CN110568256A - Online microwave power sensor based on double-layer beam structure and use method thereof - Google Patents
Online microwave power sensor based on double-layer beam structure and use method thereof Download PDFInfo
- Publication number
- CN110568256A CN110568256A CN201910981234.1A CN201910981234A CN110568256A CN 110568256 A CN110568256 A CN 110568256A CN 201910981234 A CN201910981234 A CN 201910981234A CN 110568256 A CN110568256 A CN 110568256A
- Authority
- CN
- China
- Prior art keywords
- middle beam
- double
- microwave power
- sensing electrode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses an online microwave power sensor based on a double-layer beam structure, which takes high-resistance silicon as a substrate, and a coplanar waveguide transmission line, a double-layer cantilever beam structure and a sensing electrode are designed on the substrate; the middle beam and the top beam are parallel up and down with the central signal line as a symmetry axis, are symmetrically arranged at two sides of the central signal line left and right and are fixed through two anchor areas; the overlapping area of the top beam and the middle beam is equal to the overlapping area of the middle beam and the central signal line; a sensing electrode is arranged below the middle beam; the two anchor areas and the sensing electrode are respectively connected with a bonding block. When microwave signals are transmitted in the CPW, direct current power is applied to the top layer beam, so that the upper and lower electrostatic forces borne by the middle beam are balanced, the initial horizontal state is maintained, namely the capacitance value formed by the middle beam and the sensing electrode is restored to the initial value, the conversion between the microwave power and the direct current power is realized in an electrostatic force equivalent mode, and the direct detection of the microwave power is realized.
Description
Technical Field
The invention relates to an online microwave power sensor based on a double-layer beam structure and a using method thereof, belonging to the technical field of micro-electronic mechanical systems.
Background
In the microwave research of micro-electro-mechanical systems (MEMS), microwave power is an important parameter for characterizing microwave signals, and the detection of microwave power is essential in the research of each link of generation, transmission and reception of microwave signals. In recent years, people carry out a great deal of research on microwave power sensors, and provide a capacitive microwave power sensor, wherein the displacement of a guide beam is attracted by the microwave power to an MEMS cantilever beam, and then the capacitance change between the cantilever beam and a sensing electrode is measured to obtain the microwave power to be measured; the structure is not sensitive to the microwave power with lower magnitude and can measure the higher microwave power, but the balance problem of the sensitivity and the microwave power restricts the performance and the application range of the structure. The MEMS cantilever beam type online microwave power sensor is used for coupling and extracting part of power to be detected through a cantilever beam, and the extracted microwave power is transmitted to a terminal type microwave power detection system through a secondary CPW wire to realize the detection of the microwave power; the structure can realize the on-line monitoring and detection of the microwave power, also solves the problem of the balance between the sensitivity of the capacitive microwave power sensor and the microwave performance, but is limited by the coupling coefficient and has lower sensitivity. The microwave power sensor of the above type needs to realize indirect measurement of microwave power by means of capacitance detection or thermoelectric conversion of a thermocouple, and in the parameter conversion process, the influence of parasitic capacitance and heat dissipation cannot be accurately controlled, so that the measurement accuracy of the microwave power detection system is seriously influenced.
Disclosure of Invention
The purpose is as follows: in order to overcome the defects in the prior art, the invention provides an online microwave power sensor based on a double-layer beam structure. The microwave power sensor adopts a double-layer cantilever beam structure, applies acting forces with the same magnitude and opposite directions to the middle beam through the central signal line of the top beam and the coplanar waveguide transmission line to keep the balance degree of the middle beam in the horizontal direction, converts the microwave power to be measured into equivalent direct current power, and further achieves the purpose of directly measuring the microwave power.
The technical scheme is as follows: in order to solve the technical problems, the technical scheme adopted by the invention is as follows:
The utility model provides an online microwave power sensor based on double-deck roof beam structure which characterized in that: the sensor comprises a substrate, wherein a coplanar waveguide transmission line, a double-layer cantilever beam structure and a sensing electrode are arranged on the substrate, and the double-layer cantilever beam structure is positioned above the coplanar waveguide transmission line;
The coplanar waveguide transmission line comprises a central signal line, a first ground wire and a second ground wire, wherein the first ground wire and the second ground wire are respectively arranged on two sides of the central signal line;
The double-layer cantilever beam structure comprises two independent single-end cantilever beams, namely a top beam and a middle beam, wherein the free end parts of the top beam and the middle beam are overlapped, and the top beam is arranged above the middle beam and the middle beam is arranged below the middle beam; the top-layer beam and the middle beam are symmetrically distributed on two sides of the central signal line, the top-layer beam crosses a first ground wire and is fixed on the left side of the substrate through a first anchor area, and the first anchor area is connected with the first pressure welding block; the middle beam crosses a second ground wire and is fixed on the right side of the substrate through a second anchor area, and the second anchor area is connected with a second pressure welding block;
A sensing electrode is arranged below the middle beam, the sensing electrode is positioned between the central signal line and a second ground, the sensing electrode is connected with a third press welding block through a metal wire, and the metal wire penetrates through the second ground and is not contacted with the second ground;
And insulating medium layers are arranged on the part, overlapped with the middle beam, above the central signal line, the sensing electrode, the part, overlapped with the top beam, above the middle beam and the part, overlapped with the middle beam, above the second ground line.
