JPH10261686A - Substrate treating apparatus and substrate carrying-in/ out device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate treating apparatus which does not need a stage for exchange work of a substrate storage container and can suppress the increase in the installation space thereby. SOLUTION: A cassette support 10 for temporarily placing a cassette 101 is provided at a flank 6a of a cassette stage 6 in the board carrying-in/out region of a substrate treating apparatus. The cassette support 10 is accommodated into the flank of a cassette stage 6, and projects outwards at from the flank 6a of the cassette 6 at exchange work time of the cassette. The cassette support 10 is opened and closed by a drive means or manually, or it is pulled out from the inside of the cassette stage 6. On the cassette stage 10, a cassette 101 before treatment or a treated cassette 101 s temporarily placed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a substrate processing apparatus for receiving a substrate storage container storing a plurality of substrates and performing predetermined processing on each substrate, and a substrate loading / unloading apparatus used in the substrate processing apparatus.

[0002]

2. Description of the Related Art A substrate processing apparatus is used to perform various processes on substrates such as a semiconductor wafer, a glass substrate for a liquid crystal display, a glass substrate for a photomask, and a glass substrate for an optical disk. For example, in a semiconductor device manufacturing process, a substrate processing apparatus in which each of a series of processes is unitized and a plurality of processing units are integrated is used in order to increase production efficiency.

FIG. 6 is a perspective view showing an example of a conventional substrate processing apparatus. The substrate processing apparatus of FIG.
It has a transport area C and a substrate loading / unloading area D.

In the processing area A, a rotary coating unit (spin coater) 2a for applying a processing liquid to a substrate and a rotary developing unit (spin developer) 2b for performing a developing process on the substrate are arranged in parallel. In the processing area B, a heating unit (hot plate) for performing heat treatment on the substrate
A plurality of cooling units (cooling plates) CP for performing a cooling process on the HP and the substrate are arranged. In the transfer area C, a transfer unit 5 that transfers the substrate is provided.

A substrate carry-in / out area D is provided at one end of the processing areas A and B and the transfer area C. The substrate loading / unloading area D includes a cassette mounting unit 6 and a transfer robot 7. The cassette mounting section 6 is arranged at one end of the substrate processing apparatus, and mounts a plurality of cassettes 101 accommodating a plurality of substrates 100 at predetermined positions. The transfer robot 7 disposed between the cassette mounting section 6 and the processing areas A and B and the transfer area C moves in the direction of the arrow U in the figure,
The substrate 100 is taken out of the cassette 101 and transferred to the transport unit 5, and the substrate 100 on which a series of processes has been performed is received from the transport unit 5 and returned to the cassette 101.

The transfer unit 5 moves the substrate 1 in the transfer area C.
00 in the direction of arrow S, and carry-in and carry-out of the substrate 100 to and from each of the processing units described above.
The transfer of the substrate 100 to and from the transfer robot 7 is performed.

As described above, the supply and discharge of substrates to and from the substrate processing apparatus are performed on a cassette basis. The transfer of the cassette 101 is performed by an operator or an automatic transfer robot. When transported by an operator, the operator transports one or two cassettes 101 in which a plurality of substrates 100 before processing are stored by hand. When replacing the cassette 101, an operator manually removes the processed cassette 101 from the cassette mounting portion 6, and mounts the cassette 101 in which the substrate 100 before processing is stored at a predetermined position of the cassette mounting portion 6. When the replacement operation of the cassette 101 is completed, the transfer of the substrates 100 in the cassette 101 is performed by the transfer robot 7 and the transfer unit 5.

In the above-described conventional substrate processing apparatus, when the operator replaces the cassette 101, it is not preferable from the viewpoint of safety to handle one cassette 101 with one hand. Moreover, in recent years, the diameter of the substrate 100 has increased, and the cassette 101 has become heavy, making it difficult to handle with one hand. On the other hand, a new cassette 1
01 has no area to temporarily place it.

