CN110379748A - Side cover type box body flip equipment and side cover type box body cover lifting method - Google Patents
Side cover type box body flip equipment and side cover type box body cover lifting method Download PDFInfo
- Publication number
- CN110379748A CN110379748A CN201810326272.9A CN201810326272A CN110379748A CN 110379748 A CN110379748 A CN 110379748A CN 201810326272 A CN201810326272 A CN 201810326272A CN 110379748 A CN110379748 A CN 110379748A
- Authority
- CN
- China
- Prior art keywords
- box body
- side cover
- flip
- cover type
- type box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 claims description 24
- 230000006698 induction Effects 0.000 claims description 21
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 230000008569 process Effects 0.000 abstract description 9
- 230000003749 cleanliness Effects 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 description 13
- 238000003860 storage Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000005693 optoelectronics Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 231100000719 pollutant Toxicity 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 210000001364 upper extremity Anatomy 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- -1 aqueous vapor Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Casings For Electric Apparatus (AREA)
Abstract
The present invention relates to a kind of side cover type box body flip equipment and side cover type box body cover lifting methods, to open a box body, above-mentioned box body includes the side cover of a side opening and a selectivity opening and closing side openings, and the side cover type box body flip equipment includes a base, one guiding and positioning device, one presses limiting device and a lid opening device, so, box body is positioned at flip position using guiding and positioning device, and limiting device is further pressed by this and fixes the box body, the rear side cover that the box body is raised using the lid opening device, the side cover type box body is allowed also to can be carried out automation flip and closure, to improve the degree of automation of equipment, reduce the fault of manual work, it simultaneously can be because of automatic operation, and reduce the pollution of manual work, ensure the cleanliness of process volume, therefore the practicality can be significantly improved.
Description
Technical field
The present invention relates to a kind of flip technology of box body, specifically a kind of side cover type box body flip equipment and side
Can automate the breakdown action for carrying out side cover, to reduce manual work fault, operation can be improved in lid formula box body cover lifting method
Efficiency.
Background technique
The line footpath of integrated circuit is more and more thinner in manufacture of semiconductor, has been developed to 10 nanometers at present hereinafter, therefore in processing procedure
Any pollutant may all directly influence the qualification rate of opposite processing procedure or product.But in entire manufacture of semiconductor, whether
During production, transfer, storage or transport, there are the nocuousness such as many particles, aqueous vapor, gas, chemical solvent molecule
Substance, these harmful substances can be attached to the surface of wafer, light shield or various process apparatus and device, will cause wafer conjunction
The phenomenon that lattice rate reduces, and increase cleaning and improved time, causes output to reduce, relative to it is upper can also improve operation at
This.Therefore, in order to solve this problem, and in manufacture of semiconductor, with automatic material transport system (Automated
Material Handling System, AMHS), and input and output material standard mechanical interface (Standard Mechanical is isolated
Interface, SMIF) equipment, Lai Jinhang wafer/light shield in do not use period maintenance and transport, can not only replace traditional people
Work carries, reduce dust free room equipment build and maintenance cost, moreover it is possible to it is qualified to reach superelevation production for the cleanliness for promoting light shield
Rate, therefore in recent years, AMHS and SMIF have been cited as be international semiconductor factory standard device specification.
In manufacture of semiconductor, the used light shield (Mask) for forming integrated circuit for the wafer surface (Wafer) is
The one of indispensable element in micro-photographing process, the light shield are made of the substrate of light transmission, when substrate surface has pollutant,
The video imaging of the pollutant may be made on wafer, it is also possible to cause the phenomenon that being distorted when lithographic exposure figure, influence processing procedure
Production efficiency and increase cost.
