CN110528086A - Flocking additive and its etching method for silicon heterogenous solar battery - Google Patents

Flocking additive and its etching method for silicon heterogenous solar battery Download PDF

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Publication number
CN110528086A
CN110528086A CN201910819928.5A CN201910819928A CN110528086A CN 110528086 A CN110528086 A CN 110528086A CN 201910819928 A CN201910819928 A CN 201910819928A CN 110528086 A CN110528086 A CN 110528086A
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solar battery
silicon
flocking additive
etching method
silicon heterogenous
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张震华
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SHAOXING TUOBANG ELECTRONIC TECHNOLOGY Co Ltd
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SHAOXING TUOBANG ELECTRONIC TECHNOLOGY Co Ltd
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Publication of CN110528086A publication Critical patent/CN110528086A/en
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/08Etching
    • C30B33/10Etching in solutions or melts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02363Special surface textures of the semiconductor body itself, e.g. textured active layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0745Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
    • H01L31/0747Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The present invention provides the flocking additives and its etching method of a kind of silicon heterogenous solar battery, the feed components of flocking additive content by mass percentage are as follows: hydroxypropyl methyl cellulose 0.05%~2%, Sodium Polyacrylate 0.01%~10%, neopelex 0.01%~2%, surplus are deionized water.Additive of the invention is added in wool making solution for monocrystalline silicon pieces, can obtain pyramid of the more uniform and size at 3~8 μm, is conducive to the open-circuit voltage and electric current that improve silicon heterogenous battery, to promote battery efficiency.

Description

Flocking additive and its etching method for silicon heterogenous solar battery
Technical field
The invention belongs to manufacture of solar cells technical fields, are related to a kind of making herbs into wool for silicon heterogenous solar battery Additive and its etching method.
Background technique
Silicon based hetero-junction solar battery is as emerging high performance solar batteries technology, with conventional solar cell phase Than there are many advantages such as high conversion efficiency, good temp characteristic, technological temperature be low, therefore silicon based hetero-junction solar battery has There is good development prospect.
The key technology core of heterojunction solar battery is the passivation of crystalline silicon substrate and amorphous silicon interface, high quality Passivation layer effectively can inhibit carrier in the compound of silicon face, while improve minority carrier life time, to improve photoelectric conversion efficiency.It passes The crystal silicon solar batteries of system have the silicon nitride passivation of 80 nano thickness, and silicon based hetero-junction solar battery is noncrystal Silicon passivation layer thickness only has 5~10 nanometers.Therefore, the uniform deposition of non-crystalline silicon thin-film is with regard to particularly significant.
The pyramidal uniformity of the making herbs into wool of surface of crystalline silicon and pyramidal size are deposited with significantly amorphous silicon membrane Influence, too small pyramid since its bottom curvature radius is smaller, amorphous silicon membrane be difficult to have here uniform deposition and by In the effect of stress, it is easy to produce micro-crack, passivation effect is caused to be deteriorated.Therefore, increasing pyramidal size can be effective Improve the open-circuit voltage of silicon heterogenous battery, and good pyramid uniformity, sunken photosensitiveness can be improved, promote silicon heterogenous electricity The electric current in pond, to improve the incident photon-to-electron conversion efficiency of silicon heterogenous solar battery.
The pyramid size of traditional silicon wafer flocking additive generally only has 1~3 μm, and pyramid is not uniform enough, reflectivity It is higher, it is not able to satisfy the demand of silicon heterogenous manufacture of solar cells and development.Therefore, a pyramid is bigger and more equal Even flocking additive is then particularly significant for the development of silicon heterogenous solar battery.
Summary of the invention
The purpose of the present invention is there is the above problem in view of the prior art, a kind of silicon heterogenous solar battery is provided Flocking additive and its etching method, additive of the invention is added in wool making solution for monocrystalline silicon pieces, can obtain more Pyramid of the even and size at 3~8 μm is conducive to the open-circuit voltage and electric current that improve silicon heterogenous battery, to promote battery Efficiency.
Object of the invention can be realized by the following technical scheme: the making herbs into wool for silicon heterogenous solar battery is added Agent, which is characterized in that
Feed components content by mass percentage are as follows:
Hydroxypropyl methyl cellulose 0.05%~2%,
Sodium Polyacrylate 0.01%~10%,
Neopelex 0.01%~2%,
Surplus is deionized water.
The present invention also provides a kind of etching methods for silicon heterogenous solar battery, which is characterized in that the making herbs into wool side Method includes the following steps:
One, flocking additive is prepared: the hydroxypropyl methyl cellulose for being 0.05%~2% by mass percent, 0.01% ~10% Sodium Polyacrylate, 0.01%~2% neopelex, is added in the deionized water of surplus, mixing Uniformly it is made into flocking additive;
Two, prepare alkaline solution: flocking additive is poured into No.1 tempering tank, alkaline solution is poured into No. two and is mixed It closes in bucket, the percent by volume of flocking additive and alkaline solution is 0.25~5:100;
Three, it prepares Woolen-making liquid: flocking additive is divided into 3~6 equal portions, it is molten that a flocking additive is first poured into alkalinity In liquid, rock No. two tempering tanks to solution it is uniform after, then pour into second part, repetitive operation until whole flocking additives are finished down, It is configured to Woolen-making liquid;
Four, making herbs into wool: monocrystalline silicon piece being immersed in Woolen-making liquid and carries out surface wool manufacturing, forms positive golden word in monocrystalline silicon sheet surface Tower flannelette.
Further, the alkaline solution is the sodium hydroxide or potassium hydroxide solution of concentration 0.5%~10%.
Further, the alkaline solution is the aqueous solution of inorganic base or organic base.
Further, the temperature of the Woolen-making liquid is 70~85 DEG C.
Further, the reaction time is 500s~1500s.
Compared with prior art, this for silicon heterogenous solar battery flocking additive and its etching method have with Lower advantage:
1. pyramid of the more uniform and size at 3~8 μm can be obtained, be conducive to the open circuit for improving silicon heterogenous battery Voltage and current, to promote battery efficiency.
2. the open-circuit voltage of silicon heterogenous battery can effectively be improved by increasing pyramidal size, and good pyramid Sunken photosensitiveness can be improved in uniformity.
Detailed description of the invention
Fig. 1 is the pyramidal SEM front view of silicon wafer obtained in embodiment 1.
Fig. 2 is the pyramidal SEM top view of silicon wafer obtained in embodiment 1.
Specific embodiment
Following is a specific embodiment of the present invention in conjunction with the accompanying drawings, technical scheme of the present invention will be further described, However, the present invention is not limited to these examples.
Embodiment 1
As shown in Figure 1 and Figure 2, the flocking additive for configuring silicon heterogenous solar battery, by 1g hydroxypropyl methyl fiber Element, 0.5g Sodium Polyacrylate, 0.5g neopelex mixed dissolution obtain the silicon heterogenous sun into 1L deionized water The flocking additive of energy battery.The flocking additive of 2000g sodium hydroxide, the silicon heterogenous solar battery of 1L is added to 160L In deionized water, Woolen-making liquid is obtained.Woolen-making liquid temperature is risen to 80 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction Time is 900s, and gained pyramid pedestal size is 3~8 μm.
Embodiment 2
The flocking additive for configuring silicon heterogenous solar battery, by 2g hydroxypropyl methyl cellulose, 1g Sodium Polyacrylate, 1g neopelex mixed dissolution obtains the flocking additive of silicon heterogenous solar battery into 1L deionized water. The flocking additive of 2500g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, making herbs into wool is obtained Liquid.Woolen-making liquid temperature is risen to 80 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 1200s, gained gold Word tower base size is 3~8 μm.
Embodiment 3
The flocking additive for configuring silicon heterogenous solar battery, by 1g hydroxypropyl methyl cellulose, 50g polyacrylic acid Sodium, 5g neopelex mixed dissolution obtain the making herbs into wool addition of silicon heterogenous solar battery into 1L deionized water Agent.The flocking additive of 1500g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, is obtained Woolen-making liquid.Woolen-making liquid temperature is risen to 84 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 600s, gained Pyramid pedestal size is 3~8 μm.
Embodiment 4
The flocking additive for configuring silicon heterogenous solar battery, by 2g hydroxypropyl methyl cellulose, 10g polyacrylic acid Sodium, 1g neopelex mixed dissolution obtain the making herbs into wool addition of silicon heterogenous solar battery into 1L deionized water Agent.The flocking additive of 1000g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, is obtained Woolen-making liquid.Woolen-making liquid temperature is risen to 78 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 1500s, institute Obtaining pyramid pedestal size is 3~8 μm.
Embodiment 5
The flocking additive for configuring silicon heterogenous solar battery, by 1g hydroxypropyl methyl cellulose, 1g Sodium Polyacrylate, 1g neopelex mixed dissolution obtains the flocking additive of silicon heterogenous solar battery into 1L deionized water. The flocking additive of 2500g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, making herbs into wool is obtained Liquid.Woolen-making liquid temperature is risen to 82 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 1000s, gained gold Word tower base size is 3~8 μm.
Embodiment 6
The flocking additive for configuring silicon heterogenous solar battery, by 10g hydroxypropyl methyl cellulose, 5g polyacrylic acid Sodium, 1g neopelex mixed dissolution obtain the making herbs into wool addition of silicon heterogenous solar battery into 1L deionized water Agent.The flocking additive of 2500g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, is obtained Woolen-making liquid.Woolen-making liquid temperature is risen to 82 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 1000s, institute Obtaining pyramid pedestal size is 3~8 μm.
Embodiment 7
The flocking additive for configuring silicon heterogenous solar battery, by 10g hydroxypropyl methyl cellulose, 10g polyacrylic acid Sodium, 10g neopelex mixed dissolution obtain the making herbs into wool addition of silicon heterogenous solar battery into 1L deionized water Agent.The flocking additive of 2500g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, is obtained Woolen-making liquid.Woolen-making liquid temperature is risen to 82 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 1000s, institute Obtaining pyramid pedestal size is 3~8 μm.
Embodiment 8
The flocking additive for configuring silicon heterogenous solar battery, by 5g hydroxypropyl methyl cellulose, 80g polyacrylic acid Sodium, 1g neopelex mixed dissolution obtain the making herbs into wool addition of silicon heterogenous solar battery into 1L deionized water Agent.The flocking additive of 2500g sodium hydroxide, the silicon heterogenous solar battery of 1L is added in 160L deionized water, is obtained Woolen-making liquid.Woolen-making liquid temperature is risen to 82 ° DEG C, monocrystalline silicon piece is then immersed into Woolen-making liquid making herbs into wool, reaction time 1000s, institute Obtaining pyramid pedestal size is 3~8 μm.

Claims (6)

1. being used for the flocking additive of silicon heterogenous solar battery, which is characterized in that
Feed components content by mass percentage are as follows:
Hydroxypropyl methyl cellulose 0.05%~2%,
Sodium Polyacrylate 0.01%~10%,
Neopelex 0.01%~2%,
Surplus is deionized water.
2. a kind of etching method for silicon heterogenous solar battery, which is characterized in that the etching method includes the following steps:
One, flocking additive is prepared: the hydroxypropyl methyl cellulose for being 0.05%~2% by mass percent, 0.01%~ 10% Sodium Polyacrylate, 0.01%~2% neopelex, is added in the deionized water of surplus, and mixing is equal It is even to be made into flocking additive;
Two, prepare alkaline solution: flocking additive being poured into No.1 tempering tank, alkaline solution is poured into No. two tempering tanks Interior, the percent by volume of flocking additive and alkaline solution is 0.25~5:100;
Three, it prepares Woolen-making liquid: flocking additive being divided into 3~6 equal portions, a flocking additive is first poured into alkaline solution In, rock No. two tempering tanks to solution it is uniform after, then pour into second part, repetitive operation is matched until whole flocking additives are finished down It is set to Woolen-making liquid;
Four, making herbs into wool: monocrystalline silicon piece being immersed in Woolen-making liquid and carries out surface wool manufacturing, forms positive pyramid suede in monocrystalline silicon sheet surface Face.
3. a kind of etching method for silicon heterogenous solar battery according to claim 2, which is characterized in that described Alkaline solution be concentration 0.5%~10% sodium hydroxide or potassium hydroxide solution.
4. a kind of etching method for silicon heterogenous solar battery according to claim 2, which is characterized in that described Alkaline solution is the aqueous solution of inorganic base or organic base.
5. a kind of etching method for silicon heterogenous solar battery according to claim 2, which is characterized in that described Woolen-making liquid temperature be 70~85 DEG C.
6. a kind of etching method for silicon heterogenous solar battery according to claim 2, which is characterized in that reaction Time is 500s~1500s.
CN201910819928.5A 2019-08-31 2019-08-31 Flocking additive and its etching method for silicon heterogenous solar battery Pending CN110528086A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111354840A (en) * 2020-04-22 2020-06-30 一道新能源科技(衢州)有限公司 Preparation method of selective emitter double-sided PERC solar cell

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CN107747126A (en) * 2017-11-03 2018-03-02 通威太阳能(安徽)有限公司 A kind of monocrystalline silicon is without alcohol flocking additive, Woolen-making liquid and its application method

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CN102115915A (en) * 2010-12-31 2011-07-06 百力达太阳能股份有限公司 Single crystal silicon texture-making additive and single crystal silicon texture-making technology
WO2015032153A1 (en) * 2013-09-04 2015-03-12 常州时创能源科技有限公司 Monocrystalline silicon wafer texturizing additive and use thereof
CN107747126A (en) * 2017-11-03 2018-03-02 通威太阳能(安徽)有限公司 A kind of monocrystalline silicon is without alcohol flocking additive, Woolen-making liquid and its application method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111354840A (en) * 2020-04-22 2020-06-30 一道新能源科技(衢州)有限公司 Preparation method of selective emitter double-sided PERC solar cell

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Application publication date: 20191203