CN108505013A - A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment - Google Patents
A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment Download PDFInfo
- Publication number
- CN108505013A CN108505013A CN201810668955.2A CN201810668955A CN108505013A CN 108505013 A CN108505013 A CN 108505013A CN 201810668955 A CN201810668955 A CN 201810668955A CN 108505013 A CN108505013 A CN 108505013A
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- Prior art keywords
- umbrella stand
- supporting rod
- angle
- adjustable
- driving device
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- 230000007246 mechanism Effects 0.000 title claims abstract description 30
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 14
- 238000006243 chemical reaction Methods 0.000 claims description 20
- 230000011218 segmentation Effects 0.000 abstract description 11
- 238000007747 plating Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000012769 bulk production Methods 0.000 abstract description 2
- 230000001737 promoting effect Effects 0.000 abstract description 2
- 230000000875 corresponding effect Effects 0.000 description 6
- 239000007888 film coating Substances 0.000 description 4
- 238000009501 film coating Methods 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to technical field of vacuum plating, especially a kind of umbrella stand mechanisms applied to adjustable-angle in vacuum coating equipment, it is characterised in that：The umbrella stand mechanism includes several supporting rods, and the workpiece plate for carrying workpiece is separately installed between the adjacent supporting rod；It constitutes and is hinged between the supporting rod and the driving device, the supporting rod can be rotated around its hinge joint between the driving device to adjust the angle of the workpiece plate.It is an advantage of the invention that：In same equipment realize different substrate, different technology conditions require high quality, bulk production requirement；It realizes the exchange between spherical surface umbrella stand and planetary mechanism, improves the using flexible of equipment；In the case where being changed without umbrella stand disk, realize that the variation of spherical surface umbrella stand segmentation number is enhanced production capacities under the premise of meeting substrate size requirement；It is simple and reasonable, it is convenient for disassembly and assembly, it is suitable for promoting.
Description
Technical field
It is especially a kind of applied to adjustable-angle in vacuum coating equipment the present invention relates to technical field of vacuum plating
Umbrella stand mechanism.
Background technology
Currently, in order to improve the film thickness homogeneity of workpiece to be coated, often selection passes through a plating in vacuum coating equipment
Film umbrella stand carries workpiece, which is provided centrally with center steering mechanism, plated under the driving of center steering mechanism
Film umbrella stand rotates about, to realize the uniform coated of each workpiece in umbrella stand mechanism.Since film-plating umbrella stand is revolving body, in order to carry
Its high structural stability when rotated, film-plating umbrella stand are generally overall structure, can not seperated dismounting it is very heavy, for not
With size and Product Process the condition requirement of workpiece to be coated, generally requires integrally to remove film-plating umbrella stand, then install
Another corresponding film-plating umbrella stand carries out plated film again, so undoubtedly increases plated film time, reduces production capacity, while also increasing
Production cost, a kind of product just need a kind of corresponding film-plating umbrella stand.Generally speaking, the adaptability pole of current film-plating umbrella stand
Difference cannot be satisfied the needs of increasing various coated products at all.
Invention content
The purpose of the present invention is according to above-mentioned the deficiencies in the prior art, providing, a kind of be applied to can in vacuum coating equipment
The umbrella stand mechanism for adjusting angle adjusts angle of the workpiece plate compared to coating source by being carried out to supporting rod by angle adjusts,
To realize different substrate, the high quality of different technology conditions requirement, bulk production in same equipment.
The object of the invention realization is completed by following technical scheme：
A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, the umbrella stand mechanism is driven by driving device revolves
Turn, it is characterised in that：The umbrella stand mechanism includes several supporting rods, is separately installed between the adjacent supporting rod for holding
Carry the workpiece plate of workpiece；It constitutes and is hinged between the supporting rod and the driving device, the supporting rod can be around itself and the drive
Hinge joint between dynamic device is rotated to adjust the angle of the workpiece plate.
The driving device is connected with umbrella stand disk, the supporting rod respectively with the driving device and the umbrella stand disk structure
At hinged；The corresponding ferry-boat block of post position is provided on the umbrella stand disk.
Being hinged between the supporting rod and the umbrella stand disk is to pass through, and arm is arranged on the umbrella stand disk, described to hang
There is slidable sliding block, one end of the sliding block and a connecting rod is hinged, the other end of the connecting rod and the branch on arm
Strut is hinged.
