plurality of circular rings 21 and the coating mechanism 4 are the same, so that the thicknesses of the film layers on the plurality of circular rings 21 are the same, until all the plurality of circular rings 21 are coated.
Referring to fig. 2, a flow chart of a method 7 for coating an outer surface of a hemispherical glass according to three embodiments of the present invention is shown. This embodiment is a specific operation step of the hemispherical glass 2 coating method 7 in the above two embodiments. The method 7 for coating the outer surface of the hemispherical glass comprises the following steps 701-705, wherein:
and step 701, mounting the hemispherical glass 2. Referring to fig. 4, a schematic structural view of the hemispherical glass outer surface coating apparatus 1 according to three embodiments of the present invention is shown when coating a circular surface a. The hemispherical glass 2 is divided into two circular rings 21, namely an A circular ring and a B circular ring, the width of the A circular ring is the same as that of the B circular ring, and the hemispherical glass 2 is arranged at the other end of the rotating rod 61 of the speed-adjustable motor, so that the hemispherical glass can be driven by the rotating rod 61 of the speed-adjustable motor to rotate.
In step 703, the rotation mechanism 6 is started. The speed regulating motor is started to drive the rotating rod 61 of the speed regulating motor to rotate, so as to drive the hemispherical glass 2 to rotate at the uniform speed and enable the A-shaped ring surface to rotate at the fixed position above the cathode 41 all the time.
And step 704, coating. The rotating speed of the rotating mechanism 6 is adjusted, the coating cavity 3 is vacuumized, the coating mechanism 4 is started, reactive gas is introduced into the vacuum chamber, the power supply energizes the cathode 41, electrons are emitted from the surface of the anode under the action of an electric field, the energy of the electrons is rapidly increased under the acceleration of the electric field, high-energy electrons collide with gas molecules in the space of the cathode surface area, the gas molecules are ionized, positively charged particles impact the surface of the cathode 41 at high speed under the acceleration of the electric field, metal particles are knocked out, and meanwhile, a large amount of secondary electrons are generated due to the collision of the particles on the surface of a target, and the electrons become high-energy electrons under the acceleration of the electric field, so that the normal glow discharge is maintained. The metal particles, which are discharged from the target surface by the positively charged particles, are deposited on one of the circular ring surfaces 21 to form a thin film.
The foregoing description shows and describes several preferred embodiments of the invention, but as aforementioned, it is to be understood that the invention is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The utility model provides a hemisphere glass surface coating film device for divide into a plurality of ring surfaces with hemisphere glass, carry out coating film technology in proper order, its characterized in that hemisphere glass surface coating film device includes:
coating a film cavity;
the film coating mechanism is arranged in the film coating cavity and is used for sequentially performing a film coating process on the plurality of circular rings;
the adjustable fixing mechanism is arranged on the film coating cavity and can adjust the position of the film coating mechanism according to the film coating position of the hemispherical glass; and
the rotating mechanism is pivoted with the adjustable fixing mechanism and can be driven by the adjustable fixing mechanism to adjust the position of the rotating mechanism, and the rotating mechanism is used for being connected with the hemispherical glass to drive the hemispherical glass to rotate during a film coating process, controlling the plurality of circular rings to sequentially face the film coating mechanism by rotating around the pivoting end of the hemispherical glass, and sequentially performing the film coating process on the plurality of circular rings.
2. The device for coating the outer surface of the hemispherical glass as claimed in claim 1, wherein the coating chamber has a spherical structure.
3. The apparatus for coating an outer surface of hemispherical glass according to claim 1, wherein a slide is further disposed in the coating chamber, the slide is disposed along an inner wall of the coating chamber, the adjustable fixing mechanism is disposed on the slide, and the position of the adjustable fixing mechanism is adjusted by sliding along the slide.
4. The apparatus for coating an outer surface of hemispherical glass according to claim 3, wherein the adjustable fixing means comprises:
one end of the first adjustable fixing rod is connected with the slideway and can slide along the slideway; and
and one end of the second adjustable fixed rod is fixedly connected with the other end of the first adjustable fixed rod, and the other end of the second adjustable fixed rod is pivoted with the rotating mechanism.
