CN107081682A - A kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect - Google Patents
A kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect Download PDFInfo
- Publication number
- CN107081682A CN107081682A CN201710417656.7A CN201710417656A CN107081682A CN 107081682 A CN107081682 A CN 107081682A CN 201710417656 A CN201710417656 A CN 201710417656A CN 107081682 A CN107081682 A CN 107081682A
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- CN
- China
- Prior art keywords
- microfluidic channel
- nozzle
- pressure
- air bag
- processing method
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
- B24C5/04—Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
- B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
Abstract
A kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect, realizing the processing unit (plant) of methods described includes gas drive booster pump, pressure regulator valve, pressure vessel, air bag and nozzle, and the microfluidic channel processing method comprises the following steps:1) needed to configure the abrasive material slurry that setting ratio is mixed according to processing, held in air bag, air bag is put into pressure vessel;2) current are provided for gas drive booster pump using outside water system, current is input in the pump housing by flow inlet, start gas drive booster pump to provide High-Pressure Water for subsequent operation;3) water under high pressure enters pressure vessel, extruding gasbag, and abrasive material slurry is driven into the discharge nozzle of output and then sprayed to nozzle, realizes that microfluidic channel is processed.The invention provides a kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect of effective lifting processing efficiency.
Description
Technical field
The invention belongs to special processing technology device, it is related to a kind of microfluidic channel processing method.
Background technology
Micro-fluidic technologies using microchannel network as architectural feature are to be controlled and utilized fluid using micro-fluidic chip, real
A kind of emerging technology being combined on present micro-meter scale with fields such as microelectronics, optics, the energy, biomedicines, and it is micro-fluidic
The crudy of high breadth depth ratio microchannel enters the fluid properties such as viscosity, Reynolds number during influence microfluidic flow in chip
And influence the performance and stability of micro-fluidic chip in the application.Micro-fluidic chip has been realized in commercialized production at present,
But its technical merit is far away from the semiconductor speed of development that " Moore's Law " is predicted, wherein hindering micro-fluidic technologies development
The problem of main bottleneck is manufacture processing and applied.Conventional micro-fluidic chip is with hard brittle materials such as silicon, quartz, glass and ceramics
Based on, they have, and hardness is high, fragility is big, to characteristics such as processing heat affecting sensitivities, and this proposes higher to its microfabrication
It is required that.
With the reduction of abrasive grain diameter, jet pressure and jet beam diameter, traditional microfluid processing method energy of the impinging jet
The efficiency converted to abrasive particle kinetic energy is reduced rapidly, causes the working ability of fine abrasive water jet by very big decrease, simultaneously
Influence of the jet stagnation region that low pressure stream is formed in workpiece surface to grain motion is also apparent from.
The content of the invention
In order to overcome the shortcomings of that the processing efficiency of existing microfluidic channel processing mode is relatively low, have the invention provides one kind
The microfluidic channel processing method based on abrasive particle dynamic impulsion effect of effect lifting processing efficiency.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect, realizes the processing unit (plant) bag of methods described
Gas drive booster pump, pressure regulator valve, pressure vessel, air bag and nozzle are included, the gas drive booster pump is provided with flow inlet, and the gas drive increases
The outlet of press pump is connected by pressure regulator valve with the import of the pressure vessel, and the air bag is for placing by setting ratio mixing
The air bag of good abrasive material slurry, the discharging opening of the air bag connects with discharge nozzle one end of the pressure vessel, the discharge nozzle
The other end nozzle is set, the nozzle is located above the processing stations of workbench;The microfluidic channel processing method
Comprise the following steps:
1) needed to configure the abrasive material slurry that setting ratio is mixed according to processing, held in air bag, air bag is put
Into pressure vessel;
2) current are provided for gas drive booster pump using outside water system, current is input to by the pump housing by flow inlet
It is interior, start gas drive booster pump to provide High-Pressure Water for subsequent operation;
3) water under high pressure enters pressure vessel, extruding gasbag, and abrasive material slurry is driven into the discharge nozzle of output and then sprayed to nozzle
Go out, realize that microfluidic channel is processed.
