CN109576653A - Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film - Google Patents
Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film Download PDFInfo
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- CN109576653A CN109576653A CN201811619022.0A CN201811619022A CN109576653A CN 109576653 A CN109576653 A CN 109576653A CN 201811619022 A CN201811619022 A CN 201811619022A CN 109576653 A CN109576653 A CN 109576653A
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- workpiece
- support
- turntable
- insulating supporting
- disk
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses the workpiece rotating frames and coating machine for hemispherical shell workpiece plated film, workpiece rotating frame is mounted in coating machine, workpiece rotating frame includes main fixed disk, main turntable, secondary fixed disk, secondary turntable, first insulating supporting mechanism, second insulating supporting mechanism, transmission mechanism and cylinder component, main turntable rotating support is in the upper surface of main fixed disk, secondary turntable rotating support is in the upper surface of secondary fixed disk, first insulating supporting mechanism is mounted on main turntable, second insulating supporting mechanism is mounted on secondary turntable, transmission mechanism is connect with external power device, to drive main turntable and secondary turntable rotation simultaneously, the piston rod of cylinder component is connect with secondary fixed disk, secondary fixed disk lifting is driven by oil cylinder, to realize the first insulating supporting mechanism and the second insulating supporting mechanism alternately support workpiece, coating machine of the invention is equipped with top circular cathode electricity Arc source, following circular cathode arc source and side circular cathode arc source, to realize the comprehensive plated film of carry out to hemispherical shell workpiece.
Description
Technical field
The present invention relates to a kind of workpiece rotating frames for hemispherical shell workpiece plated film, and further relating to one kind includes the workpiece
Pivoted frame and the coating machine for being used to carry out hemispherical shell workpiece plated film.
Background technique
According to demand, it now needing to carry out hemispherical shell workpiece plated film, the shape of hemispherical shell workpiece is that heavy wall hemisphere is coronal,
And size is larger, for a kind of special workpiece, it is desirable that its inner surface, outer surface, half spherical crown port surface will implement from
Sub- plated film.
Over the years, this hemispherical shell workpiece did not all occur in ion film plating industry, because without ready-made suitable
Ion plating equipment and workpiece rotating frame can be used for reference, and the requirement by workpiece plated film position is needed, and design the ion of completely new target position layout
Coating machine and completely new workpiece rotating frame mechanism.
Summary of the invention
First technical problem to be solved by this invention, is just to provide a kind of workpiece for hemispherical shell workpiece plated film
Pivoted frame.
Second technical problem to be solved by this invention, be just to provide one kind include the workpiece rotating frame and for pair
The coating machine of hemispherical shell workpiece progress plated film.
The present invention realizes the comprehensive plated film of carry out to hemispherical shell workpiece.
Above-mentioned first technical problem is solved, the present invention adopts the following technical scheme that:
A kind of workpiece rotating frame for hemispherical shell workpiece plated film, it is characterized in that including:
Main fixed disk, level are fixedly mounted in the coating chamber of coating machine；
Main turntable, rotating support is in the upper surface of main fixed disk；
Secondary fixed disk is horizontally set on the top of main turntable, and liftable；
Secondary turntable, rotating support is in the upper surface of secondary fixed disk；
First insulating supporting mechanism, is mounted on main turntable, is used to support workpiece；
Second insulating supporting mechanism, is mounted on secondary turntable, be also used for support workpiece, and workpiece with the second insulating supporting
The Support Positions of mechanism contacts and workpiece are mutually staggered with the Support Positions of the first insulating supporting mechanism contacts；
Transmission mechanism is connect with external power device, to drive main turntable and secondary turntable rotation simultaneously；
Cylinder component, piston rod are connect with secondary fixed disk；Secondary fixed disk lifting is driven by oil cylinder, to realize that first is exhausted
Edge supporting mechanism and the second insulating supporting mechanism alternately support workpiece.
First insulating supporting mechanism includes at least three group of first insulating supporting component, the first insulating supporting component difference
It is mounted on main turntable, and is uniformly distributed by circumferencial direction, the first insulating supporting component includes first support bar and is used to support
First support plate of workpiece corresponds to first support bar on secondary turntable and is provided with support rod perforation, and first support bar activity passes through support
The lower end insulation of bar perforation, first support bar is fixed on main turntable, and the first support plate is fixed on the upper end of first support bar.
Second insulating supporting mechanism includes at least three group of second insulating supporting component, the second insulating supporting component difference
It is mounted on secondary turntable, and be uniformly distributed by circumferencial direction, the second insulating supporting component includes second support bar and is used to support
The lower end insulation of second support plate of workpiece, second support bar is fixed on secondary turntable, and the second support plate is fixed on the second support
The upper end of bar.
The workpiece rotating frame further includes bias disk, biasing spring, electrode tip and furnace dispatch from foreign news agency cartridge in furnace, and the insulation of bias disk is solid
It is scheduled on above secondary turntable, furnace dispatch from foreign news agency cartridge is insulated on the furnace wall of coating chamber, and the electric connecting terminal dew of furnace dispatch from foreign news agency cartridge
Electrode tip is insulated in coating chamber in the outside of coating chamber, furnace out, an electric connecting terminal of electrode tip and furnace dispatch from foreign news agency in furnace
Another electric connecting terminal of cartridge is electrically connected, and biasing spring is fixedly mounted in furnace on another electric connecting terminal of electrode tip, bias
Outwardly extending conducting rod is provided on the wherein one or both ends of spring, conducting rod is pressed in always by the elastic force of biasing spring
On bias disk, bias disk passes through conductor wire respectively and connect with the first insulating supporting mechanism and the second insulating supporting mechanism, by work
Part and external grid bias power supply are electrically connected.
