CN108505013A - A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment - Google Patents

A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment Download PDF

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Publication number
CN108505013A
CN108505013A CN201810668955.2A CN201810668955A CN108505013A CN 108505013 A CN108505013 A CN 108505013A CN 201810668955 A CN201810668955 A CN 201810668955A CN 108505013 A CN108505013 A CN 108505013A
Authority
CN
China
Prior art keywords
umbrella stand
supporting rod
angle
adjustable
driving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810668955.2A
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Chinese (zh)
Inventor
龙汝磊
范滨
裴蓓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optorun Shanghai Co Ltd
Original Assignee
Optorun Shanghai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optorun Shanghai Co Ltd filed Critical Optorun Shanghai Co Ltd
Priority to CN201810668955.2A priority Critical patent/CN108505013A/en
Publication of CN108505013A publication Critical patent/CN108505013A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

Abstract

The present invention relates to technical field of vacuum plating, especially a kind of umbrella stand mechanisms applied to adjustable-angle in vacuum coating equipment, it is characterised in that:The umbrella stand mechanism includes several supporting rods, and the workpiece plate for carrying workpiece is separately installed between the adjacent supporting rod;It constitutes and is hinged between the supporting rod and the driving device, the supporting rod can be rotated around its hinge joint between the driving device to adjust the angle of the workpiece plate.It is an advantage of the invention that:In same equipment realize different substrate, different technology conditions require high quality, bulk production requirement;It realizes the exchange between spherical surface umbrella stand and planetary mechanism, improves the using flexible of equipment;In the case where being changed without umbrella stand disk, realize that the variation of spherical surface umbrella stand segmentation number is enhanced production capacities under the premise of meeting substrate size requirement;It is simple and reasonable, it is convenient for disassembly and assembly, it is suitable for promoting.

