CN210879251U - High-width-depth-ratio micro-channel jet processing device - Google Patents
High-width-depth-ratio micro-channel jet processing device Download PDFInfo
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- CN210879251U CN210879251U CN201921177746.4U CN201921177746U CN210879251U CN 210879251 U CN210879251 U CN 210879251U CN 201921177746 U CN201921177746 U CN 201921177746U CN 210879251 U CN210879251 U CN 210879251U
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Abstract
The utility model provides a microchannel efflux processingequipment is assisted to ultrasonic vibration, includes the support platform, place the abrasive material agitator tank on the support platform, the export and the abrasive material duct connections of abrasive material agitator tank, the end connection nozzle of abrasive material delivery end, its characterized in that, be equipped with diaphragm type measuring pump and energy storage ware on the abrasive material conveyer pipe, the abrasive material conveyer pipe is close to nozzle department is equipped with a ultrasonic vibration device. The utility model provides a can effectively reduce stagnation district pressure in the course of working, control abrasive material motion state, the device of high-efficient processing high width depth ratio microchannel.
Description
Technical Field
The utility model belongs to the technical field of abrasive material water jet machining, especially, relate to an usable ultrasonic vibration control microchannel jet machining's device.
Background
The microfluidic technology using a microchannel network as a structural feature is a new technology that uses a microfluidic chip to control and utilize fluid and realize the combination with the fields of microelectronics, optics, energy, biomedicine and the like on a micron scale, the microfluidic chip has already realized commercial production at present, but the technical level of the microfluidic chip is far lower than the speed of semiconductor development predicted by the moore's law', wherein the main bottleneck hindering the development of the microfluidic technology is the problem of manufacturing, processing and application. The commonly used micro-fluidic chip mainly uses hard and brittle materials such as silicon, quartz, glass, ceramics and the like, and has the characteristics of high hardness, large brittleness, sensitivity to processing heat influence and the like, which puts higher requirements on micro-processing of the micro-fluidic chip, so that the exploration of a high aspect ratio micro-channel processing technology which has high processing efficiency and quality, strong universality and is easy to organize large-scale production has important significance for promoting the development of micro-fluidic technology.
The micro abrasive water jet machining technology has the advantages of no heat influence area, small machining force, concentrated energy, high machining efficiency, wide range of machinable materials and the like, and is gradually used for micro machining of hard and brittle materials. The optimization of the parameters of the over-processing technology can realize the high-efficiency processing of the micro-channel with high aspect ratio on the hard and brittle material, and meanwhile, because water is used as a medium, the processed surface of the micro-channel is more beneficial to the flow of fluid, so that the micro-fine abrasive water jet becomes a new method for processing the micro-channel in the micro-fluidic chip. However, with the reduction of the diameter of the abrasive particles, the jet pressure and the diameter of the jet beam, the efficiency of converting the jet kinetic energy into the abrasive particle kinetic energy is rapidly reduced, so that the processing capacity of the fine abrasive water jet is greatly weakened, and meanwhile, the influence of a jet stagnation area formed on the surface of a workpiece by low-pressure jet on the motion of the abrasive particles is more and more obvious. Therefore, the research on how to reduce the influence brought by the pressure stagnation area in the processing process has very important scientific significance and practical value.
Disclosure of Invention
In order to solve the influence of static stagnation district to the grit motion in the course of working, improve the efficiency of grit kinetic energy conversion, the utility model provides a in the course of working, can effectively reduce stagnation district pressure, control abrasive material motion state, the device of high-efficient processing high width-depth ratio microchannel.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a high width depth ratio microchannel efflux processingequipment, includes the support platform, place the abrasive material agitator tank on the support platform, the export and the abrasive material duct junction of abrasive material agitator tank, the end connection nozzle of abrasive material delivery end, its characterized in that, be equipped with diaphragm type measuring pump and energy storage ware on the abrasive material conveyer pipe, the abrasive material conveyer pipe is close to nozzle department is equipped with a ultrasonic vibration device.
Further, a pressure indicator is arranged on the abrasive conveying pipe.
And furthermore, a fixing clamp for fixing the workpiece is arranged in front of the nozzle, the fixed furniture is arranged on a second ultrasonic vibration device, and the second ultrasonic vibration device is positioned on the processing platform.
Furthermore, a screw rod is arranged in the abrasive material stirring box, and the upper end of the screw rod is connected with an output shaft of a stirring motor.
The utility model discloses in, the grit adds the back with water, and the demand time keeps intensive mixing, and the diaphragm type measuring pump inhales the abrasive material, through the range of adjusting the measuring pump, can control pressure. Meanwhile, the ultrasonic vibration device acts on the external hose, the grinding materials which are originally mixed fully and become abnormal and uniform in the hose start to move orderly and gradually move to the center, and most of the grinding materials can be controlled in a certain area by effectively adjusting the amplitude and frequency of the ultrasonic vibration and the range of the metering pump, so that most of energy is gathered and impacted on the surface of the workpiece. In addition, in order to further improve the processing efficiency and reduce the influence of the pressure of the static stagnation area on the surface of the workpiece on the jet flow, an ultrasonic vibration platform is arranged below the workpiece. By operation of the ultrasonic vibration stage, it was effectively observed that material was effectively removed from the surface of the workpiece during each ultrasonic vibration cycle. Meanwhile, the machining angle of the sapphire nozzle can be adjusted to match with ultrasonic vibration, so that the generation of surface and subsurface cracks is effectively inhibited, and the surface quality of a workpiece is improved.
The beneficial effects of the utility model are that: compared with the prior art, particles which are disordered and disordered in the water jet flow are effectively controlled in a certain area through the combination of the superfine abrasive water jet flow and the ultrasonic vibration, and the particles are generated on the surface of a workpiece through an ultrasonic vibration platform below the workpiece, so that the static stagnation area influencing the water jet flow to process the workpiece is reduced, and the processing efficiency is greatly improved. By controlling the amplitude and frequency of ultrasonic vibration and changing the processing angle of the sapphire nozzle, an optimal joint point can be found, the generation of cracks on the surface and the sub-surface of a workpiece is effectively inhibited, the surface quality of the workpiece is improved to a great extent, and thus a microchannel with a high aspect ratio can be processed with high precision and high efficiency.
Drawings
FIG. 1 is a schematic view of a high aspect ratio microchannel jet processing apparatus
Parameters in the figure are as follows: 1. the device comprises a stirring motor 2, a screw rod 3, an abrasive stirring box 4, a support platform 5, an energy accumulator 6, a pressure indicator 7, a first ultrasonic vibration device 8, a workpiece 9, a diaphragm type metering pump 10, a fixed clamp 11, a second ultrasonic vibration device 12 and a processing platform.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1, a high aspect ratio microchannel jet machining device, includes support platform 4, place abrasive material agitator tank 3 on the support platform 4, the export and the abrasive material duct connection of abrasive material agitator tank 3, the end connection nozzle of abrasive material delivery end, be equipped with diaphragm type measuring pump 9 and energy storage 5 on the abrasive material duct, the abrasive material duct is close to nozzle department is equipped with first ultrasonic vibration device 7.
Further, a pressure indicator 6 is arranged on the abrasive conveying pipe.
Still further, a fixing clamp 10 for fixing the workpiece 8 is arranged in front of the nozzle, the fixing clamp 10 is mounted on a second ultrasonic vibration device 11, and the second ultrasonic vibration device 11 is located on a processing platform 12.
Furthermore, a spiral rod 2 is arranged in the abrasive stirring box 3, and the upper end of the spiral rod 2 is connected with an output shaft of the stirring motor 1.
In this embodiment, in order to prevent the sapphire nozzle from being blocked, after a proper amount of abrasive particles and water are added into the abrasive stirring box 3, the stirring motor 1 needs to be constantly kept to drive the screw rod 2 to rotate. After the abrasive is fully stirred in the abrasive stirring box 3, the diaphragm type metering pump 9 adsorbs the diaphragm to form vacuum, the abrasive is sucked out of the stirring box, and then the abrasive is pressurized by pushing so as to rapidly pass through the pipeline. Because carry out high-efficient wide deep passage processing, need control abrasive pressure accurately, installed pressure indicator 6 on the pipeline position, through pressure indicator 6's real-time feedback, can control abrasive pressure more accurately. In the process, the energy accumulator 5 can effectively stabilize the pressure of the grinding material, so that the condition of overlarge fluctuation of the pressure is avoided, and the stability of the processing process is ensured. When the abrasive material reaches the position of the first ultrasonic vibration device 7, the original disordered abrasive particles are quickly gathered at the middle position of the pipeline by ultrasonic vibration, and a large amount of abrasive particles are flushed out of the pipeline through the sapphire nozzle and impact on the workpiece 8. The pressure stagnation area formed by the rebound of the abrasive material impacting the workpiece 8 is obviously reduced by the addition of the second ultrasonic vibration device 11, so that the abrasive material can impact the workpiece more efficiently. Because of the inherent vibration period of the ultrasonic vibration, the tangential force of the workpiece surface and the vertical impact pressure have a relatively obvious change, and in the process, the surface quality of the workpiece 8 is fully ensured.
The ultrasonic vibration assisted microchannel jet processing device can realize high-efficiency processing of a microchannel with a high aspect ratio on a hard and brittle material, and meanwhile, because water is used as a medium, the processed microchannel surface is more beneficial to the flow of fluid, so that the ultrasonic vibration assisted micro abrasive water jet becomes a more efficient and stable method for processing the microchannel in the microfluidic chip. Compared with the traditional abrasive water jet machining device and method, the abrasive water jet machining device and method have the problems of low efficiency, poor surface quality of workpieces and unstable machining. The processing scheme that this device provided has more realistic research meaning. Because the processing efficiency and the quality are high, the universality is strong, and the device is easy to organize large-scale production and process micro-channels with high aspect ratio, and has important significance for promoting the development of microfluid technology.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (4)
1. The utility model provides a high width depth ratio microchannel efflux processingequipment, includes the support platform, place the abrasive material agitator tank on the support platform, the export and the abrasive material duct junction of abrasive material agitator tank, the end connection nozzle of abrasive material delivery end, its characterized in that, be equipped with diaphragm type measuring pump and energy storage ware on the abrasive material conveyer pipe, the abrasive material conveyer pipe is close to nozzle department is equipped with a ultrasonic vibration device.
2. A high aspect ratio microchannel jet processor as set forth in claim 1 wherein said abrasive delivery tube is provided with a pressure indicator.
3. A high aspect ratio microchannel jet machining device as claimed in claim 1 or 2, wherein a fixing jig for fixing a workpiece is provided in front of the nozzle, and the fixing jig is mounted on a second ultrasonic vibration device which is provided on the machining platform.
4. The micro-channel jet processing device with high aspect ratio as claimed in claim 1 or 2, wherein a screw rod is arranged in the abrasive stirring box, and the upper end of the screw rod is connected with an output shaft of a stirring motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921177746.4U CN210879251U (en) | 2019-07-25 | 2019-07-25 | High-width-depth-ratio micro-channel jet processing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921177746.4U CN210879251U (en) | 2019-07-25 | 2019-07-25 | High-width-depth-ratio micro-channel jet processing device |
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| CN210879251U true CN210879251U (en) | 2020-06-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110480512A (en) * | 2019-07-25 | 2019-11-22 | 浙江工业大学 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
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2019
- 2019-07-25 CN CN201921177746.4U patent/CN210879251U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110480512A (en) * | 2019-07-25 | 2019-11-22 | 浙江工业大学 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
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