The workpiece rotating frame further include at least two groups be used for so that the main turntable limit assembly of the more stable rotation of main turntable and
At least two groups are used for the secondary rotary disk limitation component so that the more stable rotation of secondary turntable.
The main turntable is annular plate-like, and the main turntable limit assembly includes main turntable limit support, vertical axis, transverse direction
Limit Bearing, the first lateral shaft and the first vertical spacing bearing, main turntable limit support are fixedly mounted in main fixed disk, vertically
Axis is mounted vertically in the middle part of main turntable limit support, and cross spacing bearing holder (housing, cover) is in vertical axis, and the side of cross spacing bearing
Face is resisted against on the inner ring surface of main turntable, and the first lateral shaft is transversely mounted on the top of main turntable limit support, the first vertical limit
Position bearing holder (housing, cover) is on the first lateral shaft, and the side of the first vertical spacing bearing is resisted against the upper surface of main turntable.
The pair rotary disk limitation component includes secondary rotary disk limitation support, the second lateral shaft and the second vertical spacing bearing, pair
Rotary disk limitation support is fixedly mounted in secondary fixed disk, and the second lateral shaft is transversely mounted on the top of secondary rotary disk limitation support, the
Two vertical spacing bearing holder (housing, cover)s are on the second lateral shaft, and the side of the second vertical spacing bearing is resisted against the upper surface of secondary turntable.
The lateral surface of the main turntable be the flank of tooth, the transmission mechanism include gear, transmission magnetic fluid seal with it is synchronous
Belt wheel, transmission magnetic fluid seal are fixedly mounted on the outer surface of the furnace wall of coating chamber, are driven the output shaft of magnetic fluid seal
It protrudes into coating chamber, gear is fixedly mounted on the output shaft of transmission magnetic fluid seal, and the flank engagement with main turntable, together
Step belt wheel is fixedly mounted on the input shaft of transmission magnetic fluid seal, for connecting with external power device.
The cylinder component includes oil cylinder, oil cylinder mounting rack, oil cylinder connector, extension rod, limit is padded and welding bellows,
Oil cylinder is fixedly mounted on the outer surface of the furnace wall of coating chamber by oil cylinder mounting rack, and extension rod passes through oil cylinder connector and oil cylinder
Piston rod connection, extension rod extends into coating chamber, and connect with secondary fixed disk, and to drive secondary fixed disk lifting, limit pad is lived
It is dynamic to cover on extension rod, and be located in coating chamber, when secondary fixed disk drops to minimum point, secondary fixed disk is resisted against limit pad
On, welding bellows is actively set on extension rod, and on a mounting board, one end is welded on oil cylinder company for one end welding of welding bellows
On connector.
Above-mentioned second technical problem is solved, the technical solution adopted in the present invention is as follows:
A kind of includes the workpiece rotating frame and the coating machine for carrying out plated film to hemispherical shell workpiece, characterized in that
The workpiece rotating frame is mounted on the lower furnace wall of the coating chamber of coating machine, and top circular cathode electric arc is equipped in coating chamber
Source, at least one following circular cathode arc source and multiple side circular cathode arc sources, top circular cathode arc source are corresponding
It is mounted on the top of workpiece, carries out plated film for the top surface to workpiece, following circular cathode arc source correspondence is mounted on workpiece
Lower section, for the inner surface and port surface progress plated film to workpiece, side circular cathode arc source distributing installation is in workpiece
Periphery carries out plated film for the side surface to workpiece.
Compared with prior art, the invention has the following advantages:
In coating process, workpiece rotating frame of the invention can pass through the first insulating supporting mechanism and the second insulating supporting mechanism
Alternately support workpiece, and Support Position mutually staggers, thus be avoided that Support Position can not plated film the case where.Plated film of the invention
Machine is by top circular cathode arc source, multiple following circular cathode arc sources and multiple side circular cathode arc sources to hemisphere
Shelly-shaped workpiece carries out plated film.As it can be seen that the present invention realizes the comprehensive plated film of carry out to hemispherical shell workpiece.
Detailed description of the invention
Fig. 1 is the schematic cross-sectional view of workpiece rotating frame of the invention；
Fig. 2 is one of the structural schematic diagram of the first insulating supporting mechanism of workpiece rotating frame of the invention；
Fig. 3 is the second structural representation of the first insulating supporting mechanism of workpiece rotating frame of the invention；
Fig. 4 is one of the structural schematic diagram of the second insulating supporting mechanism of workpiece rotating frame of the invention；
Fig. 5 is the second structural representation of the second insulating supporting mechanism of workpiece rotating frame of the invention；
Fig. 6 is the enlarged diagram in Fig. 3 at A；
Fig. 7 is one of section components assembling schematic diagram of workpiece rotating frame of the invention；
Fig. 8 is the scheme of installation of electrode tip in the biasing spring and furnace of workpiece rotating frame of the invention；
Fig. 9 is the scheme of installation of the biasing spring of workpiece rotating frame of the invention；
Figure 10 is the enlarged diagram in Fig. 7 at B；
Figure 11 is the two of the section components assembling schematic diagram of workpiece rotating frame of the invention；
Figure 12 is the scheme of installation of the secondary rotary disk limitation component of workpiece rotating frame of the invention；
Figure 13 is the scheme of installation of the main turntable limit assembly of workpiece rotating frame of the invention；
Figure 14 is the scheme of installation of the transmission mechanism of workpiece rotating frame of the invention.
Appended drawing reference meaning in figure:
1, hemispherical shell workpiece；2, the first insulating supporting mechanism；2-1, the first support plate；2-2, first support bar；2-3,
Steel ball seat protective cover；2-4, the first shielding case；3, the second insulating supporting mechanism；3-1, the second support plate；3-2, second support bar；
3-3, secondary shielding cover；5, secondary turntable；5-1, support rod perforation；6, electrode tip in furnace；6-1, bias fixed plate；It is electric in 6-2, furnace
Cartridge ceramic insulation set；Electrode tip fixing bolt in 6-3, furnace；7, main turntable；7-1, the flank of tooth；8, furnace dispatch from foreign news agency cartridge；Outside 8-1, furnace
Electrode tip ceramic insulation set；8-2, furnace dispatch from foreign news agency cartridge fixing bolt；8-3, furnace dispatch from foreign news agency cartridge sealing ring；9, transmission mechanism；9-1,
Synchronous pulley；9-2, transmission magnetic fluid seal；9-3, exterior seal ring；9-4, gear；10, main fixed disk；11, cylinder component；
11-1, oil cylinder；11-2, oil cylinder fixed plate；11-3, fixed column；11-4, welding bellows；11-5, mounting plate sealing ring；11-6,
Mounting plate；11-7, extension rod；11-8, limit pad；11-9, oil cylinder connector；12, bias disk；12-1, limiting slot；13, conductive
Line；14, outer protective cover；15, wolfram steel pearl；16, bias disk insulation fixation kit；16-1, threaded post protective cap；16-2, bias disk
Fixture nut；16-4, bias disk ceramic insulation set；16-5, bias disk ceramic insulation pad；16-6, felt pad protective cover；16-7,
Bias disk fixed column；16-8, threaded post；17, biasing spring；17-1, conducting rod；17-2, spring set screw；17-3, spring
Pressing ring；18, bolt insulation fixation kit；18-1, insulating fixing bolt；18-2, bolt ceramic insulation set；18-3, ceramic insulation
Gasket；19, connecting cylinder；20, steel ball seat；21, steel ball；22, washer；23, gland；24, red copper braid over braid；25, secondary fixed disk；
26, secondary rotary disk limitation component；26-1, secondary rotary disk limitation support；26-2, the second lateral shaft；26-3, the second vertical spacing bearing；
26-4, the second axle sleeve；27, main turntable limit assembly；27-1, main turntable limit support；27-2, cross spacing bearing；27-3, it erects
To axis；27-4, the first lateral shaft；27-5, the first vertical spacing bearing；27-6, the first axle sleeve；28, turntable protection cap；100, it plates
The furnace wall of film room.
Specific embodiment
The present invention is further described below with reference to embodiment.
It is as shown in Figure 1 a kind of workpiece rotating frame for hemispherical shell workpiece plated film comprising main fixed disk 10, main turntable
7, secondary fixed disk 25, secondary turntable 5, the first insulating supporting mechanism 2, the second insulating supporting mechanism 3, transmission mechanism 9 and cylinder component
11。
Main 10 level of fixed disk is fixedly mounted in the coating chamber of coating machine, and 7 rotating support of main turntable is in main fixed disk 10
The upper surface of, secondary fixed disk 25 is horizontally set on the top of main turntable, and secondary fixed disk 25 can in company with oil cylinder extension rod 11-7 movement
Lifting, secondary 5 rotating support of turntable is in the upper surface of secondary fixed disk 25, and secondary turntable 5 follows secondary fixed disk 25 to go up and down, the first insulating supporting
Mechanism 2 is mounted on main turntable 7, is used to support workpiece 1, and the first insulating supporting mechanism 2 follows main turntable 7 to rotate.Second insulation
Supporting mechanism 3 is mounted on secondary turntable 5, is also used for support workpiece 1, and the branch of workpiece contacted with the second insulating supporting mechanism 3
Support position and the Support Position of workpiece contacted with the first insulating supporting mechanism 2 mutually stagger, in this way in plated film, the first insulation
Supporting mechanism 2 and the second insulating supporting mechanism 3 can alternately support workpiece 1, and Support Position is different, also can be achieved with to support level
Set carry out plated film.Transmission mechanism 9 is connect with external power device, to drive main turntable 7 and secondary turntable 5 to rotate simultaneously.Oil cylinder
The piston rod of component 11 is connect with secondary fixed disk 25, drives secondary fixed disk 25 to go up and down by oil cylinder, to realize the first insulating supporting
Mechanism 2 and the second insulating supporting mechanism 3 alternately support workpiece 1.
As shown in Figure 1, hemispherical shell workpiece 1 is buckled to, and end face is supported on the first insulating supporting mechanism 2 or the when operation
It in two insulating supporting mechanisms 3, is gone up and down by secondary fixed disk 25, realizes the first insulating supporting mechanism 2 and the second insulating supporting mechanism 3
Plated film blind spot is not present in alternately support workpiece.
Tungsten is respectively set between secondary turntable 5 and secondary fixed disk 25 between main turntable 7 and main fixed disk 10 in the present embodiment
Steel ball 15, to realize main turntable rotating support in the upper surface of main fixed disk and secondary turntable rotating support in the upper surface of secondary fixed disk.
First insulating supporting mechanism 2 includes at least three group of first insulating supporting component, to realize the steady branch to workpiece
Support.The first insulating supporting mechanism of the present embodiment includes three group of first insulating supporting component, and three group of first insulating supporting component is pressed
Circumferencial direction is uniformly distributed with 120 degree of angles.First insulating supporting component is separately mounted on main turntable 7, and equal by circumferencial direction
Even distribution.As shown in Figures 2 and 3, the first insulating supporting component includes first support bar 2-2 and is used to support first of workpiece
Fagging 2-1 corresponds to first support bar on secondary turntable 5 and is provided with support rod perforation 5-1, and first support bar 2-2 activity passes through support rod
Perforate 5-1, and the lower end insulation of first support bar 2-2 is fixed on main turntable 7, and the first support plate 2-1 is fixed on first support bar
The upper end of 2-2.Specifically, first support bar 2-2 is fixed on main turntable 7 by bolt insulation fixation kit 18.
Preferably, first shielding case 2-4 is installed in the junction of first support bar 2-2 and main turntable 7.
As shown in fig. 6, the present embodiment is respectively equipped with steel ball seat 20, steel ball seat 20 in the position 5-1 of corresponding support rod perforation
Insulation is fixed on secondary turntable 5, mesoporous corresponding with support rod perforation 5-1 is equipped at the middle part of steel ball seat 20, in the side of mesoporous
Wall is equipped with several steel balls 21 for pressing circumferencial direction distribution, and first support bar 2-2 passes through mesoporous, the side of first support bar 2-2
Wall is contacted with steel ball 21, so that first support bar 2-2 is more stable smooth during elevating movement.In steel ball seat 20
It is stamped steel ball seat protective cover 2-3 in periphery.
Preferably, it is equipped with two layers of steel ball 21 on the side wall of mesoporous, is separated between two layers of steel ball 21 by washer 22, in
The end in hole is provided with gland 23, and gland is pressed on steel ball 21, so that steel ball 21 is limited on the side wall of mesoporous.
Specifically, steel ball seat 20 is fixed on secondary turntable 5 by bolt insulation fixation kit 18.
Second insulating supporting mechanism 3 includes at least three group of second insulating supporting component, to realize the steady branch to workpiece
Support.The second insulating supporting mechanism of the present embodiment includes three group of second insulating supporting component, and three group of second insulating supporting component is pressed
Circumferencial direction is uniformly distributed with 120 degree of angles.Second insulating supporting component is separately mounted on secondary turntable 5, and equal by circumferencial direction
Even distribution.As shown in Figure 4 and Figure 5, the second insulating supporting component includes second support bar 3-2 and is used to support second of workpiece
The lower end insulation of fagging 3-1, second support bar 3-2 are fixed on secondary turntable 5, and the second support plate 3-1 is fixed on second support bar
The upper end of 3-2.First support plate 2-1 and the second support plate 3-1 is separated by 60 degree and is staggered.
Preferably, secondary shielding cover 3-3 is installed in the junction of second support bar 3-2 and secondary turntable 5.
Specifically, second support bar 3-2 is fixed on secondary turntable 5 by bolt insulation fixation kit 18.
First support plate 2-1 is fixed on the structure of the upper end of first support bar 2-2 and the second support plate 3-1 is fixed on second
The structure of the upper end of support rod 3-2 is identical, on the supporting plate be arranged connecting cylinder 19,19 sets of the connecting cylinder upper ends in support rod,
Connecting cylinder also passes through the upper end that connection bolt is fixed on support rod.
As shown in Figure 7 and Figure 8, the workpiece rotating frame of the present embodiment further includes bias disk 12, biasing spring 17, electrode tip in furnace
6 and furnace dispatch from foreign news agency cartridge 8, the insulation of bias disk 12 is fixed on secondary 5 top of turntable, and furnace dispatch from foreign news agency cartridge 8 is insulated the furnace in coating chamber
On wall 100, and an electric connecting terminal of furnace dispatch from foreign news agency cartridge 8 exposes the electrode tip 6 in the outside of coating chamber, furnace and is insulated in plated film
Interior, another electric connecting terminal of an electric connecting terminal of electrode tip 6 and furnace dispatch from foreign news agency cartridge 8 is electrically connected in furnace, and biasing spring 17 is solid
Dingan County is provided on the wherein one or both ends of biasing spring 17 to extension on another electric connecting terminal of electrode tip 6 in furnace
The conducting rod 17-1 stretched, the present embodiment are that the both ends of biasing spring 17 are provided with conducting rod 17-1, and conducting rod 17-1 passes through inclined
The elastic force of pressing spring is pressed in always on bias disk 12, bias disk 12 respectively by conductor wire 13 and the first insulating supporting mechanism 2 and
The connection of second insulating supporting mechanism 3, workpiece 1 and external grid bias power supply are electrically connected.It is provided at an outer portion with grid bias power supply, furnace
The cathode of electric connecting terminal and grid bias power supply of the exposing of dispatch from foreign news agency cartridge outside coating chamber is electrically connected, the anode of grid bias power supply with
The furnace wall of coating chamber is electrically connected.
Specifically, 17 face of biasing spring is located at the side of bias disk 12, a circle limit is equipped on the side of bias disk 12
Position slot 12-1, the outer end of conducting rod 17-1 is pressed in limiting slot 12-1.Biasing spring 17 is eight turned to spring steel crin
The spring fork that font inwardly compresses.
Specifically, electrode tip 6 is insulated in secondary fixed disk 25 in furnace.