5. The apparatus for coating an outer surface of hemispherical glass according to claim 1, wherein the coating mechanism comprises:
the cathode is arranged in the coating cavity; and
and the power supply is connected with the cathode and is used for electrifying the cathode when the coating process is carried out.
6. The device for coating the outer surface of the hemispherical glass according to claim 1, wherein the rotating mechanism comprises:
one end of the speed-adjustable motor rotating rod is pivoted with the adjustable fixing mechanism, and the other end of the speed-adjustable motor rotating rod is used for being connected with the hemispherical glass during a film coating process; and
the speed regulating motor is connected with the rotating rod of the speed regulating motor, and the speed regulating motor can drive the hemispherical glass to rotate through the rotating rod of the speed regulating motor.
7. The method for coating the outer surface of the hemispherical glass is characterized by comprising the following steps of:
(a) dividing the hemispherical glass into a plurality of circular rings, and installing the circular rings on a rotating mechanism;
(b) adjusting the position of the adjustable fixing mechanism to enable one of the plurality of circular rings to correspond to the position of the film coating mechanism;
(c) starting a rotating mechanism to drive the hemispherical glass to rotate at uniform speed and enable the torus to rotate at a fixed position above the film coating mechanism all the time;
(d) adjusting the rotating speed of the rotating mechanism, starting the film coating mechanism, and performing a film coating process on the torus; and
(e) and (d) repeating the steps (b) to (d), and sequentially performing a film coating process on the plurality of circular ring surfaces until the plurality of circular ring surfaces are completely coated.
8. The method of claim 7, wherein the plurality of torus have the same width.
9. The method of claim 7, wherein the coating process is performed on the plurality of torus in sequence, and the coating chamber is in a vacuum state.
10. The method of claim 7, wherein the distance between the plurality of circular rings and the coating mechanism is the same when the plurality of circular rings are sequentially coated.
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| CN201911214911.3A CN110760812B (en) | 2019-12-02 | 2019-12-02 | Hemispherical glass outer surface coating device and coating method |
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| CN201911214911.3A CN110760812B (en) | 2019-12-02 | 2019-12-02 | Hemispherical glass outer surface coating device and coating method |
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| CN110760812A true CN110760812A (en) | 2020-02-07 |
| CN110760812B CN110760812B (en) | 2024-05-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113564533A (en) * | 2021-07-20 | 2021-10-29 | 扬州大学 | Plastic ball external metal coating device and use method thereof |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0226851A (en) * | 1988-07-14 | 1990-01-29 | Nippon Electric Glass Co Ltd | Method and device for forming film over entire surface of spherical glass |
| RU2023743C1 (en) * | 1991-06-14 | 1994-11-30 | Акционерное общество открытого типа "АВИ.С" | Apparatus for vacuum deposition of coatings |
| JPH09249961A (en) * | 1996-03-15 | 1997-09-22 | Mitsubishi Electric Corp | Thin film forming device |
| JP2000109977A (en) * | 1998-10-02 | 2000-04-18 | Olympus Optical Co Ltd | Film forming device |
| CN101100740A (en) * | 2007-08-02 | 2008-01-09 | 哈尔滨工业大学 | Method for preparing magnetron sputtering hemisphere film |
| JP2008144244A (en) * | 2006-12-13 | 2008-06-26 | Tsukishima Kikai Co Ltd | Device for controlling film formation and film-forming apparatus |
