CN112720273A - Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system - Google Patents
Ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system Download PDFInfo
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- CN112720273A CN112720273A CN202110028932.7A CN202110028932A CN112720273A CN 112720273 A CN112720273 A CN 112720273A CN 202110028932 A CN202110028932 A CN 202110028932A CN 112720273 A CN112720273 A CN 112720273A
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- abrasive
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/05—Stirrers
- B01F27/11—Stirrers characterised by the configuration of the stirrers
- B01F27/19—Stirrers with two or more mixing elements mounted in sequence on the same axis
- B01F27/192—Stirrers with two or more mixing elements mounted in sequence on the same axis with dissimilar elements
- B01F27/1921—Stirrers with two or more mixing elements mounted in sequence on the same axis with dissimilar elements comprising helical elements and paddles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/808—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with stirrers driven from the bottom of the receptacle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/82—Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/005—Vibratory devices, e.g. for generating abrasive blasts by ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
- B24C5/04—Nozzles therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
- B24C7/0038—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier the blasting medium being a gaseous stream
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses an ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system which comprises an abrasive mixing device, an abrasive conveying device, a comprehensive control cabinet, a pulse jet polishing tool, an angle adjusting device, a workpiece rotating device, a three-axis moving module, a processing pool, a rack, a waste material recovery device and a gas injection device. The invention utilizes the ultrasonic modulation principle to form pulse jet flow, and improves the jet flow polishing efficiency by means of the water hammer effect generated by fluid pulse; the intensity of the pulse jet flow is actively controlled by adjusting the distance between the tail end of the amplitude transformer and the outlet of the inner cavity of the nozzle; the stability of the components of the abrasive flow is realized by monitoring the concentration and viscosity of the abrasive flow; monitoring the intensity of the pulse jet flow in real time through an annular array sensor; cavitation erosion is avoided by the air entrainment erosion reduction principle; and the three-axis motion module and the workpiece rotating device move cooperatively to realize full-coverage precision polishing of the complex bent flow channel.
Description
Technical Field
The invention relates to the technical field of ultra-precision polishing, in particular to an ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system.
Background
The micro-fluidic chip made of the glass substrate is widely applied to the fields of biological quality detection and the like. The micro-channel is a main place for realizing fluid transportation and detection analysis of the micro-fluidic chip, and the smoothness of the inner wall surface of the micro-channel directly determines the biochemical analysis precision, stability and the like of the micro-fluidic chip. However, the micro-channel structure made of the glass substrate has the difficult processing characteristics of hard and brittle materials, and also has the processing difficulties of high aspect ratio of the channel, obvious discontinuous surface characteristics and complex bending of the channel of the same chip.
From the requirement on the polishing of a flow channel of a microfluidic chip, the fluid with very good flexibility is used for driving the micro abrasive particles to process the surface of a workpiece in the jet polishing process, so that the deterioration of a processing layer and the sub-surface damage can be effectively avoided. However, when the traditional jet polishing method is used for polishing the flow channel of the microfluidic chip, the polishing efficiency is low and the jet strength is weak. The ultrasonic vibration modulation principle is introduced into the jet flow, so that the jet flow strength can be effectively improved. The ultrasonic vibration modulation means that ultrasonic waves are emitted through an ultrasonic transducer, sound waves are focused on fluid in the nozzle through an amplitude transformer, the fluid is driven to vibrate periodically, and then micro jet flow emitted from the nozzle is forced to change in discontinuous pulses. When the discontinuous jet flow which is in pulse change impacts the wall surface, a water hammer effect can be formed, and the jet flow striking force can be effectively improved by means of the water hammer effect.
The ultrasonic vibration modulation enhancement method has the characteristics of no pollution, strong jet impact force and the like, so that the ultrasonic vibration modulation enhancement method becomes one of hot methods for improving the erosion and crushing capability of the injection jet in recent years, but the current ultrasonic modulation pulse device cannot be used for polishing a micro-channel structure. For example, the invention patent with the patent number of CN20141069807040.7 provides a method for preparing neodymium iron boron permanent magnet alloy powder, which forces neodymium iron boron particle materials to be crushed through the water hammer effect, the water wedge-stretching effect, the cavitation effect, the friction shearing effect of high-power ultrasonic pulse jet and the strong impact collision among particles, and finally prepares the neodymium iron boron alloy powder with proper particle size. However, the method is only suitable for large-scale industrial production, improves the hitting force for crushing material particles, improves the crushing effect and efficiency, and can not apply high-strength pulse jet flow and a device to the polishing of various complicated curved surface microfluidic chip surface flow channels; compared with the ultrasonic modulation pulse jet polishing, the polishing efficiency of the traditional hot-gate ultrasonic cavitation enhanced jet polishing method is lower, and cavitation bubbles generated during polishing easily cause serious cavitation damage to the inner cavity of the nozzle and the wall surface of the flow passage. The invention patent of CN2019103060203030.X provides an ultrasonic cavitation auxiliary jet polishing system and a polishing method, and the ultrasonic cavitation auxiliary jet polishing system and the polishing method combine the modes of ultrasonic waves and acoustic lenses to generate focus cavitation, thereby effectively improving the jet polishing efficiency. However, compared with the method and the device for generating the pulse abrasive particle micro-jet by ultrasonic modulation, the method and the device adopt the mode of generating cavitation by sound wave vibration, the intensity of the jet is low, and a large amount of generated cavitation bubbles easily cause cavitation corrosion to the inner walls of the nozzle and the jet cavity, and the large amount of cavitation bubbles easily block the jet orifice in the polishing process due to the small aperture of the nozzle. Therefore, it is a very practical task to develop a pulse micro-jet polishing system suitable for polishing micro-channel structures.
Disclosure of Invention
The invention aims to effectively apply the method for modulating the pulse jet flow by ultrasonic vibration to the micro jet flow polishing and improve the erosion force and the polishing efficiency of the jet flow, thereby providing the system for modulating the pulse abrasive particle micro jet flow polishing by ultrasonic vibration to finish the high-efficiency full-coverage fluid polishing of the flow channel of the micro-structure and the complex bending micro-fluidic chip.