As shown in Figure 8 and Figure 9, in furnace electrode tip 6 specific mounting structure are as follows: be fixed with partially in the side of secondary fixed disk 25
Pressing fixed board 6-1 is equipped with electrode tip mounting hole in furnace on bias fixed plate 6-1, and the insulating flange of electrode tip 6 passes through furnace in furnace
Interior electrode tip fixing bolt 6-3 is fixed on bias fixed plate 6-1, so that electrode tip 6 in furnace is fixed on bias fixed plate 6-1
On, an electric connecting terminal of electrode tip 6 passes through electrode tip mounting hole in furnace in furnace, and electrode tip 6 is installed with electrode tip in furnace in furnace
It is equipped with electrode tip ceramic insulation in furnace between hole and covers 6-2, to realize insulation.
Preferably, another electric connecting terminal of an electric connecting terminal of electrode tip 6 and furnace dispatch from foreign news agency cartridge is woven by red copper in furnace
Band 24, which is realized, to be electrically connected.
As shown in figure 8, the mounting structure of biasing spring 17 are as follows: biasing spring 17 is fixed on by spring set screw 17-2
The upper end of electrode tip 6 in furnace is provided with spring pressuring ring 17-3 between the head and biasing spring 17 of spring set screw 17-2.
The mounting structure of furnace dispatch from foreign news agency cartridge 8 are as follows: furnace dispatch from foreign news agency cartridge mounting hole is equipped on the furnace wall of coating chamber 100, outside furnace
The insulating flange of electrode tip 8 is fixed on furnace wall 100 by furnace dispatch from foreign news agency cartridge fixing bolt 8-2, so that furnace dispatch from foreign news agency cartridge 8 be consolidated
It is scheduled on furnace wall 100, an electric connecting terminal of furnace dispatch from foreign news agency cartridge 8 passes through furnace dispatch from foreign news agency cartridge mounting hole, outside furnace dispatch from foreign news agency cartridge 8 and furnace
It is equipped with furnace dispatch from foreign news agency cartridge ceramic insulation between electrode tip mounting hole and covers 8-1, to realize insulation, in the insulating flange of furnace dispatch from foreign news agency cartridge
It is equipped with furnace dispatch from foreign news agency cartridge sealing ring 8-3, between furnace wall to reach sealing.Furnace dispatch from foreign news agency cartridge is corresponded in the outside of furnace wall 100 to set
There is outer protective cover 14, outer protective cover 14 covers part of the exposing of furnace dispatch from foreign news agency cartridge 8 outside furnace wall.
Bias disk 12 is insulated by bias disk insulation fixation kit 16 is fixed on the structure of secondary 5 top of turntable are as follows: this implementation
The workpiece rotating frame of example further includes multiple groups bias disk insulation fixation kit 16, and as shown in Figure 10, bias disk insulation fixation kit 16 wraps
Bias disk fixed column 16-7 is included, the lower end of bias disk fixed column 16-7 is inserted on secondary turntable 5, and bias disk fixed column 16-7's is upper
Portion is equipped with threaded post 16-8, and bias disk ceramic insulation pad 16-5 and felt pad protective cover 16-6 is set on threaded post 16-8,
Felt pad protective cover 16-6 covers the periphery bias disk ceramic insulation pad 16-5, and the corresponding threaded post of bias disk 12 is worn equipped with fixed column
Hole, threaded post 16-8 perforate across fixed column, and bias disk 12 is supported on bias disk ceramic insulation pad 16-5, in threaded post 16-8
Bias disk ceramic insulation is equipped between fixed column perforation and covers 16-4, and it is solid to be connected with bias disk in the threaded upper ends of threaded post 16-8
Determine nut 16-2, is covered with threaded post protective cap 16-1 on the end exposed above the slave bias disk of threaded post 16-8.
As shown in figure 11, the workpiece rotating frame of the present embodiment further includes that at least two groups are used for so that the more stable rotation of main turntable
Main turntable limit assembly 27 and at least two groups are used for the secondary rotary disk limitation component 26 so that the more stable rotation of secondary turntable.
The structure of main turntable limit assembly 27 are as follows: main turntable 7 is annular plate-like, as shown in figure 13, main turntable limit assembly
27 include that main turntable limits support 27-1, vertical axis 27-3, cross spacing bearing 27-2, the first lateral shaft 27-4 and first vertically
Limit Bearing 27-5, main turntable limit support 27-1 are fixedly mounted in main fixed disk 10, and vertical axis 27-3 is mounted vertically in master
In the middle part of rotary disk limitation support 27-1, cross spacing bearing 27-2 is sleeved on vertical axis 27-3, and cross spacing bearing 27-2
Side is resisted against on the inner ring surface of main turntable 7, to limit the horizontal position of main turntable 7, the first lateral shaft 27-4 is horizontal
To the top for being mounted on main turntable limit support 27-1, the first vertical spacing bearing 27-5 is sleeved on the first lateral shaft 27-4,
And first the side of vertical spacing bearing 27-5 be resisted against the upper surface of main turntable 7, to limit the vertical position of main turntable 7
System can limit main turntable bounce.
More specifically, the first axle sleeve 27-6 is provided on the first lateral shaft 27-4, it is perpendicular that the first axle sleeve 27-6 is located at first
To between Limit Bearing 27-5 and main turntable limit support 27-1.The vertical axis 27-3 of the present embodiment is the milling work of special shape
Part, middle part is cylindrical body, and both ends are symmetrically milled out in flat interconnecting piece, and a through-hole is respectively bored on interconnecting piece, are passed through
The cooperation of through-hole and bolt is fixed on the middle part of main turntable limit support.
As shown in figure 12, the structure of secondary rotary disk limitation component 26 are as follows: secondary rotary disk limitation component 26 includes secondary rotary disk limitation branch
Seat 16-1, the second lateral shaft 16-2 and the second vertical spacing bearing 16-3, secondary rotary disk limitation support 16-1 are fixedly mounted on secondary solid
On price fixing 25, the second lateral shaft 26-2 is transversely mounted on the top of secondary rotary disk limitation support 26-1, the second vertical spacing bearing 26-
3 are sleeved on the second lateral shaft 26-2, and the side of the second vertical spacing bearing 26-3 is resisted against the upper surface of secondary turntable 5, thus
The vertical position of secondary turntable 5 is limited, secondary turntable bounce can be limited.
More specifically, the second axle sleeve 26-4 is provided on the second lateral shaft 26-2, it is perpendicular that the second axle sleeve 26-4 is located at second
To between Limit Bearing and secondary rotary disk limitation support.
As shown in figure 14, the specific structure of power transmitting are as follows: the lateral surface of main turntable 7 is flank of tooth 7-1, and transmission mechanism 9 wraps
Gear 9-4, transmission magnetic fluid seal 9-2 and synchronous pulley 9-1 are included, transmission magnetic fluid seal 9-2 is fixedly mounted on plated film
The output shaft of the outer surface of the furnace wall 100 of room, transmission magnetic fluid seal 9-2 protrudes into coating chamber, and gear 9-4 is fixedly mounted on
It is driven on the output shaft of magnetic fluid seal 9-2, and is engaged with the flank of tooth 7-1 of main turntable 7, it is synchronous to drive main turntable 7 to rotate
Belt wheel 9-1 is fixedly mounted on the input shaft of transmission magnetic fluid seal 9-2, for connecting with external power device.Operating
When, external power device drives synchronous pulley 9-1 rotation, it is rotated by transmission magnetic fluid seal 9-2 band moving gear 9-4,
Gear 9-4 drives main turntable 7 to rotate, then drives secondary turntable 5 to rotate simultaneously by first support bar 2-2.Transmission mechanism 9 passes through biography
Dynamic magnetic fluid seal 9-2 realizes sealing when rotation transmitting.
More specifically, exterior seal ring 9-3 is equipped between transmission magnetic fluid seal 9-2 and the outer surface of furnace wall 100.
As shown in fig. 7, the cylinder component 11 of the present embodiment include oil cylinder 11-1, oil cylinder mounting rack, oil cylinder connector 11-9,
Extension rod 11-7 and limit pad 11-8, oil cylinder 11-1 are fixedly mounted on the appearance of the furnace wall 100 of coating chamber by oil cylinder mounting rack
Face, extension rod 11-7 are connect by oil cylinder connector 11-9 with the piston rod of oil cylinder 11-1, and extension rod 11-7 extends into coating chamber
It is interior, and connect with secondary fixed disk 25, to drive secondary fixed disk 25 to go up and down, limit pad 11-8 is actively set on extension rod 11-7, and
In coating chamber, when secondary fixed disk 25 drops to minimum point, secondary fixed disk 25 is resisted against on limit pad 11-8.
The present embodiment is equipped with three sets of cylinder components 11, and three sets of cylinder components 11 are distributed in secondary fixed disk periphery, pass through extension
Bar evenly carries secondary fixed disk, and three oil cylinder extension rod 11-7 are mutually connected with connecting rod to guarantee that movement synchronizes.
The oil cylinder mounting rack of the present embodiment includes oil cylinder fixed plate 11-2, mounting plate 11-6 and a plurality of fixed column 11-3, peace
Loading board 11-6 is fixed on the outer surface of furnace wall 100, and oil cylinder fixed plate 11-2 is fixed on mounting plate 11- by fixed column 11-3 correspondence
6 lower section, oil cylinder 11-1 are fixedly mounted below oil cylinder fixed plate 11-2, and the piston rod of oil cylinder 11-1 straight up, is being pacified
Mounting plate sealing ring 11-5 is equipped between loading board 11-6 and the outer surface of furnace wall 100.
The cylinder component 11 of the present embodiment further includes welding bellows 11-4, and welding bellows 11-4 is actively set on extension rod
On 11-7, one end of welding bellows 11-4 is welded on mounting plate 11-6, and one end is welded on oil cylinder connector 11-9.
As shown in fig. 6, the bolt insulation fixation kit 18 of the present embodiment includes insulating fixing bolt 18-1, ceramic insulation pad
Piece 18-3 and bolt ceramic insulation cover 18-2, and ceramic insulation gasket 18-3 is padded between two connected components, bolt ceramics
Insulation sleeve 18-2 covers on insulating fixing bolt 18-1, is fixedly connected with reaching insulation.
As shown in Figure 1, the workpiece rotating frame of the present embodiment further includes turntable protection cap 28, turntable protection cap 28 covers workpiece and turns
The top of frame, first support bar 2-2 and second support bar 3-2 are each passed through turntable protection cap 28, the first support plate 2-1 and second
Support plate 3-1 is located at the top of turntable protection cap 28, and turntable protection cap 28 follows secondary turntable 5 to rotate, and turntable protection cap 28 can hinder
It keeps off sundries and plating material enters inside turntable structure.
The a kind of of the present embodiment includes above-mentioned workpiece rotating frame and the coating machine for carrying out plated film to hemispherical shell workpiece
Structure are as follows: workpiece rotating frame is mounted on the lower furnace wall of the coating chamber of coating machine, and top circular cathode is equipped in coating chamber
(it is round that top is not shown in the figure in arc source, at least one following circular cathode arc source and multiple side circular cathode arc sources
Cathode arc source, following circular cathode arc source and side circular cathode arc source), the corresponding installation of top circular cathode arc source
In the top of workpiece, plated film is carried out for the top surface to workpiece, following circular cathode arc source corresponds to the lower section for being mounted on workpiece,
For to workpiece inner surface and port surface carry out plated film, side circular cathode arc source distributing installation on the periphery of workpiece,
Plated film is carried out for the side surface to workpiece, to carry out comprehensive plated film to hemispherical shell workpiece.
The coating machine of the invention first test running before commencement of commercial operation, the detailed process of test running can be with are as follows: open coating machine
Fire door observe each component operation conditions.Hemispherical shell workpiece 1 is first supported by the first constant insulating supporting mechanism 2 of height, is opened
External power device is moved, drives main turntable 7 and secondary turntable 5 to rotate simultaneously, hemispherical shell workpiece 1 also rotates with it, and observes work
Part 1 rotate it is normal after, start the oil cylinder of cylinder component 11, oil cylinder stretches its piston rod with having the rhythm and pace of moving things, drives secondary 25 liters of fixed disk
Drop then turns to be supported workpiece 1 by the second insulating supporting mechanism 3 when cylinder piston rod drives secondary fixed disk 25 to rise lofty perch
Get up, after oil cylinder drives secondary fixed disk 25 to decline, then reconvert supports workpiece 1 by the first insulating supporting mechanism 2, and second is exhausted
Edge supports 3 structure of machine to be detached from workpiece 1, and drops to former positioning height.After observing workpiece rotation normally, then bias test is carried out, first seen
Examine bias disk 12 whether normal rotation, whether the conducting rod of biasing spring 17 pressed against on the limiting slot of bias disk 12, and cut
It after disconnected grid bias power supply, is measured with multimeter, is normally connected for furnace dispatch from foreign news agency cartridge with workpiece, and furnace dispatch from foreign news agency cartridge and each turntable
It is not turned on furnace shell, fire door can be closed and enter plating run when all going well by being passed through low bias measurement voltage value when necessary.
Claims (10)
1. a kind of workpiece rotating frame for hemispherical shell workpiece plated film, it is characterized in that including:
Main fixed disk, level are fixedly mounted in the coating chamber of coating machine；
Main turntable, rotating support is in the upper surface of described main fixed disk；
Secondary fixed disk is horizontally set on the top of the main turntable, and liftable；
Secondary turntable, rotating support is in the upper surface of described secondary fixed disk；
First insulating supporting mechanism, is mounted on the main turntable, is used to support workpiece；
Second insulating supporting mechanism is mounted on the secondary turntable, is also used for support workpiece, and workpiece with second insulation
The Support Position of supporting mechanism contact and being mutually staggered with the Support Positions of the first insulating supporting mechanism contacts for workpiece；
Transmission mechanism is connect with external power device, to drive the main turntable and the secondary turntable rotation simultaneously；
Cylinder component, piston rod are connect with the secondary fixed disk；Secondary fixed disk lifting is driven by oil cylinder, to realize described the
One insulating supporting mechanism and second insulating supporting mechanism alternately support workpiece.
2. the workpiece rotating frame according to claim 1 for hemispherical shell workpiece plated film, it is characterised in that: described first absolutely
Edge supporting mechanism includes at least three group of first insulating supporting component, and the first insulating supporting component is separately mounted to the master and turns
It on disk, and is uniformly distributed by circumferencial direction, the first insulating supporting component includes first support bar and is used to support workpiece
First support plate correspond to the first support bar on the pair turntable and is provided with support rod and perforates, and the first support bar activity wears
The support rod perforation is crossed, the lower end insulation of the first support bar is fixed on the main turntable, and first support plate is solid
It is scheduled on the upper end of the first support bar.
3. the workpiece rotating frame according to claim 1 for hemispherical shell workpiece plated film, it is characterised in that: described second absolutely
Edge supporting mechanism includes at least three group of second insulating supporting component, and the second insulating supporting component is separately mounted to described secondary turn
It on disk, and is uniformly distributed by circumferencial direction, the second insulating supporting component includes second support bar and is used to support workpiece
Second support plate, the lower end insulation of the second support bar are fixed on the secondary turntable, and second support plate is fixed on institute
State the upper end of second support bar.
4. the workpiece rotating frame according to claim 1 for hemispherical shell workpiece plated film, it is characterised in that: the workpiece turns
Frame further includes bias disk, biasing spring, electrode tip and furnace dispatch from foreign news agency cartridge in furnace, and the bias disk insulation is fixed on the secondary turntable
Top, the furnace dispatch from foreign news agency cartridge are insulated on the furnace wall of coating chamber, and an electric connecting terminal of the furnace dispatch from foreign news agency cartridge exposes
In the outside of coating chamber, the furnace electrode tip be insulated in coating chamber, in the furnace electric connecting terminal of electrode tip with
Another electric connecting terminal of the furnace dispatch from foreign news agency cartridge is electrically connected, and the biasing spring is fixedly mounted on another electricity of electrode tip in furnace
On connecting pin, outwardly extending conducting rod is provided on the wherein one or both ends of the biasing spring, the conducting rod passes through
The elastic force of biasing spring is pressed in always on bias disk, and the bias disk passes through conductor wire and first insulating supporting mechanism respectively
Mechanism connects with second insulating supporting, and workpiece and external grid bias power supply are electrically connected.
5. the workpiece rotating frame according to claim 1 for hemispherical shell workpiece plated film, it is characterised in that: the workpiece turns
Frame further includes that at least two groups are used for so that the main turntable limit assembly and at least two groups of the more stable rotation of main turntable are used for so that secondary
The secondary rotary disk limitation component of the more stable rotation of turntable.
6. the workpiece rotating frame according to claim 5 for hemispherical shell workpiece plated film, it is characterised in that: the main turntable
For annular plate-like, the main turntable limit assembly includes that main turntable limits support, vertical axis, cross spacing bearing, first laterally
Axis and the first vertical spacing bearing, the main turntable limit support are fixedly mounted in the main fixed disk, and the vertical axis is perpendicular
To being mounted in the middle part of the main turntable limit support, the cross spacing bearing holder (housing, cover) is in the vertical axis, and the transverse direction
The side of Limit Bearing is resisted against on the inner ring surface of the main turntable, and first lateral shaft is transversely mounted on the main turntable limit
The top of position support, the first vertical spacing bearing holder (housing, cover) is on first lateral shaft, and the first vertical spacing axis
The side held is resisted against the upper surface of described main turntable.
7. the workpiece rotating frame according to claim 5 for hemispherical shell workpiece plated film, it is characterised in that: the pair turntable
Limit assembly includes secondary rotary disk limitation support, the second lateral shaft and the second vertical spacing bearing, and the pair rotary disk limitation support is solid
In the secondary fixed disk, second lateral shaft is transversely mounted on the top of the secondary rotary disk limitation support, described for Dingan County
Second vertical spacing bearing holder (housing, cover) on second lateral shaft, and the side of the second vertical spacing bearing be resisted against it is described
The upper surface of secondary turntable.
8. the workpiece rotating frame according to claim 1 for hemispherical shell workpiece plated film, it is characterised in that: the main turntable
Lateral surface be the flank of tooth, the transmission mechanism includes gear, transmission magnetic fluid seal and synchronous pulley, the transmission magnetic fluid
Sealing element is fixedly mounted on the outer surface of the furnace wall of coating chamber, and the output shaft of the transmission magnetic fluid seal protrudes into coating chamber
Interior, the gear is fixedly mounted on the output shaft of transmission magnetic fluid seal, and the flank engagement with the main turntable, described
Synchronous pulley is fixedly mounted on the input shaft of transmission magnetic fluid seal, for connecting with external power device.
9. the workpiece rotating frame according to claim 1 for hemispherical shell workpiece plated film, it is characterised in that: the oil cylinder group
Part includes oil cylinder, oil cylinder mounting rack, oil cylinder connector, extension rod and limit pad, and the oil cylinder passes through the fixed peace of oil cylinder mounting rack
Mounted in the outer surface of the furnace wall of coating chamber, the extension rod is connect by the oil cylinder connector with the piston rod of the oil cylinder,
The extension rod extends into coating chamber, and connect with the secondary fixed disk, to drive the secondary fixed disk to go up and down, the limit
Pad is actively set on the extension rod, and is located in coating chamber, described secondary fixed when the secondary fixed disk drops to minimum point
Disk is resisted against on the limit pad.
10. a kind of includes the coating machine of workpiece rotating frame described in claim 1 to 9 any one, characterized in that the workpiece
Pivoted frame is mounted on the lower furnace wall of the coating chamber of coating machine, and top circular cathode arc source, at least one are equipped in coating chamber
A following circular cathode arc source and multiple side circular cathode arc sources, the top circular cathode arc source correspondence are mounted on
The top of workpiece carries out plated film for the top surface to workpiece, and the following circular cathode arc source correspondence is mounted under workpiece
Side, for the inner surface and port surface progress plated film to workpiece, the side circular cathode arc source distributing installation is in workpiece
Periphery, for workpiece side surface carry out plated film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811619022.0A CN109576653A (en) | 2018-12-27 | 2018-12-27 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811619022.0A CN109576653A (en) | 2018-12-27 | 2018-12-27 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
Publications (1)
| Publication Number | Publication Date |
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| CN109576653A true CN109576653A (en) | 2019-04-05 |
Family
ID=65933237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811619022.0A Withdrawn CN109576653A (en) | 2018-12-27 | 2018-12-27 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
Country Status (1)
| Country | Link |
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| CN (1) | CN109576653A (en) |
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| CN110760812A (en) * | 2019-12-02 | 2020-02-07 | 江苏铁锚玻璃股份有限公司 | Coating device and coating method for outer surface of hemispherical glass |
| CN111235541A (en) * | 2020-03-16 | 2020-06-05 | 湖南六方晶科技有限责任公司 | Cutter rotating stand for preparing metal oxide coating by PVD (physical vapor deposition) method |
| CN111850517A (en) * | 2020-06-30 | 2020-10-30 | 北京北方华创微电子装备有限公司 | Lower electrode assembly and process chamber |
| CN111850502A (en) * | 2020-07-22 | 2020-10-30 | 昆山欧思克精密工具有限公司 | A spheroid part coating film anchor clamps for physical vapor deposition |
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| US20090173275A1 (en) * | 2008-01-03 | 2009-07-09 | Green Energy Technology Inc. | Supporting table having heaters inside crystal-growing furnace |
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Application publication date: 20190405 |