CN203595493U - 一种可在晶片贴蜡抛光状态下对其测量的晶片厚度量具 - Google Patents
一种可在晶片贴蜡抛光状态下对其测量的晶片厚度量具 Download PDFInfo
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106839937A (zh) * | 2017-01-23 | 2017-06-13 | 安徽三安光电有限公司 | 一种晶片厚度测量装置及其测量方法 |
CN109290918A (zh) * | 2018-11-13 | 2019-02-01 | 江苏利泷半导体科技有限公司 | 用于非晶片制程的全自动抛光生产线 |
CN109290917A (zh) * | 2018-11-13 | 2019-02-01 | 江苏利泷半导体科技有限公司 | 全自动非晶制程抛光系统 |
CN109539956A (zh) * | 2017-09-22 | 2019-03-29 | 富泰华工业(深圳)有限公司 | 平面检测仪 |
CN110660696A (zh) * | 2019-08-27 | 2020-01-07 | 浙江博蓝特半导体科技股份有限公司 | 一种蓝宝石衬底的制造方法和滴蜡设备 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106839937A (zh) * | 2017-01-23 | 2017-06-13 | 安徽三安光电有限公司 | 一种晶片厚度测量装置及其测量方法 |
CN106839937B (zh) * | 2017-01-23 | 2019-08-06 | 安徽三安光电有限公司 | 一种晶片厚度测量装置及其测量方法 |
CN109539956A (zh) * | 2017-09-22 | 2019-03-29 | 富泰华工业(深圳)有限公司 | 平面检测仪 |
CN109290918A (zh) * | 2018-11-13 | 2019-02-01 | 江苏利泷半导体科技有限公司 | 用于非晶片制程的全自动抛光生产线 |
CN109290917A (zh) * | 2018-11-13 | 2019-02-01 | 江苏利泷半导体科技有限公司 | 全自动非晶制程抛光系统 |
CN110660696A (zh) * | 2019-08-27 | 2020-01-07 | 浙江博蓝特半导体科技股份有限公司 | 一种蓝宝石衬底的制造方法和滴蜡设备 |
CN110660696B (zh) * | 2019-08-27 | 2021-09-21 | 浙江博蓝特半导体科技股份有限公司 | 一种蓝宝石衬底的制造方法和滴蜡设备 |
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Inventor after: Zheng Songsen Inventor after: Lin Mengjia Inventor after: Li Jianxun Inventor before: Liao Bo Inventor before: Lin Wenjie Inventor before: Li Ye |
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Free format text: CORRECT: INVENTOR; FROM: LIAO BO LIN WENJIE LI YE TO: ZHENG SONGSEN LIN MENGJIA LI JIANXUN |
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Effective date of registration: 20200513 Address after: 213300 No.8, Feiyue Road, Shanghuang science and Technology Innovation Park, Liyang City, Changzhou City, Jiangsu Province Patentee after: Jiangsu Jingjing Photoelectric Technology Co.,Ltd. Address before: 210000 No. 58, Heng Guang road, Nanjing economic and Technological Development Zone, Jiangsu, Nanjing Patentee before: NANJING J-CRYSTAL PHOTOELECTRIC SCIENCE & TECHNOLOGY Co.,Ltd. |
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