Therefore, at the time of actual replacement of the cassette 101, the mounting table 30 separately manufactured from the substrate processing apparatus is disposed adjacent to the cassette mounting section 6, and the cassette 101 is temporarily mounted on the mounting table 30. After that, with both hands cassette 101
Is exchanged between the cassette mounting portion 6 and the mounting table 30.

[0010]

However, in recent years, as described above, the diameter of a substrate has been increasing in order to improve productivity, and accordingly, the size of each processing unit has also increased. As a result, the size of a substrate processing apparatus in which a plurality of processing units are integrated increases, and its footprint (installation area) increases. Therefore, a substrate processing apparatus that can effectively use the space in a clean room is desired.

On the other hand, in the conventional substrate processing apparatus, the mounting table 30 is required separately from the substrate processing apparatus main body, so that there is a problem that a footprint required for installing the substrate processing apparatus increases.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate processing apparatus which does not require a mounting table for exchanging a substrate storage container, thereby suppressing an increase in footprint, and a substrate loading / unloading apparatus used therein. It is to be.

[0013]

Means for Solving the Problems and Effects of the Invention A substrate processing apparatus according to a first aspect of the present invention contains a processing unit for performing a predetermined processing on a substrate and a substrate transferred between the processing units. In a substrate processing apparatus including a substrate loading / unloading unit having a mounting surface for supporting a substrate storage container, a position where a support member temporarily supporting a substrate storage container projects outward from the substrate loading / unloading unit and a substrate It is provided so as to be movable with respect to a position stored in the carry-in / carry-out section.

According to a second aspect of the present invention, in the configuration of the first substrate processing apparatus, the support member has a support surface on which the substrate storage container is supported, and the support surface is located outside the substrate loading / unloading section. It is provided so as to be openable and closable between a position protruding horizontally toward a side and a position along a side surface of the substrate carrying-in / out portion.

According to a third aspect of the present invention, in the substrate processing apparatus according to the first aspect of the present invention, the support member may include:
It has a support surface on which the substrate storage container is supported, and the support surface is provided movably between a position horizontally protruding outward from the substrate loading / unloading portion and a position stored inside the substrate loading / unloading portion. It is a thing.

According to a fourth aspect of the present invention, there is provided a substrate processing apparatus comprising:
In the configuration of the substrate processing apparatus according to any one of the third aspects of the invention, the apparatus further includes a moving unit configured to move the support member to a position protruding outward from the substrate loading / unloading unit and to a position stored in the substrate loading / unloading unit. Things.

According to a fifth aspect of the present invention, there is provided a substrate processing apparatus comprising:
In the configuration of the substrate processing apparatus according to the fourth aspect of the present invention, the support surface of the support member that protrudes outward from the substrate loading / unloading unit is disposed at a position lower than the mounting surface of the substrate loading / unloading unit. Things.

According to a sixth aspect of the present invention, there is provided a substrate processing apparatus comprising:
In the configuration of the substrate processing apparatus according to any one of the fifth aspects, the apparatus further includes a transfer unit that holds and moves the substrate storage container between the support surface of the support member and the mounting surface of the substrate loading / unloading unit. It is.

A substrate loading / unloading device according to a seventh aspect of the present invention is a substrate loading / unloading device having a support portion for supporting a substrate storage container storing a substrate to be transferred to and from a processing section for performing predetermined processing on the substrate. In the apparatus, a support member capable of supporting the substrate storage container is provided movably between a position protruding outward from the support portion and a position stored in the support portion.

In the substrate processing apparatus according to the first to sixth inventions and the substrate carry-in / out apparatus according to the seventh invention, the substrate storage container is temporarily moved by projecting the support member from the substrate carry-in / out portion or the support portion. Can be placed on the support member. Therefore, when the operator exchanges a plurality of substrate storage containers, the substrate storage container can be placed on the support member. For this reason, the operator can perform the replacement operation using one hand with one substrate storage container, and can safely perform the replacement operation even with a heavy substrate storage container. When the operation of the substrate storage container is completed, the support member can be stored in the substrate loading / unloading section or the support section. As a result, except when replacing the substrate storage container,
Since there is no portion protruding from the side surface of the substrate loading / unloading portion or the support portion, it does not hinder the passage of an operator and can reduce the occupied area of the substrate processing apparatus.

In particular, in the substrate processing apparatus according to the second invention, the support surface of the support member is formed so as to be rotatable between a horizontal position and a vertical position. Therefore, the substrate storage container can be temporarily supported with the holding member opened horizontally, and can be stored without protruding from the side surface of the substrate loading / unloading section by rotating the supporting member at the end of the work. .

In particular, in the substrate processing apparatus according to the third invention, the support member is formed so as to be drawn out from the substrate carry-in / out portion and to be housed therein. This makes it possible to temporarily support the substrate storage container during the replacement operation, and to reduce the plane occupied area of the substrate processing apparatus.

In particular, in the substrate processing apparatus according to the fourth aspect of the present invention, the supporting member can be automatically taken out or stored by providing the moving means. This allows
The burden of taking out and storing the support member is eliminated.

In particular, in the substrate processing apparatus according to the fifth aspect, the support surface of the support member is formed lower than the mounting surface of the substrate loading / unloading section. Usually, the mounting surface of the substrate loading / unloading section is often at a height that requires a large amount of labor when an operator lifts the substrate storage container. For this reason, it is difficult to lift the substrate storage container held by hand to the mounting surface of the substrate loading / unloading section at a time. Therefore, by providing the support member at a position lower than the mounting surface of the substrate loading / unloading section,
The substrate storage container can be temporarily placed, and the operator can adjust the posture and lift the substrate storage container to the mounting surface. This facilitates the replacement work of the substrate storage container by the operator.

In particular, in the substrate processing apparatus according to the sixth aspect of the present invention, there is provided a transfer means for moving the substrate storage container between the support surface of the support member and the mounting surface of the substrate loading / unloading section. Further, the operator can easily replace the substrate storage container.

[0026]

FIG. 1 is a perspective view of a substrate processing apparatus according to an embodiment of the present invention. The substrate processing apparatus according to the present invention is provided with a cassette support mechanism that can be used temporarily when replacing a cassette (substrate storage container) storing a plurality of substrates, and FIG. 1 shows an example of a substrate processing apparatus to which a support mechanism is applied.

In FIG. 1, the substrate processing apparatus has processing areas A and B, a transport area C, and a loading / unloading area D. The processing areas A and B are arranged on both sides of the transport area C, and the loading / unloading area D is located on one end side of the processing areas A and B and the transport area C.

The processing area A includes a first hierarchical level A1, a second hierarchical level A2, a third hierarchical level A3, and a fourth hierarchical level A4 arranged in order from bottom to top. Similarly, the processing area B includes a first layer, a second layer, and a third layer arranged in order from bottom to top.
And a fourth hierarchy.

On the first level A1 of the processing area A, a chemical system unit 1 for storing various processing liquids (chemical liquids), waste liquids, pumps and exhaust systems is arranged. In the second layer A2,
A plurality of rotary processing units, for example, a rotary coating unit 2a are arranged.

In the third layer A3, ULPA (Ultr
a Low Penetration Air) A plurality of air conditioning units 3 including a filter such as a filter and a chemical adsorption filter and a fan are arranged. The fourth level A4 includes a cooling unit CP for performing a cooling process on the substrate.
Also, a plurality of heat treatment units such as a heating unit HP for performing a heat treatment on the substrate are arranged.

In the first area of the processing area B, chemical units are arranged, and in the second layer, a rotation processing unit, for example, a rotary developing unit is arranged. A plurality of air conditioning units are arranged on the third level, and a plurality of heat treatment units are arranged on the fourth level.

In the transfer area C, a transfer unit for transferring the substrate 100 is provided so as to be horizontally movable and vertically movable along the processing areas A and B.

The carry-in / carry-out area D includes a first level D1, a second level D2, and a third level D arranged in order from bottom to top.
3 inclusive. In the first level D1 of the carry-in / carry-out area D, there are disposed a cassette mounting portion 6 for holding a plurality of cassettes 101 and a transfer robot (not shown) for transferring the substrate 100 between the cassette 101 and the transport unit. ing.

