CN110480512A - Ultrasonic vibration assists microchannel jet stream processing unit (plant) - Google Patents
Ultrasonic vibration assists microchannel jet stream processing unit (plant) Download PDFInfo
- Publication number
- CN110480512A CN110480512A CN201910674341.XA CN201910674341A CN110480512A CN 110480512 A CN110480512 A CN 110480512A CN 201910674341 A CN201910674341 A CN 201910674341A CN 110480512 A CN110480512 A CN 110480512A
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- CN
- China
- Prior art keywords
- abrasive material
- ultrasonic vibration
- material delivery
- plant
- microchannel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 title claims abstract description 34
- 239000003082 abrasive agent Substances 0.000 claims abstract description 44
- 238000009434 installation Methods 0.000 claims abstract description 14
- 238000003756 stirring Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 8
- 239000006061 abrasive grain Substances 0.000 description 7
- 238000003754 machining Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 206010054949 Metaplasia Diseases 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000015689 metaplastic ossification Effects 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/04—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass
- B24C1/045—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for treating only selected parts of a surface, e.g. for carving stone or glass for cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/005—Vibratory devices, e.g. for generating abrasive blasts by ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
- B24C7/0015—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier with control of feed parameters, e.g. feed rate of abrasive material or carrier
- B24C7/0023—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier with control of feed parameters, e.g. feed rate of abrasive material or carrier of feed pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
- B24C7/003—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier with means for preventing clogging of the equipment
Abstract
A kind of ultrasonic vibration auxiliary microchannel jet stream processing unit (plant), including rack platform, placing abrasive agitator tank on the rack platform, the outlet of the abrasive material agitator tank is connect with abrasive material delivery pipe, the end of the abrasive material delivery end connects nozzle, it is characterized in that, the abrasive material delivery pipe is equipped with diaphragm metering pump and accumulator, the abrasive material delivery pipe is equipped with the first ultrasonic vibration installation at the nozzle.The present invention provides one kind in process, can effectively reduce stagnation region pressure, controls abrasive material motion state, the device of the high breadth depth ratio microchannel of highly-efficient processing.
Description
Technical field
The invention belongs to Abrasive Waterjet Machining Technology fields, can be controlled using ultrasonic vibration more particularly, to one kind micro- logical
The device of road jet stream processing.
Background technique
It is to control and utilize fluid using micro-fluidic chip using microchannel network as the micro-fluidic technologies of structure feature, it is real
A kind of emerging technology combined on present micro-meter scale with fields such as microelectronics, optics, the energy, biomedicines, micro-fluidic core
Piece has been realized in commercialized production at present, but its technical level is far away from the semiconductor development that " Moore's Law " is predicted
The problem of main bottleneck that speed wherein hinders micro-fluidic technologies to develop is manufacture processing and application.Common micro-fluidic chip with
Based on the hard brittle materials such as silicon, quartz, glass and ceramics, they have, and hardness is high, brittleness is big, the spies such as sensitive to processing heat affecting
Property, to its microfabrication, more stringent requirements are proposed for this, therefore, explores a kind of processing efficiency and quality is high, and it is versatile, it is easy to
The high breadth depth ratio microchannel process technology that size of the organization metaplasia produces has great significance to the development for pushing micro-fluidic technologies.
Fine abrasive water jet processing technology is with no heat affected area, operating force is small, energy is concentrated, high in machining efficiency and can
The advantages that rapidoprint range is wide is gradually used to carry out microfabrication to hard brittle material.The optimization for crossing working process parameter can be with
The high breadth depth ratio microchannel of highly-efficient processing on hard brittle material is realized, simultaneously because the microchannel table using water as medium, after processing
Face is more conducive to the flowing of fluid, and fine abrasive water jet is allowed to become a kind of new method of microchannel processing in micro-fluidic chip.But
It is that, with the reduction of abrasive grain diameter, jet pressure and jet stream beam diameter, the efficiency that energy of the impinging jet is converted to abrasive grain kinetic energy drops rapidly
It is low, cause the working ability of fine abrasive water jet by very big decrease, while low pressure stream is penetrated what workpiece surface was formed
Influence of the stagnation region to grain motion is flowed also to be more and more obvious.Therefore, study in process how to reduce pressure stagnation region band
The influence come has highly important scientific meaning and practical value.
Summary of the invention
In order to solve influence of the static stagnation region to grain motion in process, the effect of abrasive grain kinetic energy conversion is improved
Rate, the present invention provide one kind in process, can effectively reduce stagnation region pressure, control abrasive material motion state, efficiently add
The device of the high breadth depth ratio microchannel of work.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of ultrasonic vibration assists microchannel jet stream processing unit (plant), including rack platform, places mill on the rack platform
Expect agitator tank, the outlet of the abrasive material agitator tank is connect with abrasive material delivery pipe, and the end of the abrasive material delivery end connects nozzle,
It is characterized in that, the abrasive material delivery pipe is equipped with diaphragm metering pump and accumulator, and the abrasive material delivery pipe is close to the nozzle
Place is equipped with the first ultrasonic vibration installation.
Further, the abrasive material delivery pipe is equipped with pressure indicator.
Further, the front of the nozzle is equipped with the stationary fixture for fixing workpiece, and the fitment is mounted on
On second ultrasonic vibration installation, second ultrasonic vibration installation is located on processing platform.
Further, screw rod, the upper end of the screw rod and the output of stirring motor are equipped in the abrasive material agitator tank
Axis connection.
In the present invention, after abrasive grain and water addition, takes and keep at quarter being sufficiently stirred, diaphragm metering pump sucks abrasive material, leads to
The range for overregulating metering pump, can control tonnage.Meanwhile ultrasonic vibration installation acts on external hose, in hose
Originally become abnormal uniform abrasive material because of well-mixed, start to show orderly movement, it is gradually mobile to center, and
And by the range of the amplitude and frequency and metering pump that effectively adjust ultrasonic vibration, most abrasive materials can be controlled
In certain area, the energy accumulating of the overwhelming majority is got up impact in workpiece surface.In addition, in order to further increase processing effect
Rate reduces influence of the workpiece surface static state stagnation region pressure to jet stream, ultrasonic vibration platform has been disposed under workpiece.Pass through ultrasound
The running of shaking platform can effectively observe that within each ultrasonic vibration period, the material of workpiece surface is effectively gone
It removes.Meanwhile ultrasonic vibration can be cooperated by adjusting the machining angle of sapphire nozzle, it effectively inhibits surface and sub-surface is split
The generation of line improves workpiece surface quality.
Beneficial effects of the present invention are mainly manifested in: compared with the prior art, passing through fine abrasive water jet and ultrasound
The particle of unordered chaotic motion in water jet is efficiently controlled in certain area, and passes through workpiece by the combination of vibration
Under ultrasonic vibration platform, this can be generated in workpiece surface, influence water jet machining workpiece static stagnation region reduce, greatly
Ground improves processing efficiency.It, can by controlling the amplitude and frequency of ultrasonic vibration, and the machining angle of change sapphire nozzle
To search out a best joint, the generation of workpiece surface and sub-surface crackle is effectively inhibited, is largely improved
Workpiece surface quality so as to high-precision high-efficiency processes high breadth depth ratio microchannel.
Detailed description of the invention
Fig. 1 is ultrasonic vibration auxiliary microchannel jet stream processing unit (plant) schematic diagram
Map parameter: 1, stirring motor 2, screw rod 3, abrasive material agitator tank 4, rack platform 5, accumulator 6, pressure
Indicator 7, the first ultrasonic vibration installation 8, workpiece 9, diaphragm metering pump 10, stationary fixture 11, the second ultrasonic vibration dress
Set 12, processing platform.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
Referring to Fig.1, a kind of ultrasonic vibration assists microchannel jet stream processing unit (plant), including rack platform 4, the rack platform
The outlet of placing abrasive agitator tank 3 on 4, the abrasive material agitator tank 3 is connect with abrasive material delivery pipe, the end of the abrasive material delivery end
Nozzle is connected, the abrasive material delivery pipe is equipped with diaphragm metering pump 9 and accumulator 5, and the abrasive material delivery pipe is close to the spray
The first ultrasonic vibration installation 7 is equipped at mouth.
Further, the abrasive material delivery pipe is equipped with pressure indicator 6.
Further, the front of the nozzle is equipped with the fixing clamp 10 for fixing workpiece 8, and the stationary fixture 10 is installed
On the second ultrasonic vibration installation 11, second ultrasonic vibration installation 11 is located on processing platform 12.
Further, screw rod 2, upper end and the stirring motor 1 of the screw rod 2 are equipped in the abrasive material agitator tank 3
Export axis connection.
In the present embodiment, in order to keep sapphire nozzle to be unlikely to block, suitable abrasive grain and water are added in abrasive material agitator tank 3
After interior, need to be kept stirring the rotation that motor 1 drives screw rod 2 constantly.After abrasive material is sufficiently stirred in abrasive material agitator tank 3, every
Metering pump,diaphragm 9 adsorbs barrier film shape into vacuum, and abrasive material is sucked out out of agitator tank, then by pushing, abrasive material is pressurizeed, is made
It quickly move through pipeline.Because carrying out efficiently high wide deep channel processing, need to be accurately controlled abrasive material pressure, in pipeline position
It sets and is mounted with pressure indicator 6, by the Real-time Feedback of pressure indicator 6, abrasive material pressure can be controlled more accurately.And
Accumulator 5 in this process, can effectively stable abrasive material pressure, be unlikely to pressure fluctuations occur to fluctuate excessive feelings
Condition guarantees the stability of process.When abrasive material reaches the position of the first ultrasonic vibration installation 7, ultrasonic vibration will be mixed originally
Random abrasive grain is rapidly gathered in pipeline middle position, and a large amount of abrasive grain goes out pipeline by sapphire nozzle, impinges upon workpiece 8
On.Originally due to abrasive material striking work 8 rebound and formed pressure stagnation region, at this time due to the second ultrasonic vibration installation 11 plus
Enter, the pressure stagnation region pressure on 8 surface of workpiece is obviously reduced, therefore abrasive material can more efficiently striking work.Because ultrasonic
The existing natural period of oscillation is vibrated, the tangential force and vertical direction toward impact pressure of workpiece surface have a more significant change, at this
During a, the surface quality of workpiece 8 is had fully guaranteed.
The highly-efficient processing Gao Kuanshen on hard brittle material may be implemented in above-mentioned ultrasonic vibration auxiliary microchannel jet stream processing unit (plant)
Than microchannel, simultaneously because the microchannel surface after processing is more conducive to the flowing of fluid using water as medium, make ultrasonic wave added micro-
The method that finer abrasive water jet becomes a kind of more efficient stable of microchannel processing in micro-fluidic chip.Relative to conventional abrasives
Water jet machining apparatus and method, the problem that low efficiency, workpiece surface quality are poor, processing is unstable.The processing that the present apparatus provides
Research significance of the scheme with more reality.It is versatile since processing efficiency and quality are high, it is easy to size of the organization metaplasia and produces high width
It is deep to have great significance than the microchannel processing present apparatus to the development for pushing micro-fluidic technologies.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (4)
1. a kind of ultrasonic vibration assists microchannel jet stream processing unit (plant), including rack platform, placing abrasive on the rack platform
The outlet of agitator tank, the abrasive material agitator tank is connect with abrasive material delivery pipe, and the end of the abrasive material delivery end connects nozzle, special
Sign is that the abrasive material delivery pipe is equipped with diaphragm metering pump and accumulator, and the abrasive material delivery pipe is at the nozzle
Equipped with the first ultrasonic vibration installation.
2. a kind of ultrasonic vibration as described in claim 1 assists microchannel jet stream processing unit (plant), which is characterized in that the abrasive material
Delivery pipe is equipped with pressure indicator.
3. a kind of ultrasonic vibration as claimed in claim 1 or 2 assists microchannel jet stream processing unit (plant), which is characterized in that described
The front of nozzle is equipped with the stationary fixture for fixing workpiece, and the fitment is mounted on the second ultrasonic vibration installation, institute
The second ultrasonic vibration installation is stated to be located on processing platform.
4. a kind of ultrasonic vibration as claimed in claim 1 or 2 assists microchannel jet stream processing unit (plant), which is characterized in that described
Screw rod, the upper end of the screw rod and the output axis connection of stirring motor are equipped in abrasive material agitator tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910674341.XA CN110480512A (en) | 2019-07-25 | 2019-07-25 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910674341.XA CN110480512A (en) | 2019-07-25 | 2019-07-25 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110480512A true CN110480512A (en) | 2019-11-22 |
Family
ID=68548170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910674341.XA Pending CN110480512A (en) | 2019-07-25 | 2019-07-25 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110480512A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111941288A (en) * | 2020-08-12 | 2020-11-17 | 华南理工大学 | Composite shot blasting device and method utilizing kinetic energy and ultrasonic vibration of shot |
| CN112157592A (en) * | 2020-09-29 | 2021-01-01 | 南京航太机电有限公司 | Ultrasonic-assisted ultralow-temperature abrasive gas jet micromachining device for medical polymer PDMS (polydimethylsiloxane) material |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996011081A2 (en) * | 1994-09-30 | 1996-04-18 | Extrude Hone Corporation | Method and apparatus for ultrasonic working |
| DE102008008701A1 (en) * | 2008-02-11 | 2009-09-10 | Hammelmann Maschinenfabrik Gmbh | Method for manufacturing water abrasive jet, involves supplying abrasive agent under high pressure water jet according to injector principle, and interrupting water jet before supplying abrasive agent |
| CN103753405A (en) * | 2014-01-14 | 2014-04-30 | 山东大学 | Ultrasonic reinforced abrasive water jet machining device |
| CN103909300A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoresis and supersonic vibration assisted micro-milling and machining device |
| CN107081682A (en) * | 2017-06-06 | 2017-08-22 | 浙江工业大学 | A kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect |
| CN107081681A (en) * | 2017-06-06 | 2017-08-22 | 浙江工业大学 | Microfluidic channel processing unit (plant) based on abrasive particle dynamic impulsion effect |
| CN108789165A (en) * | 2018-06-25 | 2018-11-13 | 南京航空航天大学 | A kind of ultrasonic wave added abradant jet deburring device |
| US20180354096A1 (en) * | 2016-09-14 | 2018-12-13 | Qingdao Technological University | Multi-angle two-dimensional ultrasonic vibration assisted nanofluid micro-lubrication grinding device |
| CN210879251U (en) * | 2019-07-25 | 2020-06-30 | 浙江工业大学 | High-width-depth-ratio micro-channel jet processing device |
-
2019
- 2019-07-25 CN CN201910674341.XA patent/CN110480512A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996011081A2 (en) * | 1994-09-30 | 1996-04-18 | Extrude Hone Corporation | Method and apparatus for ultrasonic working |
| DE102008008701A1 (en) * | 2008-02-11 | 2009-09-10 | Hammelmann Maschinenfabrik Gmbh | Method for manufacturing water abrasive jet, involves supplying abrasive agent under high pressure water jet according to injector principle, and interrupting water jet before supplying abrasive agent |
| CN103753405A (en) * | 2014-01-14 | 2014-04-30 | 山东大学 | Ultrasonic reinforced abrasive water jet machining device |
| CN103909300A (en) * | 2014-04-04 | 2014-07-09 | 广东工业大学 | Electrophoresis and supersonic vibration assisted micro-milling and machining device |
| US20180354096A1 (en) * | 2016-09-14 | 2018-12-13 | Qingdao Technological University | Multi-angle two-dimensional ultrasonic vibration assisted nanofluid micro-lubrication grinding device |
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| CN107081681A (en) * | 2017-06-06 | 2017-08-22 | 浙江工业大学 | Microfluidic channel processing unit (plant) based on abrasive particle dynamic impulsion effect |
| CN108789165A (en) * | 2018-06-25 | 2018-11-13 | 南京航空航天大学 | A kind of ultrasonic wave added abradant jet deburring device |
| CN210879251U (en) * | 2019-07-25 | 2020-06-30 | 浙江工业大学 | High-width-depth-ratio micro-channel jet processing device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111941288A (en) * | 2020-08-12 | 2020-11-17 | 华南理工大学 | Composite shot blasting device and method utilizing kinetic energy and ultrasonic vibration of shot |
| CN112157592A (en) * | 2020-09-29 | 2021-01-01 | 南京航太机电有限公司 | Ultrasonic-assisted ultralow-temperature abrasive gas jet micromachining device for medical polymer PDMS (polydimethylsiloxane) material |
| CN112157592B (en) * | 2020-09-29 | 2022-04-12 | 南京航太机电有限公司 | Ultrasonic-assisted ultralow-temperature abrasive gas jet micromachining device for medical polymer PDMS (polydimethylsiloxane) material |
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