CN110712113A - 一种曲面玻璃抛光机及其在线监测及调整方法 - Google Patents
一种曲面玻璃抛光机及其在线监测及调整方法 Download PDFInfo
- Publication number
- CN110712113A CN110712113A CN201911010129.XA CN201911010129A CN110712113A CN 110712113 A CN110712113 A CN 110712113A CN 201911010129 A CN201911010129 A CN 201911010129A CN 110712113 A CN110712113 A CN 110712113A
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- CN
- China
- Prior art keywords
- concentration
- polishing
- polishing powder
- supply tank
- liquid supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 128
- 238000012544 monitoring process Methods 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000011521 glass Substances 0.000 title claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 114
- 239000000843 powder Substances 0.000 claims abstract description 80
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 43
- 230000007246 mechanism Effects 0.000 claims abstract description 29
- 238000003756 stirring Methods 0.000 claims description 16
- 230000000694 effects Effects 0.000 abstract description 8
- 230000007547 defect Effects 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911010129.XA CN110712113A (zh) | 2019-10-23 | 2019-10-23 | 一种曲面玻璃抛光机及其在线监测及调整方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911010129.XA CN110712113A (zh) | 2019-10-23 | 2019-10-23 | 一种曲面玻璃抛光机及其在线监测及调整方法 |
Publications (1)
Publication Number | Publication Date |
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CN110712113A true CN110712113A (zh) | 2020-01-21 |
Family
ID=69214112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201911010129.XA Pending CN110712113A (zh) | 2019-10-23 | 2019-10-23 | 一种曲面玻璃抛光机及其在线监测及调整方法 |
Country Status (1)
Country | Link |
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CN (1) | CN110712113A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113141430A (zh) * | 2021-05-10 | 2021-07-20 | 蓝思科技(长沙)有限公司 | 具有波纹纹理的3d玻璃及其抛光方法、具有波纹纹理的手机盖板及其制备方法和手机 |
CN114952612A (zh) * | 2022-05-20 | 2022-08-30 | 深圳市普盛旺科技有限公司 | 抛光研磨液过滤设备和抛光研磨液循环过滤系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1579956A2 (en) * | 2004-03-25 | 2005-09-28 | Kabushiki Kaisha Toshiba | Polishing apparatus and polishing method |
US20070221615A1 (en) * | 2006-03-07 | 2007-09-27 | Koji Maeda | Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid |
CN103264352A (zh) * | 2013-04-26 | 2013-08-28 | 中国科学院上海光学精密机械研究所 | 大型环抛机的抛光液循环过滤注液装置 |
CN103699143A (zh) * | 2012-09-27 | 2014-04-02 | 盛美半导体设备(上海)有限公司 | 控制抛光液浓度稳定的系统和方法 |
CN105643467A (zh) * | 2016-01-14 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | 用于抛光的全自动配液注液装置 |
CN110227294A (zh) * | 2019-06-17 | 2019-09-13 | 中国工程物理研究院激光聚变研究中心 | 抛光液循环过滤系统 |
-
2019
- 2019-10-23 CN CN201911010129.XA patent/CN110712113A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1579956A2 (en) * | 2004-03-25 | 2005-09-28 | Kabushiki Kaisha Toshiba | Polishing apparatus and polishing method |
US20070221615A1 (en) * | 2006-03-07 | 2007-09-27 | Koji Maeda | Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid |
CN103699143A (zh) * | 2012-09-27 | 2014-04-02 | 盛美半导体设备(上海)有限公司 | 控制抛光液浓度稳定的系统和方法 |
CN103264352A (zh) * | 2013-04-26 | 2013-08-28 | 中国科学院上海光学精密机械研究所 | 大型环抛机的抛光液循环过滤注液装置 |
CN105643467A (zh) * | 2016-01-14 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | 用于抛光的全自动配液注液装置 |
CN110227294A (zh) * | 2019-06-17 | 2019-09-13 | 中国工程物理研究院激光聚变研究中心 | 抛光液循环过滤系统 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113141430A (zh) * | 2021-05-10 | 2021-07-20 | 蓝思科技(长沙)有限公司 | 具有波纹纹理的3d玻璃及其抛光方法、具有波纹纹理的手机盖板及其制备方法和手机 |
CN113141430B (zh) * | 2021-05-10 | 2022-09-13 | 蓝思科技(长沙)有限公司 | 具有波纹纹理的3d玻璃及其抛光方法、具有波纹纹理的手机盖板及其制备方法和手机 |
CN114952612A (zh) * | 2022-05-20 | 2022-08-30 | 深圳市普盛旺科技有限公司 | 抛光研磨液过滤设备和抛光研磨液循环过滤系统 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20200121 Assignee: Hebei Guangxing Semiconductor Technology Co.,Ltd. Assignor: TUNGHSU GROUP Co.,Ltd. Contract record no.: X2021990000461 Denomination of invention: A curved glass polishing machine and its on-line monitoring and adjustment method License type: Common License Record date: 20210810 Application publication date: 20200121 Assignee: Sichuan Zhongpu wisdom Group Co.,Ltd. Assignor: TUNGHSU GROUP Co.,Ltd. Contract record no.: X2021990000464 Denomination of invention: A curved glass polishing machine and its on-line monitoring and adjustment method License type: Common License Record date: 20210810 |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20200121 Assignee: Henan Quxian Photoelectric Technology Co.,Ltd. Assignor: TUNGHSU GROUP Co.,Ltd. Contract record no.: X2021110000034 Denomination of invention: A curved glass polishing machine and its on-line monitoring and adjustment method License type: Common License Record date: 20210909 |
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CB02 | Change of applicant information |
Address after: 100075 1112, 11 / F, 101, building 4, courtyard 2, sihezhuang Road, Fengtai District, Beijing Applicant after: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. Applicant after: TUNGHSU GROUP Co.,Ltd. Applicant after: Hebei Guangxing Semiconductor Technology Co.,Ltd. Address before: 100075 1112, 11 / F, 101, building 4, courtyard 2, sihezhuang Road, Fengtai District, Beijing Applicant before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. Applicant before: TUNGHSU GROUP Co.,Ltd. Applicant before: SHIJIAZHUANG DONGXU PHOTOELECTRICITY EQUIPMENT TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20211014 Address after: 621000 No. 177, north section of Fubin Road, economic development zone, Mianyang City, Sichuan Province Applicant after: Sichuan Fusheng Technology Co.,Ltd. Address before: 100075 1112, 11 / F, 101, building 4, courtyard 2, sihezhuang Road, Fengtai District, Beijing Applicant before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. Applicant before: TUNGHSU GROUP Co.,Ltd. Applicant before: Hebei Guangxing Semiconductor Technology Co.,Ltd. |
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