CN110408897B

CN110408897B - Vertical binding device and binding method for rotary target

Info

Publication number: CN110408897B
Application number: CN201910732403.8A
Authority: CN
Inventors: 高明; 张花蕊; 张虎; 陈浩杰
Original assignee: Beijing Hangda Micro Technology Co ltd
Current assignee: Beijing Orient Co ltd
Priority date: 2019-08-13
Filing date: 2019-08-13
Publication date: 2023-05-05
Anticipated expiration: 2039-08-13
Also published as: CN110408897A

Abstract

The utility model relates to a vertical binding device and a binding method for a rotary target, wherein the vertical binding device comprises a liner tube (1), at least two target tubes (2) sleeved on the liner tube (1) in a sectioning way, an internal heating device (3) is arranged in the liner tube (1), and an external heating device (4) is arranged outside the target tubes (2); the method is characterized in that: the inner heating device (3) is divided into a plurality of heating sections (31) which are independently controlled along the extending direction of the liner tube (1), and the heating sections (31) are arranged in one-to-one correspondence with the target tubes (2); the external heating devices (4) are arranged in one-to-one correspondence with the target tubes (2), and each external heating device (4) is independently controlled. The binding device and the binding method can prevent the solder from breaking the sealing device in the binding process.

Description

Vertical binding device and binding method for rotary target

Technical Field

The utility model relates to the field of target binding, in particular to a vertical binding device and a binding method for a rotary target.

Background

The magnetron sputtering coating is a coating deposition process widely applied in the current coating industry. The principle of sputtering film coating is that the surface of a target material is bombarded by electron gun argon ions under the vacuum condition, and the material on the surface of the target material is sputtered in the forms of molecules, atoms, ions or electrons, and splashed on a substrate to deposit film.

Sputtering targets are generally of two types: planar targets and rotary targets, wherein the utilization rate of the planar targets is only 20-30%, the rotary targets are increasingly applied to practical manufacturing in order to improve the utilization rate of the targets. And with the progress of technology, a large-sized rotary target is increasingly required.

For ceramic target tubes and certain metal target tubes, because of their great brittleness, it is difficult to produce them by casting and spraying methods, but only by cold isostatic pressing plus sintering or hot isostatic pressing, a segment of the target tube can be produced, and then a large-size target material can be formed by binding it to a backing tube. The currently commonly used binding mode can be referred to a Chinese patent application publication No. CN206366646U, namely a metal sealing system for bonding a ceramic rotary target, wherein the rotary target comprises a metal back tube and a first ceramic rotary target sleeved outside the metal back tube, and the metal back tube and the first ceramic rotary target are sealed at the bottom by a plug to form a cavity; an inner heater is arranged in the metal back tube, and an outer heater is arranged outside the first ceramic rotary target; a low-melting-point metal binding layer is cast in a cavity between the metal back tube and the first ceramic rotary target, and indium is commonly used in low-melting-point metal solders in the prior art. The sealing device is used in the binding process to keep the sealing between the two sections of targets, so that the low-melting-point metal is not lost. In the binding process, the inner heater keeps a heating state for a long time, and a plurality of target tubes need to be bound in order to manufacture a large-size target material, so that a cavity between the back tube and the target tube is filled with a lot of indium solder, which can cause the indium solder to break through the sealing device due to gravity, cause solder leakage and cause binding failure.

Disclosure of Invention

The utility model aims to solve the technical problem of providing a rotary target vertical binding device capable of preventing solder from breaking through a sealing device in the binding process.

Another technical problem to be solved by the utility model is to provide a target binding method using the binding device.

The technical scheme adopted for solving the technical problems is as follows: the vertical binding device for the rotary target comprises a liner tube, at least two target tubes sleeved on the liner tube in a sectioning mode, wherein an internal heating device is arranged in the liner tube, and an external heating device is arranged outside the target tubes; the inner heating device is divided into a plurality of heating sections which are independently controlled along the extending direction of the liner tube, and the heating sections are arranged in one-to-one correspondence with the target tubes; the external heating devices are arranged in one-to-one correspondence with the target tubes, and each external heating device is independently controlled.

