CN110556445A - 一种叠层并联太阳能电池 - Google Patents

一种叠层并联太阳能电池 Download PDF

Info

Publication number
CN110556445A
CN110556445A CN201810540682.3A CN201810540682A CN110556445A CN 110556445 A CN110556445 A CN 110556445A CN 201810540682 A CN201810540682 A CN 201810540682A CN 110556445 A CN110556445 A CN 110556445A
Authority
CN
China
Prior art keywords
sub
gaas
gainp
layer
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810540682.3A
Other languages
English (en)
Inventor
乔秀梅
刘琦
童翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zishi Energy Co.,Ltd.
Original Assignee
Dongtai Hi-Tech Equipment Technology (beijing) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongtai Hi-Tech Equipment Technology (beijing) Co Ltd filed Critical Dongtai Hi-Tech Equipment Technology (beijing) Co Ltd
Priority to CN201810540682.3A priority Critical patent/CN110556445A/zh
Publication of CN110556445A publication Critical patent/CN110556445A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022466Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H01L31/0687Multiple junction or tandem solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/184Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
    • H01L31/1844Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/544Solar cells from Group III-V materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)

Abstract

本发明涉及一种叠层并联太阳能电池,其改进之处为,用单层石墨烯将双结或多结III‑V族太阳能子电池进行并联。该双结电池在石墨烯上可以直接外延生长另一个子电池,避免了传统III‑V族叠层电池为避免晶格失配而采取的键合技术,大大简化了制备工艺,还避免了传统晶格匹配的叠层串联的电池因电流不匹配而导致的效率损失,同时有利于提高开路电压。