further, the substrate is a high-resistance silicon substrate.
furthermore, the sensing electrode is made of metal gold.
Furthermore, the top beam is not in contact with the first ground wire, the middle beam is not in contact with the second ground wire, and the top beam is not in contact with the middle beam.
Further, the overlapping area of the top beam and the middle beam is equal to the overlapping area of the middle beam and the central signal line.
Further, when the middle beam is in a horizontal state, the longitudinal distance between the top beam and the middle beam is equal to the longitudinal distance between the middle beam and the central signal line.
A use method of an online microwave power sensor based on a double-layer beam structure specifically comprises the following steps: when no microwave signal is transmitted on the coplanar waveguide transmission line, measuring an initial capacitance value between the middle beam and the sensing electrode through the second pressure welding block and the third pressure welding block;
When a microwave signal is transmitted on the coplanar waveguide transmission line, the central signal line applies downward electrostatic force to the middle beam, so that the capacitance value between the middle beam and the sensing electrode is increased; applying direct current power on the top layer beam through the first pressure welding block to enable the top layer beam to generate upward electrostatic force on the middle beam; when the upward electrostatic force of the top beam to the middle beam is equal to the downward electrostatic force of the central signal line to the middle beam, the middle beam restores to an initial balance state, namely the capacitance between the middle beam and the sensing electrode is restored to an initial capacitance, and in the balance state, the microwave power to be measured is equivalent to the direct current power applied to the top beam by the first pressure welding block, so that the microwave power can be measured.
has the advantages that: the online microwave power sensor based on the double-layer beam structure has the advantages of large applicable power dynamic range, considerable measurement precision, high sensitivity and the like. The concrete advantages are as follows:
(1) The double-layer single-end cantilever beam symmetrical structure is adopted, acting force is applied to the same position of the beam, and compared with a double-end cantilever beam structure, the double-layer single-end cantilever beam symmetrical structure has higher stability and reliability;
(2) compared with the situation that one free end of the double-end cantilever beam is used for power sensing and the other free end of the double-end cantilever beam is used for power measurement, the sensing electrode is arranged below the free end of the middle beam used for sensing the microwave power, namely the power is sensed and measured through the same free end, so that the beam balance degree is sensed more accurately, and the measurement precision is improved;
(3) in the traditional capacitive microwave power sensor, only one beam is suspended above a middle signal line, microwave powers to be measured with different sizes cause different degrees of deflection states of the beam, capacitance values under different beam states need to be measured, and the problem of low measurement precision caused by parasitic capacitance is easy to occur; according to the invention, the microwave power is converted into the direct current power for measurement by the principle that the electrostatic force borne by the intermediate beam is balanced, so that the direct reading of the microwave power result to be measured can be realized, and the problem of low measurement precision caused by parasitic capacitance in the traditional method can be avoided;
(4) The two cantilever beams of the double-layer beam structure are mutually independent and can be independently designed, so that the rigidity of the beam can be flexibly designed, for example, the middle beam with lower rigidity is selected, and elastic deformation is easy to occur, thereby achieving better sensitivity; the rigidity of the top layer beam is high, and the top layer beam can bear enough large electrostatic force without elastic deformation; no matter how large the microwave power to be measured is, the middle beam keeps a good horizontal state in a stable measuring state, the reflection loss can be reduced to the minimum by setting a proper beam height, and the balance problem of the sensitivity and the microwave characteristic of the capacitive microwave power sensor during high-power detection is effectively solved; in addition, the power of the microwave to be measured is not completely consumed, so that the microwave signal can still reach the terminal, and the on-chip integration with other microwave systems is facilitated.
Drawings
FIG. 1 is a perspective view of the present invention;
Fig. 2 is a schematic front view of the present invention.
Detailed Description
the present invention will be further described with reference to the accompanying drawings.
The terms "first", "second", "third", left "and" right "in the present invention are only used to distinguish and describe the components with similar structures, so as to make the description of the technical solution clearer, and are not used as the basis for the unique limitation of the primary and secondary components and the orientation.
as shown in fig. 1 and 2, the online microwave power sensor based on the double-layer beam structure includes a substrate 1, a coplanar waveguide transmission line, a double-layer cantilever beam structure and a sensing electrode 5 are disposed on the substrate 1, and the double-layer cantilever beam structure is located above the coplanar waveguide transmission line. The substrate 1 is a high-resistance silicon substrate, and the sensing electrode 5 is made of metal gold.
The coplanar waveguide transmission line includes a central signal line 22, a first ground line 21 and a second ground line 23, and the first ground line 21 and the second ground line 23 are respectively disposed at both sides of the central signal line 22.
The double-layer cantilever beam structure comprises two independent single-end cantilever beams, namely a top-layer beam 3 and a middle beam 4, wherein the free end parts of the top-layer beam 3 and the middle beam 4 are overlapped, and the top-layer beam 3 is arranged below the upper middle beam 4; the top layer beam 3 and the middle beam 4 are symmetrically distributed on two sides of the central signal line 22, the top layer beam 3 crosses the first ground wire 21 and is fixed on the left side of the substrate 1 through the first anchor area 11, and the first anchor area 11 is connected with the first pressure welding block 9; intermediate beam 4 is fixed to the right side of substrate 1 by second anchor region 12 across second ground line 23, and second anchor region 12 is connected to second pad 8.
the top beam 3 is not in contact with the first ground wire 21, the middle beam 4 is not in contact with the second ground wire 23, and the top beam 3 is not in contact with the middle beam 4.
The overlapping area of the top beam 3 and the middle beam 4 is equal to the overlapping area of the middle beam 4 and the central signal line 22, so that when the middle beam 4 is horizontal, the value of the plate capacitance formed by the middle beam 4 and the top beam 3 is equal to the value of the plate capacitance formed by the middle beam 4 and the central signal line 22. When the intermediate beam 4 is in a horizontal state, the longitudinal distance between the roof beam 3 and the intermediate beam 4 is equal to the longitudinal distance between the intermediate beam 4 and the central signal line 22.
A sensing electrode 5 is arranged below the middle beam 4, the sensing electrode 5 is positioned between the central signal line 22 and a second ground 23, the sensing electrode 5 is connected with a third pressure welding block 10 through a metal wire 7, and the metal wire 7 penetrates through the second ground 23 and is not contacted with the second ground 23;
An insulating dielectric layer 6 is provided over the central signal line 22 overlapping the intermediate beam 4, over the sensing electrode 5, over the intermediate beam 4 overlapping the top beam 3, and over the second ground line 23 overlapping the intermediate beam 4.
The use method of the online microwave power sensor based on the double-layer beam structure comprises the following steps: when no microwave signal is transmitted on the coplanar waveguide transmission line, measuring an initial capacitance value between the middle beam 4 and the sensing electrode 5 through the second pressure welding block 8 and the third pressure welding block 10;
when a microwave signal is transmitted on the coplanar waveguide transmission line, the central signal line 22 applies a downward electrostatic force to the intermediate beam 4, resulting in an increase in capacitance between the intermediate beam 4 and the sensing electrode 5; applying direct current power on the top layer beam 3 through the first pressure welding block 9 to enable the top layer beam to generate an upward electrostatic force on the middle beam 4; when the upward electrostatic force of the top beam 3 to the middle beam 4 is equal to the downward electrostatic force of the central signal line 22 to the middle beam 4, the middle beam 4 restores to an initial balance state, that is, the capacitance between the middle beam 4 and the sensing electrode 5 is restored to an initial capacitance, and in the balance state, the microwave power to be measured is equivalent to the direct current power applied to the top beam 3 by the first pressure welding block 9, so that the microwave power can be measured.
the microwave power detector is based on a micro-electro-mechanical system (MEMS) technology, has the basic advantages of MEMS, such as small volume, light weight, low power consumption, convenient integration and the like, and has a series of advantages which are incomparable with the traditional microwave power detector, so that the microwave power detector has good research and application values.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.
Claims (7)
1. The utility model provides an online microwave power sensor based on double-deck roof beam structure which characterized in that: the sensor comprises a substrate (1), wherein a coplanar waveguide transmission line, a double-layer cantilever beam structure and a sensing electrode (5) are arranged on the substrate (1), and the double-layer cantilever beam structure is positioned above the coplanar waveguide transmission line;
The coplanar waveguide transmission line comprises a central signal line (22), a first ground wire (21) and a second ground wire (23), wherein the first ground wire (21) and the second ground wire (23) are respectively arranged on two sides of the central signal line (22);
the double-layer cantilever beam structure comprises two independent single-end cantilever beams, namely a top beam (3) and a middle beam (4), wherein the free end parts of the top beam (3) and the middle beam (4) are overlapped, and the top beam (3) is arranged above the middle beam (4); the top layer beam (3) and the middle beam (4) are symmetrically distributed on two sides of the central signal line (22), the top layer beam (3) crosses a first ground wire (21) and is fixed on the left side of the substrate (1) through a first anchor area (11), and the first anchor area (11) is connected with the first pressure welding block (9); the middle beam (4) crosses a second ground wire (23) and is fixed on the right side of the substrate (1) through a second anchor area (12), and the second anchor area (12) is connected with a second pressure welding block (8);
a sensing electrode (5) is arranged below the middle beam (4), the sensing electrode (5) is positioned between a central signal line (22) and a second ground wire (23), the sensing electrode (5) is connected with a third pressure welding block (10) through a metal wire (7), and the metal wire (7) penetrates through the second ground wire (23) and is not in contact with the second ground wire (23);
An insulating medium layer (6) is arranged on a part overlapped with the middle beam (4) above the central signal line (22), a part overlapped with the top beam (3) above the sensing electrode (5), a part overlapped with the middle beam (4) above the middle beam (4) and a part overlapped with the middle beam (4) above the second ground line (23).
2. The online microwave power sensor based on the double-layer beam structure as claimed in claim 1, wherein: the substrate (1) is a high-resistance silicon substrate.
3. the online microwave power sensor based on the double-layer beam structure as claimed in claim 1, wherein: the sensing electrode (5) is made of metal gold.
4. The online microwave power sensor based on the double-layer beam structure as claimed in claim 1, wherein: the top layer beam (3) is not in contact with the first ground wire (21), the middle beam (4) is not in contact with the second ground wire (23), and the top layer beam (3) is not in contact with the middle beam (4).
5. The online microwave power sensor based on the double-layer beam structure as claimed in claim 1, wherein: the overlapping area of the top layer beam (3) and the middle beam (4) is equal to the overlapping area of the middle beam (4) and the central signal line (22).
6. The online microwave power sensor based on the double-layer beam structure as claimed in claim 1, wherein: when the middle beam (4) is in a horizontal state, the longitudinal distance between the top beam (3) and the middle beam (4) is equal to the longitudinal distance between the middle beam (4) and the central signal line (22).
7. the use method of the double-layer beam structure-based online microwave power sensor according to any one of claims 1 to 6, characterized in that: when no microwave signal is transmitted on the coplanar waveguide transmission line, measuring an initial capacitance value between the middle beam (4) and the sensing electrode (5) through the second pressure welding block (8) and the third pressure welding block (10);
when a microwave signal is transmitted on the coplanar waveguide transmission line, the central signal line (22) applies downward electrostatic force to the intermediate beam (4), so that the capacitance value between the intermediate beam (4) and the sensing electrode (5) is increased; applying direct current power on the top layer beam (3) through a first pressure welding block (9) to enable the top layer beam to generate upward electrostatic force on the middle beam (4); when the upward electrostatic force of the top layer beam (3) to the middle beam (4) is equal to the downward electrostatic force of the central signal line (22) to the middle beam (4), the middle beam (4) restores to an initial balance state, namely the capacitance between the middle beam (4) and the sensing electrode (5) is restored to an initial capacitance, and in the balance state, the microwave power to be measured is equivalent to the direct current power applied to the top layer beam (3) by the first pressure welding block (9), so that the microwave power can be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910981234.1A CN110568256B (en) | 2019-10-16 | 2019-10-16 | Online microwave power sensor based on double-layer beam structure and use method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910981234.1A CN110568256B (en) | 2019-10-16 | 2019-10-16 | Online microwave power sensor based on double-layer beam structure and use method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110568256A true CN110568256A (en) | 2019-12-13 |
| CN110568256B CN110568256B (en) | 2021-09-28 |
Family
ID=68784992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910981234.1A Active CN110568256B (en) | 2019-10-16 | 2019-10-16 | Online microwave power sensor based on double-layer beam structure and use method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110568256B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113671247A (en) * | 2021-09-03 | 2021-11-19 | 东南大学 | Online microwave power sensor based on PT symmetrical circuit |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040057495A1 (en) * | 2002-09-03 | 2004-03-25 | Korea Electonics Technology Institute | Microwave power sensor and method for manufacturing the same |
| CN1858601A (en) * | 2006-06-09 | 2006-11-08 | 东南大学 | Capacitance microwave power sensor |
| CN103257268A (en) * | 2013-05-20 | 2013-08-21 | 东南大学 | Warping plate type intelligent detection microwave power sensor |
| CN203275512U (en) * | 2013-05-20 | 2013-11-06 | 东南大学 | Sensor of intelligently detecting microwave power |
| CN103558417A (en) * | 2013-11-08 | 2014-02-05 | 中国工程物理研究院电子工程研究所 | Detection method and device thereof for charge balance type micro-accelerometer gauge head differential capacitor |
| CN103995150A (en) * | 2014-05-20 | 2014-08-20 | 华中科技大学 | Capacitance flexure accelerometer with adjustable scale factor |
-
2019
- 2019-10-16 CN CN201910981234.1A patent/CN110568256B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040057495A1 (en) * | 2002-09-03 | 2004-03-25 | Korea Electonics Technology Institute | Microwave power sensor and method for manufacturing the same |
| CN1858601A (en) * | 2006-06-09 | 2006-11-08 | 东南大学 | Capacitance microwave power sensor |
| CN103257268A (en) * | 2013-05-20 | 2013-08-21 | 东南大学 | Warping plate type intelligent detection microwave power sensor |
| CN203275512U (en) * | 2013-05-20 | 2013-11-06 | 东南大学 | Sensor of intelligently detecting microwave power |
| CN103558417A (en) * | 2013-11-08 | 2014-02-05 | 中国工程物理研究院电子工程研究所 | Detection method and device thereof for charge balance type micro-accelerometer gauge head differential capacitor |
| CN103995150A (en) * | 2014-05-20 | 2014-08-20 | 华中科技大学 | Capacitance flexure accelerometer with adjustable scale factor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113671247A (en) * | 2021-09-03 | 2021-11-19 | 东南大学 | Online microwave power sensor based on PT symmetrical circuit |
| CN113671247B (en) * | 2021-09-03 | 2023-02-24 | 东南大学 | Online microwave power sensor based on PT symmetrical circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110568256B (en) | 2021-09-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205844405U (en) | High-precision Microwave power detecting system based on cantilever beam cascade structure | |
| CN1858601B (en) | Capacitance microwave power sensor | |
| CN104040315A (en) | Fluid pressure sensor and measurement probe | |
| CN1056747A (en) | Load cell | |
| CN110568256B (en) | Online microwave power sensor based on double-layer beam structure and use method thereof | |
| CN113671247B (en) | Online microwave power sensor based on PT symmetrical circuit | |
| CN109932561A (en) | Microwave power detector based on compound arched girder | |
| CN110501098A (en) | A kind of highly sensitive micro-pressure sensor based on double pressure membranes and weak coupling resonator system | |
| CN2924545Y (en) | Capacitive microwave power sensor | |
| CN207636232U (en) | A kind of strain-type differential pressure pickup | |
| CN106199173A (en) | High-precision Microwave power detecting system based on cantilever beam cascade structure and method | |
| CN208043929U (en) | The piezoelectric type microwave power detector of d33 based on cantilever beam | |
| CN203275512U (en) | Sensor of intelligently detecting microwave power | |
| CN110044541A (en) | A kind of fiber bragg grating pressure sensor based on rectangular diaphragm | |
| CN204666718U (en) | Based on the microwave power detection system of MEMS cantilever beam parallel connection | |
| CN109709386B (en) | Three-channel microwave power sensor | |
| CN209894749U (en) | Double-capacitor temperature and humidity sensor | |
| CN208092125U (en) | Microwave power detector based on clamped beam piezoresistive effect | |
| CN108594006A (en) | Microwave power detector based on Hall effect | |
| CN106932636B (en) | Capacitive microwave power sensor with three-finger staggered structure | |
| CN109917182B (en) | Microwave power sensor based on graphene piezoresistive effect | |
| CN103257268B (en) | Warping plate type intelligent detection microwave power sensor | |
| CN106895930A (en) | A kind of micro- power of cantilever beam structure and micro-displacement sensing device | |
| CN109631964A (en) | A kind of single mode optical fiber sensing probe of the two-parameter multiple groups measuring section of no gelatinization | |
| CN108594007A (en) | Microwave power detector based on clamped beam piezoresistive effect |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20191213 Assignee: NANJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS NANTONG INSTITUTE Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2021980011448 Denomination of invention: On line microwave power sensor based on double-layer beam structure and its application method Granted publication date: 20210928 License type: Common License Record date: 20211027 |
|
| EE01 | Entry into force of recordation of patent licensing contract |