In order to facilitate temperature control, each heating section is correspondingly connected with a first temperature controller, and each external heating device is correspondingly connected with a second temperature controller.

Preferably, the inner heating device comprises a heating rod formed by winding a heating wire and a heat conduction sleeve sleeved outside the heating rod. The heat conduction is carried out through the heat conduction sleeve, so that the heating is more uniform.

Preferably, the external heating device is a heating sleeve coated on the outer side of the corresponding target tube.

In order to facilitate the disassembly of the heating sleeve, a detachable connecting structure is arranged on the heating sleeve.

In order to facilitate the tripping connection structure, the connection structure is a male magic tape and a female magic tape which are correspondingly arranged at two ends of the heating sleeve.

Preferably, the length of the heating section is 20-600mm, and more preferably 200-300mm.

When producing large-scale target, the length of interior heating device is not enough, in order to be convenient for mention interior heating device and heat the bushing pipe upper end, interior heating device's upper end is equipped with the pull ring.

The binding method for binding by using the vertical binding device comprises the following steps:

(a) Fixing the internal heating device in the liner tube, and controlling all heating sections of the internal heating device to start heating;

(b) When the liner tube is heated to the melting temperature of the solder, the solder is used for wetting the outer surface of the corresponding area to be bound of the liner tube, and heat is preserved after wetting;

(c) The method comprises the steps of sleeving a corresponding external heating device outside a target tube, controlling the external heating device to heat the target tube, wetting the inner surface of the target tube by using solder when the target tube is heated to the melting temperature of the solder, and preserving heat after wetting;

(d) In a heat preservation state, sleeving a section of wetted target tube on the outer side of the wetted liner tube, and pouring molten solder between the target tube (2) and the liner tube (1);

(e) Controlling the heating section of the internal heating device and the external heating device corresponding to the target tube to enter a cooling program;

(f) Repeating steps (b) to (e) as needed to bind the multiple sections of target tubes.

To prevent oxidation, step (c) is performed simultaneously with the wetting of the liner by step (b).

Compared with the prior art, the utility model has the advantages that: because each target tube is provided with the heating sections on the inner heating devices in one-to-one correspondence and the corresponding outer heating devices, the heating process of each target tube can be independently controlled in the process of brazing by using low-melting-point metal as welding flux, cooling is started after one target tube is bound, the fluidity of the low-melting-point metal is reduced, and when the binding of large-size targets with a plurality of target tubes is carried out, welding flux cannot leak from the sealing device at the bottom of the target and the sealing device of the splicing seam due to gravity, so that the success rate of binding the target is improved, and the production cost is saved; the corresponding binding method only changes the temperature control methods of the internal heating device and the external heating device based on the original operation method, and is simple to operate without retraining workers.

Drawings

FIG. 1 is a schematic view of an internal heating device according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of the overall structure of a binding device according to an embodiment of the present utility model;

FIG. 3 is an enlarged partial view of portion A of FIG. 2;

FIG. 4 is a temperature control curve of a first temperature controller and a second temperature controller according to an embodiment of the present utility model;

fig. 5 is a schematic view of an external heating device according to an embodiment of the present utility model.

Detailed Description

The following describes in further detail the embodiments of the present utility model with reference to the drawings and examples.

As shown in fig. 1 to 5, the vertical binding device of the rotary target comprises a liner tube 1, at least two target tubes 2 sleeved on the liner tube 1 in a sectionalized manner, an internal heating device 3 is arranged in the liner tube 1, and an external heating device 4 is arranged outside the liner tube 1; the inner heating device 3 is divided into a plurality of heating sections 31 which are independently controlled along the extending direction of the liner tube 1, and the heating sections 31 are arranged in one-to-one correspondence with the target tubes 2; the external heating devices 4 are arranged in one-to-one correspondence with the target tubes 2, and each external heating device 4 is independently controlled. Each heating section 31 is correspondingly connected with the first temperature controller 5, and each external heating device 4 is correspondingly connected with the second temperature controller 6. Suitable heating sections 31 have a length of 20-600mm, more preferably 200-300mm.