| CN101216567A (en) * | 2008-01-09 | 2008-07-09 | 中国科学院上海光学精密机械研究所 | Inclined deposition coating device |
| US20110027987A1 (en) * | 2009-07-28 | 2011-02-03 | Nec Electronics Corporation | Method and apparatus for manufacturing semiconductor device |
| CN105671509A (en) * | 2016-03-31 | 2016-06-15 | 成都西沃克真空科技有限公司 | Spherical target cathode mechanism and sputter coating device |
| US20180030595A1 (en) * | 2015-02-13 | 2018-02-01 | Oerlikon Surface Solutions Ag, Pfaffikon | Fixture comprising magnetic means for holding rotary symmetric workpieces |
| CN108505013A (en) * | 2018-06-26 | 2018-09-07 | 光驰科技(上海)有限公司 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
| CN208346245U (en) * | 2018-06-14 | 2019-01-08 | 深圳市沃克力技术有限公司 | A kind of vacuum coating equipment of multistation |
| CN109576653A (en) * | 2018-12-27 | 2019-04-05 | 东莞市汇成真空科技有限公司 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
| CN109628904A (en) * | 2018-12-13 | 2019-04-16 | 上海航天控制技术研究所 | A kind of hemispherical reso nance gyroscope plated film spatial movement device |
| CN209412308U (en) * | 2019-01-16 | 2019-09-20 | 中国科学院宁波材料技术与工程研究所 | A kind of vacuum coater |
| CN209568140U (en) * | 2018-12-26 | 2019-11-01 | 镇江阿尔法特种镀膜科技有限公司 | A kind of coating apparatus of adjustable varied angle |
| CN211005603U (en) * | 2019-12-02 | 2020-07-14 | 江苏铁锚玻璃股份有限公司 | Coating device for outer surface of hemispherical glass |
-
2019
- 2019-12-02 CN CN201911214911.3A patent/CN110760812B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0226851A (en) * | 1988-07-14 | 1990-01-29 | Nippon Electric Glass Co Ltd | Method and device for forming film over entire surface of spherical glass |
| RU2023743C1 (en) * | 1991-06-14 | 1994-11-30 | Акционерное общество открытого типа "АВИ.С" | Apparatus for vacuum deposition of coatings |
| JPH09249961A (en) * | 1996-03-15 | 1997-09-22 | Mitsubishi Electric Corp | Thin film forming device |
| JP2000109977A (en) * | 1998-10-02 | 2000-04-18 | Olympus Optical Co Ltd | Film forming device |
| JP2008144244A (en) * | 2006-12-13 | 2008-06-26 | Tsukishima Kikai Co Ltd | Device for controlling film formation and film-forming apparatus |
| CN101100740A (en) * | 2007-08-02 | 2008-01-09 | 哈尔滨工业大学 | Method for preparing magnetron sputtering hemisphere film |
| CN101216567A (en) * | 2008-01-09 | 2008-07-09 | 中国科学院上海光学精密机械研究所 | Inclined deposition coating device |
| US20110027987A1 (en) * | 2009-07-28 | 2011-02-03 | Nec Electronics Corporation | Method and apparatus for manufacturing semiconductor device |
| US20180030595A1 (en) * | 2015-02-13 | 2018-02-01 | Oerlikon Surface Solutions Ag, Pfaffikon | Fixture comprising magnetic means for holding rotary symmetric workpieces |
| CN105671509A (en) * | 2016-03-31 | 2016-06-15 | 成都西沃克真空科技有限公司 | Spherical target cathode mechanism and sputter coating device |
| CN208346245U (en) * | 2018-06-14 | 2019-01-08 | 深圳市沃克力技术有限公司 | A kind of vacuum coating equipment of multistation |
| CN108505013A (en) * | 2018-06-26 | 2018-09-07 | 光驰科技(上海)有限公司 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
| CN109628904A (en) * | 2018-12-13 | 2019-04-16 | 上海航天控制技术研究所 | A kind of hemispherical reso nance gyroscope plated film spatial movement device |
| CN209568140U (en) * | 2018-12-26 | 2019-11-01 | 镇江阿尔法特种镀膜科技有限公司 | A kind of coating apparatus of adjustable varied angle |
| CN109576653A (en) * | 2018-12-27 | 2019-04-05 | 东莞市汇成真空科技有限公司 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
| CN209412308U (en) * | 2019-01-16 | 2019-09-20 | 中国科学院宁波材料技术与工程研究所 | A kind of vacuum coater |
| CN211005603U (en) * | 2019-12-02 | 2020-07-14 | 江苏铁锚玻璃股份有限公司 | Coating device for outer surface of hemispherical glass |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113564533A (en) * | 2021-07-20 | 2021-10-29 | 扬州大学 | Plastic ball external metal coating device and use method thereof |
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