CN110697252B - Storage and transportation device for semiconductor wafers and using method thereof - Google Patents
Storage and transportation device for semiconductor wafers and using method thereof Download PDFInfo
- Publication number
- CN110697252B CN110697252B CN201910964953.2A CN201910964953A CN110697252B CN 110697252 B CN110697252 B CN 110697252B CN 201910964953 A CN201910964953 A CN 201910964953A CN 110697252 B CN110697252 B CN 110697252B
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- Prior art keywords
- electromagnetic valve
- storage
- control device
- semiconductor wafers
- brush body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 235000012431 wafers Nutrition 0.000 title claims abstract description 45
- 238000003860 storage Methods 0.000 title claims abstract description 41
- 239000004065 semiconductor Substances 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims description 11
- 230000007246 mechanism Effects 0.000 claims abstract description 55
- 239000000428 dust Substances 0.000 claims abstract description 30
- 238000010521 absorption reaction Methods 0.000 claims abstract description 18
- 238000004140 cleaning Methods 0.000 claims abstract description 4
- 239000000872 buffer Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000013618 particulate matter Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000916 dilatatory effect Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910964953.2A CN110697252B (en) | 2019-10-11 | 2019-10-11 | Storage and transportation device for semiconductor wafers and using method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910964953.2A CN110697252B (en) | 2019-10-11 | 2019-10-11 | Storage and transportation device for semiconductor wafers and using method thereof |
Publications (2)
Publication Number | Publication Date |
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CN110697252A CN110697252A (en) | 2020-01-17 |
CN110697252B true CN110697252B (en) | 2021-09-14 |
Family
ID=69199336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910964953.2A Active CN110697252B (en) | 2019-10-11 | 2019-10-11 | Storage and transportation device for semiconductor wafers and using method thereof |
Country Status (1)
Country | Link |
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CN (1) | CN110697252B (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0442780A1 (en) * | 1990-02-06 | 1991-08-21 | Saint-Gobain Vitrage International | Pallet for transport of glass panels |
KR20130007324A (en) * | 2011-06-30 | 2013-01-18 | (주)둔포기계 | Subtrate storage container |
CN103129858A (en) * | 2011-12-05 | 2013-06-05 | 陕西子竹电子有限公司 | Printed circuit board (PCB) anti-static turnover box |
CN109230317A (en) * | 2018-09-25 | 2019-01-18 | 刘林琴 | A kind of transhipment cabin for semiconductor substrate storage transport |
CN208994123U (en) * | 2018-10-18 | 2019-06-18 | 无锡百晟科技有限公司 | Circuit board flashboard rack with deashing device |
-
2019
- 2019-10-11 CN CN201910964953.2A patent/CN110697252B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0442780A1 (en) * | 1990-02-06 | 1991-08-21 | Saint-Gobain Vitrage International | Pallet for transport of glass panels |
KR20130007324A (en) * | 2011-06-30 | 2013-01-18 | (주)둔포기계 | Subtrate storage container |
CN103129858A (en) * | 2011-12-05 | 2013-06-05 | 陕西子竹电子有限公司 | Printed circuit board (PCB) anti-static turnover box |
CN109230317A (en) * | 2018-09-25 | 2019-01-18 | 刘林琴 | A kind of transhipment cabin for semiconductor substrate storage transport |
CN208994123U (en) * | 2018-10-18 | 2019-06-18 | 无锡百晟科技有限公司 | Circuit board flashboard rack with deashing device |
Also Published As
Publication number | Publication date |
---|---|
CN110697252A (en) | 2020-01-17 |
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PB01 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20210830 Address after: Room c-712, No. 198, Qidi Road, Xiaoshan Economic and Technological Development Zone, Xiaoshan District, Hangzhou City, Zhejiang Province Applicant after: Hangzhou Xiangyi Technology Co.,Ltd. Address before: 215000 No.6, Weizhong Road, Weitang Town, Xiangcheng District, Suzhou City, Jiangsu Province Applicant before: Wang Huazhen |
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20240423 Address after: Room 1812, Building 1, Qiantang Aviation Building, Shangcheng District, Hangzhou City, Zhejiang Province, 310000 Patentee after: Hangzhou Pinde Holding Co.,Ltd. Country or region after: China Address before: Room c-712, No. 198, Qidi Road, Xiaoshan Economic and Technological Development Zone, Xiaoshan District, Hangzhou City, Zhejiang Province Patentee before: Hangzhou Xiangyi Technology Co.,Ltd. Country or region before: China |
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Effective date of registration: 20240516 Address after: Room 05-2, 8th Floor, Building 2, Wuhan Optics Valley Enterprise World, No.1 Lingjiashan South Road, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Shenglida Technology Co.,Ltd. Country or region after: China Address before: Room 1812, Building 1, Qiantang Aviation Building, Shangcheng District, Hangzhou City, Zhejiang Province, 310000 Patentee before: Hangzhou Pinde Holding Co.,Ltd. Country or region before: China |
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TR01 | Transfer of patent right |