Further, the step 3) in, regulation pressure valve is needed so as to adjust hydraulic pressure according to processing, and then adjust abrasive slurries
I.e. body rate of outflow nozzle velocity, while the angle of inclination of nozzle and workpiece is adjusted, to reach optimal processing
Effect.
Further, the first electronic switch valve is provided with the import of the pressure vessel, the discharge nozzle is provided with second
Electronic switch valve.
Further, the workbench is located at the moved end of ultrasonic vibration accumulator, starts ultrasonic vibration accumulator during processing.
In the present invention, current extrude the abrasive material slurry mixed by a certain percentage simultaneously after the pressurization of gas drive booster pump
Sprayed by nozzle, form high speed fine abrasive water jet, erosion workpiece to be machined reaches by the high velocity impact of abrasive particle and workpiece
The purpose removed to material.The feed mode of this front mixing can ensure the concentration of abrasive material slurry in process not at any time
Between change, while improving the utilization rate of abrasive material.Workpiece to be machined is fixed on workbench, realizes shaking vertically
Dynamic, ultrasonic vibration accumulator is arranged on the lower end of workbench, provides power for the up-down vibration of workbench, nozzle is accommodated three
The processing request under different technical parameters (including flow angle and nozzle translational speed) can be realized on maintenance and operation moving platform.
Beneficial effects of the present invention are mainly manifested in:It can ensure to grind in process using the feed mode of front mixing
Material concentration is not changed over, while the utilization rate of abrasive material can be provided;Introduce ultrasonic accumulator and provide second for process
Power source, makes to produce oscillator field in processing workpiece process, and is coupled with water-jet flow field, so as to influence punching in jet stagnation region
The distribution and movement locus for hitting abrasive particle improve crudy, while can strengthen fine by the dynamic impulsion effect of abrasive particle
The working ability of abrasive water-jet.
Brief description of the drawings
Fig. 1 is the schematic diagram of the microfluidic channel processing unit (plant) based on abrasive particle dynamic impulsion effect.
Wherein, 1, current;2nd, gas drive booster pump;3rd, pressure regulator valve;4th, the first electronic switch valve;5th, pressure vessel;6th, abrasive material
Slurry;7th, air bag;8th, the second electronic switch valve;9th, nozzle;10th, workpiece to be processed;11st, workbench;12nd, ultrasonic vibration accumulation of energy
Device.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings.
A kind of reference picture 1, microfluidic channel processing method based on abrasive particle dynamic impulsion effect realizes adding for methods described
Frock is put including gas drive booster pump 2, pressure regulator valve 3, pressure vessel 5, air bag 7, nozzle 9 and ultrasonic vibration accumulator 12, and current 1 lead to
Cross the import of gas drive booster pump 2 and enter the pump housing, gas drive booster pump 2 uses air type of drive, to improve hydraulic pressure.After supercharging
Current 1 flow out from the outlet of gas drive booster pump 2, are connected by pressure regulator valve 3 with pressure vessel 5, electronic provided with first in the middle of pipeline
Switch valve 4.Pressure regulator valve 3 is located on the pipeline of gas drive booster pump 2 and pressure vessel 5, and for adjusting hydraulic pressure, pressure vessel 5 is close
Close, it is possible to bear high pressure.There is an air bag 7 inside pressure vessel 5, air bag 7 is using high water proofing property, high-wearing feature, high-elastic
The high polymer material of plastic deformation is made.Prior mixed uniformly abrasive material slurry 6 is stored in air bag 7, by gas drive booster pump
High-Pressure Water enter pressure vessel, extruding gasbag so that in air bag abrasive material slurry flow out.Air bag 7 passes through outside pipeline and container
The nozzle 9 in portion is connected, and can be adjusted according to processing effect and be provided with electronic switch valve 8 in the middle of the angle of nozzle and workpiece, pipeline,
Workpiece to be processed 10 is placed on workbench 11, and ultrasonic vibration accumulator 12 is arranged on the lower section of workbench, is by corresponding pipeline
Workbench 11 provides vibration source.First electronic switch valve 4 and the second electronic switch valve 8 control the break-make of abrasive material slurry 6, pressure valve
The pressure of 3 control current 1 is so that the speed that the fine abrasive water jet that control process is formed sprays from nozzle 9.The miniflow
Body passageway machining method comprises the following steps:
1) needed to configure the abrasive material slurry that setting ratio is mixed according to processing, held in air bag, air bag is put
Into pressure vessel;
2) current are provided for gas drive booster pump using outside water system, current is input to by the pump housing by flow inlet
It is interior, start gas drive booster pump to provide High-Pressure Water for subsequent operation;
3) water under high pressure enters pressure vessel, extruding gasbag, and abrasive material slurry is driven into the discharge nozzle of output and then sprayed to nozzle
Go out, realize that microfluidic channel is processed.