According to above-mentioned technological concept, the light shield is in addition to exposing in use, light shield is in the process of transport or during saving, all
Wafer or light shield must be placed in the carrier of a high-cleanness, high, such as light shield transmission box, shipment or the storage of automation
Light shield feeder or light shield holder etc..Wherein being mainly used for generally storing with the light shield holder transported includes one
Kind side cover type box body passes in and out box body when storage for aforementioned light shield as shown in Figure 1,100 side of box body has an opening 101
100, and the box body 100 is pivoted with the side cover 102 of a normally closed type in 101 upper limbs that are open, and 102 two sides of side cover be respectively provided with it is convex
Group portion 103 of 100 adjacent side of box body out, for conveniently turning to lift the side cover 102 in an open position of opposite box body 100 opening 101
Set and a closed position between be displaced, while to be respectively provided with an opposite handle convex for the two sides side of 100 adjacent apertures 101 of box body
Item 105, for being held when operating personnel's movement box body 100；
Since the opening of box body 100 101 of above-mentioned light shield holder is located at side, effectively fixed and clamping position is had no,
And side cover 102 raised Shi Gengxu and stirred with finger, therefore its usually system is carried out with manual mode of operation, it is difficult to for from
In dynamicization equipment, such as photo-mask detection device, light shield washing device or light shield storage facilities etc., it influences using the side cover type
The degree of automation of the semiconductor equipment of box body 100 causes efficiency not promoted effectively, therefore developing one kind can automate
The equipment for carrying out the flip of side cover type box body, it is believed that be the important topic of industry.
In view of this, the present invention is the demand further investigated automated based on above-mentioned semiconductor equipment, and by virtue of this invention
The experience that people is engaged in related development for many years actively seeks the road solved, and the research and development through being continually striving to successfully is created finally
A kind of side cover type box body flip equipment and side cover type box body cover lifting method are made, can effectively solve those existing can not carry out
Automate inconvenience caused by flip and puzzlement.
Summary of the invention
Therefore, the main object of the present invention, which ties up to, provides a kind of side cover type box body flip equipment and side cover type box body lifts
Lid method, to improve the degree of automation of equipment, is reduced artificial with that can carry out the flip of side cover type box body in an automated manner
The fault of operation, to improve process efficiency.
Also, an of the invention main purpose is to provide a kind of side cover type box body flip equipment and side cover type box body
Cover lifting method can reduce the pollution of manual work because of automatic operation, it is ensured that the cleanliness of process volume, to be promoted
Process yield.
Furthermore an of the invention main purpose is to provide a kind of side cover type box body flip equipment and side cover type box
Body cover lifting method can reduce the fault of manual work by automatic operation, and further promote operating efficiency.
For this purpose, the present invention is mainly by following technological means, come implement above-mentioned projects and efficiency:
A kind of side cover type box body flip equipment, to open a box body, above-mentioned box body includes a side opening and a selection
Property opening and closing side openings side cover, and side cover two sides are respectively provided with the portion of dialling of protrusion box body adjacent side, and the box body sides adjacent
The two sides side of side opening is respectively provided with an opposite handle raised line, and the side cover type box body flip equipment be characterized in include
Have:
One base；
One guiding and positioning device, is set on base, which includes a guide-track groove and a positioning
Portion can be moved to a flip position using two side grip raised lines for above-mentioned box body in guide-track groove, and the positioning region is for box
Body is limited in the flip position；
One presses limiting device, is set to side cover one end on base different from box body, this presses limiting device with one
Driving element and a push element, wherein driving element can drive push element selectivity by different from aforementioned positioning region one
The box body is supported in side pressure, is fixed on the flip position for box body；
One lid opening device, is set to side cover one end that box body is corresponded on base, which has a driving element
And a lever lifting element, wherein driving element can drive the lever lifting element to leave position, a closed position and an open position one
It is moved between setting, for driving box body side cover to be displaced between closed position and open position.
The side cover type box body flip equipment, in which: two guide-track grooves of the guiding and positioning device, which are respectively formed at, to be set to
On the relatively parallel side plate of the two of base.
The side cover type box body flip equipment, in which: the positioning region of the guiding and positioning device is formed at two guide-track grooves
The stopper protrusion in middle section, and the handle raised line of the box body is formed with and can stick in the ladder end face of the stopper protrusion.
The side cover type box body flip equipment, in which: the guiding and positioning device has whether one be located at for detection box body
The first position sensing element of flip position.
The side cover type box body flip equipment, in which: the driving element for pressing limiting device can drive the pushing
Element selectively pushes a rear end face of box body handle raised line, and selective property fixed bin body is in flip position.
The side cover type box body flip equipment, in which: this, which is pressed, has a sync bit in the push element of limiting device
The induction pieces of shifting, and this presses limiting device and is equipped with a second position sensing element and a third place sensing element, wherein the
Two position sensing elements can be located at releasing position by the induction pieces detection push element, and the third place sensing element energy
Enough it is located at by the induction pieces detection push element and compresses position.
