JPH02119114A - Automatic replacing machine of original edition and vessel for original edition - Google Patents

Abstract

PURPOSE:To attach and detach a holder without contact with an original edition by vacuum suction, and prevent dust and the like from attaching to the original edition by a method wherein the original edition of a mask or the like is retained by a holder of metal material and controlled in this state, and attaching and detaching in an exposure machine and a replacing machine of original edition are performed together by vacuum suction of the holder. CONSTITUTION:The original edition of a mask 1 or the like is retained by a mask holder 2 of metal material, and the holder 2 is conveyed at the exposure position of an exposure machine and the exchange position of a replacing machine. Suction pads 5 for vacuum suction of the holder 2 are arranged at four positions of the lower part of the tip of a mask hand 4 capable of vertical movement; the hand 4 is horizontally opened and closed by a motor 6 and moved vertically by a motor 7. A plurality of masks 1 are accommodated in a mask carrier 8, which is retained by a carrier stand 9, and moved vertically. An arbitrary mask 1 is set at the position of a loader 3, by vertically moving the carrier 8 retained by the carrier stand 9, with a motor 10.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an automatic original exchanger that automatically exchanges originals such as photomasks used in semiconductor exposure equipment, and an original container that can store a plurality of originals. It is something.

[Prior Art] In recent years, the integration of semiconductors has tended to progress significantly, and with this, patterns drawn on masks have also tended to become finer. Therefore, the dust that adheres to masks and squares,
This has become a problem as it causes a significant decrease in yield. Under these circumstances, it is strongly desired that semiconductor manufacturing equipment, particularly exposure equipment, be able to handle fine patterns, be fully automated to improve productivity, and be considerate of dust.

On the other hand, in the exposure process using semiconductor exposure equipment, there are multiple exposure processes in which the pattern drawn on the photomask is accurately transferred to the wafer using a photomask as a master plate, and usually a different photomask is used for each exposure process. Therefore, it is necessary to replace the photomask. In the past, masks were changed by humans after each process, but due to full automation and consideration to waste, there is a need for mask changing machines that can automatically change masks, and several types of mask changing machines have been devised. .

In conventional mask exchange machines, masks are stored in a container that accommodates one mask. The mask exchanger takes out the mask from the mask container by directly contacting the mask itself using means such as vacuum suction, positions the mask, etc., and then sets it in the exposure machine. Further, although a mask exchanger can store a plurality of mask containers, in each part of the device other than the mask exchanger, mask containers are usually managed one by one, and a plurality of mask containers cannot be managed at the same time.

[Problems to be Solved by the Invention] However, the conventional mask exchanger as described above has the following drawbacks.

(1) When replacing the mask, you will come into direct contact with the mask using vacuum suction or other means, so damage to the mask is inevitable.
Moreover, the dust generated during the contact adheres to the mask as it is, reducing the yield in the exposure process.

(2) When positioning the mask with respect to the exposure device, the mask is positioned by directly contacting the periphery of the mask with a reference such as a pin, which may cause damage to the mask.
Furthermore, dust generated during contact adheres to the mask, reducing the yield in the exposure process.

(3) Each mask is stored in a container called a mask cassette. Then, the mask exchange machine takes out the mask from the container and positions it with respect to the exposure machine.
Set the mask on the exposure machine. For this reason, a mechanism for taking out the mask from the container and a mechanism for positioning it are required, which increases the time required to change the mask and increases the cost of the mask exchange machine. Because the mask has a long path to travel until it reaches the surface, there is a high possibility that dirt will adhere to the mask during this time.

(4) As mentioned above, one mask is used for one mask.
The mask is stored in a container called a mask cassette.
The mask exchange machine can store multiple masks in containers. However, in each part of the device other than the mask exchanger, mask containers are managed one by one, so there is a problem that a plurality of mask containers cannot be managed at the same time.

The present invention solves the drawbacks of the above-mentioned conventional examples, and provides an automatic original exchanger and an original container that can manage multiple originals such as masks at the same time, and that can prevent damage to masks and minimize the generation of dust. The purpose is to provide.

[Means and effects for solving the problem] In order to achieve the above object, the automatic original plate exchanger according to the present invention manages the mask mitten original plate while being held in a holder made of a metal member, etc. The original plate is attached to and removed from the exposure machine and the original exchange machine by vacuum suction of the holder. As a result, when the original plate exchanger transports the original plate, part of the holder is vacuum-adsorbed, so that the original plate itself is not directly contacted.

Note that the positioning of the original with respect to the exposure machine is preferably carried out by providing a positioning hole in one member of the holder, and providing a positioning pin that fits into the positioning hole on the exposure machine and the master exchanger. Also, when positioning the original, there is no direct contact with the original itself.

Further, since positioning is easily performed using a hole in a part of the holder and the pins of the exposure machine and the original plate exchanger, a complicated positioning mechanism is not required and the efficiency of exchanging the original plate can be increased.

Further, the original container according to the present invention includes a partition plate for configuring an independent space for storing the original, and an openable and closable lid provided for each independent space for taking in and taking out the original, It is designed to be able to store multiple originals. In addition, by making the container that stores the original plate and the original plate exchanger body independent and removable, it is possible to store multiple originals in a container other than the original plate exchanger, and store multiple originals at the same time. Can be managed.

Note that if the lid of the master container is made of a transparent material and a window made of a transparent material is also provided on the side surface where the lid is not placed, the inside of the container can be viewed visually.

[Example code] Hereinafter, the present invention will be explained in detail using the drawings.

FIG. 1 is a diagram depicting the appearance of a mask exchanger according to an embodiment of the present invention. In the figure, 1 is a mask, 2 is a mask holder that holds the mask 1, and 3 is a mask loader 4 that transports the mask holder 2 to the exposure position in the exposure machine and the mask exchange position in the mask exchange machine, and the left and right sides are independently separated. It is a mask hand that can be opened and closed.

This mask hand 4 can be moved up and down as a unit. Reference numeral 5 denotes a suction pad that vacuum-sucks the mask holder 2, which is attached to four locations below the tip of the mask hand 4 and is connected to a vacuum source (not shown); 6, a motor that opens and closes the mask hand 4 in the horizontal direction; and 7, a motor that opens and closes the mask hand 4. 8 is a mask carrier that stores a plurality of masks; 9 is a carrier stand that holds the mask carrier 8 and moves up and down; 10 is a motor that drives the carrier stand 9. The motor 10 drives the mask carrier 8 held on the carrier stand 9 in the vertical direction, and can position an arbitrary mask at the position of the mask loader 3.

FIG. 2 shows the state of the mask carrier 8 shown in FIG. 1 and the mask 1 housed therein. In the figure, 11 is a handle for carrying the mask carrier 8, 12 is an opening/closing lid made of a transparent member provided for each stage of the space for storing each mask, and 13 is provided on the side surface of the mask carrier 8. A window made of a transparent member, 14 is a torsion coil spring that applies a force in the direction of self-closing the opening/closing M12, and 15 is a partition plate that divides the mask carrier 8 into upper and lower stages in which the masks 1 are stored.

Fig. 3 shows the state when the mask carrier 8 is attached to the main body of the mask exchanger and the suction pad 5 vacuum-adsorbs the mask holder 2. In the figure, 16 is a motor that automatically opens and closes the opening/closing M12, and 17 is a motor. This roller is attached to the opening/closing lid 16 and hooks the end face of the opening/closing lid 12 by rotation of the motor 16 to open/close the opening/closing lid 12.

Figure 4 shows that the mask holder 2 is connected to the mask loader of the exposure machine.
3 shows a mechanism for positioning the mask 1 and a structure for fixing the mask 1 to the mask holder 2. In the figure, 18 is a positioning hole provided in the mask holder 2;
19 is a positioning pin provided on the mask loader 3;
Reference numeral 20 denotes a Y-direction reference roller 21 fixed to the mask holder 2. The Y-direction reference roller 21 is arranged on the opposite side of the Y-direction reference roller 20 and abuts the end face of the mask 1 against the Y-direction reference roller 20. 22 is a Y-direction push roller 21. a Y-direction pressing spring that generates a force pressing the mask L against the end surface of the mask L;
23 is an X-direction reference roller fixed to the mask holder 2; 24 is an X-direction reference roller arranged on the opposite side of the X-direction reference roller 23, and abuts the end surface of the mask 1 against the
Directional pressing roller 25 is an X-direction pressing spring that generates a force that presses the X-direction pressing roller 24 against the end surface of the mask 1; 26 is provided around the lower side of the central opening of the mask holder 2 and is in contact with the lower surface of the mask 1; This is a mask holder that holds the mask 1.

Next, FIG. 5 illustrates the mask exchange procedure of the mask exchange machine of this embodiment. Figure 5 (a) shown here
(q) schematically shows the state of cross section A in FIG. 3.

The procedure shown in FIGS. 5(a) to (i) is as follows:
The figure shows how the mask holder 2 is recovered into the mask carrier 8. 5(j) to (q) show how the mask holder 2 is mounted on the mask loader 3 from the mask carrier 8.

Next, embodiments of the present invention will be described in detail with reference to FIGS. 1 to 5.

First, a method for fixing the mask 1 to the mask holder 2 and a method for positioning the mask holder 2 on the mask loader 3 will be described with reference to FIG. For details of the mask holder 2, please refer to the patent application 1986-tggg.
It is disclosed in No. Ib.

In FIG. 4, the mask holder 2 has a rectangular shape and has a rectangular opening in the center corresponding to the exposure area of the mask 1. In FIG. The mask 1 is attached to the rectangular opening of the mask holder 2, and is held by the lower surface of the mask 1 coming into contact with a mask receiver 26 provided around the lower side of the opening.

Further, the Y-direction pressing roller 21 is driven in the direction of the arrow by the action of the Y-direction pressing spring 22, and the mask 1 is positioned in the Y-direction by pressing the end surface of the mask 1 against the Y-direction reference roller 20. Similarly, due to the action of the X direction pressing spring 25,
The direction pressing roller 24 is driven in the direction of the arrow, and the mask 1
The mask 1 is positioned in the X direction by pressing the end face of the mask 1 against the X direction reference roller 23. That is, by pressing the end face of the mask 1 against three points: two Y-direction reference rollers 20 and one X-direction reference roller 23, the mask 1
is positioned relative to the mask holder 2.

As described above, in the mask exchanger of this embodiment, the mask 1 is exchanged with the mask 1 fixed to the mask holder 2. In addition, when replacing the mask 1, the mask hand 4 and mask loader 3 replace the mask 1 as shown in FIG.
The exchange is performed by contacting the mask holder 2 without directly contacting the mask holder 2 .

Further, as shown by the dotted line in FIG. 4, the positioning hole 18 provided in the mask holder 2 is connected to the mask loader 3.
The mask holder 2 is fitted with a positioning pin 19 provided on the mask loader 3, thereby positioning the mask holder 2 on the mask loader 3. The positioning hole 18 is 20 mm with respect to the positioning pin 19.
The mask holder 2 is controlled to have a large dimension of about .mu.m, and the mask holder 2 is positioned with an accuracy within several tens of .mu.m relative to the mask loader 3.

Next, the mask carrier 8 will be explained with reference to FIG.

The mask carrier 8 has a box-shaped structure and can accommodate a plurality of masks while being held in the mask holder 2. Further, the stages in which each mask holder 2 is stored are separated by partition plates 15 in the vertical direction of the mask carrier 8, and opening/closing lids 12 that can be opened and closed in the horizontal direction are disposed in opposing directions. When the opening/closing M12 is closed, it is a space independent from other stages and the outside of the mask carrier 8. Furthermore, two windows 13 made of a transparent material are arranged in opposing directions on each stage, and the opening/closing i12 is also made of a transparent material.

Therefore, the internal mask 1 can be visually confirmed from all sides of the mask carrier 8. Further, a handle 11 is provided on the upper part of the mask carrier 8 for convenience when carrying the entire mask carrier 8.

The mask carrier 8 has a structure independent of the mask exchanger, and the entire mask carrier 8 can be carried by the handle 11 and replaced with the mask carrier 8 placed on the carrier stand 9 shown in FIG. 1.

Next, referring to FIG. 5, the procedure for replacing the mask will be explained in detail.

First, the operation of the mask exchanger to collect the mask holder 2 from the mask loader 3 to the mask carrier 8 will be explained.