The invention realizes the purpose through the following technical scheme: an ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system comprises an abrasive mixing device, an abrasive conveying device, a comprehensive control cabinet, a pulse jet polishing tool, an angle adjusting device, a workpiece rotating device, a three-axis moving module, a processing pool, a rack, a waste recovery device and a gas injection device; the abrasive mixing device is connected with an abrasive flow pipeline of the abrasive conveying device through an abrasive flow outlet; the abrasive material conveying device is connected to an abrasive particle flow injection inlet of the pulse jet polishing tool through an abrasive particle flow output pipeline; the comprehensive control cabinet controls the operation of the whole system; the pulse jet polishing tool is fixed at the front end of the angle adjusting device through a hoop; the angle adjusting device is fixed on a module in the three-axis moving module, and the angle adjusting device and the pulse jet polishing tool can move along the directions of x, y and z under the driving of the three-axis moving module; the workpiece rotating device is arranged in the processing pool through supporting rods at two ends; the three-axis moving module is arranged on the rack; the processing pool is arranged on the inner wall of the rack through bolts and is positioned below the three-axis moving module; the waste recovery device is connected with an outlet at the bottom of the processing pool through a waste recovery pipe in a threaded structure and is used for collecting waste abrasive particle flow; the gas injection device is connected to a gas injection port of the pulse jet polishing tool through a gas injection pipe.
The abrasive mixing device comprises a water inlet, a combined stirring paddle, a stirring motor, a stirrer frame, an abrasive flow outlet and an abrasive mixing barrel; the water inlet is positioned at the left barrel opening of the abrasive mixing barrel, and the flow can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the sensor; the grinding material mixing barrel is arranged in the center of a frame of the stirrer, and a rotating shaft of the stirring motor is connected with a vertically arranged rotating main shaft through a rotating joint and is connected to a combined stirring blade in the barrel through a hole below the grinding material mixing barrel; the combined stirring paddle is divided into a propelling paddle and two-blade inclined paddle, the propelling paddle is installed at the bottom of the abrasive mixing barrel and rolls the abrasives at the bottom upwards, the two-blade inclined paddle at the upper part shears the abrasives in the tank body in circulation to form strong turbulence disturbance, the abrasive particles are refined by the strong turbulence effect, the contact probability is increased, and the overall circulation and mixing efficiency of the abrasives in the barrel are improved; the abrasive particle outflow port is positioned on the right side wall of the middle part of the abrasive mixing barrel and is connected with the abrasive particle flow pipeline.
The abrasive material conveying device comprises an abrasive flow pipeline, a self-sucking pump, a filter disc, a flow switch, an abrasive flow pressure gauge, an electro-hydraulic servo valve, an abrasive flow output pipeline, an ultrasonic liquid viscosity sensor and a particle concentration sensor, wherein the abrasive flow pipeline is arranged at the inlet of the self-sucking pump; the outlet of the self-priming pump is sequentially connected with a filter disc, a flow switch, an abrasive flow pressure gauge, an electro-hydraulic servo valve, an ultrasonic liquid viscosity sensor and a particle concentration sensor through the abrasive flow output pipeline; the ultrasonic liquid viscosity sensor and the particle concentration sensor are used for monitoring the change of the viscosity and the concentration of the abrasive particle flow in real time.
The pulse jet polishing tool comprises an ultrasonic transducer, an amplitude transformer, a flange plate sealing rubber layer, an abrasive particle flow injection port, a sealing rubber ring, a nozzle, a conical cavity, a gas injection port and a jet sleeve, wherein the ultrasonic transducer is positioned at the uppermost part of the whole pulse jet polishing tool; the top end of the amplitude transformer is connected with the bottom of the ultrasonic transducer, and the tail end of the amplitude transformer sequentially penetrates through the jet sleeve and the conical cavity and extends into the nozzle; the flange face at the middle end of the amplitude transformer is clamped and assembled with the flange face at the upper end of the jet flow sleeve through a flange plate; a flange plate sealing rubber layer is arranged between the flange plate and the flange surface at the upper end of the jet flow sleeve; the abrasive particle flow injection port and the gas injection port are obliquely arranged on two sides of the jet flow sleeve, so that the direct impact on the amplitude transformer can be avoided; the nozzle is arranged at the tail end of the conical cavity, the whole material of the nozzle is made of tungsten steel, and the inner core is made of ruby, so that the abrasion of the nozzle is reduced, and the service life of the nozzle is prolonged; the conical cavity is in matched connection with an internal thread structure at the lower end of the jet sleeve through an external thread on the upper end surface; the internal flow channel structure of the conical cavity is in an inverted cone shape, and the tail end of the external thread surface of the conical cavity is provided with a right-angle end surface; a sealing rubber ring with an adjustable thickness specification is arranged between the tail end surface of the jet sleeve and the right-angle end surface of the bottom of the external thread of the conical cavity, and the sealing rubber ring is screwed through the thread between the jet sleeve and the conical cavity to realize the sealing effect of the sealing rubber ring; under different polishing requirements, the distance between the tail end of the amplitude transformer and the outlet of the inner cavity of the nozzle can be adjusted by replacing the thickness specification of the sealing rubber ring under the condition of not changing the technological parameters of the micro jet, and the intensity of the pulse jet is actively controlled.
The angle adjusting device comprises a clamp, a clamp supporting plate and an angle adjusting plate, wherein the arc-shaped movable grooves with the same circle center are formed in the upper end and the lower end of the angle adjusting plate, and the adjustable angle range is 0-60 degrees. When the jet angle needs to be adjusted, the clamp support plate is swung up and down to a proper angle, and then the pulse jet polishing tool is locked by using a screw to penetrate through the arc-shaped groove and a screw hole in the clamp support plate; and the inner ring of the hoop is provided with vibration isolation rubber for keeping the stability of the pulse jet polishing tool in working.
The workpiece rotating device comprises a clamp, a pressure sensor, a vertical servo motor, a waterproof isolation box and two end supporting rods, wherein the waterproof isolation box is arranged on the inner wall of the processing pool through the two end supporting rods; the vertical servo motor is arranged at the bottom of the waterproof isolation box; a rotating shaft of the vertical servo motor is connected with the clamp through a connector to control the periodic autorotation of the clamp; a plurality of pressure sensors are arranged in the clamp along the circumferential direction in an array mode and used for monitoring the intensity change of the pulse jet flow in real time and guaranteeing the stability of polishing intensity.
The three-axis moving module comprises a guide rail, a linear sliding block base plate, a module fixing plate, a Y-axis module, a Z-axis module, a horizontal transverse moving bottom plate, an X-axis module and a horizontal moving bottom plate, the guide rail is installed on the left side of the rack, and the linear sliding block base plate is installed at the upper end of the guide rail; a horizontal transverse moving bottom plate is arranged on the upper end face of the X-axis module and connected with the right side of the rack, and the upper end face of the linear sliding block base plate is connected with the upper end face of the horizontal transverse moving bottom plate through a module fixing plate by screws; the Y-axis module is installed on the front end face of the module fixing plate, the Z-axis module is installed on the front end face of the Y-axis module, and the movement in the x, Y and Z directions can be achieved integrally.
The waste recovery device comprises an abrasive particle flow waste pipeline and a waste recovery box, wherein one end of the abrasive particle flow waste pipeline is connected with an outlet at the bottom of the processing pool; the other end of the abrasive particle flow waste pipeline is connected with an inlet of a waste recovery box.
The gas injection device comprises a gas pump, a gas switch, a gas pressure gauge, a proportional valve and a gas injection pipe, wherein one end of the gas injection pipe is connected with the gas outlet end of the gas pump, the other end of the gas injection pipe is connected with a gas injection hole of the pulse jet polishing tool, the gas switch, the gas pressure gauge and the proportional valve are sequentially arranged on the gas injection pipe according to the flowing direction of the gas, and the gas generated by the gas pump sequentially passes through the gas switch, the gas pressure gauge and the proportional valve in the gas injection pipe and then enters a conical cavity of the pulse jet polishing tool; the gas injection device injects gas into the conical cavity, so that cavitation damage of cavitation bubbles generated by ultrasonic vibration in the abrasive flow to the conical cavity and the nozzle inner cavity channel is reduced or eliminated.
Further, the distance D between the tail end of the amplitude transformer and the outlet of the inner cavity of the nozzle, the diameter R of the tail end of the amplitude transformer, the diameter of the flow channel, the preset jet intensity and the specification of the nozzle are determined by calculation of an Euler multi-term flow model.
Further, the diameter of the outlet hole of the nozzle is summarized according to experimental data, and is optimally selected to be between 0.1 and 0.5 mm. The specific aperture of the nozzle is determined by Finnie erosion model calculation according to the intensity of the pulse micro-jet and the pre-designed polishing time of the flow channel with different areas and different bending degrees.
Further, in the abrasive mixing barrel, the combined stirring paddle is used for mixing the abrasive with the abrasive, and the density of the mixed abrasive is 1000kg/m3Has a density of 3170kg/m and distilled water of not more than 5% by volume3The alumina abrasive grains are evenly stirred to prepare abrasive grain flow.
Furthermore, the pressure sensor monitors the jet impact force in real time and transmits data back to the comprehensive control cabinet, and when the jet impact force fluctuates, the comprehensive control cabinet controls the amplitude of the amplitude transformer by adjusting the power of the ultrasonic transducer, so that the pulse jet strength is kept relatively stable in the whole polishing process.
Furthermore, the ultrasonic liquid viscosity sensor and the particle concentration sensor monitor the viscosity and the concentration of the abrasive particle flow in real time, and send the obtained data back to the comprehensive control cabinet. When the concentration or viscosity of the abrasive flow is higher or lower than a pre-designed numerical value, the comprehensive control cabinet automatically adjusts the flow of the water inlet on the abrasive mixing barrel according to specific conditions, and the accurate control of the system on the mixing quality of the abrasive flow is realized.
Furthermore, the three-axis motion module and the workpiece rotating device are controlled by the comprehensive control cabinet, so that the three-axis motion module and the workpiece rotating device can move cooperatively, and the complete and accurate polishing of the complex bent flow channel is completed.
Compared with the prior art, the invention has the following advantages:
1) the combined stirring paddle is divided into a propelling paddle and two-blade inclined paddles, the propelling paddle is arranged at the bottom of the grinding material mixing barrel, grinding materials at the bottom are rolled upwards, and the two-blade inclined paddles at the upper part shear the grinding materials in the tank body circularly to form strong turbulence disturbance. The abrasive particles are refined through the strong turbulence effect, the contact probability is increased, and the overall circulation and mixing efficiency of the abrasive flow in the barrel are improved.
2) The water inlet is arranged above the abrasive mixing barrel, and the water inflow can be adjusted in real time according to abrasive concentration and viscosity data fed back by the comprehensive control cabinet.
3) The ultrasonic liquid viscosity sensor and the particle concentration sensor monitor the viscosity and the concentration of the abrasive flow in real time and transmit the obtained data back to the comprehensive control cabinet. When the viscosity or the concentration of the abrasive flow is higher than or lower than a pre-designed numerical value, the comprehensive control cabinet automatically adjusts the flow of the water inlet on the abrasive mixing barrel according to specific conditions, and the accurate control of the system on the mixing quality of the abrasive flow is realized.
4) According to the air-entrainment cavitation erosion reduction technology adopted by the invention, the air is mixed into the abrasive particle mixed flow by arranging the air-entrainment port on the side wall of the jet flow sleeve, so that the movement characteristic of the incoming flow is changed, a certain compressed abrasive particle, water and air mixed three-phase flow is formed, and cavitation erosion damage of cavitation bubbles generated by ultrasonic vibration in the abrasive particle flow to the conical cavity and the nozzle inner cavity channel is reduced or eliminated.
5) According to the invention, the sealing rubber rings with various thickness specifications are arranged between the conical cavity and the nut, and the distance between the tail end of the amplitude transformer and the inner cavity of the nozzle is adjusted by changing the thickness specifications of the sealing rubber rings under the condition of not changing the technological parameters of the micro-jet, so that the intensity of the pulse jet is actively controlled.
6) The angle adjusting device of the invention is coupled with the pulse jet polishing tool and is integrated into a whole, so that the angle adjustment and control of the jet beam in the whole polishing process are more flexible.
7) The central interlayer of the clamp is provided with a plurality of pressure sensors which are circumferentially arrayed and used for monitoring the real-time intensity change of the feedback pulse jet flow. When the jet intensity is out of the set range, the pulse jet intensity is adjusted in time.
8) According to the invention, the flow channel is polished in different regions according to the diameter of the flow channel and the combination of the pre-designed pulse jet intensity and the pulse jet diameter, so that the high-efficiency full-coverage fluid polishing of the flow channel of the micro-fluidic chip with the microstructure and the complex curved surface is completed under the coordination of the three-axis moving module and the workpiece rotating device.
9) The pressure sensor monitors the jet impact force in real time, transmits data back to the comprehensive control cabinet, and when the jet impact force fluctuates, the comprehensive control cabinet controls the amplitude of fluctuation by adjusting the power of the ultrasonic transducer
The amplitude of the beam keeps the pulsed jet intensity relatively constant throughout the polishing process.
Drawings
FIG. 1 is a schematic diagram of an ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing device according to the present invention.
Fig. 2 is a structural view of the abrasive mixing device of the present invention.
Fig. 3 is a schematic structural diagram of the abrasive conveying device of the invention.
FIG. 4 is a schematic view of a pulsed jet polishing tool of the present invention.
FIG. 5 is a schematic cross-sectional view of a pulsed jet polishing tool of the present invention.
Fig. 6 is a schematic structural view of the angle adjusting device of the present invention.
FIG. 7 is a schematic view of the structure of the workpiece rotating apparatus according to the present invention.
FIG. 8 is a circumferential array layout of pressure sensors according to the present invention.
Fig. 9 is a schematic view of the structure of the triaxial moving module of the present invention.
FIG. 10 is a schematic view of the waste recycling apparatus of the present invention.
FIG. 11 is a schematic view of the gas injection apparatus of the present invention.
FIG. 12 is a schematic view of a flow channel sub-section of the present invention.
FIG. 13 is a schematic view of the surface partial polishing of the flow channel of the microfluidic chip according to the present invention.
Fig. 14 is a schematic view of the rotation of the curved flow channel of the present invention.
In the figure, 01-abrasive mixing device, 02-abrasive conveying device, 03-comprehensive control cabinet, 04-pulse jet polishing tool, 05-angle adjusting device, 06-workpiece rotating device, 07-triaxial moving module, 08-processing pool, 09-frame, 10-waste recovery device, 11-gas injection device, 0101-water inlet, 0102-combined stirring paddle, 0103-stirring motor, 0104-stirrer frame, 0105-abrasive particle outflow port, 0106-abrasive mixing barrel, 0201-abrasive particle flow pipeline, 0202-self-priming pump, 0203-filter disc, 0204-flow switch, 0205-abrasive particle flow pressure gauge, 0206-electro-hydraulic servo valve, 0207-abrasive particle flow output pipeline, 0208-ultrasonic liquid viscosity sensor, 0209-particle concentration sensor, 0401-ultrasonic transducer, 0402-horn, 0403-flange, 0404-flange rubber sealing layer, 0405-abrasive particle stream inlet, 0406-sealing rubber ring, 0407-nozzle, 0408-conical cavity, 0409-gas inlet, 0411-jet sleeve, 0501-clamp, 0502-clamp support plate, 0503-angle adjusting plate, 0601-clamp, 0602-pressure sensor, 0603-vertical servo motor, 0604-waterproof isolation box, 0701-guide rail, 0702-linear slide block pad, 0703-module fixing plate, 0704-Y-axis module, 0705-Z-axis module, 0706-horizontal transverse moving base plate, 0707-X-axis module, 0708 horizontal moving base plate, 1001-abrasive particle stream waste pipeline, 1002-a waste recycling tank, 1101-an air pump, 1102-an air switch, 1103-an air pressure gauge, 1104-a proportional valve and 1105-an air injection pipe.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings 1 to 14 in conjunction with specific examples. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
As shown in fig. 1 to 14, the present invention achieves the above object by the following technical solutions: an ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system comprises an abrasive mixing device 01, an abrasive conveying device 02, a comprehensive control cabinet 03, a pulse jet polishing tool 04, an angle adjusting device 05, a workpiece rotating device 06, a three-axis moving module 07, a processing pool 08, a rack 09, a waste recovery device 10 and a gas injection device 11; the abrasive mixing device 01 is connected with an abrasive flow pipeline 0201 of the abrasive conveying device 02 through an abrasive flow outlet 0105; the abrasive material conveying device 02 is connected to an abrasive material flow injection port 0405 of the pulse jet polishing tool 04 through an abrasive material flow output pipeline 0207; the integrated control cabinet 03 controls the operation of the whole system; the pulse jet polishing tool 04 is fixed at the front end of the angle adjusting device 05 through a hoop 0501; the angle adjusting device 05 is fixed on a module in the three-axis moving module 07, and the angle adjusting device 05 and the pulse jet polishing tool 04 can move along the directions x, y and z under the driving of the three-axis moving module 07; the workpiece rotating device 06 is arranged in the processing pool 08 through supporting rods 0605 at two ends; the three-axis moving module 07 is arranged on a frame 09; the processing pool 08 is fixed on the inner wall of the rack 09 through bolts and is positioned below the three-axis moving module 07; the waste recovery device 10 is connected with an outlet at the bottom of the processing pool 08 through a waste abrasive flow pipeline 1001 in a threaded structure and is used for collecting waste abrasive flow; the gas injection device 11 is connected to a gas injection port 0409 of the pulse jet polishing tool 04 through a gas injection tube 1105.
As shown in fig. 2, the abrasive mixing device 01 includes a water inlet 0101, a combined stirring paddle 0102, a stirring motor 0103, a stirrer frame 0104, an abrasive particle outlet 0105, and an abrasive mixing barrel 0106; the water inlet 0101 is positioned at the left side opening of the abrasive mixing barrel 0106, and the flow rate can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the sensor; the abrasive mixing barrel 0106 is installed in the center of the stirrer frame 0104, and a rotating shaft of the stirring motor 0103 is connected with a vertically arranged rotating main shaft through a rotating joint and connected to a combined stirring blade 0102 in the barrel through a hole below the abrasive mixing barrel 0106; the combined stirring paddle 0102 is divided into a pushing paddle and two-blade inclined-blade paddles, the pushing paddle is installed at the bottom of the abrasive material mixing barrel 0106, abrasive materials at the bottom are rolled upwards, the two-blade inclined-blade paddles at the upper part shear the abrasive materials in the tank body circularly to form strong turbulence disturbance, abrasive material particles are refined by a strong turbulence effect, the contact probability is increased, and the overall circulation and mixing efficiency of the abrasive materials in the barrel are improved; the abrasive particle outflow port 0105 is located on the right side wall of the middle of the abrasive mixing barrel 0106, and the abrasive particle outflow port 0105 is connected to the abrasive particle flow pipe 0201.
As shown in fig. 3, the abrasive material conveying device 02 includes an abrasive particle flow pipeline 0201, a self-priming pump 0202, a filter disc 0203, a flow switch 0204, an abrasive particle flow pressure meter 0205, an electrohydraulic servo valve 0206, an abrasive particle flow output pipeline 0207, an ultrasonic liquid viscosity sensor 0208 and a particle concentration sensor 0209, wherein the abrasive particle flow pipeline 0201 is installed at an inlet of the self-priming pump 0202; the outlet of the self-priming pump 0202 is sequentially connected with a filter disc 0203, a flow switch 0204, an abrasive flow pressure meter 0205, an electro-hydraulic servo valve 0206, an ultrasonic liquid viscosity sensor 0208 and a particle concentration sensor 0209 through an abrasive flow output pipeline 0207; the ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209 are used for monitoring the change of the viscosity and the concentration of the abrasive particle flow in real time.
As shown in fig. 4 and 5, the pulse jet polishing tool 04 includes an ultrasonic transducer 0401, a horn 0402, a flange 0403, a flange sealing rubber layer 0404, an abrasive particle stream inlet 0405, a sealing rubber ring 0406, a nozzle 0407, a tapered cavity 0408, a gas inlet 0409, and a jet sleeve 0411, and the ultrasonic transducer 0401 is located at the uppermost portion of the entire pulse jet polishing tool 04; the top end of the horn 0402 is connected with the bottom of the ultrasonic transducer 0401, the tail end of the horn 0402 sequentially passes through a jet sleeve (0411 and a conical cavity 0408 to extend into a nozzle 0407, the middle end flange face of the horn 0402 is clamped and assembled with the flange face at the upper end of the jet sleeve 0411 through a flange 0403, a flange sealing rubber layer 0404 is arranged between the flange 0403 and the flange face at the upper end of the jet sleeve 0411, the abrasive particle flow inlet 0405 and the gas injection port 0409 are obliquely arranged at two sides of the jet sleeve 0411 so as to avoid directly impacting the horn 0402, the nozzle 0407 is arranged at the tail end of the conical cavity 0408, the whole material is tungsten steel, the inner core is ruby material so as to reduce the abrasion of the nozzle 0407 and improve the service life of the nozzle 0407, the conical cavity 0408 is matched and connected with an internal thread structure at the lower end of the jet sleeve 0411 through an external thread at the upper end face, and the internal flow passage structure of the conical cavity 0408, the tail end of the external thread surface is provided with a right-angle end surface; a sealing rubber ring 0406 with an adjustable thickness specification is arranged between the tail end surface of the jet flow sleeve 0411 and the right-angle end surface of the bottom of the external thread of the conical cavity 0408, and the sealing rubber ring 0406 is screwed through the thread between the jet flow sleeve 0411 and the conical cavity 0408, so that the sealing effect of the sealing rubber ring 0406 is realized; under different polishing requirements, the distance between the tail end of the amplitude transformer 0402 and the outlet of the inner cavity of the nozzle (0407) can be adjusted by replacing the thickness specification of the sealing rubber ring 0406 without changing the micro-jet process parameters, and the intensity of the pulse jet flow is actively controlled.
As shown in fig. 6, the angle adjusting device 05 includes a hoop 0501, a hoop support plate 0502 and an angle adjusting plate 0503, the upper and lower ends of the angle adjusting plate 0503 are provided with arc-shaped movable grooves having the same center, and the adjustable angle range is 0-60 degrees. When the jet angle needs to be adjusted, the hoop support plate 0502 is swung up and down to a proper angle, and then the pulse jet polishing tool 04 is locked by using a screw to penetrate through the arc-shaped groove and a screw hole on the hoop support plate 0502; the inner ring of the hoop 0501 is provided with vibration isolation rubber for keeping the stability of the pulse jet polishing tool during working.
As shown in fig. 7 and 8, the workpiece rotating device 06 includes a clamp 0601, a pressure sensor 0602, a vertical servo motor 0603, a waterproof isolation box 0604, and two end support rods 0605, wherein the waterproof isolation box 0604 is installed on the inner wall of the processing tank 08 through the two end support rods 0605; the vertical servo motor 0603 is arranged at the bottom of the waterproof isolation box 0604; the rotating shaft of the vertical servo motor 0603 is connected with the clamp 0601 through a connector to control the periodic rotation of the clamp 0601; the plurality of pressure sensors 0602 are arranged in the clamp 0601 in an array manner along the circumferential direction and used for monitoring the intensity change of the pulse jet flow in real time and ensuring the stability of polishing intensity.
As shown in fig. 9, the three-axis moving module 07 includes a guide rail 0701, a linear slider pad 0702, a module fixing plate 0703, a Y-axis module 0704, a Z-axis module 0705, a horizontal transverse moving base plate 0706, an X-axis module 0707, and a horizontal moving base plate 0708, the guide rail 0701 is installed on the left side of the rack 09, and the linear slider pad 0702 is installed at the upper end of the guide rail 0701; a horizontal transverse moving base plate 0706 is arranged on the upper end face of the X-axis module 0707, the horizontal moving base plate 0708 is connected with the right side of the rack 09, and the upper end face of the linear slider backing plate 0702 is connected with the upper end face of the horizontal transverse moving base plate 0706 through the module fixing plate 0703 through screws; the Y-axis module 0704 is mounted on the front end face of the module fixing plate 0703, the Z-axis module 0705 is mounted on the front end face of the Y-axis module 0704, and the whole body can move in the x, Y and Z directions.
As shown in fig. 10, the waste recycling apparatus 10 includes an abrasive flow waste pipeline 1001 and a waste recycling bin 1002, wherein one end of the abrasive flow waste pipeline 1001 is connected to a bottom outlet of the processing tank 08; the other end of the abrasive particle flow waste pipe 1001 is connected with the inlet of a waste recovery box 1002.
As shown in fig. 11, the gas injection device 11 includes a gas pump 1101, a gas switch 1102, a gas pressure gauge 1103, a proportional valve 1104, and a gas injection pipe 1105, one end of the gas injection pipe 1105 is connected to an outlet of the gas pump 1101, the other end of the gas injection pipe 1105 is connected to a gas injection port 0409 of the pulse jet polishing tool 04, the gas switch 1102, the gas pressure gauge 1103, and the proportional valve 1104 are sequentially disposed on the gas injection pipe 1105 according to a flow direction of the gas, the gas generated by the gas pump 1101 sequentially passes through the gas switch 1102, the gas pressure gauge 1103, and the proportional valve 1104 in the gas injection pipe 1105 and then enters the tapered cavity 0408 of the pulse jet polishing tool 04, and the mixed gas can reduce or eliminate cavitation damage of cavitation bubbles generated by ultrasonic vibration in the abrasive flow to the tapered cavity 0408 and the inner wall surface of the nozzle 0407.
The distance D between the tail end of the horn 0402 and the outlet of the inner cavity of the nozzle 0407, the diameter R of the tail end of the horn 0402, the diameter of the flow passage, the preset jet intensity and the specification of the nozzle 0407 are determined by calculation of an Euler polynomial flow model.
The exit aperture of the nozzle 0407 in the present invention is optimally selected between 0.1 and 0.5mm, as summarized in a number of experimental data. The specific aperture of the nozzle 0407 was determined by Finnie erosion model calculations based on the pulsed micro-jet intensity, pre-designed polishing times for different regions and different degrees of curvature flow channels.
In the abrasive mixing barrel 0106 of the invention, the density of the combined stirring paddle 0102 is 1000kg/m3Has a density of 3170kg/m and distilled water of not more than 5% by volume3The alumina abrasive grains are evenly stirred to prepare abrasive grain flow.
The pressure sensor 0602 in the invention monitors the jet impact force in real time, and transmits data back to the integrated control cabinet 03, and when the jet impact force fluctuates, the integrated control cabinet 03 controls the amplitude of the horn 0402 by adjusting the power of the ultrasonic transducer 0401, so that the pulse jet intensity is kept relatively stable in the whole polishing process.
The ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209 in the invention monitor the viscosity and concentration of the abrasive particle flow in real time and transmit the obtained data back to the comprehensive control cabinet 03. When the concentration or viscosity of the abrasive flow is higher or lower than the pre-designed value, the integrated control cabinet 03 automatically adjusts the flow of the water inlet 0101 on the abrasive mixing barrel 0106 according to specific conditions, so as to realize the accurate control of the system on the mixing quality of the abrasive flow.
The three-axis motion module 07 and the workpiece rotating device 06 are controlled by the comprehensive control cabinet 03, so that the three-axis motion module 07 and the workpiece rotating device 06 can move cooperatively, and complete full-coverage accurate polishing of a complex bent flow channel is completed.
Preferred embodiments:
after the processing is started, abrasive flow is first prepared in the abrasive mixing device 01 and is uniformly mixed, the self-sucking pump 0202 extracts the abrasive flow from the middle layer of the abrasive mixing barrel 0106, the abrasive flow is filtered by the filter disc 0203 of the self-sucking pump 0202, and the abrasive flow is injected into the jet flow sleeve 0411 through the abrasive flow injection port 0405 under the monitoring of the ultrasonic liquid viscosity sensor 0208 and the particle concentration sensor 0209. After a certain amount of abrasive flow is injected, an ultrasonic generator in the integrated control cabinet 03 is started to convert electric energy into a high-frequency alternating current signal matched with the ultrasonic transducer 0401, the ultrasonic transducer 0401 is driven to work to emit ultrasonic waves, the ultrasonic energy is focused by the amplitude transformer 0402, a high-density sound field is generated in the nozzle 0407 and acts on fluid in the nozzle 0407 to generate forced vibration, sinusoidal acoustic pressure is transmitted to the fluid through the nozzle 0407 to generate periodic change of the pressure before the fluid is ejected, and therefore the outlet speed of the jet flow also changes periodically, so that the fluid flow is modulated to form pulse jet flow. Meanwhile, in order to avoid the erosion of a large amount of cavitation bubbles generated by ultrasonic vibration on the inner wall surfaces of the conical cavity 0408 and the nozzle 0407, the air pump 1101 mixes air into abrasive flow through a gas injection port 0409 on the right side wall of the jet flow sleeve 0411 to change the movement characteristic of incoming flow, so that abrasive flow, water and gas mixed three-phase flow with certain compression is formed, and the cavitation erosion damage of the cavitation bubbles generated by the ultrasonic vibration in the abrasive flow on the inner cavity wall surfaces of the conical cavity 0408 and the nozzle 0407 is reduced or eliminated. After the jet beam reaches the workpiece, the pressure sensors 0602 arranged in a circumferential array in the clamp 0601 collect impact force data of the jet beam in real time, and when the impact force intensity of the jet beam exceeds or is smaller than a preset intensity range value, the integrated control cabinet 03 immediately adjusts the power of the ultrasonic generator according to the change condition of the pulse jet impact force, changes the ultrasonic wave emission frequency of the ultrasonic transducer 0401, and enables the pulse jet intensity to be kept relatively stable in the whole polishing process.
In the specific polishing process, the aperture of the nozzle 0407 is determined according to the workpiece material and the total width of the micro flow channel, and the jet beam angle is adjusted. Then, as shown in fig. 12, in order to protect the edge structure of the flow channel, avoid the edge structure from being damaged by the excessively high pulse jet flow, and improve the polishing efficiency of the middle flow channel, the surface of the flow channel to be polished is uniformly divided into three regions, different pulse jet flow intensities are set according to different regions, the region including the edge of the flow channel is set with smaller pulse jet flow intensities a1 and A3, and the middle of the flow channel is set with stronger pulse jet flow intensity a2, that is, a1 is A3< a 2. After polishing, as shown in fig. 13, the pulse jet continues to move forward at a preset speed and angle, the region (i) is polished with a pulse jet intensity a1, after the region (i) is polished, the pulse jet polishing tool 04 is moved rightward by a and the region (ii) is reversely processed with the same process with a pulse jet intensity a2, after the region (ii) is processed, the pulse jet polishing tool 04 continues to move rightward by b, and the region (iii) is polished with a pulse jet intensity A3. In the polishing process, when a curved flow channel is encountered, as shown in fig. 14, according to the curved condition of the flow channel, the workpiece is rotated by the workpiece rotating device 06, so that the pulse jet flow is always kept relatively parallel to the flow channel, and the jet flow is kept forward at a constant speed.
The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.