There is guide rail, the sliding block to be slidably matched with the guide rail on the arm, fixation is provided on the sliding block
Part, the fixing piece is for being fixed position of the sliding block on the guide rail；It is provided in the side of the arm
Adjustment part, the adjustment part is for being adjusted position of the sliding block on the guide rail.
The umbrella stand disk is adapted with plated film planetary mechanism.
The driving device is connected with a conversion block, and detachable company is constituted between the conversion block and the umbrella stand disk
Fixation is connect, one end of the supporting rod is hinged with the conversion block.
It is an advantage of the invention that：In same equipment realize different substrate, different technology conditions require high quality, batch
The requirement of amount property production；It realizes the exchange between spherical surface umbrella stand and planetary mechanism, improves the using flexible of equipment；It is being changed without
In the case of umbrella stand disk, realize that the variation of spherical surface umbrella stand segmentation number is enhanced production capacities under the premise of meeting substrate size requirement；
It is simple and reasonable, it is convenient for disassembly and assembly, it is suitable for promoting.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the vertical view of the present invention；
Fig. 3 is the front view of the present invention；
Fig. 4 is the reverse geometry schematic diagram of Fig. 1 of the present invention.
Specific implementation mode
Feature of present invention and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing, so as to
In the understanding of technical staff of the same trade：
As shown in Figs. 1-3, figure label 1-14 is expressed as：Center fixing piece 1, workpiece plate 3, supporting rod 4, connects umbrella stand disk 2
Extension bar 5, sliding block 6, arm 7, ferry-boat block 8, film-coating workpiece 9, conversion block 10, guide rail 11, adjustment screw 12, fixed screw 13, branch
Support muscle 14.
Embodiment：As shown in Figure 1, it is applied to the umbrella stand mechanism of adjustable-angle in vacuum coating equipment in the present embodiment,
It is by driving device（It is not shown in figure）Driving rotates, fixing piece 1 centered on the output end of driving device, and center fixing piece 1 is solid
It is scheduled on the center of umbrella stand mechanism, driving device can drive umbrella stand to rotate integrally by center fixing piece 1.
It is fixed as shown in Figure 1, center fixing piece 1 is installed with umbrella stand disk 2 by flange, umbrella stand disk 2 is used to support below
Structure.As shown in Fig. 2, umbrella stand mechanism includes four supporting rods 4, four supporting rods 4 are between the circumferencial direction of umbrella stand disk 2 is uniform
Every arrangement, circumferencial direction is divided into four parts, i.e., four segmentations.It is installed with workpiece between two adjacent supporting rods 4
Disk 3, workpiece plate 3 is for carrying film-coating workpiece 9.Workpiece plate 3 rotates under the drive of the drive, and workpiece is carried on to realize
The uniform coated of film-coating workpiece 9 on disk 3.
In conjunction with shown in Fig. 1, Fig. 3 and Fig. 4, conversion block 10, conversion block 10 and umbrella stand disk 2 are installed in the lower section of umbrella stand disk 2
Between constitute detachable be connected and fixed.Conversion block 10 with the one end of each supporting rod 4 for being connected.On conversion block 10
It, can be easily by conversion block 10 from umbrella according to the difference of 4 quantity of supporting rod equipped with connection position corresponding with the quantity of supporting rod 4
Another conversion block 10 corresponding with 4 quantity of supporting rod is removed and changed on frame disk 2, in the premise for being changed without umbrella stand disk 2
Under, realize the variation of umbrella stand segmentation number, and then improve the adaptability and switch speed of umbrella stand.
In order to make umbrella stand disk 2 cope with the variation that umbrella stand divides number, ferry-boat block 8 is provided on umbrella stand disk 2, ferry-boat block 8 is right
It should be in the installation site of several supporting rods 4.For shown in Fig. 1, the original state of umbrella stand disk 2 is six segmentations, circumferencial direction
Supporting rod can be fixedly mounted on every supporting rib 14 in the six roots of sensation supporting rib 14 being evenly arranged.But umbrella stand disk 2 is changed to four segmentations
When, two supporting rods among four supporting rods 4 can not be completed to be fixedly mounted by existing supporting rib 14, at this time this two
Installation ferry-boat block 8 coordinates simultaneously to realize that the installation of supporting rod 4 is fixed on 2 position of umbrella stand disk corresponding to root supporting rod 4
Conversion block 10 can realize the variation of umbrella stand segmentation number under the premise of being changed without umbrella stand disk 2.