Further, the step 3) in, regulation pressure valve is needed so as to adjust hydraulic pressure according to processing, and then adjust abrasive slurries
I.e. body rate of outflow nozzle velocity, while the angle of inclination of nozzle and workpiece is adjusted, to reach optimal processing
Effect.
During processing, start gas drive booster pump 2 and the first electronic switch valve 4, High-Pressure Water 1 is subsequently conveyed to high-pressure bottle
5, high-pressure bottle 5 is gradually filled with, High-Pressure Water 1 starts extruding gasbag 7.Now, because the second electronic switch valve 8 is not yet turned on,
So abrasive material slurry 6 will not be ejected.Pressure regulator 3 is rotated, adjusts the hydraulic pressure of high-pressure bottle 5 to meet processing request.Then, open
Electronic switch valve 8 is opened, air bag 7 forces abrasive material slurry 6 to enter nozzle 9 after being squeezed, work is encountered with certain speed injection
On part 10, processed workpiece 10, at the same time ultrasonic vibration accumulator 12 persistently vibrates workbench.
Claims (5)
1. a kind of microfluidic channel processing method based on abrasive particle dynamic impulsion effect, realizing the processing unit (plant) of methods described includes
Gas drive booster pump, pressure regulator valve, pressure vessel, air bag and nozzle, the gas drive booster pump are provided with flow inlet, the gas drive supercharging
The outlet of pump is connected by pressure regulator valve with the import of the pressure vessel, and the air bag is to be mixed for placing by setting ratio
Abrasive material slurry air bag, the discharging opening of the air bag connects with discharge nozzle one end of the pressure vessel, the discharge nozzle
The other end sets the nozzle, and the nozzle is located above the processing stations of workbench;The microfluidic channel processing method bag
Include following steps:
1) needed to configure the abrasive material slurry that setting ratio is mixed according to processing, held in air bag, air bag is put into pressure
In force container;
2) current are provided for gas drive booster pump using outside water system, current is input in the pump housing by flow inlet, opened
Drive booster pump is taken offence to provide High-Pressure Water for subsequent operation;
3) water under high pressure enters pressure vessel, extruding gasbag, and abrasive material slurry is driven into the discharge nozzle of output and then sprayed to nozzle, real
Existing microfluidic channel processing.
2. the microfluidic channel processing method as claimed in claim 1 based on abrasive particle dynamic impulsion effect, it is characterised in that:Institute
State step 3) in, regulation pressure valve is needed so as to adjust hydraulic pressure according to processing, and then adjust the abrasive material slurry rate of outflow namely
Nozzle velocity, while the angle of inclination of nozzle and workpiece is adjusted, to reach optimal processing effect.
3. the microfluidic channel processing method as claimed in claim 1 or 2 based on abrasive particle dynamic impulsion effect, its feature exists
In:The first electronic switch valve is provided with the import of the pressure vessel, the discharge nozzle is provided with the second electronic switch valve.
4. the microfluidic channel processing method as claimed in claim 1 or 2 based on abrasive particle dynamic impulsion effect, its feature exists
In:The workbench is located at the moved end of ultrasonic vibration accumulator, starts ultrasonic vibration accumulator during processing.