The side cover type box body flip equipment, in which: there is the lever lifting element of the lid opening device alternative to recline
One protrusion of box body side cover dials the protrusion in portion, is leaving position, closed position for the side cover relative side opening of the actuation box body
It is displaced between open position.
The side cover type box body flip equipment, in which: with a synchronous shift in the lever lifting element of the lid opening device
Induction pieces, and the lid opening device is arranged with one the 4th position sensible element, one the 5th position sensing element and the sense of one the 6th position
Element is answered, wherein the 4th position sensing element can leave position, and the 5th position by the induction pieces detection lever lifting element
Sensing element can be located at the closed position of side cover by the induction pieces detection lever lifting element, as the 6th position sensing element
The open position of side cover can be located at by the induction pieces detection lever lifting element.
The present invention also provides a kind of side cover type box body cover lifting methods, and to open a box body, above-mentioned box body includes a side
The side cover of opening and a selectivity opening and closing side openings, and side cover two sides are respectively provided with group portion of protrusion box body adjacent side, again
The two sides side of box body adjacent side opening is respectively provided with an opposite handle raised line, and the side cover type box body cover lifting method
Be characterized in include:
It places in the side cover type box body flip equipment after a box body is resetted in one；
Utilize the mobile above-mentioned box body of a guiding and positioning device to a flip position；
Generation one, which compresses power, makes above-mentioned box body be fixed on flip position；And
A lid opening device is driven to raise the side cover of above-mentioned box body.
The side cover type box body cover lifting method, wherein also include:
Above-mentioned lid opening device is driven to discharge the side cover of above-mentioned box body；
The mobile above-mentioned limiting device that presses discharges above-mentioned box body；And
Above-mentioned box body is removed into above-mentioned side cover type box body flip equipment.
In this way, passing through the specific implementation of aforementioned techniques means, position the present invention by box body using guiding and positioning device
Press limiting device by this in flip position, and further and fix the box body, rear the box is raised using the lid opening device
The side cover of body allows the side cover type box body also to can be carried out automation flip and closure, to improve the degree of automation of equipment, reduces
The fault of manual work, while the pollution of manual work can be reduced because of automatic operation, it is ensured that the cleanliness of process volume,
Therefore the practicality can be significantly improved, and can increase its surcharge, and its economic benefit can be improved.
Detailed description of the invention
Fig. 1 is a kind of appearance diagram applied to the side cover type box body for placing light shield.
Fig. 2 is the three-dimensional appearance schematic diagram of side cover type box body flip equipment of the present invention.
Fig. 3 is the sectional perspective decomposition diagram of side cover type box body flip equipment of the present invention, for illustrating the opposite of each component
Relationship.
Fig. 4 is the flow chart of side cover type box body cover lifting method of the present invention.
Fig. 5 is side cover type box body flip equipment of the present invention in three-dimensional appearance schematic diagram in actual use, for illustrating box body
It is placed in the movement aspect of positioning.
Fig. 6 is side cover type box body flip equipment of the present invention in schematic top plan view in actual use, for illustrating box body
Press the movement aspect of limit.
Fig. 7 is side cover type box body flip equipment of the present invention in three-dimensional appearance schematic diagram in actual use, for illustrating box body
Movement aspect before flip.
Fig. 8 is side cover type box body flip equipment of the present invention in three-dimensional appearance schematic diagram in actual use, for illustrating box body
The movement aspect of flip.
Description of symbols: 100 box bodys；101 side openings；102 side covers；103 groups of portions；105 handle raised lines；106 front ends
Face；107 rear end faces；108 ladder end faces；10 bases；20 guiding and positioning devices；21 guide-track grooves；210 oblique guide lugs；22 side plates；23
Positioning region；231 positioning convex portions；24 first position sensing elements；30 press limiting device；31 driving elements；32 push element；
33 mounting bases；34 induction pieces；35 second position sensing elements；36 the third place sensing elements；40 lid opening devices；41 driving members
Part；42 lever lifting elements；420 protrusions；43 mounting bases；44 induction pieces；45 the 4th position sensing elements；46 the 5th position sensings
Part；47 the 6th position sensing elements.
Specific embodiment
The present invention is a kind of side cover type box body flip equipment and side cover type box body cover lifting method, and accompanying legend shows this hair
In bright specific embodiment and its component, before all about and rear, left and right, top and bottom, top and lower part, Yi Jishui
It is flat to be only used for conveniently being described, not the limitation present invention with vertical reference, nor its component is limited to any position
Or direction in space.Specified size in schema and specification, when can be in without departing from claim of the invention, root
It is changed according to the design of specific embodiments of the present invention with demand.
And the present invention is a kind of for side cover type box body flip equipment and side cover type box body cover lifting method, to selectivity
Box body 100 as shown in Figure 1 is opened, above-mentioned box body 100 includes that a side opening 101 and one is hubbed at 101 upper limb of side openings
Side cover 102, the side cover 102 can relative side opening 101 be displaced between an open position and a closed position, and side cover 102
Two sides are respectively provided with group portion 103 of protrusion 100 adjacent side of box body, for conveniently turning to lift the 102 selectivity opening and closing box body of side cover
100 side openings 101, while the two sides side of 100 adjacent apertures 101 of box body is respectively provided with an opposite handle raised line
105, and respectively the handle raised line 105 is respectively provided with a front end face 106, a rear end face 107, and respectively the handle raised line 105 in it is preceding,
A ladder end face 108 is formed between rear end face 106,107.Person shown by another Fig. 2 is that the side cover type box body flip equipment includes
One base 10, a guiding and positioning device 20, one press limiting device 30 and a lid opening device 40 is formed.In some embodiments
On, which further includes the feed conveyor of a mobile box body 100, such as semiconductor equipment
Mechanical arm, for clamp and be displaced the box body 100 be loaded into the side cover type box body flip equipment in；
Wherein base 10 with for aforementioned guiding and positioning device 20, press limiting device 30 and lid opening device 40 installation set
It sets, and the base 10 can be some of semiconductor equipment, which can be as detecting reticle surface dirt
Contaminate optical checking equipment (Automatic Optical Inspection System, AOI), the light shield washing device, light of object
In cover storage facilities or lithography apparatus, for directly taking out the substrate being accommodated in box body 100, the dirt of the substrate such as light shield is carried out
Contaminate analyte detection, cleaning or storage conversion；
Again as shown in Figure 2 and Figure 3, the guiding and positioning device 20 is set on base 10, and it includes have a guide-track groove
21 and a positioning region 23, make the guiding and positioning device 20 that can guide box body 100 and be moved to one using two side grip raised lines 105 and lifts
The positioning of lid position, in certain embodiments, which can be respectively formed at two parallel side plates 22 set on base 10
Opposed inside surface.In certain embodiments, which forms outside widened oblique guide lug 210, for being convenient for
The handle raised line 105 of 100 two sides of box body imports, and the positioning region 23 of the guiding and positioning device 20 is in certain embodiments, can
To be formed at the stopper protrusion 231 in two guide-track grooves, 21 middle section, pasted for the ladder end face 108 of the 100 handle raised line 105 of box body
To limit, the another guiding and positioning device 20 further has once for detection box body 100, whether the first position of flip position is felt
Element 24 is surveyed, in certain embodiments, which can be the touch that one is set to 21 end of guide-track groove and open
It closes, proximity switch or optoelectronic switch, sensing element 24 system in first position of the invention are supplied using touch switch as main embodiment
When the ladder end face 108 of 100 handle raised line 105 of box body is limited by positioning region 23, the front end face 106 of the handle raised line 105 can be touched
The first position sensing element 24 movement is touched, to confirm that box body 100 can be with regard to flip position；
The another limiting device 30 that presses is set on base 10, for box body 100 forward by aforementioned guiding and positioning device
20 fixed bits postpone selectivity and compress limitation by rear, and in certain embodiments, this presses limiting device 30 with a driving member
Part 31 and a push element 32 are formed, and wherein the driving element 31 can be set to one and be placed in the mounting base 33 of base 10, the drive
Dynamic element 31 can the actuation push element 32, compress push element 32 can in one and moved between position and a releasing position, this is pushed away
The movement of pressure element 32 can be the α swing offset along Z axis or the θ swing offset along X-axis, push away for 32 selectivity of push element
The rear end face 107 for pressing 100 handle raised line 105 of box body, for cooperating the 23 front and back fixed bin of positioning region of aforementioned guiding and positioning device 20
Body 100 makes it that can pass in and out guiding and positioning device 20 in flip position, or release box body 100, and system of the present invention enables driving element 31
Actuation push element 32 is main embodiment along the α swing offset of Z axis, and in certain embodiments, is had in the push element 32
There are an induction pieces 34 of a synchronous shift, and this presses limiting device 30 in being arranged with a second on base 10 or mounting base 33
Sensing element 35 and a third place sensing element 36 are set, wherein second position sensing element 35 is for the detection push element
32 are located at releasing position (as shown in Figure 5) and the third place sensing element 36 for the detection push element 32 positioned at compressing position
Set (as shown in Figure 6, Figure 7), and second and third position sensing element 35,36 can be selected from touch switch, proximity switch or
Optoelectronic switch, second and third position sensing element 35 of the invention, 36 systems are using optoelectronic switch as main embodiment；
Furthermore the lid opening device 40 is set on base 10, selective property actuation 100 side openings 101 of box body
Side cover 102 leave in one and be displaced between position, a closed position and an open position, in certain embodiments, the lid opening device
40 there is a driving element 41 and a lever lifting element 42 to be formed, and wherein the driving element 41 can be set to one and be placed in base 10
In mounting base 43, the driving element 41 can the actuation lever lifting element 42 moved between position, closed position and open position in leaving
Dynamic, in certain embodiments, which has what an alternative reclined 100 side cover 102 of box body to dial the convex of portion 103
Portion 420, and the movement of the lever lifting element 42 can be the rotation with 102 coaxial rotating of side cover, such as along the θ swing offset of X-axis,
It is displaced between position, closed position and open position for 102 relative side of the side cover opening 101 of the actuation box body 100 in leaving,
Again in certain embodiments, with the induction pieces 44 of a synchronous shift in the lever lifting element 42, and the lid opening device 40 is in base
10 or mounting base 43 on be arranged with one the 4th position sensible element 45, one the 5th position sensing element 46 and one the 6th position sense
Element 47 is answered, wherein the 4th position sensing element 45 leaves position (as shown in Figure 5) for the detection lever lifting element 42, to keep away
Exempting from, which influences box body 100, passes in and out, and for detection, the lever lifting element 42 is located at closing for side cover 102 to the 5th position sensing element 46
Coincidence is set (as shown in Fig. 7), the state of side cover 102 is lifted for preparation, as the 6th position sensing element 47 for this group of detection
Rod element 42 is located at the open position (as shown in Figure 8) of side cover 102, is in opening state for confirmation 100 side openings 101 of box body, and
This fourth, fifth and six position sensing element 45,46,47 can be selected from touch switch, proximity switch or optoelectronic switch, this hair
Fourth, fifth bright and six position sensing elements, 45,46,47 system is using optoelectronic switch as main embodiment；
In this way, group, which constitutes one, can automate the side cover type box body flip equipment person of flip.
Fig. 4 show the flow chart of side cover type box body cover lifting method in accordance with some embodiments again.And such as Fig. 5, Fig. 6, figure
It is that the movement of the side cover type box body flip equipment in side cover type box body cover lifting method in accordance with some embodiments is shown shown in 7 and Fig. 8
It is intended to.Side cover type box body flip equipment of the invention can be set in different semiconductor equipments, such as light shield checks equipment, light
Cover cleaning equipment or light shield storage facilities, when the side cover 102 for the side openings 101 for having the unlatching box body 100 takes out internal storage
Substrate such as light shield checked, cleaned or stored demand when.The process step of the side cover type box body cover lifting method includes:
In step s101, it places in the side cover type box body flip equipment after a box body is resetted in one: utilizing semiconductor
A mobile device (mechanical arm of such as clamping box body) in equipment clamps the box body 100, sets above-mentioned box body 100 for preparation
In in a side cover type box body flip equipment, and according to some embodiments, which presses limit
One push element 32 of device 30 leaves position in one in a lever lifting element 42 of a releasing position and a lid opening device 40, allows
Box body 100 can smoothly pass in and out the side cover type box body flip equipment；
In step s 102, the mobile above-mentioned box body of a guiding and positioning device to a flip position: above-mentioned mobile device is utilized
Box body 100 is placed in a guiding and positioning device 20, as shown in figure 5, making the box body 100 using two side grip raised lines, 105 edge
The guide-track groove 21 of the guiding and positioning device 20 is moved to a flip position, and above-mentioned box body 100 can be with respect to guiding and positioning device 20
Positioning region 23 generate locating effect, such as using the ladder end face 108 of 100 liang of handle raised lines 105 of box body with respect to sticking in guide rail
The positioning convex portion 231 of slot 21, and according to some embodiments, which can utilize first position sensing element 24
105 front end face 106 of handle raised line of detection box body 100, to confirm whether the box body 100 is correctly positioned at flip position；
In step S103, generation one, which compresses power, makes above-mentioned box body be fixed on flip position: as shown in Figure 6 according to some
Embodiment drives the one of above-mentioned side cover type box body flip equipment 31 actuation one of driving element for pressing limiting device 30 to push member
Part 32 presses the rear end face 107 of the handle raised line 105 of the box body 100, and box body 100 is made to be directed to the positioning region of positioning device 20
It 23 and presses the push element 32 of limiting device 30 and is fixed on flip position.And according to some embodiments, this presses limiting device
30 can use the induction pieces 34 of its 36 detection of the third place sensing element push element 32, to confirm that box body 100 is certain
It is fixed on flip position；
In step S104, one lid opening device of actuation raises the side cover of above-mentioned box body: above-mentioned box body 100 is fixed on flip position
It postpones, as shown in Figure 7, Figure 8, according to some embodiments, above-mentioned lid opening device 40 can pass through 41 actuation driving lever member of driving element
Part 42 turns to a closed position of opposite 100 side cover 102 of box body, and the protrusion 420 of the lever lifting element 42 is made to stick to the side cover
102 group portion 103 (as shown in Figure 7), then further actuation lever lifting element 42 turns to open position, makes the lever lifting element
42 can drive side cover 102 to raise with respect to 100 side openings 101 of box body in opening state (as shown in Figure 8), and according to certain implementations
Example, the lid opening device 40 can use the induction pieces of its five, the six position sensing element 46, the 47 detections lever lifting elements 42
44, to confirm that the side cover 102 of box body 100 is located at closed position and open position, automate for the semiconductor equipment by base
Plate is placed in 100 inside of box body or by substrate by taking out inside box body 100；
In the flip for the side cover 102 for completing box body 100, and after taking-up or merging base board operation, increase can according to need
Following process step；Such as:
In step S105, above-mentioned lid opening device is driven to discharge the side cover of above-mentioned box body: the merging or taking-up of completing substrate
Afterwards, the lever lifting element 42 can be rotated backward by the driving element 31 of above-mentioned lid opening device 40 to closed position, make the box body
100 side cover 102 can move down and close the side openings 101 of the box body 100 in company with lever lifting element 42, and the flip fills
It sets the 40 further actuation of driving element 41 lever lifting element 42 and is inverted to and leave position, it is made to exit Shi Bugan in box body 100
Side cover 102 is related to, and according to some embodiments, which can use the inspection of its five, the four position sensing element 46,45
The induction pieces 44 of the lever lifting element 42 are known, to confirm that the side cover 102 of box body 100 is located at closed position and leaves position；
In step S106, the mobile above-mentioned limiting device that presses discharges above-mentioned box body: discharging box body 100 in lid opening device 40
Side cover 102 after, can drive it is above-mentioned press limiting device 30 the reversed actuation push element 32 of driving element 31 be detached from the box
The rear end face 107 of the handle raised line 105 of body 100, the power for making box body 100 be fixed on flip position are discharged.And according to
Some embodiments, this, which presses limiting device 30, can use the sense of its 35 detection of second position sensing element push element 32
Part 34 is answered, to confirm that box body 100 is discharged really, and the push element 32 is located on the path for not interfering box body 100 to exit；
In step S107, above-mentioned box body is removed into above-mentioned side cover type box body flip equipment: using in the semiconductor equipment
Mobile device clamps the box body 100, and above-mentioned box body 100 is removed to the guide-track groove 21 of the guiding and positioning device 20, makes box body 100
Guide-track groove 21 is exited using two handle raised lines 105, which can be removed the side cover type box body flip equipment.
Via above-mentioned explanation, side cover type box body flip equipment utilization guiding and positioning device 20 of the present invention is by box body 100
Be positioned at flip position, and further press limiting device 30 by this and fix the box body 100, rear utilize the lid opening device
40 raise the side cover 102 of the box body 100, allow the side cover type box body 100 also to can be carried out automation flip and closure, to improve
The degree of automation of equipment reduces the fault of manual work, while can reduce the pollution of manual work because of automatic operation,
Ensure the cleanliness of process volume, therefore the practicality can be significantly improved.
It is described above to be merely exemplary for the purpose of the present invention, and not restrictive, those of ordinary skill in the art's reason
Solution, without departing from the spirit and scope defined by the claims, can many modifications may be made, variation or equivalent, but all
It will fall under the scope of the present invention.
Claims (10)
1. a kind of side cover type box body flip equipment, to open a box body, above-mentioned box body includes a side opening and a selectivity
The side cover of side openings is opened and closed, and side cover two sides are respectively provided with the portion of dialling of protrusion box body adjacent side, and the box body adjacent side
The two sides side of opening is respectively provided with an opposite handle raised line, and the side cover type box body flip equipment be characterized in include:
One base；
One guiding and positioning device, is set on base, which includes a guide-track groove and a positioning region, in confession
A flip position can be moved to using two side grip raised lines in guide-track groove by stating box body, and the positioning region is limited in for box body
The flip position；
One presses limiting device, is set to side cover one end on base different from box body, this presses limiting device with a driving
Element and a push element, wherein driving element can drive push element selectivity by compressing different from aforementioned positioning region side
The box body is fixed on the flip position for box body；
One lid opening device, is set to side cover one end that box body is corresponded on base, which has a driving element and one
Lever lifting element, wherein driving element can drive the lever lifting element to leave between position, a closed position and an open position one
It is mobile, for driving box body side cover to be displaced between closed position and open position.
2. side cover type box body flip equipment according to claim 1, it is characterised in that: two guide rails of the guiding and positioning device
Slot is respectively formed on two relatively parallel side plates of base.
3. side cover type box body flip equipment according to claim 1 or 2, it is characterised in that: the guiding and positioning device is determined
Position portion is formed at the stopper protrusion in two guide-track groove middle sections, and the handle raised line of the box body is formed with and can stick in the limit convex
The ladder end face in portion.
4. side cover type box body flip equipment according to claim 1, it is characterised in that: the guiding and positioning device has one to supply
Whether detection box body is located at the first position sensing element of flip position.
5. side cover type box body flip equipment according to claim 1, it is characterised in that: this presses the driving member of limiting device
Part can drive the push element selectively to push a rear end face of box body handle raised line, and selective property fixed bin body is in flip position
It sets.
6. side cover type box body flip equipment according to claim 1 or 5, it is characterised in that: this presses pushing away for limiting device
The induction pieces on element with a synchronous shift are pressed, and this presses limiting device equipped with a second position sensing element and a third
Position sensible element, wherein second position sensing element can be located at releasing position by the induction pieces detection push element, and
The third place sensing element can be located at by the induction pieces detection push element compresses position.
7. side cover type box body flip equipment according to claim 1, it is characterised in that: the lever lifting element of the lid opening device has
There is a recline protrusion of box body side cover of an alternative to dial the protrusion in portion, for the actuation box body side cover relative side opening from
It is displaced between open position, closed position and open position.
8. side cover type box body flip equipment according to claim 1 or claim 7, it is characterised in that: the driving lever member of the lid opening device
With the induction pieces of a synchronous shift on part, and the lid opening device is arranged with one the 4th position sensible element, the sense of one the 5th position
Survey element and one the 6th position sensible element, wherein the 4th position sensing element can by the induction pieces detection lever lifting element from
Open position, but the 5th position sensing element can be located at the closed position of side cover by the induction pieces detection lever lifting element, until
The open position of side cover can be located at by the induction pieces detection lever lifting element in the 6th position sensing element.
9. a kind of side cover type box body cover lifting method, to open a box body, above-mentioned box body includes a side opening and a selectivity
The side cover of side openings is opened and closed, and side cover two sides are respectively provided with the portion of dialling of protrusion box body adjacent side, and the box body adjacent side
The two sides side of opening is respectively provided with an opposite handle raised line, and the side cover type box body cover lifting method be characterized in include:
It places in the side cover type box body flip equipment after a box body is resetted in one；
Utilize the mobile above-mentioned box body of a guiding and positioning device to a flip position；
Generation one, which compresses power, makes above-mentioned box body be fixed on flip position；And
A lid opening device is driven to raise the side cover of above-mentioned box body.
10. side cover type box body cover lifting method according to claim 9, which is characterized in that also include:
Above-mentioned lid opening device is driven to discharge the side cover of above-mentioned box body；
The mobile above-mentioned limiting device that presses discharges above-mentioned box body；And
Above-mentioned box body is removed into above-mentioned side cover type box body flip equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810326272.9A CN110379748A (en) | 2018-04-12 | 2018-04-12 | Side cover type box body flip equipment and side cover type box body cover lifting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810326272.9A CN110379748A (en) | 2018-04-12 | 2018-04-12 | Side cover type box body flip equipment and side cover type box body cover lifting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110379748A true CN110379748A (en) | 2019-10-25 |
Family
ID=68243631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810326272.9A Pending CN110379748A (en) | 2018-04-12 | 2018-04-12 | Side cover type box body flip equipment and side cover type box body cover lifting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110379748A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005067622A (en) * | 2003-08-20 | 2005-03-17 | Kyokuhei Glass Kako Kk | Box for transporting glass substrate |
| CN202601591U (en) * | 2012-05-04 | 2012-12-12 | 上海华力微电子有限公司 | Light shield storage box opening device |
| JP2014005078A (en) * | 2012-06-01 | 2014-01-16 | Shin Etsu Polymer Co Ltd | Package body of substrate storage container |
| CN204271058U (en) * | 2014-02-13 | 2015-04-15 | 中勤实业股份有限公司 | Closed wafer transfer box |
| CN204271055U (en) * | 2014-02-13 | 2015-04-15 | 中勤实业股份有限公司 | Closed wafer transfer box |
| CN208422878U (en) * | 2018-04-12 | 2019-01-22 | 特铨股份有限公司 | Side cover type box body flip equipment |
-
2018
- 2018-04-12 CN CN201810326272.9A patent/CN110379748A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005067622A (en) * | 2003-08-20 | 2005-03-17 | Kyokuhei Glass Kako Kk | Box for transporting glass substrate |
| CN202601591U (en) * | 2012-05-04 | 2012-12-12 | 上海华力微电子有限公司 | Light shield storage box opening device |
| JP2014005078A (en) * | 2012-06-01 | 2014-01-16 | Shin Etsu Polymer Co Ltd | Package body of substrate storage container |
| CN204271058U (en) * | 2014-02-13 | 2015-04-15 | 中勤实业股份有限公司 | Closed wafer transfer box |
| CN204271055U (en) * | 2014-02-13 | 2015-04-15 | 中勤实业股份有限公司 | Closed wafer transfer box |
| CN208422878U (en) * | 2018-04-12 | 2019-01-22 | 特铨股份有限公司 | Side cover type box body flip equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101040479B1 (en) | Coating and developing apparatus | |
| JPH0159352B2 (en) | ||
| KR101308770B1 (en) | Two-side exposure device | |
| KR20120030057A (en) | Imprint system, imprinting method, and computer storage medium | |
| JP2011233930A (en) | Substrate processing apparatus | |
| JP2009182222A (en) | Substrate cleaning apparatus, substrate cleaning method, program, and computer storage medium | |
| CN208422878U (en) | Side cover type box body flip equipment | |
| CN110379748A (en) | Side cover type box body flip equipment and side cover type box body cover lifting method | |
| CN112789705A (en) | Multi-module chip manufacturing device | |
| JP4137244B2 (en) | Transfer mechanism in substrate cleaning equipment | |
| JP2535821B2 (en) | Substrate high-speed conversion device and method | |
| CN108121173A (en) | Light shield loading attachment and exposure machine | |
| CN102566305B (en) | Exposure device and exposure method | |
| JP3647330B2 (en) | Semiconductor manufacturing apparatus and device manufacturing method | |
| US5983479A (en) | Apparatus and method of automatically removing a wafer carrier from a container | |
| CN110391162A (en) | Transport mechanism | |
| CN208127167U (en) | Spring snap type box body opens cartridge device | |
| JP2006186296A (en) | Supporting frame, cleaning and drying apparatus, and cutting machine for workpiece | |
| JP2008194904A (en) | Resin sealing apparatus | |
| TWI673565B (en) | Side cover type box cover device and side cover type box cover method | |
| JP2002329765A (en) | Transfer apparatus and method | |
| CN219370994U (en) | Full-automatic photovoltaic semiconductor belt cleaning device | |
| JPH11255332A (en) | Substrate storing case | |
| JPH02119114A (en) | Automatic replacing machine of original edition and vessel for original edition | |
| KR100837875B1 (en) | Apparatus for imprint lithography process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |