CN110745482B

CN110745482B - Semiconductor equipment with one-side loading and unloading function and material conveying device thereof

Info

Publication number: CN110745482B
Application number: CN201911031091.4A
Authority: CN
Inventors: 林欣家; 赵曾男
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2019-10-28
Filing date: 2019-10-28
Publication date: 2022-01-07
Anticipated expiration: 2039-10-28
Also published as: CN110745482A

Abstract

The embodiment of the application provides semiconductor equipment capable of loading and unloading on one side and a material conveying device of the semiconductor equipment. This material transfer device includes: the movable base is used for bearing materials; the material storage position assembly is arranged on one side of the guide rail assembly and is used for bearing the movable base; the first traction assembly is used for moving the moving base from the material storage position assembly to the material moving mechanism and is also used for moving the moving base from the material moving mechanism back to the material storage position assembly; the material taking and placing component is arranged on the other side of the guide rail component and used for bearing the moving base, and the second traction component is used for moving the moving base to the material taking and placing component from the material moving mechanism and also used for moving the moving base back to the material moving mechanism from the material taking and placing component. The embodiment of the application realizes that the waiting time of the semiconductor equipment for loading and unloading on one side is greatly reduced and the working efficiency is improved.

Description

Semiconductor equipment with one-side loading and unloading function and material conveying device thereof

Technical Field

The application relates to the technical field of semiconductor processing, in particular to a unilateral loading and unloading semiconductor device and a material conveying device thereof.

Background

At present, with the continuous fire and heat of the domestic semiconductor market and the huge demand of the market for related products, the capacity demand of the customers for the semiconductor equipment is higher and higher, and the cost demand is higher and higher. Along with the more and more obvious trend of domestic aging, the labor cost is gradually increased. How to solve the above-mentioned problems is left to each semiconductor equipment supplier.

At present, domestic slot type cleaning equipment still generally uses artifical unloading of going up, and the material loading position of cleaning equipment is placed to the basket of flowers that will bear the weight of the wafer that remains to wash by the manual work promptly, and the basket of flowers is taken away from the unloading position by the manual work again after finishing waiting to wash. The current stage adopts single basket of flowers or two baskets of flowers comparatively general, and the cleaning process time of basket of flowers is certain, and operating personnel need go up unloading operation in the frequent going on of different equipment rooms when cleaning equipment is in a large number, if operating personnel operates untimely, cleaning equipment just is in the wait state to influence cleaning equipment's cleaning efficiency, and for reducing cleaning equipment's latency, just need be equipped with more operating personnel, but the cost of labor will rise by a wide margin, lead to economic benefits lower.

Disclosure of Invention

The application aims at the defects of the prior art and provides a semiconductor device capable of loading and unloading on one side and a material conveying device thereof, and the technical problems that in the prior art, the storage efficiency is low, the labor cost is high and the economic benefit is low are solved.

In a first aspect, an embodiment of the present application provides a material conveying apparatus for a semiconductor device with single-side loading and unloading, including: the device comprises one or more material storage position assemblies, one or more moving bases, a material moving mechanism, a guide rail assembly and one or more material taking and placing position assemblies, wherein the moving bases are used for bearing materials; the material storage position assembly is arranged on one side of the guide rail assembly and is used for bearing the movable base; the material moving mechanism is arranged on the guide rail assembly, can move along the guide rail assembly and comprises one or more first traction assemblies, and the first traction assemblies are used for moving the moving base from the material storage position assembly to the material moving mechanism and moving the moving base from the material moving mechanism back to the material storage position assembly; the material taking and placing component is arranged on the other side of the guide rail component and used for bearing the moving base, and the material taking and placing component comprises one or more second traction components, wherein the second traction components are used for moving the moving base to the material taking and placing component from the material moving mechanism and also used for moving the moving base to the material moving mechanism from the material taking and placing component.

In an embodiment of the present application, the mobile base includes: the device comprises a movable seat and a bearing piece, wherein a pulley is arranged at the bottom of the movable seat, and the movable base moves through the pulley; the bearing piece is arranged on the upper part of the moving seat, is fixedly connected with the moving seat and is used for bearing the material.

In an embodiment of the present application, the material moving mechanism further includes: the first traction assembly, the first driving part and the first slide rail are arranged on the base, and the base is in sliding fit with the guide rail assembly; the first driving part is used for driving the base to move on the guide rail assembly; the extension direction of the first slide rail is intersected with the extension direction of the guide rail assembly, the first positioning blocks are arranged on the side wall of the first slide rail in a one-to-one correspondence mode, positioning grooves are correspondingly formed in the movable base, the first traction assembly moves the movable base from the material storage positioning assembly to the first slide rail, and the first positioning blocks and the positioning grooves are matched to position the movable base.

In an embodiment of the present application, an extending direction of the first slide rail is perpendicular to an extending direction of the guide rail assembly.

In one embodiment of the present application, the first pulling assembly and the second pulling assembly each comprise: the device comprises a second driving part, a driving wheel, a driven wheel, a tension wheel, a transmission part and a traction pin, wherein the second driving part is connected with the driving wheel and used for driving the driving wheel to rotate; the driving wheel and the driven wheel are arranged at intervals, the transmission part is connected with the driving wheel and the driven wheel, and when the driving wheel rotates, the transmission part rotates along with the driving wheel and drives the driven wheel to rotate; the tension wheel is arranged between the driving wheel and the driven wheel, abuts against the transmission part and is used for adjusting the tension degree of the transmission part; the traction pin is fixedly arranged on the transmission piece, the movable base is provided with a traction block matched with the traction pin, and the traction pin is matched with the traction block to enable the movable base to move through the rotation of the transmission piece.

In one embodiment of the present application, the material storage assembly includes: the material moving mechanism can selectively align the first slide rail and the second slide rail by moving on the guide rail assembly; the second positioning block is arranged on the side wall of the second slide rail and corresponds to the positioning groove on the mobile base in position, the first traction assembly moves the mobile base from the first slide rail to the second slide rail, and the second positioning block is matched with the positioning groove to position the mobile base.

In an embodiment of the application, the material taking and placing assembly includes a supporting frame, a third slide rail, and a third positioning block, wherein an extending direction of the third slide rail is the same as an extending direction of the first slide rail, and the material moving mechanism selectively aligns the first slide rail and the third slide rail by moving on the guide rail assembly; the third positioning block is arranged on the side wall of the third slide rail and corresponds to the positioning groove on the mobile base in position, the second traction assembly enables the mobile base to move from the first slide rail to the third slide rail, and the third positioning block is matched with the positioning groove to be positioned on the mobile base.

In an embodiment of the present application, the guide rail assembly includes a support, a guide rail, and a tooth slot, wherein the guide rail and the tooth slot are both disposed on the support; a sliding block is arranged on the guide rail, and the base is fixedly connected with the sliding block; the first driving part comprises a gear matched with the tooth grooves, the gear rotates under the driving of the first driving part, and the base is driven to move on the guide rail through the matching of the tooth grooves and the gear.

In an embodiment of the application, a guide wheel is further disposed at the bottom of the movable base, and the guide wheel is matched with the first slide rail, the second slide rail or the third slide rail, and is used for limiting the moving direction of the movable base when the movable base moves.

In a second aspect, an embodiment of the present application provides a single-side loading and unloading semiconductor device, including the material conveying apparatus as provided in the first aspect.

The technical scheme provided by the embodiment of the application has the following beneficial technical effects:

according to the embodiment of the application, the guide rail assembly is arranged at the feeding and discharging end of the semiconductor equipment for feeding and discharging on one side, the material storage position assembly and the material taking and placing position assembly are arranged on two sides of the guide rail assembly, the material moving mechanism is arranged on the guide rail assembly, and the moving base is moved by the first traction assembly and the second traction assembly, so that the operation of automatic feeding and discharging of materials in the process is realized, the efficiency of the semiconductor equipment for feeding and discharging on one side can be effectively improved, and the waiting time of the semiconductor equipment for feeding and discharging on one side is greatly reduced; and because a plurality of mobile base can be deposited to one side of guide rail assembly, consequently can effectively reduce operating personnel's outfit to not only can effectively reduce the cost of labor, but also can further improve work efficiency.

Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.

Drawings

The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a schematic top view of a material transfer device and a semiconductor apparatus with one-side loading and unloading according to an embodiment of the present disclosure;

fig. 2 is a schematic top view of a material transfer device provided in an embodiment of the present application;

fig. 3 is a schematic perspective view illustrating the material storage position assembly and the movable base according to the embodiment of the present disclosure;

fig. 4 is a schematic perspective view illustrating the movable base, the flower basket and the material storage unit according to the embodiment of the present disclosure;

fig. 5 is a schematic perspective view of a mobile base according to an embodiment of the present application;

fig. 6 is a schematic perspective view illustrating the carrier provided in the embodiment of the present application engaged with a flower basket;

fig. 7 is a schematic perspective view of a material moving mechanism according to an embodiment of the present application;

FIG. 8 is a perspective view of a first pulling assembly and a second pulling assembly according to an embodiment of the present disclosure;

fig. 9 is a partial schematic view of the first pulling assembly and the second pulling assembly engaged with the movable base according to the embodiment of the present disclosure;

fig. 10 is a perspective view of a material storage position assembly according to an embodiment of the present disclosure;

fig. 11 is a perspective view of a material pick-and-place assembly according to an embodiment of the present disclosure;

fig. 12 is a partial schematic view of a rail assembly provided in an embodiment of the present application.

Detailed Description

Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.

It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.

The embodiment of the present application provides a material conveying device for a semiconductor equipment 100 with single-side loading and unloading, including: the device comprises one or more material storage position assemblies 1, one or more moving bases 2, a material moving mechanism 3, a guide rail assembly 4 and one or more material taking and placing position assemblies 5, wherein the moving bases 2 are used for bearing materials 200; the material storage position assembly 1 is arranged on one side of the guide rail assembly 4 and is used for bearing the movable base 2; the material moving mechanism 3 is arranged on the guide rail assembly 4, can move along the guide rail assembly 4 and comprises one or more first traction assemblies 36, and the first traction assemblies 36 are used for moving the moving base 2 from the material storage position assembly 1 to the material moving mechanism 3 and also used for moving the moving base 2 from the material moving mechanism 3 back to the material storage position assembly 1; the material taking and placing position component 5 is arranged on the other side of the guide rail component 4 and used for bearing the moving base 2, and comprises one or more second traction components 54, wherein the second traction components 54 are used for moving the moving base 2 from the material moving mechanism 3 to the material taking and placing position component 5 and also used for moving the moving base 2 from the material taking and placing position component 5 back to the material moving mechanism 3.

As shown in fig. 1 and 2, the single-sided loading and unloading semiconductor apparatus 100 may be a wafer cleaning apparatus, and the material 200 may be, for example, a wafer cassette (also called a basket) containing wafers to be cleaned, but the embodiment of the present invention is not limited thereto. The guide rail assembly 4 may be specifically disposed on the left side of the semiconductor apparatus 100 with one-side loading and unloading, that is, the loading and unloading end 101 of the semiconductor apparatus 100 with one-side loading and unloading, and the extending direction of the guide rail assembly 4 may form an included angle with the moving direction of the robot 102 of the semiconductor apparatus 100 with one-side loading and unloading, and the included angle may be, for example, 90 degrees, but the embodiment of the present application is not limited thereto.

As shown in fig. 2, a plurality of material storage level assemblies 1 may be disposed on the upper side of the guide rail assembly 4, the plurality of material storage level assemblies 1 may be disposed in parallel along the extending direction of the guide rail assembly 4, the material storage level assemblies 1 may be used for carrying the movable base 2, and the movable base 2 is used for carrying the material. In practical application, a plurality of mobile bases 2 carrying materials can be placed on the material storage position assembly 1 by a hoisting device or an operator, but the embodiment of the application does not limit the specific way of placing the mobile bases 2 on the material storage position assembly 1. By adopting the above design, owing to set up a plurality of materials and deposit position subassembly 1, not only be convenient for depositing of wafer can reduce operating personnel or hoist device's operating frequency moreover to can effectively improve work efficiency, and can also use manpower sparingly and material resources's cost by a wide margin, and then the effectual economic benefits who improves this application embodiment. It should be noted that, the number of the plurality of material storage level assemblies 1 is not limited in the embodiment of the present application, and may be set according to the length of the guide rail assembly 4. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

As shown in fig. 2, the material moving mechanism 3 may be disposed on the guide rail assembly 4, and the material moving mechanism 3 may include two first pulling assemblies 36 disposed side by side, and the two first pulling assemblies 36 may be aligned with any two adjacent material storage position assemblies 1. One of the first pulling elements 36 can move the moving base 2 from the material storage position element 1 to the material moving mechanism 3, and the moving base 2 carries the material to be cleaned; and the other first traction assembly 36 can move the mobile base 2 from the material moving mechanism 3 to the material storage position assembly 1, and the mobile base 2 can carry the cleaned material. In some cases, the two first pulling members 36 may move the moving base 2 from the material storage level assembly 1 to the material moving mechanism 3 simultaneously, or move the moving base 2 from the material moving mechanism 3 to the material storage level assembly 1 simultaneously.

As shown in fig. 2, the material taking and placing position assembly 5 is disposed at the other side of the guide rail assembly 4 for carrying the moving base 2. Specifically, the material taking and placing assembly 5 may be disposed between the guide rail assembly 4 and the upper and lower material ends 101, and the manipulator 102 may directly take and place the moving base 2 from the material taking and placing assembly 5. The material pick-and-place assembly 5 may be disposed directly below the robot 102 to facilitate the robot 102 to pick or place the mobile base 2. By adopting the arrangement, the waiting time of the manipulator 102 in the cleaning process of the material can be reduced, so that the working efficiency of the single-side loading and unloading semiconductor equipment 100 applying the embodiment of the application can be effectively improved. Further, the material taking and placing assembly 5 may further include a second traction assembly 54, and when the material moving mechanism 3 is aligned with the material taking and placing assembly 5, the second traction assembly 54 may move the moving base 2 from the material moving mechanism 3 to the material taking and placing assembly 5; the second pulling assembly 54 can also move the mobile base 2 back onto the material moving mechanism 3. Optionally, the first pulling assembly 36 may also move the moving base 2 back to the material moving mechanism 3, but the embodiment of the present application is not limited thereto.

It should be noted that the material pick-and-place assembly 5 is not necessarily included in all embodiments of the present application, and in some other embodiments, the robot 102 may directly cooperate with the material moving mechanism 3 to grasp or place the moving base 2. In addition, the number of the second traction assemblies 54 on the material taking and placing assembly 5 is not limited in the implementation of the present application, and the number of the second traction assemblies 54 may be multiple. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

According to the embodiment of the application, the guide rail assembly is arranged at the feeding and discharging end of the semiconductor equipment for feeding and discharging on one side, the material storage position assembly and the material taking and placing position assembly are arranged on two sides of the guide rail assembly, the material moving mechanism is arranged on the guide rail assembly, and the moving base is moved through the first traction assembly 36 and the second traction assembly, so that the automatic feeding and discharging operation of materials in the process is realized, the efficiency of the semiconductor equipment for feeding and discharging on one side can be effectively improved, and the waiting time of the semiconductor equipment for feeding and discharging on one side is greatly reduced; and because a plurality of mobile base can be deposited to one side of guide rail assembly, consequently can effectively reduce operating personnel's outfit to not only can effectively reduce the cost of labor, but also can further improve work efficiency.

In an embodiment of the present application, the mobile base 2 includes: the device comprises a movable seat 21 and a bearing piece 22, wherein a pulley 23 is arranged at the bottom of the movable seat 21, and the movable base 2 moves through the pulley 23; the bearing member 22 is disposed on the upper portion of the movable base 21, and is fixedly connected to the movable base 21 for bearing the material.

As shown in fig. 3, a plurality of mobile bases 2 are respectively arranged with a plurality of material storage assemblies 1 in a matching manner, the number of the mobile bases 2 can be correspondingly arranged with the number of the material storage assemblies 1, the mobile bases 2 can be used for bearing a plurality of materials 200, and the mobile bases 2 can divide the materials 200 into a plurality of groups so as to facilitate the transmission of the materials 200, so that the operation frequency can be effectively reduced, and the work efficiency can be greatly improved. The movable base 2 and the material storage position assembly 1 can be matched in a sliding mode, when in practical application, the movable base 2 can slide between the material storage position assembly 1, the material moving mechanism 3 and the material taking and placing position assembly 5, so that the material can be conveyed conveniently, the conveying can be more stable in a sliding fit mode, and the safety of the embodiment of the application is further improved.

It should be noted that, the embodiment of the present application does not limit the specific structure and number of the moving base 2, as long as it can satisfy the requirement of carrying materials and can drive the materials to move relatively. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

As shown in fig. 4 and 5, the movable base 21 may include a connection plate 211, a positioning plate 212, and a side support plate 213. The connecting plate 211 may be a hollow plate-shaped structure, two positioning plates 212 are respectively disposed on two opposite sides of the connecting plate 211, and the two positioning plates 212 may be used for mounting the carrier 22. Two side support plates 213 may be provided at the lower portion of the connection plate 211, and the side support plates 213 may be positioned to correspond to the positioning plates 212. A plurality of pulleys 23 may be provided on the side support plate 213. By adopting the design, the structure implemented by the application is simple and easy to maintain, and the application and maintenance cost of the embodiment of the application can be effectively reduced. Further, the pulley 23 is arranged, so that the movement of the movable seat 21 in the embodiment of the present application can be more stable, and the failure rate in the embodiment of the present application can be effectively reduced.

The carrier 22 may be made of a bent stainless steel tube, and its specific structure may refer to the shape shown in fig. 5. The bearing 22 may be fixedly disposed on the movable base 21 by means of a pressing block 26 and a bolt 27, but the embodiment of the present application is not limited thereto, and for example, the two may also be fixedly connected by means of welding. Furthermore, the left and right bending angles of the bearing member 22 can be matched with the lower inclined plane of the flower basket 6 for positioning, so as to prevent the flower basket 6 from overturning left and right. By adopting the design, the occupied space for positioning between the movable seat 21 and the flower basket 6 is smaller, and the structure is more compact. In addition, by adopting the design, the flower basket 6 can be effectively prevented from overturning when the movable base 2 moves, and the phenomenon that the manipulator 102 cannot clamp the flower basket 6 due to the fact that the position of the flower basket 6 in the movable base 2 deviates during moving can also be prevented.

It should be noted that the embodiment of the present application is not limited to the specific implementation of the bearing member 22, for example, the bearing member 22 may also be made of other metal materials and have other shapes as long as the function of bearing and positioning the flower basket 6 is satisfied. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

As shown in fig. 6, the bottom of the basket 6 may be provided with four positioning slots 61 extending along the radial direction of the wafer, and the positioning slots 61 may be aligned with the position of the carrier 22, and in practical application, the positioning slots 61 may be engaged with the carrier 22 for positioning, so as to axially position the basket 6 on the carrier 22 along the material 200, that is, to achieve positioning of the front and rear sides of the basket 6. By adopting the design, the flower basket 6 can be effectively prevented from overturning in the front and back directions when the movable base 2 moves, and the position of the flower basket 6 in the movable base 2 can be prevented from shifting when the movable base 2 is moved, so that the phenomenon that the manipulator 102 cannot clamp the flower basket 6 is caused, the safety of the embodiment of the application is improved, the stability of the embodiment of the application is higher, and the production efficiency can be effectively improved.

It should be noted that, in the embodiment of the present application, the specific implementation of the positioning card slot 61 is not limited, and the cross-sectional shape of the positioning card slot 61 may be a triangular or rectangular structure. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

In an embodiment of the present application, the material moving mechanism 3 further includes: the device comprises a base 31, a first driving part 32, one or more first sliding rails 33 and one or more first positioning blocks 34, wherein a first traction assembly 36, the first driving part 32 and the first sliding rails 33 are all arranged on the base 31, and the base 31 is in sliding fit with a guide rail assembly 4; the first driving part 32 is used for driving the base 31 to move on the guide rail assembly 4; the extending direction of the first slide rail 33 is crossed with the extending direction of the guide rail assembly 4, the first positioning blocks 34 are correspondingly arranged on the side walls of the first slide rail 33 one by one, the positioning grooves 25 are correspondingly arranged on the movable base 2, the first traction assembly 36 moves the movable base 2 from the material storage position assembly 1 to the first slide rail 33, and the first positioning blocks 34 and the positioning grooves 25 are matched to position the movable base 2. Optionally, the extending direction of the first slide rail 33 is perpendicular to the extending direction of the guide rail assembly 4.

As shown in fig. 7 and 12, the base 31 may be a plate-shaped structure, and four sliding blocks 35 are disposed at the bottom of the base for sliding in cooperation with the rail assembly 4, but the embodiment of the present invention is not limited thereto. The first driving part 32 may specifically adopt a motor, and the first driving part 32 may be disposed at an end position of the base 31. First drive division 32 can be provided with the gear when practical application, can be provided with tooth's socket 43 on the guide rail assembly 4, the gear can with the cooperation of tooth's socket 43 in order to drive material moving mechanism 3 and remove for guide rail assembly 4, first drive division 32 also can adopt other drive structure, this application embodiment does not limit to this. By adopting the design, the application implementation structure is simple, and the application and maintenance cost of the embodiment of the application can be effectively reduced.

The number of the first slide rails 33 may be four, each two first slide rails 33 may correspond to one material storage station assembly and one material taking and placing station assembly, and the extending direction of the first slide rails 33 may be parallel to the moving direction of the robot 102, that is, the extending direction of the first slide rails 33 is perpendicular to the extending direction of the guide rail assembly 4. The first slide rail 33 can be convenient for the movable base 2 to slide among the material storage position component 1, the material moving mechanism 3 and the material taking and placing position component 5 by adopting the design. Further, a first traction mechanism may be disposed between each first sliding rail 33.

One side of each of the first slide rails 33 may be provided with a first positioning block 34, or one side of each of the two first slide rails 33 is provided with a first positioning block 34. One side or two sides of the mobile base 2 are provided with positioning slots 25, and the first positioning block 34 and the positioning slots 25 cooperate to selectively position the mobile base 2 on the slide rail. The first positioning block 34 may be a ball plunger, and the positioning slot 25 may be disposed on the side support plate 213 of the movable base 21. Further, a protrusion may be disposed on the side support plate 213, and a positioning groove 25 may be opened at the top of the protrusion. First locating block 34 cooperates with locating slot 25 to realize the location of moving base 2, and then realizes the location of moving base 2. By adopting the above design, when the base 2 needs to be moved, the first positioning block 34 can be separated from the positioning slot 25, and vice versa. Therefore, the embodiment of the application has a simple and reasonable structure and is easy to apply and maintain.

It should be noted that, the positioning structure between the moving base 2 and the first sliding rail 33 is not limited in the embodiment of the present application, for example, the positions of the first positioning block 34 and the positioning slot 25 may be interchanged. In addition, the number of the first slide rail 33 and the first positioning block 34 is not limited in the embodiment of the present application, and the number thereof can be adjusted and set according to actual requirements. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

In one embodiment of the present application, first pulling assembly 36 and second pulling assembly 54 each include: the device comprises a second driving part 71, a driving wheel 72, a driven wheel 73, a tension wheel 74, a transmission piece 75 and a traction pin 76, wherein the second driving part 71 is connected with the driving wheel 72 and used for driving the driving wheel 72 to rotate; the driving wheel 72 and the driven wheel 73 are arranged at intervals, the transmission piece 75 is connected with the driving wheel 72 and the driven wheel 73, and when the driving wheel 72 rotates, the transmission piece 75 rotates along with the driving wheel 73 and drives the driven wheel 73 to rotate; the tension wheel 74 is arranged between the driving wheel 72 and the driven wheel 73 and is abutted against the transmission piece 75 for adjusting the tension degree of the transmission piece 75; the traction pin 76 is fixedly arranged on the transmission member 75, the movable base 2 is provided with a traction block 28 matched with the traction pin 76, and the traction pin 76 is matched with the traction block 28 through the rotation of the transmission member 75 to enable the movable base 2 to move.

As shown in fig. 8 and 9, the driving pulley 72 may be disposed on the second driving portion 71, the driven pulley 73 may be disposed at a distance from the driving pulley 72, a transmission member 75 may be disposed between the driving pulley and the driven pulley, and a traction pin 76 may be disposed on the transmission member 75. The tension wheel 74 is disposed between the driving wheel 72 and the driven wheel 73, and can selectively abut against the transmission member 75 from the inner side of the transmission member 75. In practical applications, the driving wheel 72 can convert the rotation motion of the second driving portion 71 into the linear motion of the transmission member 75, so that the pulling pin 76 can be engaged with the hook of the mobile base 2 to realize the movement of the mobile base 2. Further, the second driving portion 71 can rotate forward and backward to drive the movable base 2 to slide, so as to slide among the material storage component 1, the material moving mechanism 3 and the material taking and placing component 5. By adopting the design, the application and maintenance cost of the embodiment of the application can be effectively reduced, and the economic benefit can be further improved. Furthermore, the automation degree of the embodiment of the application is higher, the allocation of operators is further reduced, and therefore the labor cost can be greatly reduced.

The tensioning wheel 74 can be disposed on the material moving mechanism 3 and the material picking and placing assembly 5, and can be slidably positioned with the material moving mechanism 3 and the material picking and placing assembly 5, so as to adjust the tension of the transmission member 75. With the above design, the tension of the transmission member 75 can be always kept in the most suitable state due to the arrangement of the tension wheel 74, so that the first traction assembly 36 and the second traction assembly 54 can realize more accurate control on the mobile base 2. In an embodiment of the present application, the transmission member 75 may be a chain or a belt, which is not limited in the embodiment of the present application, but each of the transmission members should be adjusted according to the type of the transmission member 75. By adopting the design, the application of the embodiment of the application is wider, and the application and the maintenance are convenient.

It should be noted that the embodiment of the present application is not limited to the specific implementation of the second driving portion 71, and for example, the second driving portion 71 may be implemented by a motor. In the embodiment of the present application, the position of the tension pulley 74 is not limited, and for example, the tension pulley 74 may be provided outside the transmission member 75. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

In an embodiment of the present application, the material storage position assembly 1 includes: the material moving mechanism 3 can selectively align the first slide rail 33 with the second slide rail 12 by moving on the guide rail assembly 4, wherein the extending direction of the second slide rail 12 is the same as the extending direction of the first slide rail 33; the second positioning block 13 is disposed on the sidewall of the second slide rail 12, and corresponds to the positioning slot 25 on the mobile base 2, the first traction assembly 36 moves the mobile base 2 from the first slide rail 33 to the second slide rail 12, and the second positioning block 13 is matched with the positioning slot 25 to position the mobile base 2.

As shown in fig. 10, the supporting frame 11 may specifically include a bottom plate 111 and two side plates 112, the two side plates 112 are disposed on two sides of the bottom plate 111, and the two second sliding rails 12 are disposed on the two side plates 112 respectively. The extending direction of the second slide rail 12 may be parallel to the moving direction of the robot 102, and the extending direction of the second slide rail 12 may be the same as the extending direction of the first slide rail 33. The two second slide rails 12 may both be provided with the second positioning blocks 13, or the second positioning blocks 13 may be only provided on the side wall of one of the second slide rails 12. Optionally, the second positioning block 13 may also be disposed on a side wall of the support frame 11, but the embodiment of the present application is not limited thereto. The specific embodiment of the second positioning block 13 and the matching manner with the positioning slot 25 can refer to the first positioning block 34, and are not described herein again. By adopting the design, the embodiment of the application has the advantages of simple structure, convenience in use and maintenance and capability of effectively reducing application and maintenance costs.

It should be noted that the embodiment of the present application is not limited to the specific implementation of the support frame 11, and for example, the support frame 11 may also be an integral structure. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

In an embodiment of the present application, the material taking and placing assembly 5 includes a supporting frame 51, a third slide rail 52 and a third positioning block 53, wherein an extending direction of the third slide rail 52 is the same as an extending direction of the first slide rail 33, and the material moving mechanism 3 can selectively align the first slide rail 33 with the third slide rail 52 by moving on the guide rail assembly 4; the third positioning block 53 is disposed on the sidewall of the third slide rail 52 and corresponds to the positioning slot 25 on the mobile base 2, the second traction assembly 54 pulls the mobile base 2 from the first slide rail 33 to the third slide rail 52, and the third positioning block 53 is matched with the positioning slot 25 to be positioned on the mobile base 2.

As shown in fig. 11, the supporting frame 51 may specifically include a first horizontal plate 511, a second horizontal plate 512 and two vertical plates 513. The two sides of the first horizontal plate 511 are respectively provided with a vertical plate 513, a second horizontal plate 512 is arranged between the two vertical plates 513, and a second traction assembly 54 can be arranged on the second horizontal plate 512. The two third sliding rails 52 are respectively disposed on the two vertical plates 513. The extending direction of the second slide rail 12 may be parallel to the moving direction of the robot 102, and the extending direction of the third slide rail 52 may be the same as the extending direction of the first slide rail 33 and the second slide rail 12. The two third slide rails 52 may be provided with third positioning blocks 53, or the third positioning blocks 53 may be provided only on the side wall of one of the third slide rails 52. Optionally, the third positioning block 53 may also be disposed on the first horizontal plate 511, but the embodiment of the present application is not limited thereto. The specific embodiment of the third positioning block 53 and the matching manner with the positioning slot 25 can refer to the first positioning block 34 and the second positioning block 13, and are not described herein again. By adopting the design, the embodiment of the application has the advantages of simple structure, convenience in use and maintenance and capability of effectively reducing application and maintenance costs.

In an embodiment of the present application, as shown in fig. 12, the guide rail assembly 4 includes a support 41, a guide rail 42 and a tooth slot 43, wherein the guide rail 42 and the tooth slot 43 are both disposed on the support 41; a sliding block is arranged on the guide rail 42, and the base 31 is fixedly connected with the sliding block; the first driving part 32 includes a gear engaged with the tooth slot 43, and the first driving part 32 drives the gear to rotate, so that the base 31 is moved on the guide rail 42 by the engagement of the tooth slot 43 and the gear. The two guide rails 42 may be arranged in parallel on the holder 41, and the teeth 43 may be located inside the two guide rails 42 and on the holder 41. By adopting the design, the application implementation structure is simple, and the application and maintenance cost of the embodiment of the application can be effectively reduced.

In an embodiment of the present application, as shown in fig. 5, the bottom of the moving base 21 is further provided with a guide wheel 24, and the guide wheel 24 is engaged with the first slide rail 33, the second slide rail 12 or the third slide rail 52 for limiting the moving direction of the moving base 2 when moving. Leading wheel 24 specifically can install on two collateral branch faggings 213, both ends can be provided with two leading wheels 24 around the collateral branch fagging 213, the axial of two leading wheels 24 all can be vertical setting, leading wheel 24 can with first slide rail 33, the inboard cooperation of second slide rail 12 and third slide rail 52, be used for when removing seat 21 and deposit a subassembly 1 at the material, when material moving mechanism 3 and material are got and are put between the position subassembly 5 and move, can lead to removing seat 21, thereby make the removal of removing seat 21 more stable.

It should be noted that the embodiment of the present application is not limited to the specific implementation of the guide wheel 24, as long as it can realize the limitation of the moving direction of the moving seat 21. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.

By applying the embodiment of the application, at least the following beneficial effects can be realized:

according to the embodiment of the application, the guide rail assembly is arranged at the feeding and discharging end of the semiconductor equipment for feeding and discharging on one side, the material storage position assembly and the material taking and placing position assembly are arranged on two sides of the guide rail assembly, the material moving mechanism is arranged on the guide rail assembly, and the moving base is moved through the first traction assembly and the second traction assembly, so that the automatic feeding and discharging operation of materials in the technological process is realized, the efficiency of the semiconductor equipment for feeding and discharging on one side can be effectively improved, and the waiting time of the semiconductor equipment for feeding and discharging on one side is greatly reduced; and because a plurality of mobile base can be deposited to one side of guide rail assembly, consequently can effectively reduce operating personnel's outfit to not only can effectively reduce the cost of labor, but also can further improve work efficiency.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.

The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.

Claims

1. A material conveying device for a semiconductor device with one-side loading and unloading function is characterized by comprising: one or more material storage position components, one or more moving bases, a material moving mechanism, a guide rail component and one or more material taking and placing position components, wherein,

the movable base is used for bearing materials;

the material storage position assembly is arranged on one side of the guide rail assembly and is used for bearing the movable base;

the material moving mechanism is arranged on the guide rail assembly, can move along the guide rail assembly and comprises one or more first traction assemblies, and the first traction assemblies are used for moving the moving base from the material storage position assembly to the material moving mechanism and moving the moving base from the material moving mechanism back to the material storage position assembly; the material moving mechanism further comprises: the first traction assembly, the first driving part and the first slide rail are arranged on the base, and the base is in sliding fit with the guide rail assembly; the first driving part is used for driving the base to move on the guide rail assembly; the extending direction of the first slide rail is intersected with the extending direction of the guide rail assembly, the first positioning blocks are correspondingly arranged on the side walls of the first slide rail one by one, positioning grooves are correspondingly arranged on the mobile base, the first traction assembly moves the mobile base from the material storage position assembly to the first slide rail, and the first positioning blocks and the positioning grooves are matched to position the mobile base;

the material taking and placing component is arranged on the other side of the guide rail component and used for bearing the moving base, and the material taking and placing component comprises one or more second traction components, wherein the second traction components are used for moving the moving base to the material taking and placing component from the material moving mechanism and also used for moving the moving base to the material moving mechanism from the material taking and placing component.

2. The material transfer device of claim 1, wherein the mobile base comprises: a movable seat and a bearing piece, wherein,

the bottom of the moving seat is provided with a pulley, and the moving base moves through the pulley;

the bearing piece is arranged on the upper part of the moving seat, is fixedly connected with the moving seat and is used for bearing the material.

3. The material transfer device of claim 1, wherein the first track extends in a direction that is orthogonal to the direction of extension of the track assembly.

4. The material transfer device of any of claims 1 to 3, wherein the first pulling assembly and the second pulling assembly each comprise: a second driving part, a driving wheel, a driven wheel, a tension wheel, a transmission part and a traction pin, wherein,

the second driving part is connected with the driving wheel and is used for driving the driving wheel to rotate;

the driving wheel and the driven wheel are arranged at intervals, the transmission part is connected with the driving wheel and the driven wheel, and when the driving wheel rotates, the transmission part rotates along with the driving wheel and drives the driven wheel to rotate;

the tension wheel is arranged between the driving wheel and the driven wheel, abuts against the transmission part and is used for adjusting the tension degree of the transmission part;

the traction pin is fixedly arranged on the transmission piece, the movable base is provided with a traction block matched with the traction pin, and the traction pin is matched with the traction block to enable the movable base to move through the rotation of the transmission piece.

5. The material transfer device of claim 2, wherein the material storage assembly comprises: a supporting frame, a second slide rail and a second positioning block, wherein,

the extension direction of the second slide rail is the same as that of the first slide rail, and the material moving mechanism can selectively align the first slide rail with the second slide rail by moving on the guide rail assembly;

the second positioning block is arranged on the side wall of the second slide rail and corresponds to the positioning groove on the mobile base in position, the first traction assembly moves the mobile base from the first slide rail to the second slide rail, and the second positioning block is matched with the positioning groove to position the mobile base.

6. The material conveying device according to claim 2, wherein the material positioning assembly comprises a support frame, a third slide rail, and a third positioning block,

the extension direction of the third slide rail is the same as that of the first slide rail, and the material moving mechanism can selectively align the first slide rail with the third slide rail by moving on the guide rail assembly;

the third positioning block is arranged on the side wall of the third slide rail and corresponds to the positioning groove on the mobile base in position, the second traction assembly enables the mobile base to move from the first slide rail to the third slide rail, and the third positioning block is matched with the positioning groove to be positioned on the mobile base.

7. The material transfer device of claim 1, wherein the guide track assembly comprises a carriage, a guide track, a gullet, wherein,

the guide rail and the tooth grooves are arranged on the support;

a sliding block is arranged on the guide rail, and the base is fixedly connected with the sliding block;

the first driving part comprises a gear matched with the tooth grooves, the gear rotates under the driving of the first driving part, and the base is driven to move on the guide rail through the matching of the tooth grooves and the gear.

8. The material conveying device according to any one of claims 5 to 6, characterized in that, for the material conveying device according to claim 5, the bottom of the moving base is further provided with a guide wheel which is matched with the first slide rail and the second slide rail and used for limiting the moving direction of the moving base when the moving base moves; alternatively, the first and second electrodes may be,

for the material conveying device according to claim 6, the bottom of the moving base is further provided with a guide wheel, and the guide wheel is matched with the first slide rail and the third slide rail and used for limiting the moving direction of the moving base when the moving base moves.

9. A semiconductor apparatus with single-side loading and unloading, comprising the material conveying device as claimed in any one of claims 1 to 8.