For uniform heat conduction, the internal heating device 3 includes a heating rod 32 formed by winding a heating wire, and a heat conduction sleeve 33 sleeved outside the heating rod 32. The heat-conducting jacket 33 of the present embodiment can uniformly transfer heat; the heating wires in this embodiment are metal heating wires, and the heating rod 32 is divided into corresponding heating sections, and is respectively connected to the corresponding first temperature controllers 5. For ease of assembly, the external heating device 4 is a heating jacket that is wrapped around the outside of the corresponding target tube 2. A releasable connection 41 is provided on the heating mantle. The connection structure 41 of the present embodiment is a male magic tape and a female magic tape which are correspondingly arranged at two ends of the heating jacket. The heating jacket of this embodiment is sleeve-shaped.

When large-size targets are produced, the length of the inner heating device 3 is insufficient, and in order to facilitate lifting of the inner heating device 3 to heat the upper end of the liner tube 1, the upper end of the inner heating device 3 is provided with a pull ring 34.

Binding is carried out according to the following steps:

1. the target tube 2 and the liner tube 1 are firstly cleaned by an oil remover, then cleaned by ultrasonic equipment, and cleaned by dust-free cloth;

2. fixing the inner heating device 3 in the liner tube 1, controlling all heating sections 31 of the inner heating device 3 to start heating, and heating the liner tube 1 to be above the melting temperature of the solder;

3. when the liner tube 1 reaches the melting temperature of the solder, the solder is used for wetting the outer surface of the corresponding area to be bound of the liner tube 1, and after the wetting is finished, the heat is preserved, and the specific wetting process in the embodiment is as follows: when the outer surface of the liner tube 1 is heated to the indium melting temperature, namely the process of the section (1) is run to the process of the section (6), an ultrasonic indium coating gun is used for carrying out 360-degree rotary indium coating welding on the liner tube, and a temperature controller starts to keep constant after reaching the seventh section of 220 degrees;

4. the external heating device 4 corresponding to the outside of the target tube 2 is sleeved, the male magic tape and the female magic tape at the two ends are tightly adhered, the target tube 2 is prevented from loosening, the second temperature controller 6 controls the external heating device 4 to heat, when the target tube 2 is heated to the melting temperature of solder, the inner surface of the target tube 2 is wetted by the solder, and the heat is preserved after the wetting is finished, and the specific wetting process in the embodiment is as follows: as shown in fig. 4, when the inner surface of the target tube 2 is heated to the indium melting temperature, namely, the process of the section (1) is operated to the process of the section (6), an ultrasonic indium coating gun is used for carrying out 360-degree rotary indium coating welding on the target tube, and a rear temperature controller starts to keep constant after reaching 220 degrees of the section (7);

5. when the outer surface of the metallized lining tube 1 and the inner surface of the target tube 2 are coated with indium and welded to achieve bright metal color, the welding wetting is complete, and the lining tube 1 and the target tube 2 are simultaneously wetted by ultrasonic waves, so that oxidation is avoided;

6. after wetting is completed, a plurality of persons cooperate to vertically sleeve the target tube 2 outside the liner tube 1, so that the defect caused by mutual friction between the target tube 2 and the liner tube 1 is prevented during sleeve, the process is quickened as much as possible, and the oxidation of an indium layer is avoided;

and seventhly, adjusting and fixing the position of the target tube 2 after sleeving so as to keep the target tube 2 vertical and concentric with the liner tube 1, sealing the target tube 2, and filling molten indium liquid into a gap between the target tube 2 and the liner tube 1 for welding after sealing, thereby completing the binding task of one section of the target tube 2 and the liner tube 1.