Claims (10)
1. The ultrasonic vibration modulation pulse abrasive particle micro-jet polishing system is characterized in that: the device comprises an abrasive mixing device (01), an abrasive conveying device (02), a comprehensive control cabinet (03), a pulse jet polishing tool (04), an angle adjusting device (05), a workpiece rotating device (06), a three-axis moving module (07), a processing pool (08), a rack (09), a waste recovery device (10) and a gas injection device (11); the abrasive mixing device (01) is connected with an abrasive flow pipeline (0201) of the abrasive conveying device (02) through an abrasive flow outlet (0105); the abrasive material conveying device (02) is connected to an abrasive material flow injection port (0405) of the pulse jet polishing tool (04) through an abrasive material flow output pipeline (0207); the integrated control cabinet (03) controls the operation of the whole system; the pulse jet polishing tool (04) is fixed at the front end of the angle adjusting device (05) through a hoop (0501); the angle adjusting device (05) is fixed on a module in the three-axis moving module (07), and the angle adjusting device (05) and the pulse jet polishing tool (04) can move along the directions of x, y and z under the drive of the three-axis moving module (07); the workpiece rotating device (06) is arranged in the processing pool (08) through supporting rods (0605) at two ends; the three-axis moving module (07) is arranged on the rack (09); the processing pool (08) is fixed on the inner wall of the rack (09) through bolts and is positioned below the three-axis moving module (07); the waste recovery device (10) is connected with an outlet at the bottom of the processing pool (08) through a waste pipeline (1001) of the abrasive flow in a threaded structure and is used for collecting the waste abrasive flow; the gas injection device (11) is connected to a gas injection port (0409) of the pulse jet polishing tool (04) through a gas injection tube (1105);
the abrasive mixing device (01) comprises a water inlet (0101), a combined stirring blade (0102), a stirring motor (0103), a stirrer frame (0104), an abrasive particle outflow port (0105) and an abrasive mixing barrel (0106); the water inlet (0101) is positioned at the left barrel mouth of the abrasive mixing barrel (0106), and the flow can be adjusted in real time according to the abrasive concentration and viscosity data fed back by the sensor; the grinding material mixing barrel (0106) is installed in the center of a stirrer rack (0104), a rotating shaft of a stirring motor (0103) is connected with a vertically arranged rotating main shaft through a rotating joint and penetrates through a hole below the grinding material mixing barrel (0106) to be connected to a combined stirring blade (0102) in the barrel; the combined stirring paddle (0102) is divided into a propelling paddle and two-blade inclined-blade paddles, the propelling paddle is installed at the bottom of the abrasive material mixing barrel (0106), the bottom abrasive material is rolled upwards, the two-blade inclined-blade paddles at the upper part shear the abrasive material circulation in the tank body to form strong turbulence disturbance, the abrasive material particles are refined by using a strong turbulence effect, the contact probability is increased, and the overall circulation and mixing efficiency of the abrasive material in the barrel are improved; the abrasive particle outflow port (0105) is located in the right side wall of the middle of the abrasive mixing barrel (0106), and the abrasive particle outflow port (0105) is connected with the abrasive particle flow pipeline (0201);
the abrasive material conveying device (02) comprises an abrasive particle flow pipeline (0201), a self-priming pump (0202), a filter disc (0203), a flow switch (0204), an abrasive particle flow pressure gauge (0205), an electro-hydraulic servo valve (0206), an abrasive particle flow output pipeline (0207), an ultrasonic liquid viscosity sensor (0208) and a particle concentration sensor (0209), wherein the abrasive particle flow pipeline (0201) is installed at an inlet of the self-priming pump (0202); the outlet of the self-priming pump (0202) is sequentially connected with a filter disc (0203), a flow switch (0204), an abrasive flow pressure gauge (0205), an electro-hydraulic servo valve (0206), an ultrasonic liquid viscosity sensor (0208) and a particle concentration sensor (0209) through the abrasive flow output pipeline (0207); the ultrasonic liquid viscosity sensor (0208) and the particle concentration sensor (0209) are used for monitoring the change of the viscosity and the concentration of the abrasive particle flow in real time;
the pulse jet polishing tool (04) comprises an ultrasonic transducer (0401), a horn (0402), a flange plate (0403), a flange plate sealing rubber layer (0404), an abrasive particle flow injection inlet (0405), a sealing rubber ring (0406), a nozzle (0407), a conical cavity (0408), a gas injection port (0409) and a jet sleeve (0411), wherein the ultrasonic transducer (0401) is positioned at the uppermost part of the whole pulse jet polishing tool (04); the top end of the amplitude transformer (0402) is connected with the bottom of the ultrasonic transducer (0401), and the tail end of the amplitude transformer (0402) sequentially penetrates through the jet flow sleeve (0411) and the conical cavity (0408) and extends into the nozzle (0407); the flange face at the middle end of the amplitude transformer (0402) is clamped and assembled with the flange face at the upper end of the jet flow sleeve (0411) through a flange plate (0403); a flange sealing rubber layer (0404) is arranged between the flange plate (0403) and the flange surface at the upper end of the jet flow sleeve (0411); the abrasive particle flow injection port (0405) and the gas injection port (0409) are obliquely arranged on two sides of the jet flow sleeve (0411) so as to avoid directly impacting the amplitude transformer (0402); the nozzle (0407) is arranged at the tail end of the conical cavity (0408), the whole material of the nozzle (0407) is made of tungsten steel, and the inner core of the nozzle is made of ruby, so that the abrasion of the abrasive to the nozzle (0407) is reduced, and the service life of the nozzle (0407) is prolonged; the conical cavity (0408) is in matched connection with an internal thread structure at the lower end of the jet flow sleeve (0411) through an external thread at the upper end surface; the internal flow channel structure of the conical cavity (0408) is in an inverted cone shape, and the tail end of the external thread surface is provided with a right-angled end surface; a sealing rubber ring (0406) with an adjustable thickness specification is arranged between the tail end surface of the jet flow sleeve (0411) and the right-angle end surface of the bottom of the external thread of the conical cavity (0408), and the sealing rubber ring (0406) is screwed through the thread between the jet flow sleeve (0411) and the conical cavity (0408) to realize the sealing effect of the sealing rubber ring (0406); under different polishing requirements, the distance between the tail end of an amplitude transformer (0402) and the outlet of the inner cavity of a nozzle (0407) can be adjusted by replacing the thickness specification of a sealing rubber ring (0406) without changing the micro-jet process parameters, and the intensity of the pulse jet flow is actively controlled;
the angle adjusting device (05) comprises a hoop (0501), a hoop supporting plate (0502) and an angle adjusting plate (0503), wherein the upper end and the lower end of the angle adjusting plate (0503) are provided with arc-shaped movable grooves with the same circle center, the adjustable angle range is 0-60 degrees, when the jet angle needs to be adjusted, the hoop supporting plate (0502) is swung up and down to a proper angle, and then the pulse jet polishing tool (04) is locked by using a screw to penetrate through the arc-shaped grooves and a screw hole in the hoop supporting plate (0502); and the inner ring of the hoop (0501) is provided with vibration isolation rubber for keeping the stability of the pulse jet polishing tool during working.
2. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: the workpiece rotating device (06) comprises a clamp (0601), a pressure sensor (0602), a vertical servo motor (0603), a waterproof isolation box (0604) and two end supporting rods (0605), wherein the waterproof isolation box (0604) is installed on the inner wall of the processing pool (08) through the two end supporting rods (0605); the vertical servo motor (0603) is arranged at the bottom of the waterproof isolation box (0604); a rotating shaft of the vertical servo motor (0603) is connected with the clamp (0601) through a connector to control the periodic rotation of the clamp (0601); the clamp (0601) is internally provided with a plurality of pressure sensors (0602) in an array along the circumferential direction, and is used for monitoring the intensity change of the pulse jet flow in real time and ensuring the stability of the polishing intensity.
3. The three-axis moving module (07) comprises a guide rail (0701), a linear sliding block base plate (0702), a module fixing plate (0703), a Y-axis module (0704), a Z-axis module (0705), a horizontal transverse moving base plate (0706), an X-axis module (0707) and a horizontal moving base plate (0708), wherein the guide rail (0701) is installed on the left side of the rack (09), and the linear sliding block base plate (0702) is installed at the upper end of the guide rail (0701); a horizontal transverse moving base plate (0706) is mounted on the upper end face of the X-axis module (0707), the horizontal moving base plate (0708) is connected with the right side of the rack (09), and the upper end face of the linear sliding block base plate (0702) is connected with the upper end face of the horizontal transverse moving base plate (0706) through the module fixing plate (0703) through screws; the Y-axis module (0704) is arranged on the front end face of the module fixing plate (0703), the Z-axis module (0705) is arranged on the front end face of the Y-axis module (0704), and the whole X-axis module, the Y-axis module and the Z-axis module can move in the directions of x, Y and Z.
4. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: the waste recovery device (10) comprises an abrasive particle flow waste pipeline (1001) and a waste recovery box (1002), wherein one end of the abrasive particle flow waste pipeline (1001) is connected with an outlet at the bottom of the processing pool (08); the other end of the abrasive particle flow waste pipeline (1001) is connected with an inlet of a waste recovery box (1002).
5. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: the gas injection device (11) comprises a gas pump (1101), a gas switch (1102), a gas pressure gauge (1103), a proportional valve (1104) and a gas injection pipe (1105), one end of the gas injection pipe (1105) is connected with the outlet of the air pump (1101), the other end of the gas injection pipe (1105) is connected with the gas injection port (0409) of the pulse jet polishing tool (04), according to the flowing direction of the gas, a gas switch (1102), a gas pressure gauge (1103) and a proportional valve (1104) are sequentially arranged on a gas injection pipe (1105), the gas generated by an air pump (1101) sequentially passes through the gas switch (1102), the gas pressure gauge (1103) and the proportional valve (1104) in the gas injection pipe (1105) and then enters a conical cavity (0408) of the pulse jet polishing tool (04), the mixed gas can reduce or eliminate cavitation damage of cavitation bubbles generated by ultrasonic vibration in the abrasive particle flow to the inner wall surfaces of the conical cavity body (0408) and the nozzle (0407).
6. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: the three-axis motion module (07) and the workpiece rotating device (06) are controlled by the integrated control cabinet (03), so that the three-axis motion module (07) and the workpiece rotating device (06) can move cooperatively, and the complete-coverage accurate polishing of the complex bending flow channel is completed.
7. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: in the abrasive mixing barrel (0106), the density of the combined stirring paddle (0102) is 1000kg/m3Has a density of 3170kg/m and distilled water of not more than 5% by volume3The alumina abrasive grains are evenly stirred to prepare abrasive grain flow.
8. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: the ultrasonic liquid viscosity sensor (0208) and the particle concentration sensor (0209) monitor the viscosity and concentration of the abrasive particle flow in real time and transmit obtained data back to the comprehensive control cabinet (03); when the concentration or viscosity of the abrasive flow is higher or lower than a pre-designed numerical value, the comprehensive control cabinet (03) automatically adjusts the flow of the water inlet (0101) on the abrasive mixing barrel (0106) according to specific conditions, and the accurate control of the system on the mixing quality of the abrasive flow is realized.
9. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 1, wherein: the outlet aperture of the nozzle (0407) is summarized according to a plurality of experimental data, and is optimally selected to be between 0.1 and 0.5 mm; the specific aperture of the nozzle (0407) is determined by Finnie erosion model calculation in combination with the pulsed micro-jet intensity, pre-designed polishing times for different regions and different degrees of curvature flow channels; the distance D between the tail end of the amplitude transformer rod (0402) and the outlet of the inner cavity of the nozzle (0407), the diameter R of the tail end of the amplitude transformer rod (0402) and the diameter of the flow channel, the preset jet intensity and the specification of the nozzle (0407) are determined by calculation of an Euler multiphase flow model.
10. The ultrasonic vibration modulated pulsed abrasive particle micro-jet polishing system of claim 2, wherein: the pressure sensor (0602) monitors jet impact force in real time, data are transmitted back to the comprehensive control cabinet (03), and when the jet impact force fluctuates, the comprehensive control cabinet (03) controls the amplitude of the amplitude transformer (0402) by adjusting the power of the ultrasonic transducer (0401), so that the pulse jet intensity is kept relatively stable in the whole polishing process.
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| CN114703035A (en) * | 2022-05-06 | 2022-07-05 | 广西平乐栊珑农业开发有限公司 | Method for quickly clarifying and deastringent persimmon vinegar |
| CN114952635A (en) * | 2022-05-30 | 2022-08-30 | 西南交通大学 | Ultrasonic cavitation assisted submerged pulsating gas jet polishing system |
| WO2024042542A1 (en) * | 2022-08-23 | 2024-02-29 | Jawaharlal Nehru Centre For Advanced Scientific Research | Acoustophoresis-assisted fluid jet polishing |
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