An air conditioning unit 8 including a filter and a fan is arranged on the second level D2, and an electric control unit 9 is arranged on the third level D3.

The cassette mounting portion 6 has a mounting surface 6e on which a plurality of, in the illustrated example, four cassettes 101 are mounted. At the time of replacing the cassette 101, the operator moves the arrow X
Approaching the cassette mounting portion 6 from the
The processed cassette 101 is taken out, and the cassette 101 containing the unprocessed substrates is placed at a predetermined position on the placement surface 6e.

On the side surface 6a of the cassette 6, a cassette support mechanism including a cassette support table 10 on which an operator temporarily places the cassette 101 is provided. FIG.
Schematically shows a cassette support mechanism, and a specific configuration will be described below.

FIG. 2 is a perspective view showing a first example of the cassette support mechanism. In FIG. 2, a cassette support base 10 for supporting a cassette 101 is formed in a flat plate shape, and is attached to a side surface 6a of the cassette mounting portion 6 so as to be openable and closable about a lower end. Also, the side surface 6 of the cassette mounting portion 6
a, a recess 6b is formed in the cassette support 1
0 is stored in the recess 6b, and the cassette support 1
0 is substantially flush with the surface of the side surface 6a of the cassette mounting portion 6.

The links 1 are provided at both ends of the cassette support 10.
1, 11 are attached. One end of the link 11 is rotatably attached to the cassette support 10. The other end is provided with a penetrating portion 6 c of the side surface 6 a
And is connected to the tip of the rod of the drive cylinder 12 directly or via an intermediary member. The expansion / contraction operation of the drive cylinder 12 is controlled by the control unit 1.
4.

A sensor 15 is attached to the side surface 6a of the cassette mounting portion 6. The sensor 15 detects the approach of the worker and outputs a detection signal to the control unit 14. When the operator replaces the cassette and approaches the cassette mounting portion 6 of the substrate processing apparatus while holding the cassette in which the unprocessed substrates are stored, the sensor 15 detects the approach of the operator and sends a detection signal to the control portion 14. Output. The control unit 14 includes a proximity sensor 15
Drives the drive cylinder 12 based on the output signal from the
Extend the rod. As a result, the link 11 rotates the cassette support 10 and stops at a position where the support surface 10 of the cassette support 10a is horizontal. Therefore, the operator temporarily places an unprocessed cassette on the support surface 10a of the cassette support table 10, and further takes out the cassette 101 to be replaced from the cassette mounting section 6 and removes the cassette 101.
On the supporting surface 10a. Then, the cassette 101 containing the unprocessed substrates is lifted by hand, and the cassette 101 is placed at a predetermined position of the cassette placing section 6.

By repeating such an operation, the cassette 101 storing the processed substrates and the cassette 101 storing the unprocessed substrates can be sequentially exchanged.

When the replacement operation is completed and the worker separates from the cassette mounting portion 6, the sensor 15 detects the separation of the worker, and based on the control operation of the control portion 14, the drive cylinder 12
Is retracted, the cassette support 10 rotates, and is accommodated in the recess 6b.

As described above, by using the cassette support base 10 which can be opened and closed at the time of replacing the cassette 101,
The operator can handle the cassettes 101 one by one with both hands, and can work in a safe and comfortable posture. Further, since the cassette support 10 is configured to be housed, the cassette support 101 does not increase the plane occupied area of the substrate processing apparatus. Therefore, the footprint of the substrate processing apparatus can be reduced as compared with the conventional substrate processing apparatus that always requires the table 30 (see FIG. 6) dedicated to replacing the cassette 101 as an auxiliary facility.

Note that, instead of the sensor 15, a switch (foot switch) that can be operated by a worker with a foot may be provided, and the cassette support 10 may be opened and closed by opening and closing the foot switch. Further, the means for opening and closing the cassette support base 10 is not limited to the drive cylinder 12, and other drive means such as a hydraulic / pneumatic cylinder or a motor may be used. Further, the mechanism for opening and closing the cassette support table 10 includes:
Not limited to the link mechanism shown in FIG. 2, another link mechanism or a mechanism using a wire and a pulley may be used. Further, the cassette support 10 may be manually opened and closed.