First, in FIG. 5(a), the mask holder 2 is moved by the motor 10 of FIG. Move the mask carrier 8 up and down. After that, when the mask carrier 8 comes to a predetermined height position, the motor 1
Stop 0.

Next, in FIG. 5(b), the motor 16 is rotated so that the roller 17 is caught on the end of the opening/closing M12, and the opening/closing i1 on both sides is rotated.
Open 2. Thereafter, the mask loader 3 is driven in the horizontal direction by a motor (not shown) and enters the inside of the mask carrier 8. At this time, the mask loader 3 is in a state in which the mask holder 2 is placed thereon.

Next, in FIG. 5(C), the mask hand 4 is driven horizontally by the motor 6 shown in FIG. 1, closes, and enters the inside of the mask carrier 8.

Thereafter, as shown in FIG. 5(d), the mask hand 4 is driven by the motor 7 shown in FIG. 1 and moves downward, and the suction pad 5 vacuum-adsorbs the mask holder 2.

Furthermore, as shown in FIG. 5(e), the mask hand 4 is driven by the motor 7, moves upward while holding the mask holder 2 under vacuum suction, and removes the mask holder 2 from the mask loader 3.

Further, in FIG. 5(f), the mask loader 3 is driven in the horizontal direction by a motor (not shown) and is moved out of the mask carrier 8.

Next, in FIG. 5(g), the mask hand 4 is driven by the motor 7 and moves downward to collect the mask holder 2 at a predetermined position on the mask carrier 8.

Next, in FIG. 5(h), after the suction pad 5 releases the suction, the mask hand 4 is driven by the motor 7 shown in FIG. 1 and moves upward.

Thereafter, as shown in FIG. 5(i), the mask hand 4 is driven by the motor 6 to open and exit the mask carrier 8. The motor 16 in FIG. 3 is shown in FIG. 5(b).
When the roller 17 is rotated in the opposite direction to that in step 1, the roller 17 opens and closes i1.
2, the lid 12 can be opened and closed by the action of the torsion coil spring 14.
closes.

With this, the operation of collecting the mask holder 2 from the mask loader 3 to the mask carrier 8 is completed.

Next, the operation of the mask exchanger to attach the mask holder 2 to the mask loader 3 from the mask carrier 8 will be explained.

First, as shown in FIG. 5(j), in order to position the stage of the mask carrier 8 containing the mask holder 2 to be attached to the mask loader 3 at the height of the mask loader 3, The mask carrier 8 is moved up and down by driving the motor 10 of the mask carrier 8. After that, the mask carrier 8 is placed at a predetermined height position.
When , the motor 10 is stopped.

Next, the motor 16 shown in FIG. 3 is rotated to hook the roller 17 onto the end of the opening/closing i12 to open the opening/closing M12 as shown in FIG. 5(k). Thereafter, the mask hand 4 is closed by the drive of the motor 6 and enters the inside of the mask carrier 8.

Next, as shown in Figure 5 (j2), the mask hand 4
is driven by the motor 7 shown in FIG.

After that, as shown in FIG. 5 (+n), the mask hand 4
is driven by the motor 7 and moves upward with the mask holder 2 vacuum-adsorbed.

Furthermore, as shown in FIG. 5(n), the mask loader 3 is driven by a motor (not shown) and enters the inside of the mask carrier 8.

Next, as shown in FIG. 5(0), the mask hand 4 is driven by the motor 7 to move downward, and the mask holder 2
is set in the mask loader 3. At this time, as shown in FIG. 4, the positioning pin 19 is fitted into the positioning hole 18, and the mask holder 2 is positioned relative to the mask loader 3.

Further, as shown in FIG. 5(p), after the suction pad 5 releases the suction, the mask hand 4 is driven by the motor 7 shown in FIG. 1 and moves upward.

Finally, as shown in FIG. 5(q), the mask hand 4 is driven by the motor 6 to open and exit the mask carrier 8. At the same time, the mask loader 3 is driven by a motor (not shown), moves out of the mask carrier 8, and then transports the mask holder 2 into the exposure machine. Further, when the motor 16 shown in FIG. 3 rotates, the roller 17 is interlocked, and the opening/closing lid 12 is closed by the action of the torsion coil spring 14.

This completes the operation of the mask exchanger to attach the mask holder 2 to the mask loader 3 from the mask carrier 8.

In the above embodiment, the mask carrier 8 is moved up and down, but the mask carrier 8 is fixed and the mask loader 3
The mask hand 4 and the lid opening/closing mechanism may be moved up and down, and the mask hand 4 may clamp the mask holder 2 mechanically instead of by vacuum suction.

Furthermore, instead of the opening/closing lid 12 for each stage in which each mask is stored in the mask carrier 8, a cover that covers the entire mask carrier 8 may be provided. In this case, the cover may be removed when the mask carrier 8 is attached to the mask exchanger, and the cover may be attached when the mask carrier 8 is stored outside the mask exchanger.

[Effects of the Invention] As explained above, the present invention provides the following effects.

(1) According to the automatic original plate exchanger according to the present invention, the original plate such as a mask is fixed to a metal member, for example, called a holder, and the handling of the original plate exchanger is performed by vacuum suctioning the holder without directly contacting the original plate itself. Since this is carried out in a similar manner, damage to the original can be eliminated and the amount of dust adhering to the original can be reduced.

(2) If the original is positioned with respect to the exposure machine or the original exchanger using the positioning holes in the holder holding the original and the positioning pins provided on the exposure machine and the original exchanger, the original exchanger will be able to move the original to the original. The original plate can be positioned without direct contact. Therefore, there is an effect that damage to the original can be eliminated and dust adhering to the original can be reduced.

Furthermore, a mechanism for positioning the original with respect to the exposure machine and the original exchanger can be omitted, and the time required for positioning can be saved.

(3) In the original plate exchanger according to the present invention, most of the mask exchange operations are performed within the mask carrier that stores the mask;
In addition, the moving path of the mask required for mask replacement is extremely short. Therefore, there is an effect that the possibility of dust adhering to the mask during this movement can be reduced.

(4) The original container according to the present invention, which can store a plurality of originals, is independent of the mask exchanger and has a removable structure. It also has the effect of allowing you to store multiple sheets at the same time.

(5) If the original container is provided with an opening/closing lid made of a transparent material and a window on the side, it is possible to visually check the original inside from all sides without removing the original from the original container.

[Brief explanation of the drawing]

FIG. 1 is an external view of a mask exchanger according to an embodiment of the present invention. FIG. 2 is an external view showing a mask holder housed in a mask carrier. FIG. FIG. 4 is an external view showing a mechanism in which the mask is positioned and held on the mask holder, and a mechanism in which the mask holder is positioned in the mask loader; FIG. 5 is a sectional view showing the procedure of mask exchange operation. : Mask, : Mask holder: Mask loader; Mask hand, : Suction pad, 7.10, 16: Motor, Mask carrier, Carrier stand, : Handle, : Opening/closing lid, : Window, ; Torsion coil spring, : Partition plate, Two rollers: Positioning hole, : Positioning pin, 6°8; 9: 20: Y-direction reference roller 21: Y-direction pressing roller 22: Y-direction pressing spring, 23: X-direction reference roller 24: x-direction pressing roller 25 : x direction pressing spring, 26: mask holder. patent

Claims (5)

[Claims] (1) An automatic original exchanger that automatically exchanges originals installed in an exposure device, in which the original is held by a holder, and the original is replaced by vacuum suction on the holder without directly touching the original itself. An automatic original plate exchange machine featuring: (2) The automatic plate exchanger according to claim 1, wherein the holder is provided with a positioning hole, and the exposure device and the automatic plate exchanger are provided with positioning pins that fit into the positioning holes. (3) A container for storing a plurality of originals installed in an exposure device, including a partition plate provided in the container to configure an independent space for storing each original, and a partition plate provided for each independent space. An original plate container characterized by comprising an openable and closable lid for taking in and out the original plate. (4) The original container according to claim 3, wherein the original container has a structure independent of an automatic original exchanger and is detachable from the automatic original exchanger. (5) A claim in which the openable and closable lid provided for each independent space for storing each master plate is made of a transparent member, and a window made of a transparent material is also provided on the side where the lid is not placed. The original container according to item 3 or 4.