Description

A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment
Technical field
It is especially a kind of applied to adjustable-angle in vacuum coating equipment the present invention relates to technical field of vacuum plating Umbrella stand mechanism.
Background technology
Currently, in order to improve the film thickness homogeneity of workpiece to be coated, often selection passes through a plating in vacuum coating equipment Film umbrella stand carries workpiece, which is provided centrally with center steering mechanism, plated under the driving of center steering mechanism Film umbrella stand rotates about, to realize the uniform coated of each workpiece in umbrella stand mechanism.Since film-plating umbrella stand is revolving body, in order to carry Its high structural stability when rotated, film-plating umbrella stand are generally overall structure, can not seperated dismounting it is very heavy, for not With size and Product Process the condition requirement of workpiece to be coated, generally requires integrally to remove film-plating umbrella stand, then install Another corresponding film-plating umbrella stand carries out plated film again, so undoubtedly increases plated film time, reduces production capacity, while also increasing Production cost, a kind of product just need a kind of corresponding film-plating umbrella stand.Generally speaking, the adaptability pole of current film-plating umbrella stand Difference cannot be satisfied the needs of increasing various coated products at all.
Invention content
The purpose of the present invention is according to above-mentioned the deficiencies in the prior art, providing, a kind of be applied to can in vacuum coating equipment The umbrella stand mechanism for adjusting angle adjusts angle of the workpiece plate compared to coating source by being carried out to supporting rod by angle adjusts, To realize different substrate, the high quality of different technology conditions requirement, bulk production in same equipment.
The object of the invention realization is completed by following technical scheme:
A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, the umbrella stand mechanism is driven by driving device revolves Turn, it is characterised in that:The umbrella stand mechanism includes several supporting rods, is separately installed between the adjacent supporting rod for holding Carry the workpiece plate of workpiece;It constitutes and is hinged between the supporting rod and the driving device, the supporting rod can be around itself and the drive Hinge joint between dynamic device is rotated to adjust the angle of the workpiece plate.
The driving device is connected with umbrella stand disk, the supporting rod respectively with the driving device and the umbrella stand disk structure At hinged;The corresponding ferry-boat block of post position is provided on the umbrella stand disk.
Being hinged between the supporting rod and the umbrella stand disk is to pass through, and arm is arranged on the umbrella stand disk, described to hang There is slidable sliding block, one end of the sliding block and a connecting rod is hinged, the other end of the connecting rod and the branch on arm Strut is hinged.
There is guide rail, the sliding block to be slidably matched with the guide rail on the arm, fixation is provided on the sliding block Part, the fixing piece is for being fixed position of the sliding block on the guide rail;It is provided in the side of the arm Adjustment part, the adjustment part is for being adjusted position of the sliding block on the guide rail.
The umbrella stand disk is adapted with plated film planetary mechanism.
The driving device is connected with a conversion block, and detachable company is constituted between the conversion block and the umbrella stand disk Fixation is connect, one end of the supporting rod is hinged with the conversion block.
It is an advantage of the invention that:In same equipment realize different substrate, different technology conditions require high quality, batch The requirement of amount property production;It realizes the exchange between spherical surface umbrella stand and planetary mechanism, improves the using flexible of equipment;It is being changed without In the case of umbrella stand disk, realize that the variation of spherical surface umbrella stand segmentation number is enhanced production capacities under the premise of meeting substrate size requirement; It is simple and reasonable, it is convenient for disassembly and assembly, it is suitable for promoting.
Description of the drawings
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the vertical view of the present invention;
Fig. 3 is the front view of the present invention;
Fig. 4 is the reverse geometry schematic diagram of Fig. 1 of the present invention.
Specific implementation mode
Feature of present invention and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing, so as to In the understanding of technical staff of the same trade:
As shown in Figs. 1-3, figure label 1-14 is expressed as:Center fixing piece 1, workpiece plate 3, supporting rod 4, connects umbrella stand disk 2 Extension bar 5, sliding block 6, arm 7, ferry-boat block 8, film-coating workpiece 9, conversion block 10, guide rail 11, adjustment screw 12, fixed screw 13, branch Support muscle 14.
Embodiment:As shown in Figure 1, it is applied to the umbrella stand mechanism of adjustable-angle in vacuum coating equipment in the present embodiment, It is by driving device(It is not shown in figure)Driving rotates, fixing piece 1 centered on the output end of driving device, and center fixing piece 1 is solid It is scheduled on the center of umbrella stand mechanism, driving device can drive umbrella stand to rotate integrally by center fixing piece 1.
It is fixed as shown in Figure 1, center fixing piece 1 is installed with umbrella stand disk 2 by flange, umbrella stand disk 2 is used to support below Structure.As shown in Fig. 2, umbrella stand mechanism includes four supporting rods 4, four supporting rods 4 are between the circumferencial direction of umbrella stand disk 2 is uniform Every arrangement, circumferencial direction is divided into four parts, i.e., four segmentations.It is installed with workpiece between two adjacent supporting rods 4 Disk 3, workpiece plate 3 is for carrying film-coating workpiece 9.Workpiece plate 3 rotates under the drive of the drive, and workpiece is carried on to realize The uniform coated of film-coating workpiece 9 on disk 3.
In conjunction with shown in Fig. 1, Fig. 3 and Fig. 4, conversion block 10, conversion block 10 and umbrella stand disk 2 are installed in the lower section of umbrella stand disk 2 Between constitute detachable be connected and fixed.Conversion block 10 with the one end of each supporting rod 4 for being connected.On conversion block 10 It, can be easily by conversion block 10 from umbrella according to the difference of 4 quantity of supporting rod equipped with connection position corresponding with the quantity of supporting rod 4 Another conversion block 10 corresponding with 4 quantity of supporting rod is removed and changed on frame disk 2, in the premise for being changed without umbrella stand disk 2 Under, realize the variation of umbrella stand segmentation number, and then improve the adaptability and switch speed of umbrella stand.
In order to make umbrella stand disk 2 cope with the variation that umbrella stand divides number, ferry-boat block 8 is provided on umbrella stand disk 2, ferry-boat block 8 is right It should be in the installation site of several supporting rods 4.For shown in Fig. 1, the original state of umbrella stand disk 2 is six segmentations, circumferencial direction Supporting rod can be fixedly mounted on every supporting rib 14 in the six roots of sensation supporting rib 14 being evenly arranged.But umbrella stand disk 2 is changed to four segmentations When, two supporting rods among four supporting rods 4 can not be completed to be fixedly mounted by existing supporting rib 14, at this time this two Installation ferry-boat block 8 coordinates simultaneously to realize that the installation of supporting rod 4 is fixed on 2 position of umbrella stand disk corresponding to root supporting rod 4 Conversion block 10 can realize the variation of umbrella stand segmentation number under the premise of being changed without umbrella stand disk 2.
For example, when using four supporting rods 4 shown in FIG. 1, i.e., when four segmentations, set that there are four be used on conversion block 10 The connection position being connect with four supporting rods 4, four supporting rods 4 can be connected to one by one in four connection positions of conversion block 10.When answering When to different coated products, according to the needs of its technique and yield, umbrella stand is if desired switched to six segmentations, then will have four The conversion block 10 of a connection position is removed from center fixing piece 1, and changing tool, there are six the conversion blocks of connection position, later in each connection Difference connection support bar 4 at position, and the one-to-one correspondence of each supporting rod 4 is fixed on supporting rib 14, you can it is being changed without Under the premise of umbrella stand disk 2, realize that umbrella stand is become the variation of six segmentations by four segmentations.
In conjunction with shown in Fig. 1, Fig. 3 and Fig. 4, one end of each supporting rod 4 is respectively hinge connection between conversion block 10.Respectively The top of supporting rod 4 is separately provided for the regulating mechanism of adjustment 4 angle of supporting rod.Specifically, 4 top setting of supporting rod There are connecting rod 5, one end of connecting rod 5 and the body of rod hinge connection of supporting rod 4.The other end of connecting rod 5 connects with 6 hinge of sliding block It connects, sliding block 6 is arranged on arm 7 on set guide rail 11, and arm 7 is fixedly mounted on lower section or the ferry-boat block 8 of supporting rib 14 Lower section, the extending direction of the extending direction and supporting rod 4 of arm 7 is consistent.Sliding block 6 can be slided on the guide rail 11 of arm 7 Dynamic, with the sliding of sliding block 6, connecting rod 5 can drive supporting rod 4 to be rotated upwardly and downwardly around supporting rod 4 and the hinge joint of conversion block 10, from And the angle adjustment of supporting rod 4 is completed, and then realize the angle of the workpiece plate 3 that is arranged between supporting rod 4 compared to coating source Adjustment.So, different film-coating workpieces, the high quality that different technology conditions require, batch can be achieved in same equipment Property production requirement;Meanwhile it under the premise of meeting substrate size requirement, enhancing production capacities.
As shown in figure 3, being provided with adjustment screw 12 in the side of arm 7, adjustment screw 12 can be threaded through on guide rail 11, End face tightening is in a side surface of sliding block 6;It can be made to carry out inside pushing tow to sliding block 6 by tightening adjustment screw 12, to make The slid inward on guide rail 11 of sliding block 6, to adjust the angle of supporting rod 4.As shown in figure 3, being provided with fixed screw on sliding block 6 13, the position of sliding block 6 can be fixed by fixed screw 13, to ensure entire umbrella stand mechanism in coating process Stable structure avoids shaking.
The present embodiment is in the specific implementation:Umbrella stand disk 2 is adapted with plated film planetary mechanism, realizes spherical surface umbrella stand and planet machine Exchange between structure improves the using flexible of equipment, widens its use scope.
Although above example elaborates the design of the object of the invention and embodiment with reference to attached drawing, this Field those of ordinary skill will recognize, still can be right in the case where no disengaging claim limits the precondition of range The present invention makes various modifications and variations, therefore does not repeat one by one herein.

Claims (6)

1. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment, the umbrella stand mechanism is driven by driving device Rotation, it is characterised in that:The umbrella stand mechanism includes several supporting rods, is separately installed with and is used between the adjacent supporting rod Carry the workpiece plate of workpiece;Constituted between the supporting rod and the driving device it is hinged, the supporting rod can around its with it is described Hinge joint between driving device is rotated to adjust the angle of the workpiece plate.
2. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 1, feature It is:The driving device is connected with umbrella stand disk, and the supporting rod is constituted with the driving device and the umbrella stand disk respectively It is hinged;The corresponding ferry-boat block of post position is provided on the umbrella stand disk.
3. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature It is:Being hinged between the supporting rod and the umbrella stand disk is to pass through, and is arranged arm on the umbrella stand disk, on the arm With slidable sliding block, one end of the sliding block and a connecting rod is hinged, the other end of the connecting rod and the supporting rod It is hinged.
4. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 3, feature It is:There is guide rail, the sliding block to be slidably matched with the guide rail on the arm, fixing piece is provided on the sliding block, The fixing piece is for being fixed position of the sliding block on the guide rail;The side of the arm is provided with adjustment Part, the adjustment part is for being adjusted position of the sliding block on the guide rail.
5. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature It is:The umbrella stand disk is adapted with plated film planetary mechanism.
6. a kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment according to claim 2, feature It is:The driving device is connected with a conversion block, and detachable connection is constituted between the conversion block and the umbrella stand disk Fixed, one end of the supporting rod is hinged with the conversion block.
CN201810668955.2A 2018-06-26 2018-06-26 A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment Pending CN108505013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810668955.2A CN108505013A (en) 2018-06-26 2018-06-26 A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810668955.2A CN108505013A (en) 2018-06-26 2018-06-26 A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment

Publications (1)

Publication Number Publication Date
CN108505013A true CN108505013A (en) 2018-09-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810668955.2A Pending CN108505013A (en) 2018-06-26 2018-06-26 A kind of umbrella stand mechanism applied to adjustable-angle in vacuum coating equipment

Country Status (1)

Country Link
CN (1) CN108505013A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110923631A (en) * 2019-10-31 2020-03-27 维达力实业(赤壁)有限公司 Film coating jig, gradient color film coating method, decorative cover plate and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110923631A (en) * 2019-10-31 2020-03-27 维达力实业(赤壁)有限公司 Film coating jig, gradient color film coating method, decorative cover plate and preparation method thereof

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