5. the microfluidic channel processing method as claimed in claim 1 or 2 based on abrasive particle dynamic impulsion effect, its feature exists
In:The first electronic switch valve is provided with the import of the pressure vessel, the discharge nozzle is provided with the second electronic switch valve.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110480512A (en) * | 2019-07-25 | 2019-11-22 | 浙江工业大学 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
CN111604745A (en) * | 2020-06-03 | 2020-09-01 | 临沂湾格岛家具有限公司 | High-end furniture raw and other materials paulownia manufacture equipment |
CN114533907A (en) * | 2022-03-04 | 2022-05-27 | 伍华 | Medical treatment consumptive material is with degassing unit that heats fast |
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CN2193228Y (en) * | 1993-11-02 | 1995-03-29 | 焦作矿业学院 | Front-mixing abrasive efflux generator |
EP1053830A2 (en) * | 1999-05-19 | 2000-11-22 | Infineon Technologies North America Corp. | System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer |
WO2004025724A9 (en) * | 2002-09-13 | 2005-05-19 | Towa Intercon Technology Inc | Jet singulation of a substrate |
CN202498449U (en) * | 2011-11-10 | 2012-10-24 | 拓梦琅 | Portable hydraulic cutting device having energy storage device |
CN104290041A (en) * | 2014-08-18 | 2015-01-21 | 武汉大学 | New high pressure abrasive water jet device and method using saturated solution for crystallization |
CN105058247A (en) * | 2015-07-03 | 2015-11-18 | 山东大学 | Ultrasonic torsional vibration workbench specially used for fine abrasive water jet machining |
CN106112821A (en) * | 2016-07-29 | 2016-11-16 | 重庆大学 | A kind of front mixing abrasive water jet is worked continuously system and method |
CN106272107A (en) * | 2016-06-17 | 2017-01-04 | 山东理工大学 | Fine abrasive water jet pulsed magnetic abrasive feedway and control method thereof |
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2017
- 2017-06-06 CN CN201710417656.7A patent/CN107081682A/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN2193228Y (en) * | 1993-11-02 | 1995-03-29 | 焦作矿业学院 | Front-mixing abrasive efflux generator |
EP1053830A2 (en) * | 1999-05-19 | 2000-11-22 | Infineon Technologies North America Corp. | System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer |
WO2004025724A9 (en) * | 2002-09-13 | 2005-05-19 | Towa Intercon Technology Inc | Jet singulation of a substrate |
CN1703774A (en) * | 2002-09-13 | 2005-11-30 | 东和-英特康科技公司 | Jet singulation of a substrate |
CN202498449U (en) * | 2011-11-10 | 2012-10-24 | 拓梦琅 | Portable hydraulic cutting device having energy storage device |
CN104290041A (en) * | 2014-08-18 | 2015-01-21 | 武汉大学 | New high pressure abrasive water jet device and method using saturated solution for crystallization |
CN105058247A (en) * | 2015-07-03 | 2015-11-18 | 山东大学 | Ultrasonic torsional vibration workbench specially used for fine abrasive water jet machining |
CN106272107A (en) * | 2016-06-17 | 2017-01-04 | 山东理工大学 | Fine abrasive water jet pulsed magnetic abrasive feedway and control method thereof |
CN106112821A (en) * | 2016-07-29 | 2016-11-16 | 重庆大学 | A kind of front mixing abrasive water jet is worked continuously system and method |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110480512A (en) * | 2019-07-25 | 2019-11-22 | 浙江工业大学 | Ultrasonic vibration assists microchannel jet stream processing unit (plant) |
CN111604745A (en) * | 2020-06-03 | 2020-09-01 | 临沂湾格岛家具有限公司 | High-end furniture raw and other materials paulownia manufacture equipment |
CN114533907A (en) * | 2022-03-04 | 2022-05-27 | 伍华 | Medical treatment consumptive material is with degassing unit that heats fast |
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Application publication date: 20170822 |