FIG. 3 is a perspective view showing a second example of the cassette support mechanism. The cassette support mechanism shown in FIG.
The opening / closing direction of the cassette support table 10 is reversed with respect to the cassette support mechanism shown in FIG. That is, the cassette support 10 rotates around the upper end edge of the cassette support 10 in the housed state, and is attached to the side surface 6 a of the substrate mounting portion 6 so as to be openable and closable.

At the time of opening, the rod of the drive cylinder 12 extends, and the link 11 pushes the lower end of the cassette support 10 outward, so that the cassette support 10 rotates about its upper edge and the support surface. Stop at the position where 10a is horizontal.

During storage, the rod of the drive cylinder 12 is retracted, and the cassette support 10 rotates to
Is stored inside.

Although not shown, the cassette support mechanism according to the present embodiment may include the sensor 15 and the control unit 14 similarly to the cassette support mechanism according to the first embodiment, and may be provided with a foot switch. A drive mechanism for the drive cylinder 12 may be provided. Further, instead of the link 11 and the drive cylinder 12, another mechanism for rotating the cassette support 10 and a drive source may be used. Further, the cassette support table 10 may be configured to be opened and closed manually.

FIG. 4 is a perspective view showing a third example of the cassette support mechanism. The cassette supporting mechanism according to the third example includes:
The cassette support 10 is formed so as to be movable in the horizontal direction. The driving mechanism of the cassette support base 10 in the horizontal direction includes
The driving pulley 22 is connected to a motor (not shown), a driven pulley 21, and a belt 20 stretched between the driving pulley 22 and the driven pulley. The cassette support 10 is connected to a part of the belt 20 by a connecting member 23. Then, as the drive pulley 22 rotates and the belt 20 rotates, the cassette support 10 protrudes outward from the position stored inside the cassette mounting portion 6 and the side surface 6 a of the cassette mounting portion 6. Reciprocate between positions.

In the example shown in FIG. 4, two cassette supporting tables 10 are provided. Thus, more cassettes 101 can be temporarily placed on the support surface 10a of the cassette support base 10.

The cassette supporting mechanism according to the third example also automatically moves the cassette supporting table 10 using the sensor 15 and the control unit 14, similarly to the cassette supporting mechanisms according to the first and second examples. May be configured to do
Alternatively, the cassette support 10 may be manually moved. Further, a foot switch or the like may be used instead of the sensor 15.

FIG. 5 is a perspective view showing a fourth example of the cassette support mechanism. The cassette support mechanism according to the fourth example further includes a mechanism for transporting the cassette 101 in addition to the configuration of the cassette support mechanism according to the first to third examples.

The cassette transport mechanism is, for example, a cassette 10
1, a holding frame 30 that supports the holding unit 30, and a moving mechanism unit 32 that moves the supporting frame 31 between above the cassette support table 10 and above the cassette mounting unit 6. It is composed of Note that the same mechanism as in the first to third examples can be applied to the cassette support 10 and the mechanism for moving the cassette support 10 in this example.

Recently, as the diameter of the substrate has been increased, the weight per cassette 101 has increased. Therefore, even if the operator handles the cassette 101 with both hands, it may not be easy. Therefore, the cassette support 1
When moving the cassette 101 placed on the cassette mounting portion 6 to a predetermined position of the cassette mounting portion 6, the moving mechanism portion 32 is driven to move the support frame 31 above the cassette support base 10,
The holding unit 30 is opened and closed to hold the upper end of the cassette 101. Thereafter, the moving mechanism 32 is moved to the cassette mounting section 6 side. At this time, the support frame 31 moves while holding the holding unit 30 horizontally. And the support frame 3
When 1 moves to a position above the cassette mounting portion 6, the holding portion 30 is lowered, and the cassette 101 is mounted at a predetermined position on the cassette mounting portion 6. Further, the holding unit 30 is released from the cassette 101 and is raised to the original position. When the cassette 101 placed on the substrate mounting unit 6 is moved onto the cassette support table 10, the reverse operation is performed.

As described above, the transfer of the cassette 101 between the cassette mounting portion 6 and the cassette support table 10 is performed by using the transport mechanism, so that the heavy cassette 101 can be easily and safely transferred. Can be.

The cassette transport mechanism shown in FIG. 5 is an example, and any other known mechanism that can move while holding the cassette 101 can be used. For example,
A mechanism for holding and raising and lowering the cassette 101;
A mechanism combining a mechanism that moves in the horizontal direction while holding 01 may be used.

It is preferable that the cassette transport mechanism has a structure capable of waiting above the cassette mounting portion 6 after the operation is completed.

In the cassette support mechanisms according to the first to fourth examples, the support member 10 is disposed at a position lower than the mounting surface 6e of the cassette mounting portion 6. For this reason, the operation | work which an operator puts the cassette 101 temporarily and lifts becomes easy.

Further, the cassette holding mechanism shown in the above embodiment can be applied to various substrate processing apparatuses irrespective of the type or arrangement of each unit disposed in the processing area of the substrate processing apparatus.

[Brief description of the drawings]

FIG. 1 is a perspective view of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a first example of a cassette support mechanism.

FIG. 3 is a perspective view showing a second example of the cassette support mechanism.

FIG. 4 is a perspective view showing a third example of the cassette support mechanism.

FIG. 5 is a perspective view showing a fourth example of the cassette support mechanism.

FIG. 6 is a perspective view showing an example of a conventional substrate processing apparatus.

[Explanation of symbols]

 Reference Signs List 6 substrate mounting portion 6a side surface 6b concave portion 10 cassette support base 10a support surface 11 link 12 drive cylinder

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masao Tsuji 322 Hahazushi Furukawa-cho, Fushimi-ku, Kyoto Dainippon Screen Manufacturing Co., Ltd. Dainichi Screen Manufacturing Co., Ltd. (72) Inside the Rakusai Office (72) Inventor Yoichi Nishimura Kyoto City 322 Hashinashi Furukawacho Dainichi Screen Manufacturing Co., Ltd.Rakusai Office

Claims (7)

[Claims] A processing unit configured to perform a predetermined process on a substrate; and a substrate loading / unloading unit having a mounting surface for supporting a substrate storage container storing a substrate transferred to and from the processing unit. In the substrate processing apparatus, a support member for temporarily supporting the substrate storage container is provided so as to be movable between a position protruding outward from the substrate loading / unloading portion and a position stored in the substrate loading / unloading portion. A substrate processing apparatus characterized by being performed. 2. The support member has a support surface for supporting the substrate storage container, and extends along a position where the support surface protrudes horizontally outward from the loading / unloading portion and a side surface of the substrate loading / unloading portion. The substrate processing apparatus according to claim 1, wherein the substrate processing apparatus is provided so as to be openable and closable with a position. 3. The support member has a support surface for supporting the substrate storage container, and is provided at a position where the support surface horizontally projects outward from the substrate carry-in / out portion and inside the substrate carry-in / out portion. 2. The substrate processing apparatus according to claim 1, wherein the substrate processing apparatus is provided so as to be able to advance and retreat between the stored position. 4. The apparatus according to claim 1, further comprising a moving unit configured to move the support member to a position protruding outward from the substrate loading / unloading unit and to a position stored in the substrate loading / unloading unit. The substrate processing apparatus according to any one of claims 1 to 3. 5. The device according to claim 1, wherein the support surface of the support member protruding outward from the substrate loading / unloading portion is disposed at a position lower than the mounting surface of the substrate loading / unloading portion. Item 5. The substrate processing apparatus according to any one of Items 1 to 4. 6. A transport unit for holding and moving the substrate storage container between the support surface of the support member and the mounting surface of the substrate loading / unloading unit. The substrate processing apparatus according to any one of claims 1 to 5. 7. A substrate loading / unloading device having a support portion for supporting a substrate storage container storing a substrate to be transferred to and from a processing section for performing predetermined processing on the substrate, wherein the substrate storage container can be supported. And a support member movably provided between a position protruding outward from the support portion and a position housed in the support portion.