CN110660696A - 一种蓝宝石衬底的制造方法和滴蜡设备 - Google Patents
一种蓝宝石衬底的制造方法和滴蜡设备 Download PDFInfo
- Publication number
- CN110660696A CN110660696A CN201910796178.4A CN201910796178A CN110660696A CN 110660696 A CN110660696 A CN 110660696A CN 201910796178 A CN201910796178 A CN 201910796178A CN 110660696 A CN110660696 A CN 110660696A
- Authority
- CN
- China
- Prior art keywords
- wax
- wafer
- circular
- back surface
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 33
- 239000010980 sapphire Substances 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000005498 polishing Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 7
- 230000001105 regulatory effect Effects 0.000 claims abstract description 7
- 238000003860 storage Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 9
- 238000000137 annealing Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000000691 measurement method Methods 0.000 claims description 2
- 238000009987 spinning Methods 0.000 claims description 2
- 238000000227 grinding Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910796178.4A CN110660696B (zh) | 2019-08-27 | 2019-08-27 | 一种蓝宝石衬底的制造方法和滴蜡设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910796178.4A CN110660696B (zh) | 2019-08-27 | 2019-08-27 | 一种蓝宝石衬底的制造方法和滴蜡设备 |
Publications (2)
Publication Number | Publication Date |
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CN110660696A true CN110660696A (zh) | 2020-01-07 |
CN110660696B CN110660696B (zh) | 2021-09-21 |
Family
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Family Applications (1)
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CN201910796178.4A Active CN110660696B (zh) | 2019-08-27 | 2019-08-27 | 一种蓝宝石衬底的制造方法和滴蜡设备 |
Country Status (1)
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CN (1) | CN110660696B (zh) |
Citations (13)
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CN1869818A (zh) * | 2005-01-28 | 2006-11-29 | Asml蒙片工具有限公司 | 用于改进临界尺寸计算中使用的光刻胶模型的校准的方法、程序产品以及设备 |
US20090075451A1 (en) * | 2007-09-14 | 2009-03-19 | Oki Electric Industry Co., Ltd | Method for manufacturing semiconductor substrate |
CN101934492A (zh) * | 2010-08-10 | 2011-01-05 | 天津中环领先材料技术有限公司 | 高平整度区熔硅抛光片的抛光工艺 |
CN102490439A (zh) * | 2011-12-15 | 2012-06-13 | 天津中环领先材料技术有限公司 | Igbt用区熔单晶硅双面抛光片的有蜡贴片工艺 |
CN203595493U (zh) * | 2014-02-13 | 2014-05-14 | 南京京晶光电科技有限公司 | 一种可在晶片贴蜡抛光状态下对其测量的晶片厚度量具 |
CN103988047A (zh) * | 2011-11-30 | 2014-08-13 | 大发工业株式会社 | 蜡的涂布膜厚和涂布范围评价方法、以及涂布检查系统 |
CN105382678A (zh) * | 2015-10-29 | 2016-03-09 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片的抛光装置及其抛光方法 |
US20170166768A1 (en) * | 2015-12-11 | 2017-06-15 | Seiko Epson Corporation | Ink set and recording method |
CN107243821A (zh) * | 2017-08-02 | 2017-10-13 | 上海超硅半导体有限公司 | 一种蓝宝石衬底片的单面抛光方法 |
CN107505225A (zh) * | 2017-08-14 | 2017-12-22 | 山东南山铝业股份有限公司 | 一种铝合金罐盖涂蜡量的检测方法 |
CN109830577A (zh) * | 2019-01-18 | 2019-05-31 | 重庆市妙格科技有限公司 | 一种高质量发光二极管的制造方法 |
CN109968191A (zh) * | 2018-11-30 | 2019-07-05 | 浙江博蓝特半导体科技股份有限公司 | 一种蓝宝石衬底贴片方法 |
CN110098286A (zh) * | 2018-01-29 | 2019-08-06 | 山东浪潮华光光电子股份有限公司 | 一种简便的led晶片衬底减薄中的贴片方法 |
-
2019
- 2019-08-27 CN CN201910796178.4A patent/CN110660696B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1869818A (zh) * | 2005-01-28 | 2006-11-29 | Asml蒙片工具有限公司 | 用于改进临界尺寸计算中使用的光刻胶模型的校准的方法、程序产品以及设备 |
US20090075451A1 (en) * | 2007-09-14 | 2009-03-19 | Oki Electric Industry Co., Ltd | Method for manufacturing semiconductor substrate |
CN101934492A (zh) * | 2010-08-10 | 2011-01-05 | 天津中环领先材料技术有限公司 | 高平整度区熔硅抛光片的抛光工艺 |
CN103988047A (zh) * | 2011-11-30 | 2014-08-13 | 大发工业株式会社 | 蜡的涂布膜厚和涂布范围评价方法、以及涂布检查系统 |
CN102490439A (zh) * | 2011-12-15 | 2012-06-13 | 天津中环领先材料技术有限公司 | Igbt用区熔单晶硅双面抛光片的有蜡贴片工艺 |
CN203595493U (zh) * | 2014-02-13 | 2014-05-14 | 南京京晶光电科技有限公司 | 一种可在晶片贴蜡抛光状态下对其测量的晶片厚度量具 |
CN105382678A (zh) * | 2015-10-29 | 2016-03-09 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片的抛光装置及其抛光方法 |
US20170166768A1 (en) * | 2015-12-11 | 2017-06-15 | Seiko Epson Corporation | Ink set and recording method |
CN107243821A (zh) * | 2017-08-02 | 2017-10-13 | 上海超硅半导体有限公司 | 一种蓝宝石衬底片的单面抛光方法 |
CN107505225A (zh) * | 2017-08-14 | 2017-12-22 | 山东南山铝业股份有限公司 | 一种铝合金罐盖涂蜡量的检测方法 |
CN110098286A (zh) * | 2018-01-29 | 2019-08-06 | 山东浪潮华光光电子股份有限公司 | 一种简便的led晶片衬底减薄中的贴片方法 |
CN109968191A (zh) * | 2018-11-30 | 2019-07-05 | 浙江博蓝特半导体科技股份有限公司 | 一种蓝宝石衬底贴片方法 |
CN109830577A (zh) * | 2019-01-18 | 2019-05-31 | 重庆市妙格科技有限公司 | 一种高质量发光二极管的制造方法 |
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CN110660696B (zh) | 2021-09-21 |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220418 Address after: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee after: Jinhua Bolante New Material Co.,Ltd. Address before: 321000 South Second Ring West Road, Jinhua, Zhejiang Province, No. 2688 Patentee before: ZHEJIANG BOLANTE SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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TR01 | Transfer of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A manufacturing method of sapphire substrate and wax dropping equipment Effective date of registration: 20220621 Granted publication date: 20210921 Pledgee: Bank of Jinhua Limited by Share Ltd. science and Technology Branch Pledgor: Jinhua Bolante New Material Co.,Ltd. Registration number: Y2022330001022 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230807 Granted publication date: 20210921 Pledgee: Bank of Jinhua Limited by Share Ltd. science and Technology Branch Pledgor: Jinhua Bolante New Material Co.,Ltd. Registration number: Y2022330001022 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A Manufacturing Method and Wax Dropping Equipment for Sapphire Substrates Granted publication date: 20210921 Pledgee: Bank of Jinhua Limited by Share Ltd. science and Technology Branch Pledgor: Jinhua Bolante New Material Co.,Ltd. Registration number: Y2024980021188 |