After a section of binding is completed, the inner heating device 4 and the outer heating device 4 enter a temperature control program section (8) under the control of the first temperature controller 5 and the second temperature controller 6, namely, the outer heating device 4 and the inner heating device 3 corresponding to the target tube 2 and the liner tube 1 enter a cooling and cooling link started in the section (8);

nine, when two or more sections of the target tube 2 are bound, repeating the steps three to eight times as required;

in addition, when the target tube 2 and the liner tube 1 are bound for a long time, such as 3 meters and 4 meters, the inner heating device 3 cannot heat the upper liner tube 1 due to insufficient length, so that the pull ring 34 at the upper end of the inner heating device 3 is lifted and fixed so as to heat the upper liner tube 1.

The liner tube 1 is fixed on the base during operation, and the sealing treatment in the seventh step comprises setting a sealing device between the target tube 2 and the base, and setting a sealing device between the target tube 2, wherein the sealing device is a conventional sealing device in the prior art.

In order to avoid oxidation, step four is performed simultaneously with step three.

The technical means disclosed by the scheme of the utility model is not limited to the technical means disclosed by the embodiment, and also comprises the technical scheme formed by any combination of the technical features. It should be noted that modifications and adaptations to the utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be within the scope of the present utility model.

Claims

1. The vertical binding device for the rotary target comprises a liner tube (1), at least two target tubes (2) sleeved on the liner tube (1) in a sectioning mode, an internal heating device (3) is arranged in the liner tube (1), and an external heating device (4) is arranged outside the target tubes (2); the method is characterized in that: the inner heating device (3) is divided into a plurality of heating sections (31) which are independently controlled along the extending direction of the liner tube (1), and the heating sections (31) are arranged in one-to-one correspondence with the target tubes (2); the external heating devices (4) are arranged in one-to-one correspondence with the target tubes (2), and each external heating device (4) is independently controlled;

the inner heating device (3) comprises a heating rod (32) formed by winding a heating wire and a heat conduction sleeve (33) sleeved outside the heating rod (32).

2. The vertical binding apparatus for a rotary target according to claim 1, wherein: each heating section (31) is correspondingly connected with the first temperature controller (5), and each external heating device (4) is correspondingly connected with the second temperature controller (6).

3. The vertical binding apparatus for a rotary target according to claim 1, wherein: the external heating device (4) is a heating sleeve which is coated on the outer side of the corresponding target tube (2).

4. A vertical binding apparatus for a rotary target according to claim 3, wherein: a releasable connection (41) is provided on the heating jacket.

5. The vertical binding apparatus for a rotary target according to claim 4, wherein: the connecting structure (41) is a male magic tape and a female magic tape which are correspondingly arranged at two ends of the heating sleeve.

6. The vertical binding apparatus for a rotary target according to any one of claims 1 to 5, wherein: the length of the heating section (31) is 20-600mm.

7. The vertical binding apparatus for a rotary target according to any one of claims 1 to 5, wherein: the upper end of the inner heating device (3) is provided with a pull ring (34).

8. The binding method of the rotary target is characterized by comprising the following steps of:

(a) Fixing the internal heating device (3) in the liner tube (1), and controlling all heating sections (31) of the internal heating device (3) to start heating;

(b) When the liner tube (1) is heated to the melting temperature of the solder, the solder is used for wetting the outer surface of the corresponding area to be bound of the liner tube (1), and heat is preserved after wetting;

(c) The method comprises the steps that a corresponding external heating device (4) is sleeved outside a target tube (2), the external heating device (4) is controlled to heat the target tube (2), when the target tube (2) is heated to the melting temperature of solder, the solder is used for wetting the inner surface of the target tube (2), and heat is preserved after wetting is finished;

(d) In a heat preservation state, a section of wetted target tube (2) is sleeved on the outer side of the wetted liner tube (1), and molten solder is poured between the target tube (2) and the liner tube (1);

(e) Controlling a heating section (31) of the internal heating device (3) and an external heating device (4) corresponding to the target tube (2) to enter a cooling program;

(f) Repeating the steps (b) to (e) according to the requirement to bind the multiple sections of target tubes (2).

9. The method of claim 8, wherein:

step (c) is performed simultaneously with the wetting process of step (b) on the liner (1).