For example, when using four supporting rods 4 shown in FIG. 1, i.e., when four segmentations, set that there are four be used on conversion block 10
The connection position being connect with four supporting rods 4, four supporting rods 4 can be connected to one by one in four connection positions of conversion block 10.When answering
When to different coated products, according to the needs of its technique and yield, umbrella stand is if desired switched to six segmentations, then will have four
The conversion block 10 of a connection position is removed from center fixing piece 1, and changing tool, there are six the conversion blocks of connection position, later in each connection
Difference connection support bar 4 at position, and the one-to-one correspondence of each supporting rod 4 is fixed on supporting rib 14, you can it is being changed without
Under the premise of umbrella stand disk 2, realize that umbrella stand is become the variation of six segmentations by four segmentations.
In conjunction with shown in Fig. 1, Fig. 3 and Fig. 4, one end of each supporting rod 4 is respectively hinge connection between conversion block 10.Respectively
The top of supporting rod 4 is separately provided for the regulating mechanism of adjustment 4 angle of supporting rod.Specifically, 4 top setting of supporting rod
There are connecting rod 5, one end of connecting rod 5 and the body of rod hinge connection of supporting rod 4.The other end of connecting rod 5 connects with 6 hinge of sliding block
It connects, sliding block 6 is arranged on arm 7 on set guide rail 11, and arm 7 is fixedly mounted on lower section or the ferry-boat block 8 of supporting rib 14
Lower section, the extending direction of the extending direction and supporting rod 4 of arm 7 is consistent.Sliding block 6 can be slided on the guide rail 11 of arm 7
Dynamic, with the sliding of sliding block 6, connecting rod 5 can drive supporting rod 4 to be rotated upwardly and downwardly around supporting rod 4 and the hinge joint of conversion block 10, from
And the angle adjustment of supporting rod 4 is completed, and then realize the angle of the workpiece plate 3 that is arranged between supporting rod 4 compared to coating source
Adjustment.So, different film-coating workpieces, the high quality that different technology conditions require, batch can be achieved in same equipment
Property production requirement；Meanwhile it under the premise of meeting substrate size requirement, enhancing production capacities.
As shown in figure 3, being provided with adjustment screw 12 in the side of arm 7, adjustment screw 12 can be threaded through on guide rail 11,
End face tightening is in a side surface of sliding block 6；It can be made to carry out inside pushing tow to sliding block 6 by tightening adjustment screw 12, to make
The slid inward on guide rail 11 of sliding block 6, to adjust the angle of supporting rod 4.As shown in figure 3, being provided with fixed screw on sliding block 6
13, the position of sliding block 6 can be fixed by fixed screw 13, to ensure entire umbrella stand mechanism in coating process
Stable structure avoids shaking.
The present embodiment is in the specific implementation：Umbrella stand disk 2 is adapted with plated film planetary mechanism, realizes spherical surface umbrella stand and planet machine
Exchange between structure improves the using flexible of equipment, widens its use scope.
Although above example elaborates the design of the object of the invention and embodiment with reference to attached drawing, this
Field those of ordinary skill will recognize, still can be right in the case where no disengaging claim limits the precondition of range
The present invention makes various modifications and variations, therefore does not repeat one by one herein.
Claims (6)
1. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, the umbrella stand mechanism is driven by driving device
Rotation, it is characterised in that：The umbrella stand mechanism includes several supporting rods, is separately installed with and is used between the adjacent supporting rod
Carry the workpiece plate of workpiece；Constituted between the supporting rod and the driving device it is hinged, the supporting rod can around its with it is described
Hinge joint between driving device is rotated to adjust the angle of the workpiece plate.
2. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 1, feature
It is：The driving device is connected with umbrella stand disk, and the supporting rod is constituted with the driving device and the umbrella stand disk respectively
It is hinged；The corresponding ferry-boat block of post position is provided on the umbrella stand disk.
3. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature
It is：Being hinged between the supporting rod and the umbrella stand disk is to pass through, and is arranged arm on the umbrella stand disk, on the arm
With slidable sliding block, one end of the sliding block and a connecting rod is hinged, the other end of the connecting rod and the supporting rod
It is hinged.
4. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 3, feature
It is：There is guide rail, the sliding block to be slidably matched with the guide rail on the arm, fixing piece is provided on the sliding block,
The fixing piece is for being fixed position of the sliding block on the guide rail；The side of the arm is provided with adjustment
Part, the adjustment part is for being adjusted position of the sliding block on the guide rail.
5. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature
It is：The umbrella stand disk is adapted with plated film planetary mechanism.
6. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature
It is：The driving device is connected with a conversion block, and detachable connection is constituted between the conversion block and the umbrella stand disk
Fixed, one end of the supporting rod is hinged with the conversion block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810668955.2A CN108505013B (en) | 2018-06-26 | 2018-06-26 | Angle-adjustable umbrella stand mechanism applied to vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810668955.2A CN108505013B (en) | 2018-06-26 | 2018-06-26 | Angle-adjustable umbrella stand mechanism applied to vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108505013A true CN108505013A (en) | 2018-09-07 |
| CN108505013B CN108505013B (en) | 2024-08-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810668955.2A Active CN108505013B (en) | 2018-06-26 | 2018-06-26 | Angle-adjustable umbrella stand mechanism applied to vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108505013B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110760812A (en) * | 2019-12-02 | 2020-02-07 | 江苏铁锚玻璃股份有限公司 | Coating device and coating method for outer surface of hemispherical glass |
| CN110923631A (en) * | 2019-10-31 | 2020-03-27 | 维达力实业（赤壁）有限公司 | Film coating jig, gradient color film coating method, decorative cover plate and preparation method thereof |
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| CN101597747A (en) * | 2008-06-05 | 2009-12-09 | 鸿富锦精密工业（深圳）有限公司 | Optical coating device |
| CN102234781A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Coating umbrella stand |
| CN104004996A (en) * | 2014-04-15 | 2014-08-27 | 京浜光学制品（常熟）有限公司 | Evaporation device for low temperature AF film coating |
| CN205893382U (en) * | 2016-08-03 | 2017-01-18 | 光驰科技(上海)有限公司 | Modular coating film work piece umbrella stand |
| CN108193188A (en) * | 2018-02-08 | 2018-06-22 | 丹阳市鼎新机械设备有限公司 | A kind of glasses lens plated machine umbrella stand turntable |
| CN208562509U (en) * | 2018-06-26 | 2019-03-01 | 光驰科技(上海)有限公司 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
-
2018
- 2018-06-26 CN CN201810668955.2A patent/CN108505013B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060196423A1 (en) * | 2005-03-02 | 2006-09-07 | Asia Optical Co., Inc. | Gradually changed film coating device and tool for using in the coating device |
| CN101597747A (en) * | 2008-06-05 | 2009-12-09 | 鸿富锦精密工业（深圳）有限公司 | Optical coating device |
| CN102234781A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Coating umbrella stand |
| CN104004996A (en) * | 2014-04-15 | 2014-08-27 | 京浜光学制品（常熟）有限公司 | Evaporation device for low temperature AF film coating |
| CN205893382U (en) * | 2016-08-03 | 2017-01-18 | 光驰科技(上海)有限公司 | Modular coating film work piece umbrella stand |
| CN108193188A (en) * | 2018-02-08 | 2018-06-22 | 丹阳市鼎新机械设备有限公司 | A kind of glasses lens plated machine umbrella stand turntable |
| CN208562509U (en) * | 2018-06-26 | 2019-03-01 | 光驰科技(上海)有限公司 | A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923631A (en) * | 2019-10-31 | 2020-03-27 | 维达力实业（赤壁）有限公司 | Film coating jig, gradient color film coating method, decorative cover plate and preparation method thereof |
| CN110760812A (en) * | 2019-12-02 | 2020-02-07 | 江苏铁锚玻璃股份有限公司 | Coating device and coating method for outer surface of hemispherical glass |
| CN110760812B (en) * | 2019-12-02 | 2024-05-28 | 江苏铁锚玻璃股份有限公司 | Hemispherical glass outer surface coating device and coating method |
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| Publication number | Publication date |
|---|---|
| CN108505013B (en) | 2024-08-20 |
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