CN110408897A - A kind of vertical binding device and binding method of rotary target material - Google Patents
A kind of vertical binding device and binding method of rotary target material Download PDFInfo
- Publication number
- CN110408897A CN110408897A CN201910732403.8A CN201910732403A CN110408897A CN 110408897 A CN110408897 A CN 110408897A CN 201910732403 A CN201910732403 A CN 201910732403A CN 110408897 A CN110408897 A CN 110408897A
- Authority
- CN
- China
- Prior art keywords
- pipe
- heating device
- target
- target material
- bushing pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
Abstract
The present invention relates to the vertical binding devices and binding method of a kind of rotary target material, at least two target pipes (2), the bushing pipe (1) being set on bushing pipe (1) including bushing pipe (1), segmentation are interior to be equipped with inner heating device (3), and the target pipe (2) is externally provided with external heating device (4)；It is characterized by: the inner heating device (3) is divided into multiple bringing-up sections (31) of independent control along the extending direction of the bushing pipe (1), the bringing-up section (31) is arranged in a one-to-one correspondence with the target pipe (2)；The external heating device (4) is arranged in a one-to-one correspondence with the target pipe (2), and each external heating device (4) is independent control.Binding device and binding method of the invention can prevent solder from breaking through sealing device in binding procedure.
Description
Technical field
The present invention relates to target binding field more particularly to vertical binding device and the binding sides of a kind of rotary target material
Method.
Background technique
Magnetron sputtering plating is the extensive coated film deposition technique of current plated film industrial application.The principle of sputter coating is true
Under empty condition, target material surface is bombarded by electron gun argon ion, target material surface material is with molecule, atom, ion or electricity
The forms such as son are sputtered out, are splashed on substrate and deposit film forming.
Sputtering target material usually has two classes: planar targets and rotary target material, wherein the utilization rate of planar targets only has 20-
30%, in order to improve the utilization rate of target, rotary target material is increasingly being applied in practical manufacture.And with science and technology
Progress, has increasing need for large-sized rotary target material.
For ceramic target pipe and certain metallic target pipes, since its brittleness is big, it is difficult to be produced with casting and spraying method, only
Sintering or hot isostatic pressing method can be added to produce a section section target pipe with isostatic cool pressing, then form big ruler by being tied on bushing pipe
Very little target.Currently used binding mode can refer to a kind of Chinese utility model patent " pottery of Publication No. CN206366646U
The metal sealing system of porcelain rotary target material bonding ", this kind of rotary target material includes metal penstock and is nested with outside metal penstock
First ceramic rotary target material, wherein metal penstock and the first ceramic rotary target material are sealed by a plug in bottom and form cavity；Gold
Belong to and be provided with internal heater in the pipe of penstock, also, the outside of the first ceramic rotary target material is provided with outer heating device；Metal penstock
And low-melting-point metal binding layer, low-melting-point metal weldering in the prior art are cast in the first cavity between ceramic rotary target material
Expect common indium.To keep sealing between two sections of targets using sealing device in binding procedure, so that low-melting-point metal will not flow
It loses.It is bound in this way, during successively binding each target pipe, internal heater keeps heated condition for a long time,
Large-size target is made, needs to bind multiple target pipes, therefore the cavity between penstock and target pipe is filled with many indium solders, this
Indium solder be will lead to since gravity breaks through sealing device, solder is caused to leak, and make Bind Failed.
Summary of the invention
There is provided one kind the technical problem to be solved by the present invention is to the status for the prior art can prevent solder from tying up
The vertical binding device of rotary target material of sealing device is broken through during fixed.
Another technical problem to be solved by this invention is to provide a kind of target binding side using aforementioned binding device
Method.
The technical scheme of the invention to solve the technical problem is: the vertical binding device of this kind of rotary target material,
At least two target pipes that are set on bushing pipe including bushing pipe, segmentation are equipped with inner heating device, the target pipe peripheral hardware in the bushing pipe
There is external heating device；The inner heating device is divided into multiple bringing-up sections of independent control along the extending direction of the bushing pipe, described
Bringing-up section is arranged in a one-to-one correspondence with the target pipe；The external heating device is arranged in a one-to-one correspondence with the target pipe, each described outer
Heating device is independent control.
For the ease of carrying out temperature control, each bringing-up section is correspondingly connected with the first temperature controller, each described additional
Thermal is correspondingly connected with the second temperature controller.
Preferably, the inner heating device includes heating rod made of heater strip winding, and is set in the heating rod
Outer heat conducting sleeve.Carried out by heat conducting sleeve thermally conductive, heating is more uniform.
Preferably, the external heating device is the heating mantle being coated on the outside of the corresponding target pipe.
For the ease of dismantling heating mantle, releasable connection structure is equipped in the heating mantle.
For the ease of connection structure of threading off, the connection structure is to be correspondingly arranged at the public velcro at the heating mantle both ends
And female velcro.
Preferably, the heading-length is 20-600mm, is further preferably 200-300mm.
When producing large-size target, the curtailment of inner heating device, for the ease of lifting inner heating device for lining
Pipe upper end is heated, and the upper end of the inner heating device is equipped with pull ring.
The binding method bound using above-mentioned vertical binding device, the following steps are included:
(a) fixed inner heating device is begun to warm up in all bringing-up sections in bushing pipe, controlling fixed inner heating device；
(b) when bushing pipe to be heated to the fusion temperature of solder, the appearance of the solder corresponding region to be bound to bushing pipe is used
Face is soaked, and is kept the temperature after wetting；
(c) it is set with corresponding external heating device in target tube outside, control external heating device heats target pipe, by target pipe
When being heated to the fusion temperature of solder, is soaked using inner surface of the solder to target pipe, kept the temperature after wetting；
(d) under keeping warm mode, the target pipe sleeve after section wetting is set to the outside of bushing pipe after wetting, and in target pipe
(2) solder of melting is perfused between bushing pipe (1)；
(e) bringing-up section and external heating device for controlling the corresponding inner heating device of target pipe enter cooling process；
(f) step (b) to (e) is repeated as needed to bind more piece target pipe.
It aoxidizes in order to prevent, carries out step (c) while carrying out step (b) to bushing pipe wet processes.
Compared with the prior art, the advantages of the present invention are as follows: since each target pipe of the invention has correspondingly
Bringing-up section and corresponding external heating device on inner heating device can use low-melting-point metal to carry out pricker as solder
During weldering, the heating process of each target pipe is independently controlled, begins to cool down after having bound a target pipe, is reduced
The mobility of low-melting-point metal, when have the binding of large-size target of multiple target pipes, solder will not due to gravity and
It is leaked from from the sealing device of the sealing device of target bottom and splicing seams, improves the success rate of target binding, saving is produced into
This；And corresponding binding method only changes inner heating device, external heating device on the basis of original operating method
Temperature control method does not need to retrain worker, easy to operate.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the inner heating device of the embodiment of the present invention；
Fig. 2 is the overall structure diagram of the binding device of the embodiment of the present invention；
Fig. 3 is the partial enlarged view of the part A of Fig. 2；
Fig. 4 is the temperature control curve of the first temperature controller of the embodiment of the present invention, the second temperature controller；
Fig. 5 is the schematic diagram of the external heating device of the embodiment of the present invention.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.
As shown in Fig. 1 to 5, the vertical binding device of this kind of rotary target material is set on bushing pipe 1 including bushing pipe 1, segmentation
Inner heating device 3 is equipped at least two target pipes 2, bushing pipe 1, bushing pipe 1 is externally provided with external heating device 4；Inner heating device 3 is along bushing pipe
1 extending direction is divided into multiple bringing-up sections 31 of independent control, and bringing-up section 31 is arranged in a one-to-one correspondence with target pipe 2；External heating device 4
It is arranged in a one-to-one correspondence with target pipe 2, each external heating device 4 is independent control.Each bringing-up section 31 is corresponding with the first temperature controller 5
Connection, each external heating device 4 are correspondingly connected with the second temperature controller 6.Suitable 31 length of bringing-up section is 20-600mm, further
Preferably 200-300mm.
In order to thermally conductive uniform, inner heating device 3 includes heating rod 32 made of being wound as heater strip, and is set in heating
Heat conducting sleeve 33 outside stick 32.The heat conducting sleeve 33 of the present embodiment can uniformly transfer heat；The heater strip of the present embodiment adds for metal
Heated filament, heating rod 32 are divided into corresponding bringing-up section, are separately connected corresponding first temperature controller 5.It is additional for the ease of assembly
Thermal 4 is to be coated on the heating mantle in corresponding 2 outside of target pipe.Releasable connection structure 41 is equipped in heating mantle.This reality
The connection structure 41 applied is to be correspondingly arranged at the public velcro and female velcro at heating mantle both ends.The heating mantle of the present embodiment is set
Tubular.
When producing large-size target, the curtailment of inner heating device 3, for the ease of lift inner heating device 3 for
1 upper end of bushing pipe is heated, and the upper end of inner heating device 3 is equipped with pull ring 34.
It is bound according to the following steps:
One, target pipe 2 and bushing pipe 1 are first cleaned with degreaser, after cleaned with ultrasonic equipment, wiped after cleaning with non-dust cloth
Completely；
Two, fixed inner heating device 3 starts to add in all bringing-up sections 31 in bushing pipe 1, controlling fixed inner heating device 3
Bushing pipe 1 is heated to the fusion temperature of solder or more by heat；
Three, when bushing pipe 1 reaches the fusion temperature of solder, the appearance of the solder corresponding region to be bound to bushing pipe 1 is used
Face is soaked, and is kept the temperature after wetting, and the present embodiment specifically soaks technique are as follows: is melted when the outer surface of bushing pipe 1 is warming up to indium
Change temperature i.e. by the 1. section program run to the 6. section program when, apply indium rifle using ultrasonic wave it rotated 360 ° and apply indium and weld
It connects, rear temperature controller starts permanent heat preservation after reaching the 7th section 220 °；
Four, corresponding external heating device 4 is set with outside target pipe 2, and the public velcro and female velcro at both ends are closely glued
Patch avoids target pipe 2 from loosening, and controls external heating device 4 by the second temperature controller 6 and heats, target pipe 2 is heated to the fusing temperature of solder
When spending, is soaked, is kept the temperature after wetting, the present embodiment specifically soaks technique using inner surface of the solder to target pipe 2 are as follows:
As shown in figure 4, making when the inner surface of target pipe 2 is warming up to indium fusion temperature i.e. 1. section program is run to 6. section program by
Indium rifle being applied with ultrasonic wave it being rotated 360 ° and apply indium welding, rear temperature controller reaches the and 7. starts permanent heat preservation after 220 ° of section；
Five, when 1 outer surface of bushing pipe after metallization and the painting indium welding of 2 inner surface of target pipe reach bright metallic luster,
Show welding wetting completely, and the ultrasonic wave wetting simultaneously of bushing pipe 1 and target pipe 2, avoids aoxidizing；
Six, wetting after the completion of, then more people cooperation make target pipe 2 vertically be nested with prevented outside bushing pipe 1, when being nested target pipe 2 with
1 phase mutual friction of bushing pipe generates defect, enables process accelerate as far as possible, indium layer is avoided to aoxidize；
Seven, are adjusted after being nested and fixed 2 position of target pipe, so that it is kept vertical and concentric with bushing pipe 1, then carry out to target pipe 2
Encapsulation process is filled to target pipe 2 and 1 gap location of bushing pipe with the indium liquid of fusing after sealing and is welded, that is, completes a section target pipe 2 and lining
The binding task of pipe 1.
After eight, complete section binding, the first temperature controller 5, the second temperature controller 6 control under inside and outside heating device 4 enter
The 8. temperature program section, the i.e. external heating device 4 corresponding with bushing pipe 1 of target pipe 2, inner heating device 3 enter the drop that 8. section starts
The cooling link of temperature；
Nine, repeat step 3 to more than eight times when target pipe 2 has two sections or more piece is bound as needed；
In addition, the meeting of inner heating device 3 can not because of curtailment when binding is such as 3 meters longer, 4 meters of target pipes 2 are with bushing pipe 1
Upper end bushing pipe 1 is heated, thus it is fixed after above being mentioned using the pull ring 34 of 3 upper end of inner heating device, to be heated to upper end bushing pipe 1.
It is fixed on pedestal in above-mentioned 1 operating process of bushing pipe, the encapsulation process of step 7 includes setting between target pipe 2 and pedestal
It sets and sealing device is set between sealing device and target pipe 2, sealing device is using sealing device conventional in the prior art
It can.
In order to avoid oxidation, step 4 is carried out while carrying out step 3.
The technical means disclosed in the embodiments of the present invention is not limited only to technological means disclosed in above embodiment, further includes
Technical solution consisting of any combination of the above technical features.It should be pointed out that for those skilled in the art
For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (10)
1. a kind of vertical binding device of rotary target material, at least two targets being set on bushing pipe (1) including bushing pipe (1), segmentation
Inner heating device (3) are equipped in pipe (2), the bushing pipe (1), the target pipe (2) is externally provided with external heating device (4)；Its feature exists
It is divided into multiple bringing-up sections (31) of independent control along the extending direction of the bushing pipe (1) in: the inner heating device (3), it is described
Bringing-up section (31) is arranged in a one-to-one correspondence with the target pipe (2)；The external heating device (4) corresponds with the target pipe (2) and sets
It sets, each external heating device (4) is independent control.
2. the vertical binding device of rotary target material according to claim 1, it is characterised in that: each bringing-up section (31)
It is correspondingly connected with the first temperature controller (5), each external heating device (4) is correspondingly connected with the second temperature controller (6).
3. the vertical binding device of rotary target material according to claim 2, it is characterised in that: the inner heating device (3)
Including heating rod (32) made of heater strip winding, and it is set in the heat conducting sleeve (33) of the heating rod (32) outside.
4. the vertical binding device of rotary target material according to claim 3, it is characterised in that: the external heating device (4)
For the heating mantle being coated on the outside of the corresponding target pipe (2).
5. the vertical binding device of rotary target material according to claim 4, it is characterised in that: be equipped in the heating mantle
Releasable connection structure (41).
6. the vertical binding device of rotary target material according to claim 5, it is characterised in that: the connection structure (41) is
It is correspondingly arranged at the public velcro and female velcro at the heating mantle both ends.
7. according to claim 1 to the vertical binding device of rotary target material described in 6 any claims, it is characterised in that: institute
Stating bringing-up section (31) length is 20-600mm.
8. according to claim 1 to the vertical binding device of rotary target material described in 6 any claims, it is characterised in that: institute
The upper end for stating inner heating device (3) is equipped with pull ring (34).
9. a kind of binding method of rotary target material, it is characterised in that the following steps are included:
(a) fixed inner heating device (3) control all bringing-up sections (31) beginning of fixed inner heating device (3) in bushing pipe (1)
Heating；
(b) when bushing pipe (1) being heated to the fusion temperature of solder, the outer of the solder corresponding region to be bound to bushing pipe (1) is used
Surface is soaked, and is kept the temperature after wetting；
(c) corresponding external heating device (4) is set with outside target pipe (2), control external heating device (4) adds target pipe (2)
Heat when target pipe (2) is heated to the fusion temperature of solder, is soaked, wetting is finished using inner surface of the solder to target pipe (2)
After keep the temperature；
(d) under keeping warm mode, the target pipe (2) after section wetting is arranged to the outside of bushing pipe (1) after wetting, and in target pipe
(2) solder of melting is perfused between bushing pipe (1)；
(e) bringing-up section (31) and external heating device (4) for controlling the corresponding inner heating device (3) of the target pipe (2) enter cooling journey
Sequence；
(f) step (b) to (e) is repeated as needed to bind more piece target pipe (2).
10. the binding method of rotary target material according to claim 9, it is characterised in that:
Step (c) is carried out while carrying out step (b) to bushing pipe (1) wet processes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910732403.8A CN110408897B (en) | 2019-08-13 | 2019-08-13 | Vertical binding device and binding method for rotary target |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910732403.8A CN110408897B (en) | 2019-08-13 | 2019-08-13 | Vertical binding device and binding method for rotary target |
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| CN110408897A true CN110408897A (en) | 2019-11-05 |
| CN110408897B CN110408897B (en) | 2023-05-05 |
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Cited By (3)
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|---|---|---|---|---|
| CN110948071A (en) * | 2019-11-22 | 2020-04-03 | 福建阿石创新材料股份有限公司 | Soldering method of splicing-free rotary target |
| CN111304605A (en) * | 2020-03-09 | 2020-06-19 | 东莞市欧莱溅射靶材有限公司 | ITO (indium tin oxide) rotary target binding method |
| CN113249693A (en) * | 2021-05-08 | 2021-08-13 | 浙江大学台州研究院 | Pipe target binding device |
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| CN113249693A (en) * | 2021-05-08 | 2021-08-13 | 浙江大学台州研究院 | Pipe target binding device |
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| Publication number | Publication date |
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| CN110408897B (en) | 2023-05-05 |
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