Description

一种叠层并联太阳能电池
技术领域
本发明涉及太阳能电池领域,特别是涉及一种基于石墨烯的双结或多结叠层并联太阳能电池。
背景技术
III-V族化合物半导体材料是继硅之后应用最为广泛的半导体材料之一,上世纪70年代就开始了光伏应用领域的开发。多结III-V化合物太阳电池通过匹配不同带隙的半导体材料,可实现对太阳光的宽光谱吸收,目前双结电池的世界效率已超过30%。
常规的III-V族叠层串联太阳能电池是以隧道结连接的pn结串联形式,它要求每个pn结所产生的电流匹配。对于晶格匹配电池可能会发生电流在各结层的失配,而导致效率下降。采用并联结构可避免考虑上述串联结构所引起的电池失配问题。
对于上下叠加的并联电池,中间电极的透明性和导电性至关重要。常见的中间电极采用金属电极或透明导电氧化物材料,但对于III-V族材料来说,直接外延生长要求上层材料晶格和下层材料晶格匹配,对于上述透明导电氧化物或金属材料,无法在其上面直接外延生长III-V族半导体电池,复杂化了制备工艺。
发明内容
本发明的目的是提供一种基于石墨烯的叠层并联太阳能电池,其主要改进点为,用单层石墨烯将双结或多结III-V族太阳能子电池进行并联,具体要结构为:包括双结或多结层叠设置的III-V族子电池,相邻的子电池间通过单层石墨烯进行并联。
研究发现,单层石墨烯的透光率可达97.7%,电子迁移率可达10000~250000cm2/vs,用作透明电极,不影响下面子电池对光照的吸收,且可快速收集电流。而且单层石墨烯具有远程同质外延功能,对于III-V族电池而言,可直接外延生长上面子电池,制备得到晶格匹配的上面子电池和下面子电池。
优选的,所述单层石墨烯通过直接生长法或转移生长法设置于两个子电池之间。所述直接生长法是指直接在下面子电池上生长单层石墨烯层,所述转移生长法是指单层石墨烯层进行生长后再转移到下面子电池上。
优选的,本申请所述的叠层并联太阳能电池由如下方法制备得到:
1)通过外延生长方法,生长底层子电池;
2)在所述底层子电池上通过转移生长法设置单层石墨烯层;
3)在所述单层石墨烯层上通过外延生长方法生长上面子电池,得双结太阳能电池;
或,重复步骤2)和3)制备多结太阳能电池。
作为一种优选的方案,本发明提供一种叠层并联GaAs/GaInP太阳能电池,从下至上依次包括GaAs子电池、石墨烯和GaInP子电池。GaAs材料能隙为1.42eV,与太阳光谱较为匹配,吸收系数较高,GaInP能隙为1.89eV,是与GaAs晶格匹配的顶电池材料的理想选择,禁带宽度组合合理。
优选的,所述GaAs子电池从下至上依次包括GaAs基底、背场层、GaAs基极、GaAs发射极和GaInP窗口层;
优选的,所述GaInP子电池从下至上包括依次形成于所述单层石墨烯上的背场层、GaInP基极、GaInP发射极和AlInP窗口层。
本申请中基极或发射极的n或p型的具体选择本领域技术人员可根据需要灵活进行。
优选的,所述GaAs子电池还包括位于所述GaAs基底下的背面电极,所述GaInP子电池还包括位于所述n(p)+型AlInP窗口层上方的正面电极,所述背面电极和正面电极相互连接实现GaAs子电池和GaInP子电池并联。
优选的,所述GaAs子电池的厚度2.5~3.5微米;
优选的,所述GaInP子电池的厚度为0.7~1微米。
优选的,本发明所述的太阳能电池由如下方法制备得到:
1)通过外延生长方法,生长GaAs子电池;
2)在所述GaAs子电池上通过转移生长法设置单层石墨烯层;
3)在所述石墨烯层上通过外延生长方法生长GaInP子电池;
4)制备GaAs子电池背电极和GaInP子电池正电极。
优选的,所述外延长生长法为MOCVD或MBE。
优选的,所述GaAs子电池的生长温度是600~750℃,生长速率为30-90nm/min;
优选的,所述GaInP子电池的生长温度为生长速率为30-90nm/min。
优选的,所述转移生长法包括聚甲基丙烯酸甲酯(PMMA)转移法、PDSM印章转移法、无中介物的层压转移法、卷对卷转移技术和电化学转移法。
作为优选的实施方式,本发明的方法包括如下步骤:
1)在GaAs基底上利用MOCVD法外延生长AlGaAs背场层;
2)在所述AlGaAs背场层上利用MOCVD法外延生长GaAs基极;
3)在所述GaAs基极上利用MOCVD法外延生长GaAs发射极;
4)在所述GaAs发射极上利用MOCVD法外延生长GaInP窗口层;
步骤1)~4)中AlGaAs、GaAs和GaInP的生长温度分别是690~710℃、650~670℃和650~670℃,生长速率分别为30~35nm/min、30~35nm/min和85~90nm/min;
5)在所述GaInP窗口层上利用热剥离胶带法设置单层石墨烯层;
6)在所述石墨烯层上利用MOCVD法外延生长GaInP背场层;
7)在所述GaInP背场层上利用MOCVD法外延生长GaInP基极;
8)在所述GaInP基极上利用MOCVD法外延生长GaInP发射极;
9)在所述GaInP发射极上利用MOCVD法外延生长AlInP窗口层;
步骤6)~9)中GaInP和AlInP的生长温度为650~670℃和690~710℃,生长速率分别为85~90nm/min和45~55nm/min。
优选的,所述热剥离胶带法具体为,通过CVD法在Si/SiO2基底上生长单层石墨烯,将撕去剥离层的TRT与石墨烯/Cu箔平整地紧密贴合,之后用硫酸铵溶液腐蚀除去铜箔,清洗晾干,将TRT-石墨烯与第一个子电池的GaInP窗口层紧密贴合,烘烤至热剥离温度以上,胶带自发脱落,转移完成。
本发明具有如下有益效果:
1)该叠层并联电池中,单层石墨烯具有较好的导电性和透光性,减少了对光的吸收和对电子的消耗,有助于提高效率。
2)该叠层并联电池避免了在传统晶格匹配的叠层串联电池中因电池的电流不匹配导致的效率损失,同时有利于提高开路电压。
3)该叠层并联电池在单层石墨烯上可以直接外延生长另一个子电池,避免了传统并联III-V族电池因避免晶格失配而采取的键合技术,键合技术通常需要在高温高压下进行,因此本申请的方法大大简化工艺,降低生产成本。
附图说明
图1为所示为本发明具体实施例1中GaAs/GaInP双结太阳能电池的结构示意图。
其各层分别是1、GaAs子电池,2、GaInP子电池,3、Cu背电极,4、GaAs基底,5、n+型AlGaAs背场层,6、n型GaAs基极,7、p型GaAs发射极,8、p+型GaInP窗口层,9、石墨烯层,10、p+型GaInP背场层,11、p型GaInP基极,12、n型GaInP发射极,13、n+型AlInP窗口层,14、SiN减反膜和15、正面电极。
具体实施方式
以下实施例用于说明本发明,但不用来限制本发明的范围。
实施例1
本实施例涉及一种GaAs/GaInP叠层并联双结太阳能电池,包括GaAs子电池、位于GaAs子电池上方的单层石墨烯和位于石墨烯上方的GaInP子电池,所述GaAs子电池的厚度2.5~3.5微米,所述GaInP子电池的厚度为0.7~1微米。
所述GaAs/GaInP双结太阳能电池包括1、GaAs子电池,2、GaInP子电池,3、Cu背电极,4、GaAs基底,5、n+型AlGaAs背场层,6、n型GaAs基极,7、p型GaAs发射极,8、p+型GaInP窗口层,9、石墨烯层,10、p+型GaInP背场层,11、p型GaInP基极,12、n型GaInP发射极,13、n+型AlInP窗口层,14、SiN减反膜和15、正面电极。
所述背面电极和正面电极相互连接实现GaAs子电池和GaInP子电池并联。
本实施例所述电池的最高转换效率为28.9%,其中,单层石墨烯的透光性可达97.7%,电子迁移率10000~250000cm2/vs。
实施例2
本实施例涉及实施例1所述太阳能电池的制备方法,包括如下步骤:
1)在n型GaAs基底上利用MOCVD法外延生长n+型AlGaAs背场层;
2)在n+型AlGaAs背场层上利用MOCVD法外延生长n型GaAs基极;
3)在n型GaAs基极上利用MOCVD法外延生长p型GaAs发射极;
4)在p型GaAs发射极上利用MOCVD法外延生长p+型GaInP窗口层;
步骤1)~4)中AlGaAs、GaAs和GaInP的生长温度分别是700℃、660℃和660℃,生长速率30nm/min、30nm/min和90nm/min;
5)在p+型GaInP窗口层上利用热剥离胶带法转移制备单层石墨烯,其具体操作为,通过CVD法在Si/SiO2基底上生长单层石墨烯,将撕去剥离层的TRT与石墨烯/Cu箔平整地紧密贴合,之后用硫酸铵溶液腐蚀除去铜箔,清洗晾干,将TRT-石墨烯与子电池的GaInP窗口层紧密贴合,烘烤至热剥离温度以上,胶带自发脱落,转移完成;
6)在石墨烯层上利用MOCVD法外延生长p+型GaInP背场层;
7)在p+型GaInP背场层上利用MOCVD法外延生长p型GaInP基极;
8)在p型GaInP基极上利用MOCVD法外延生长n型GaInP发射极;
9)在n型GaInP发射极上利用MOCVD法外延生长n+型AlInP窗口层;
步骤6)~9)中GaInP和AlInP的生长温度为660℃和700℃,生长速率为90nm/min和50nm/min;
10)在n+型AlInP窗口层上PVD法沉积SiN减反膜;
11)在n型GaAs衬底另一面利用PVD法沉积Cu背电极;
12)在SiN减反膜上制作Cu栅极。
对比例1
与实施例1相比,其区别仅在于,用ITO替代石墨烯层,其结构具体为GaAs子电池/ITO/GaInP子电池。
其中,所述GaAs子电池/ITO/GaInP子电池包括1、GaAs子电池,2、GaInP子电池,3、Cu背电极,4、GaAs基底,5、n+型AlGaAs背场层,6、n型GaAs基极,7、p型GaAs发射极,8、p+型GaInP窗口层,9、ITO,10、p+型GaInP背场层,11、p型GaInP基极,12、n型GaInP发射极,13、n+型AlInP窗口层,14、SiN减反膜和15、正面电极。
本实施例所述电池的最高转换效率为26%,其中,ITO透光性大于86%,电子迁移率10~30cm2/vs,且上述电池在制备的过程中需要采用键合法,制备工艺复杂。
虽然,上文中已经用一般性说明、具体实施方式及试验,对本发明作了详尽的描述,但在本发明基础上,可以对之作一些修改或改进,这对本领域技术人员而言是显而易见的。因此,在不偏离本发明精神的基础上所做的这些修改或改进,均属于本发明要求保护的范围。

Claims (10)

1.一种叠层并联太阳能电池,其特征在于,用单层石墨烯将双结或多结III-V族太阳能子电池进行并联。
2.根据权利要求1所述的太阳能电池,其特征在于,所述单层石墨烯通过直接生长法或转移生长法设置于两个子电池之间。
3.根据权利要求1或2所述的太阳能电池,其特征在于,所述太阳能电池由如下方法制备得到:
1)通过外延生长方法,生长底层子电池;
2)在所述底层子电池上通过转移生长法设置单层石墨烯层;
3)在所述单层石墨烯层上通过外延生长方法生长上面子电池,得双结太阳能电池;
或,重复步骤2)和3)制备多结太阳能电池。
4.一种GaAs/GaInP叠层并联太阳能电池,其特征在于,从下至上依次包括GaAs子电池、单层石墨烯和GaInP子电池。
5.根据权利要求4所述的太阳能电池,其特征在于,所述GaAs子电池从下至上依次包括GaAs基底、背场层、GaAs基极、GaAs发射极和GaInP窗口层;
和/或,所述GaInP子电池从下至上包括依次形成于所述单层石墨烯上的背场层、GaInP基极、GaInP发射极和AlInP窗口层。
6.根据权利要求4或5所述的太阳能电池,其特征在于,所述GaAs子电池还包括位于所述GaAs基底下的背面电极,所述GaInP子电池还包括位于所述AlInP窗口层上方的正面电极,所述背面电极和正面电极相互连接实现GaAs子电池和GaInP子电池并联。
7.根据权利要求4~6任一项所述的太阳能电池,其特征在于,所述GaAs子电池的厚度2.5~3.5微米,和/或,所述GaInP子电池的厚度为0.7~1微米。
8.一种权利要求4~7所述太阳能电池的制备方法,其特征在于,包括如下步骤:
1)通过外延生长方法,生长GaAs子电池;
2)在所述GaAs子电池上通过转移生长法设置单层石墨烯层;
3)在所述石墨烯层上通过外延生长方法生长GaInP子电池;
4)制备GaAs子电池背电极和GaInP子电池正电极。
9.根据权利要求8所述的制备方法,其特征在于,所述GaAs子电池的生长温度是600~750℃,生长速率为30-90nm/min;
和/或,所述GaInP子电池的生长温度为生长速率为30-90nm/min。
10.根据权利要求8或9所述的制备方法,其特征在于,所述转移生长法包括聚甲基丙烯酸甲酯转移法、PDSM印章转移法、热剥离胶带法、卷对卷转移技术或电化学转移法。
CN201810540682.3A 2018-05-30 2018-05-30 一种叠层并联太阳能电池 Pending CN110556445A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810540682.3A CN110556445A (zh) 2018-05-30 2018-05-30 一种叠层并联太阳能电池

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810540682.3A CN110556445A (zh) 2018-05-30 2018-05-30 一种叠层并联太阳能电池

Publications (1)

Publication Number Publication Date
CN110556445A true CN110556445A (zh) 2019-12-10

Family

ID=68735115

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810540682.3A Pending CN110556445A (zh) 2018-05-30 2018-05-30 一种叠层并联太阳能电池

Country Status (1)

Country Link
CN (1) CN110556445A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111180541A (zh) * 2020-01-05 2020-05-19 复旦大学 具有亚带隙红外响应的宽谱晶硅太阳电池及其制备方法
CN112216759A (zh) * 2020-09-22 2021-01-12 中国电子科技集团公司第十八研究所 一种三端双面叠层太阳电池及其制备工艺

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111180541A (zh) * 2020-01-05 2020-05-19 复旦大学 具有亚带隙红外响应的宽谱晶硅太阳电池及其制备方法
CN112216759A (zh) * 2020-09-22 2021-01-12 中国电子科技集团公司第十八研究所 一种三端双面叠层太阳电池及其制备工艺

Similar Documents

Publication Publication Date Title
CN102184980B (zh) 基于晶片键合的三结太阳能电池及其制备方法
US9437769B2 (en) Four-junction quaternary compound solar cell and method thereof
CN101950774A (zh) 四结GaInP/GaAs/InGaAsP/InGaAs太阳电池的制作方法
CN104300015B (zh) AlGaAs/GaInAs/Ge连续光谱太阳能电池
CN210535681U (zh) 一种晶格失配的五结太阳能电池
CN103928539A (zh) 多结iii-v太阳能电池及其制造方法
CN106299011B (zh) 基于InP衬底的五结太阳能电池及其制备方法
CN103219414B (zh) GaInP/GaAs/InGaAsP/InGaAs四结级联太阳电池的制作方法
WO2016145936A1 (zh) 倒装多结太阳能电池及其制备方法
CN109216484B (zh) 一种石墨烯/AlGaAs多结异质太阳能电池及其制备方法
CN109148621B (zh) 一种双面生长的高效六结太阳能电池及其制备方法
CN110556445A (zh) 一种叠层并联太阳能电池
CN102790117A (zh) GaInP/GaAs/InGaNAs/Ge四结太阳能电池及其制备方法
CN103077983A (zh) 多结太阳能电池及其制备方法
CN106409958B (zh) 基于石墨衬底的倒装三结太阳电池及其制备方法
CN110911510B (zh) 一种含超晶格结构的硅基氮化物五结太阳电池
CN104157725A (zh) GaInP/GaAs/InGaAsP/InGaAs四结级联太阳电池的制作方法
CN114171615B (zh) 一种硅基多结太阳电池及其渐变缓冲层
CN206584943U (zh) 一种正向生长的匹配四结太阳能电池
CN110556448A (zh) 一种叠层串联太阳能电池
CN210692559U (zh) 一种倒装生长的双异质结四结柔性太阳能电池
CN107546293B (zh) 双结太阳能电池及其制备方法、太阳能电池外延结构
CN110797427B (zh) 倒装生长的双异质结四结柔性太阳能电池及其制备方法
Mizuno et al. A “smart stack” triple-junction cell consisting of InGaP/GaAs and crystalline Si
CN210052751U (zh) 多结太阳能电池

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
CB02 Change of applicant information

Address after: 102209 Beijing City, Changping District Beiqijia Town, Tivoli Park No. 15

Applicant after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd.

Address before: 102209 Beijing City, Changping District Beiqijia Town, Tivoli Park No. 15

Applicant before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd.

CB02 Change of applicant information
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right

Effective date of registration: 20211022

Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208

Applicant after: Zishi Energy Co.,Ltd.

Address before: 102209 Beijing City, Changping District Beiqijia Town, Tivoli Park No. 15

Applicant before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd.

TA01 Transfer of patent application right