CN204779793U - 3 transposition work rests of three point support - Google Patents
3 transposition work rests of three point support Download PDFInfo
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- CN204779793U CN204779793U CN201520493199.6U CN201520493199U CN204779793U CN 204779793 U CN204779793 U CN 204779793U CN 201520493199 U CN201520493199 U CN 201520493199U CN 204779793 U CN204779793 U CN 204779793U
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Abstract
The utility model relates to a 3 transposition work rests of three point support, including rotation motor, rotation drive mechanism, 3 transposition motors and inversion mechanisms, wherein the output of rotation motor is connected with the work rest transmission through rotation drive mechanism, the rolling transposition of 3 transposition motor drive inversion mechanisms, the inversion mechanism includes 3 transposition lift ball screw, lifting disk, guiding mechanism, support column, fixed disks and transposition branches, the installation chassis is fixed in to the lift ball screw's that wherein replaces bottom through the footing on, and top and lifting disk butt, the lifting disk is worn to arrange in the vertical setting of guiding mechanism, arranges a plurality of support columns that are used for erection bracing point fixed disk on the lifting disk, sets up three transposition branch on the erection bracing point fixed disk. The utility model discloses the film forming can be realized one time to the needle, does not need many times coating film, has avoided many times the coating film to the damage of epimembranal face when improving work efficiency, has improved sample coating film qualification rate, indirect protection operating personnel, avoid leading to the fact the damage to person.
Description
Technical field
The utility model relates to a kind of work rest, specifically a kind of supported at three point three point transposition work rest.
Background technology
Be applied to the work rest on magnetron sputtering coater, mainly support, fix plated membrane sample, make magnetic controlling target carry out plated film to its outside surface; Require and plated film requirement according to plated sample shape, size, station, work rest structure has very large difference; According to sample shape and the support of size determination work rest, fixed sturcture and size, require that (one-step installation several sample) and plated film require that (full surface coating or designated surface plated film) determines the structure of work rest according to station; For ensureing the homogeneity of sample film, work rest is except support, fixed sample function, and need with rotation function, magnetic controlling target maintains static just to sample surfaces, and work rest rotation realizes sample surfaces uniform coated.
Existing for spherical sample and the full surface coating of hemispheric sample, because work rest need support fixed sample, sample is supported, fixed face plated film time can not be plated to, (more than twice) plated film is several times needed to realize full surface coating, repeatedly plated film can impact the homogeneity of film, support, fixed face is thin than all the other position retes, while, is repeatedly installed and easily damages sample outside surface rete, and the qualification rate of plated sample is lower.
Single sample is plated film repeatedly, is lengthened, inefficiency the plated film time.If rete is harmful rete, repeatedly plated film can cause operator frequently to contact plated sample, the measure even if operator have properly protected, and repeatedly plated film also increases operator by the danger injured.
Utility model content
The deficiencies such as the qualification rate for the plated sample of magnetron sputtering coater in prior art is lower, inefficiency, the technical problems to be solved in the utility model be to provide a kind ofly to increase work efficiency, the supported at three point three point transposition work rest of the success ratio that increases sample coating.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is:
The utility model supported at three point three point transposition work rest, comprise spinning motor, rotation transmission rig, three point transposition motor and inversion mechanisms, wherein the output terminal of spinning motor is in transmission connection through rotation transmission rig and work rest, and three point transposition motors drive inversion mechanism rolling transposition.
Inversion mechanism comprises three point transposition lifting ball screws, lifting disk, guiding mechanism, pillar stiffener, shaft collar and transposition pole, wherein the bottom of transposition lifting ball screw is fixed on installation chassis by footing, top abuts with lifting disk, guiding mechanism is vertically arranged, be placed through in lifting disk, lifting disk being arranged multiple pillar stiffener for installing point of suppon shaft collar, installing on point of suppon shaft collar and three transposition poles are set.
The utility model is also provided with lifting transposition guide shaft, and it is placed through the edge of lifting disk.
Lifting transposition guide shaft upper end is provided with a supporting-point roller, rotates contact with a rotation driven gear mechanism outer rim.
The utility model is also provided with negative bias mechanism, and it is an annular, is installed on rotation driven gear mechanism, is electrically connected with three fixed support points and three point of suppon that replace.
The utility model also has baffle plate, and it is located at the top of rotation driven gear mechanism.
Rotation transmission rig comprises spinning motor, rotation driving toothed gear mechanism and rotation driven gear mechanism, and wherein the output terminal of spinning motor is connected with rotation driving toothed gear mechanism driving, and rotation driving toothed gear mechanism engages with rotation driven gear mechanism.The utility model has following beneficial effect and advantage:
1. the utility model is for semisphere or spherical sample list station, full surface coating, and supported at three point three point transposition work rest can realize one-pass film-forming, does not need repeatedly plated film.
2. applying the utility model can one-pass film-forming, not only increases working efficiency, avoids repeatedly the damage of plated film to film surface simultaneously, improve sample coating qualification rate.
3. the utility model adopts supported at three point three point transposition work rest plated film, decrease operator and the direct frequency of exposure of plated sample, and indirect protection operator, avoid causing damage to person.
Accompanying drawing explanation
Fig. 1 is the utility model 3 fixed support view;
Fig. 2 is the utility model three point transposition holding state schematic diagram.
Wherein, 1 is spinning motor, and 2 is rotation driving toothed gear mechanism, and 3 is three point transposition point of suppon guiding mechanisms, 4 is three fixed support points, and 5 is hemisphere sample, and 6 is three transposition point of suppon, and 7 is rotation driven gear mechanism, 8 is negative bias mechanism, and 9 is three point transposition lifting ball screws, and 10 is three point transposition motors, 11 is installation chassis, and 12 is lifting disk, and 13 is lifting transposition guide shaft, 14 is transposition pole, and 15 is fixing pole, and 16 is pillar stiffener, 17 is point of suppon shaft collar, and 18 is baffle plate
Embodiment
Below in conjunction with Figure of description, the present invention is further elaborated.
As shown in Figure 1, the utility model supported at three point three point transposition work rest comprises spinning motor 1, rotation transmission rig, three point transposition motor 10 and inversion mechanisms, wherein the output terminal of spinning motor 1 is in transmission connection through rotation transmission rig and work rest, and three point transposition motors 10 drive inversion mechanism rolling transposition.
Inversion mechanism comprises three point transposition lifting ball screws 9, lifting disk 12, guiding mechanism 3, pillar stiffener 16, shaft collar 17 and transposition pole 14, wherein the bottom of transposition lifting ball screw 9 is fixed on installation chassis 11 by footing, apical support lifting disk 12, guiding mechanism 3 is vertically arranged, be placed through in lifting disk 12, lifting disk 12 being arranged multiple pillar stiffener 16 for installing point of suppon shaft collar 17, installing on point of suppon shaft collar 17 and three transposition poles 14 are set.
Rotation transmission rig comprises spinning motor 1, rotation driving toothed gear mechanism 2 and rotation driven gear mechanism 7, and wherein the output terminal of spinning motor 1 and rotation driving toothed gear mechanism 2 are in transmission connection, and rotation driving toothed gear mechanism 2 engages with rotation driven gear mechanism 7.
In order to make lifting action stablize, the utility model is also provided with lifting transposition guide shaft 13, and it is placed through the edge of lifting disk 12.Lifting transposition guide shaft 13 upper end is provided with a supporting-point roller, rotates contact with rotation driven gear mechanism 7 outer rim.
Also be provided with negative bias mechanism 8, it is an annular, is installed on rotation driven gear mechanism 7, is electrically connected with three fixed support points and three point of suppon that replace.
In order to prevent gear mechanism by plated film, the utility model is also provided with baffle plate 18, and it is located at the top of rotation driven gear mechanism 7.
All parts are installed on 11 installation chassis; Sample rotation relies on 1 spinning motor to drive 2 rotation driving toothed gear mechanisms to rotate the rotation of drive 7 rotation driven gear mechanism and realizes 5 sample rotations; Point transposition relies on 10 3 point transposition motors to drive 9 to be that three point transpositions lifting ball screws drive 12 lifting disks to move up and down by 13 lifting transposition guide shafts, realizes three fixed support points and three point of suppon that replace switch.
Add certain negative voltage to sample when negative film press mechanism is sample coating, object increases plated film firmness, and it is connected with six fulcrums.
With diameter of phi 70mm hemispheric sample (sphere upwards), single station, full surface coating are example, need three magnetic controlling targets to be arranged in respectively immediately below sample, directly over and side, sample rotation on work rest simultaneously, supported at three point three point transposition form realizes sample outside surface vapor deposition forming.
The rotation of supported at three point three point transposition work rest sample is driven by a motor, and geartransmission, realizes sample rotation.
Supported at three point three point transposition work rest is for ensureing once full surface coating, adopt uniform six point of suppon, wherein three point of suppon are motionless, support, fix hemispheric sample, rely on two motors to drive, two cover ball-screw-transmissions, realize other three point of suppon oscilaltions, realize and three motionless point of suppon, transposition supports.
Adopt that three point of suppon support, fixed sample, sample can be reduced and to be blocked area, ensure sample stability simultaneously; Sample is first installed on three motionless point of suppon, carry out plated film, only have three point of suppon not by plated film, after requiring plated film certain hour according to coating process, when not stopping plated film, starting other three transposition point of suppon, replacing with three motionless point of suppon and support, require plated film certain hour according to coating process, now sample outside surface is all by plated film.
Claims (7)
1. a supported at three point three point transposition work rest, it is characterized in that: comprise spinning motor, rotation transmission rig, three point transposition motor and inversion mechanisms, wherein the output terminal of spinning motor is in transmission connection through rotation transmission rig and work rest, and three point transposition motors drive inversion mechanism rolling transposition.
2. by supported at three point three point transposition work rest according to claim 1, it is characterized in that: inversion mechanism comprises three point transposition lifting ball screws, lifting disk, guiding mechanism, pillar stiffener, shaft collar and transposition pole, wherein the bottom of transposition lifting ball screw is fixed on installation chassis by footing, top abuts with lifting disk, guiding mechanism is vertically arranged, be placed through in lifting disk, lifting disk being arranged multiple pillar stiffener for installing point of suppon shaft collar, installing on point of suppon shaft collar and three transposition poles are set.
3. by supported at three point three point transposition work rest according to claim 1, it is characterized in that: be also provided with lifting transposition guide shaft, it is placed through the edge of lifting disk.
4. by supported at three point three point transposition work rest according to claim 3, it is characterized in that: lifting transposition guide shaft upper end is provided with a supporting-point roller, rotates contact with a rotation driven gear mechanism outer rim.
5. by supported at three point three point transposition work rest according to claim 1, it is characterized in that: be also provided with negative bias mechanism, it is an annular, is installed on rotation driven gear mechanism, is electrically connected with three fixed support points and three point of suppon that replace.
6., by supported at three point three point transposition work rest according to claim 1, it is characterized in that: also have baffle plate, it is located at the top of rotation driven gear mechanism.
7. by supported at three point three point transposition work rest according to claim 1, it is characterized in that: rotation transmission rig comprises spinning motor, rotation driving toothed gear mechanism and rotation driven gear mechanism, wherein the output terminal of spinning motor is connected with rotation driving toothed gear mechanism driving, and rotation driving toothed gear mechanism engages with rotation driven gear mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520493199.6U CN204779793U (en) | 2015-07-09 | 2015-07-09 | 3 transposition work rests of three point support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520493199.6U CN204779793U (en) | 2015-07-09 | 2015-07-09 | 3 transposition work rests of three point support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204779793U true CN204779793U (en) | 2015-11-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520493199.6U Active CN204779793U (en) | 2015-07-09 | 2015-07-09 | 3 transposition work rests of three point support |
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| CN (1) | CN204779793U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048551A (en) * | 2016-07-19 | 2016-10-26 | 沈阳大学 | Workpiece bracket of vacuum coating machine |
| CN109576653A (en) * | 2018-12-27 | 2019-04-05 | 东莞市汇成真空科技有限公司 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
-
2015
- 2015-07-09 CN CN201520493199.6U patent/CN204779793U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048551A (en) * | 2016-07-19 | 2016-10-26 | 沈阳大学 | Workpiece bracket of vacuum coating machine |
| CN109576653A (en) * | 2018-12-27 | 2019-04-05 | 东莞市汇成真空科技有限公司 | Workpiece rotating frame and coating machine for hemispherical shell workpiece plated film |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |