JP2006186296A - Supporting frame, cleaning and drying apparatus, and cutting machine for workpiece - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning and drying apparatus for a workpiece cleaning and drying uniformly all over the workpiece. <P>SOLUTION: The apparatus comprises: a workpiece transporting mechanism which transports a cut workpiece supporting frame 2 with changing the position of the frame from horizontal position to vertical position; and a cleaning and drying mechanism which washes and dries the workpiece W as fixing the frame 2 in the vertical position and moving a cleaning nozzle 29 and a drying nozzle 30 after closing a cleaning and drying chamber 16, where the workpiece supporting frame 2 is placed by the transporting mechanism. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a work support frame for adhering and supporting a work by attaching an adhesive tape to the frame, and a work washing and drying device for performing washing and drying of a work cut in the XY direction while being adhering and supported by the adhesive tape. And a cutting device.

  In recent years, semiconductor devices have been miniaturized, and semiconductor chips are mounted in a matrix on one surface of a substrate, as represented by CSP (Chip / Size / Package or Chip / Scale / Package) type semiconductor devices. Workpieces that can be picked up are used. This workpiece is resin-sealed on the chip mounting surface side in a lump, and is cut into individual pieces for each semiconductor chip by a cutting apparatus after resin sealing. In the cut workpiece, chips, dust and the like adhering to the workpiece are removed by washing and dried, and the cut semiconductor devices are individually collected.

  In FIG. 10, the workpiece W is adhesively supported by the adhesive tape 102 that is adhered to the ring-shaped support frame 101 so that the adhesive tape (for example, UV tape) 102 closes the ring hole 103. The support frame body 101 that supports and supports the workpiece W is transferred to the cutting unit and cut in the XY directions. After washing and drying, the work is collected after the work is easily peeled off by irradiating the adhesive tape with UV light. As the support frame 101, for example, a ring frame having a maximum outer diameter of 276 mm corresponding to a semiconductor wafer having a diameter of 8 inches is used.

In the configuration of the cutting device, a support frame body that adheres and supports a work housed in a cassette is taken out by a chuck hand or the like, and is sucked and held on a chuck table that can move in the Y direction. The chuck table moves to the cutting portion while the support frame is chucked, and the workpiece is cut in the XY direction by the cutting blade. The chuck table on which the cut support frame is placed moves to the cleaning / drying unit, sprays the cleaning liquid while rotating the table, and then cleans and dries it. Then, the chuck table is taken out by a chuck hand and carried into the UV irradiation unit. (See Patent Document 1).
In addition, a device for cleaning and drying the workpiece after cutting has been proposed in which the workpiece is rotated while adsorbed to the chuck table, and a cleaning liquid is sprayed from a nozzle provided so as to be swingable above the workpiece to be cleaned and dried. (See Patent Document 2).
Japanese Patent Application Laid-Open No. 2003-203887 JP 11-214333 A

  When a large number of semiconductor devices are obtained by adhering and supporting a rectangular workpiece (resin substrate) on the ring-shaped support frame 101 in FIG. 10, for example, in the case of 8 inch diameter (maximum outer diameter 276 mm), the width is 75 mm at the maximum. There is a problem that only a workpiece size of 210 mm in length can be handled. Moreover, since the adhesive tape is relatively expensive and is attached to the support frame 101 so as to block the entire ring hole 103, there is a large wasteful area that does not contribute to the adhesive support of the workpiece W, and the manufacturing cost increases. There is also.

Further, in the cleaning / drying unit, the cleaning liquid is ejected while rotating the workpiece at a high speed. However, since the linear velocity is different between the rotation center side and the peripheral portion of the workpiece, there is a problem that uneven cleaning is likely to occur. .
Further, since the cutting device and the cleaning / drying unit are laid out in a planar manner, the cutting device has a large installation area and the device tends to be large. In addition, since the workpiece conveyance path becomes longer, the cycle time between the processes becomes longer and the productivity is lowered.

  The present invention solves the above-mentioned problems of the prior art, and a first object is to support a large rectangular work while maintaining the outer size of the support frame as the conventional size, thereby eliminating the waste of adhesive tape. The second object is to provide a workpiece cleaning / drying apparatus that can perform uniform cleaning and drying over the entire surface of the workpiece, and the third object is to reduce the installation area required for cleaning and drying the workpiece. It is an object of the present invention to provide a cutting device that facilitates downsizing and can efficiently perform a cutting process and a washing and drying process.

In order to achieve the above object, the present invention comprises the following arrangement.
That is, in a work support frame that adheres and supports a work by attaching an adhesive tape to a ring-shaped frame, a rectangular hole is formed along the diagonal direction of the rectangular frame, and the rectangular hole The adhesive tape is adhered along the surrounding partition frame.

Also, in a workpiece cleaning and drying device that performs cleaning and drying of workpieces that are to be cut while being adhesively supported by an adhesive tape that is adhered to the workpiece support frame, the workpiece support frame after cutting is changed from a horizontal posture to a vertical posture for cleaning and drying. The workpiece transfer mechanism for loading and unloading into the chamber and the cleaning / drying chamber in which the workpiece support frame is stored by the workpiece transfer mechanism are closed, and the workpiece is moved while the cleaning / drying nozzle is moved while the workpiece support frame is fixed in a vertical posture. And a cleaning / drying mechanism for performing the cleaning / drying.
The workpiece transfer mechanism includes a first guide rail capable of changing a posture to a vertical posture while positioning the workpiece support frame after the workpiece is cut in a horizontal posture, and a vertical posture of the workpiece support frame from the first guide rail in the vertical posture. A second guide rail that guides and holds the cleaning and drying chamber as it is, and a guide head that moves from the first guide rail in the vertical posture to the second guide rail while receiving the lower end of the work support frame. It is characterized by.
The first guide rail includes a first position where the work support frame can be placed in a horizontal position, a second position where the work support frame is sandwiched and positioned from both sides, and the work support frame. It is characterized by opening and closing to a third position that allows movement in the longitudinal direction while guiding the flat surface portion.
Further, the guide head is provided integrally with the cleaning nozzle and the drying nozzle.
In addition, when the first guide rail changes its posture from the horizontal posture to the vertical posture, the first and second guide rails communicate with each other by opening the open / close door of the closed cleaning / drying chamber. The door is closed when the guide rail returns to a horizontal position.
The second guide rail is formed in a U-shaped cross section, and is formed with a locking portion that prevents the workpiece support frame body from moving due to its own weight in a vertical posture.
The cleaning / drying mechanism includes a drive source that moves the work support frame guided in a vertical position on the second guide rail in the cleaning / drying chamber together with the second guide rail, and an adhesive tape on the side opposite to the work pasting surface. It has a suction head that sucks and holds the surface, a cleaning nozzle that sprays and cleans the cleaning liquid while moving in the vertical direction facing the work held by the suction head, and a drying nozzle that dries by air blow Features.
In the cleaning / drying chamber, an air blowing portion for drying both surfaces of the work carried out after the cleaning / drying is provided in the vicinity of the open / close door.

In the cutting device, the work supply unit that stores the work support frame body in which the work is adhesively supported on the adhesive tape attached to the work support frame body, and the work support frame body supplied from the work supply unit to the rotary table. A work cleaning / drying device according to any one of claims 2 to 9, wherein the work is supported by a cutting part that cuts the work while being fixed, and the work supported by the work support frame after cutting. The workpiece support frame supplied from the supply unit is transported to the cutting unit to be cut, and the workpiece support frame after cleaning and drying by the workpiece cleaning / drying apparatus is stored in the workpiece supply unit again.
Also, a conveying means for holding the workpiece support frame drawn from the workpiece supply unit to the first guide rail and conveying it to the rotary table, and conveying the cut workpiece support frame from the rotary table to the first guide rail. It is provided with two or more, The operation which conveys a work support frame from a 1st guide rail to a turntable, and the operation which conveys the work support frame after cutting from a turntable to a 1st guide rail are characterized by being parallel. .
The first and second transport means for holding the work support frame reciprocate between the first guide rail and the rotary table along the first and second transport rails provided in the upper part of the apparatus. It is provided to be movable.

  If the workpiece support frame according to the present invention is used, a rectangular hole is formed along the diagonal direction of the rectangular frame, so that the workpiece can be compared with the conventional one without increasing the outer diameter of the frame. Even a large size can be supported, and a tape adhesive surface is partially formed on the frame surrounding the rectangular hole, so that waste of expensive adhesive tape can be suppressed and production cost can be reduced. For example, in a rectangular frame having a maximum outer diameter of 276 mm, a workpiece having a width of 75 mm and a length of 210 mm to a width of 75 mm and a length of 250 mm can be supported by adhesion, and a large number of pieces can be obtained.

Also, in the workpiece cleaning and drying device, the workpiece transfer mechanism changes the workpiece support frame after cutting the workpiece from the horizontal posture to the vertical posture and carries it into the cleaning and drying chamber, and closes the cleaning and drying chamber in which the workpiece support frame is stored. Since the workpiece is washed and dried while moving the washing and drying nozzle while the workpiece support frame is fixed in a vertical posture, dust and washing liquid adhering to the workpiece can easily fall due to its own weight. Can be washed and dried uniformly. Further, by adjusting the nozzle moving speed steplessly, cleaning and drying according to the degree of dirt on the workpiece can be performed in a small space. Further, the amount, location, and timing of spraying the cleaning liquid can be controlled according to the situation.
The workpiece can be carried into the washing / drying chamber simply by moving the lower end of the work support frame from the first guide rail in the vertical posture to the second guide rail while the guide head is received, and the washing / drying chamber can be simply pushed up by the guide head. Since the workpiece can be carried out from the machine, the carrying-in / out mechanism to the cleaning / drying chamber is simplified. In addition, since the guide head that can move in the vertical direction is provided integrally with the cleaning nozzle and the drying nozzle and is multi-functional, it is possible to promote downsizing in a space-saving manner by using both the cleaning and drying mechanism and the carry-in / out mechanism.
When the first guide rail changes its posture between the horizontal posture and the vertical posture, the open / close door of the closed cleaning / drying chamber is opened / closed, so that it is not necessary to separately provide an open / close mechanism for the open / close door, thereby reducing the number of parts. it can. In addition, since the cleaning / drying chamber opens and closes only when the work is carried in and out, there is no risk of the cleaning liquid leaking out, so that the cutting operation of the next work can be performed in parallel during the cleaning / drying.

In the cutting device, since the cleaning and drying device can be arranged below the workpiece conveyance path by performing the cleaning and drying of the workpiece in a vertical posture, the installation area can be reduced and the miniaturization can be promoted. The first conveying means conveys the workpiece support frame from the first guide rail to the rotary table, and the second conveying means conveys the workpiece support frame after cutting from the rotary table to the first guide rail. By performing the operations in parallel, the cutting process and the cleaning and drying process can be performed efficiently.
In addition, the first and second transfer means for holding the work support frame are respectively provided between the first guide rail and the rotary table along the first and second transfer rails arranged in parallel on the upper part of the apparatus. Since it is provided so as to be able to reciprocate, the distance from the front of the device to the cutting part is short by retracting the first and second transport devices to a predetermined position, and a sufficient working space can be secured. The maintenance work becomes easier.

Hereinafter, preferred embodiments of a workpiece support frame, a workpiece cleaning / drying device, and a cutting device according to the present invention will be described in detail with reference to the accompanying drawings. In this embodiment, a semiconductor chip is mounted on one surface of a substrate in a matrix and a workpiece that can be taken in large numbers and is resin-sealed is used.
First, a schematic configuration of the cutting device will be described with reference to FIG.
In FIG. 1, a workpiece supply unit 1 is provided with a supply magazine 3 for storing a plurality of workpiece support frames 2 so as to be moved up and down by a known elevator mechanism 4. The workpiece W is adhesively supported on the adhesive tape that is adhered to the workpiece support frame 2 so that the adhesive tape (for example, UV tape) closes the rectangular hole.

  In FIG. 1, the work support frame 2 taken out from the work supply unit 1 in the X-axis direction and transported to the take-out stage P is positioned by a first guide rail 17 described later. The work support frame 2 is conveyed from the take-out stage P to the rotary table 5 by the first conveying device 41 and is fixed by suction. The rotary table 5 is made of a porous disk material, and holds the work support frame 2 by air suction. The rotary table 5 reciprocates in the Y-axis direction between the suction position Q and the cutting position R. The cutting unit 6 cuts the workpiece W that is adhesively supported by the workpiece support frame 2 in the XY direction by the cutting blades 7a and 7b. The cutting blades 7a and 7b are rotationally driven by the spindle portions 8a and 8b. These are respectively supported by the moving bodies 9a and 9b, and move along the moving rail 10 in the X-axis direction. Cameras (not shown) are mounted on the moving bodies 9a and 9b, respectively, move along the moving rail 10, read the reference mark of the workpiece W, and after aligning with the cutting blades 7a and 7b, start cutting. To do. The cutting blades 7a and 7b reciprocate along the Y-axis direction, rotate the rotary table 5 by 90 degrees, and cut the workpiece W in the XY direction.

A workpiece cleaning / drying device 12 is provided below the take-out stage P in FIG. The workpiece cleaning / drying device 12 cleans and drys the workpiece W supported by the workpiece support frame 2 after cutting. By providing the cleaning / drying device 12 below the take-out stage P, the workpiece support frame 2 to be supplied next from the workpiece supply unit 1 is conveyed by the first conveyance device 41 to the cutting unit 6 via the rotary table 5. During the cutting, the workpiece support frame 2 that has been cut first is transferred from the suction position Q to the first guide rail 17 in the take-out stage P by the second transfer device 42, and the workpiece W is cleaned. Drying is performed in parallel. The workpiece support frame 2 after being washed and dried is stored in the supply magazine 3 again from the take-out stage P on the first guide rail 17.
Note that the workpiece support frame 2 is taken out from the workpiece supply unit 1 to the take-out stage P without paralleling the cutting operation and the cleaning / drying operation, positioning by the first guide rail 17, and the workpiece support frame 2 is taken out from the take-out stage P. Transport to the suction position Q, move the workpiece support frame 2 to the cutting position R while being attracted to the rotary table 5, cut the workpiece W, transport the workpiece support frame 2 from the suction position Q to the take-out stage P, and a workpiece cleaning and drying device A series of operations from cleaning and drying of the workpiece W by 12 and storage of the workpiece support frame 2 in the workpiece supply unit 1 can be sequentially performed.

Next, the configuration of the work support frame 2 will be described.
In the workpiece cleaning / drying apparatus according to the present invention, support frames of various sizes or various shapes can be used in addition to the workpiece support frame body shown in FIGS. 7 and 10, but in the following, refer to FIG. 7 as an example. To explain.
In the present embodiment, the work support frame 2 is a rectangular frame having a side length of 276 mm. By sticking an adhesive tape (for example, UV tape) 13 to this frame body rectangular hole, the workpiece W is adhesively supported. A rectangular hole 14a is formed along the diagonal direction of the rectangular frame. A tape adhesive surface is formed along the partition frame 15 surrounding the rectangular hole 14a. A portion surrounded by the partition frame 15 and the outer frame is a dummy hole 14b, so that the weight of the frame body is reduced. Thus, by forming the rectangular holes 14a along the diagonal direction of the rectangular frame body, the length size of the rectangular workpiece W is larger than before without increasing the outer shape of the workpiece support frame body 2. You can support anything. For example, in a rectangular frame having a maximum outer diameter of 276 mm, workpieces W having a width of 75 mm and a length of 210 mm to a width of 75 mm and a length of 250 mm can be adhered and supported, and a larger number can be obtained. Moreover, since a tape sticking surface is partially formed along the partition frame 15 surrounding the rectangular hole 14a, waste of the expensive adhesive tape 13 can be suppressed and production cost can be reduced. Further, since the support frame body of FIG. 7 is rectangular, when it is housed in a second guide rail 22 to be described later, the guide contacting the second guide rail 22 compared to the support frame body (ring frame) of FIG. There is an advantage that the portion is long and can be slidably guided and the suction to the suction head 26 is also stable.

Next, the configuration of the workpiece cleaning / drying apparatus 12 will be described with reference to FIGS. 2 to 6.
In FIG. 2, the workpiece cleaning / drying device 12 is provided with a workpiece transfer mechanism that changes the workpiece support frame 2 after being cut from a horizontal posture to a vertical posture and carries it into and out of the cleaning / drying chamber 16. Further, the cleaning / drying chamber 16 in which the work support frame 2 is housed is closed, and the work W is cleaned and dried by moving the cleaning nozzle and the drying nozzle while the work support frame 2 is fixed in a vertical posture. A drying mechanism is provided. Hereinafter, these mechanisms will be described in detail.

First, the configuration of the workpiece transfer mechanism will be described.
Fig.4 (a) is an enlarged view of the extraction stage P part (refer FIG.1 and FIG.2). The workpiece support frame 2 after cutting is placed on the extraction stage P, and the workpiece support frame 2 after washing and drying is stored in the supply magazine 3 from the extraction stage P. The 1st guide rail 17 is provided in the both sides on the base 19 so that opening and closing is possible. The first guide rail 17 can be changed in posture to a vertical posture by rotating 90 degrees around the rotary shaft 20 while the workpiece support frame 2 after being cut is positioned in a horizontal posture. In FIG. 2, a cylinder rod of a rotation cylinder (air cylinder) 21, which will be described later, is connected to the base 19, and when the rotation cylinder 21 is operated, the first guide rail 17 is moved 90 degrees together with the base 19. The posture is changed to a vertical posture by rotating. The first guide rail 17 is provided with a locking portion 17a that prevents the workpiece support frame body 2 from falling when in a vertical posture.

  The first guide rail 17 includes a first position (see FIGS. 2 and 4D) where the work support frame 2 is placed in a horizontal posture, and the work support frame 2 as the first guide rail. A second position (see FIG. 4B) that is sandwiched and positioned by both sides by 17 and a third position that allows movement in the direction of the cleaning and drying chamber while guiding the flat portion of the work support frame 2 ( The rail width can be changed by moving each to FIG. 4 (c). When the work support frame 2 is transferred from the rotary table 5 to the take-out stage P or stored in the supply magazine 3 from the take-out stage P, the first guide rail 17 is moved to the first position (FIG. 4 ( d)). When the work support frame 2 is placed on the base 19, a drive source (such as a motor) (not shown) is operated, and the work support frame 2 is sandwiched from both sides by the first guide rail 17 on the basis of the center. Positioning is performed (second position: see FIG. 4B). When the first guide rail 17 is rotated from the horizontal posture to the vertical posture and the work support frame 2 is carried into the cleaning / drying chamber 16, a driving source (not shown) is operated to move to the second position (FIG. 4 ( b)) to a third position (see FIG. 4C). As a result, the workpiece support frame 2 held by the first guide rail 17 is allowed to move to the cleaning / drying chamber 16 while the plane portion is guided without tilting. As a result, the work support frame 2 is sent from the first guide rail 17 to the second guide rail 22 held in the cleaning / drying chamber 16 in a vertical posture. The first guide rail 17 is formed in a U-shaped cross section with the base 19 so as to guide the work support frame 2. When a conventional ring type is used as the work support frame 2, the first guide rail 17 is shortened as shown in FIG. 4 (e), but the work support frame 2 is dropped in a vertical posture. A locking portion 17a to prevent is provided in the same manner.

  In FIG. 2, a second guide rail 22 is provided in the cleaning / drying chamber 16 to guide the workpiece support frame 2 from the first guide rail 17 to the cleaning / drying chamber 16 in a vertical posture. 5A, the second guide rail 22 having a U-shaped cross section is supported by a support plate 24, and the support plate 24 is connected to a shaft 25. The shaft 25 is a cylinder of a suction cylinder (not shown). It is connected to the rod (see FIG. 2). When the suction cylinder is operated, the workpiece support frame 2 is drawn toward the suction head 26 provided with a suction surface in the cleaning / drying chamber 16 in the vertical direction. 5A, the second guide rail 22 is formed with a frame body locking portion 27a that prevents the workpiece support frame body 2 from dropping due to its own weight in a vertical posture (see FIG. 5D).

  In FIG. 5B, when the suction head 26 presses the work support frame 2 guided and carried by the second guide rail 22 against the suction surface 26a, the suction head 26 sucks air from the suction hole 26b. The workpiece support frame 2 is sucked and held in a vertical posture. The adhesive tape 13 is sucked to the suction surface 26a by, for example, six suction holes 26b. The suction head 26 can be replaced by changing the work support frame 2. If the work support frame 2 has a ring shape without the partition frame 15 in FIG. 5C, the suction hole 26b may be provided in an annular shape. Is possible. In this case, the suction head 26 can be shared by attaching an inexpensive tape other than the UV tape to the dummy hole 14b that does not support the work W of the work support frame 2 in an adhesive manner.

  In FIG. 2, a guide head 28 is provided in the cleaning / drying chamber 16 so as to reciprocate in the vertical direction. The guide head 28 receives the lower end of the workpiece support frame 2 in a vertical posture. By moving the guide head 28 to the lower end of the second guide rail 22 while receiving the lower end of the work support frame 2, the work support frame 2 is transferred to the second guide rail 22. The workpiece support frame 2 is held as it is when locked to the frame locking portion 27a of the second guide rail 22. Further, by moving the guide head 28 to the upper end of the second guide rail 22, the guide head 28 is transferred to the first guide rail 17 in the reverse procedure.

  In FIG. 6, the guide head 28 is provided integrally with the cleaning nozzle 29 and the drying nozzle 30. The cleaning nozzle 29 cleans the workpiece W by spraying a cleaning liquid together with high-pressure air in a mist form from a plurality of nozzle holes provided in the horizontal direction. Further, the drying nozzle 30 is formed with a slit hole in the horizontal direction, and high pressure air or warm air blows out from the slit hole to dry the workpiece W after cleaning. The cleaning head 31 integrally including the guide head 28, the cleaning nozzle 29, and the drying nozzle 30 is connected to an endless belt chain 32, for example. The belt chain 32 is installed between pulleys 33 provided on the upper and lower sides, and is rotated by a belt drive motor 34. The cleaning head 31 can be reciprocated up and down by driving the belt drive motor 34 forward and backward. The moving speed of the cleaning head 31 can be set arbitrarily (steplessly), and cleaning according to the contamination of the workpiece W is possible. The cleaning head 31 can be cleaned and dried while reciprocating using a space formed by the second guide rail 22 being drawn toward the suction head 26 together with the work support frame 2. . The drying nozzle 30 of the cleaning head 31 may blow off obliquely downward so that the cleaning liquid can easily fall. Further, the moving speed of the cleaning head 31 may be controlled in various ways, such as when moving from the upper side to the lower side of the cleaning / drying chamber 16 more slowly than when moving from the lower side to the upper side. Moreover, when the high-pressure air and the cleaning liquid are heated to a high temperature, drying is accelerated.

  In FIG. 2, the work support frame 2 that is held in the vertical position on the second guide rail 22 in the cleaning / drying chamber 16 is drawn together with the second guide rail 22 to the suction head 26 so that the adhesive tape surface side is moved. Hold by adsorption. The cleaning head 31 is sprayed with cleaning liquid from the cleaning nozzle 29 while being moved in the vertical direction so as to face the work W, and then the high-pressure air or warm air is blown from the drying nozzle 30 to dry the work W.

  A plurality of air blowing portions 36 are provided in the vicinity of the open / close door 35 of the cleaning / drying chamber 16 so as to face each other. The air blowing part 36 dries again the suction surface and the cleaning surface of the work support frame 2 that is transported from the second guide rail 22 to the first guide rail 17 after cleaning and drying. The open / close door 35 always closes the cleaning / drying chamber 16 by the pulling force of the spring 37. When the base 19 changes its posture from a horizontal posture to a vertical posture, the roller 19a provided at the end of the base 19 abuts against the abutting portion 38 of the open / close door 35 and resists the pulling force of the spring 37. By pushing, the cleaning / drying chamber 16 is opened. Thereby, the first guide rail 17 and the second guide rail 22 can communicate with each other in a vertical posture. Further, when the first guide rail 17 returns to the horizontal posture, the pushing force to the contact portion 38 by the roller 19 a is released, so that the opening / closing door 35 is closed by the pulling force of the spring 37. Further, the cleaning / drying chamber 16 is provided with a drain port 39 for discharging a cleaning liquid at the time of cleaning and an exhaust port 40 for exhausting air containing moisture at the time of cleaning.

Next, with reference to FIG.2 and FIG.3, the conveyance system of the workpiece | work support frame 2 is demonstrated.
The first transfer device 41 (first transfer means) holds the work support frame 2 pulled out from the supply magazine 3 to the base 19 and moves along the first transfer rail 43 with respect to the work support frame 2. Is conveyed to the rotary table 5. The second transport device 42 (second transport means) holds the cut work support frame 2 and transports it from the turntable 5 to the base 19 along the second transport rail 44.
As the first and second transfer devices 41 and 42, a transfer device including a suction hand that sucks the upper surface of the work support frame 2 is used. The operation of the first transport device 41 transporting the work support frame 2 from the first guide rail 17 to the rotary table 5, and the second transport device 42 based on the work support frame 2 cut from the rotary table 5. The operation of conveying to the table 19 is performed in parallel. In FIG. 3, the first and second transfer devices 41 and 42 are provided so as to be movable in the vertical direction, and will not interfere even if the work support frame 2 is transferred in the reverse direction. In the present embodiment, the first and second transfer apparatuses 41 and 42 alternately perform the same operation. By arranging the first transport rail 43 and the second transport rail 44 side by side in the upper part of the apparatus, the first and second transport apparatuses 41 and 42 are retracted to a predetermined position, so that the distance from the front of the apparatus to the cutting section 6 can be reduced. Since the distance is short and a sufficient work space can be secured, it is easy to perform maintenance work such as replacing the cutting blades 7a and 7b (see FIG. 1).

  Next, the cleaning / drying operation of the workpiece cleaning / drying apparatus 12 will be described separately for a workpiece carry-in operation and a workpiece carry-out operation. First, the workpiece carrying-in operation after cutting will be described with reference to FIGS. 8A to 8H. In FIG. 8A, the chuck hand 18 moves from the supply magazine 3 to the work support frame before the second transport device 42 transfers the cut work support frame 2 from the rotary table 5 to the take-out stage P (base 19). 2 is gripped and taken out to the take-out stage P (base 19). At this time, the first guide rail 17 is in the state shown in FIG. When the workpiece support frame 2 is placed on the base 19, the first guide rail 17 positions the workpiece support frame 2 with reference to the center by sandwiching the workpiece support frame 2 from both sides as shown in FIG. 4B. Next, the first guide rail 17 releases the pinch and returns to the state of FIG. 4D, and the first transport device 41 moves the workpiece support frame 2 before cutting from the take-out stage P (base 19). It is held and conveyed to the rotary table 5.

  Next, in FIG. 8B, when the second transport device 42 transports the cut work support frame 2 to the take-out stage P, it is lowered and placed on the base 19. At this time, the first guide rail 17 is in the state shown in FIG. When the work support frame 2 is placed on the base 19, the first guide rail 17 sandwiches the work support frame 2 from both sides as shown in FIG.

  Next, in FIG. 8C, when the cylinder 21 for rotation is operated and the cylinder rod is extended in the direction of the arrow, the base 19 rotates 90 degrees around the rotation shaft 20 to change the posture from the horizontal posture to the vertical posture. At this time, since the work support frame 2 is sandwiched between the first guide rails 17 (see FIG. 4B), it does not move due to its own weight. As the base 19 rotates, the roller 19 a contacts and pushes against the contact portion 38 of the opening / closing door 35 of the cleaning / drying chamber 16, so that the opening / closing door 35 is opened against the pulling force of the spring 37. At this time, in the cleaning / drying chamber 16, the cleaning head 31 is in the vicinity of the opening (position moved upward), and the guide head 28 stands by just below the workpiece support frame 2.

  When the first guide rail 17 moves from the state shown in FIG. 4B to the state shown in FIG. 4C, the workpiece support frame 2 enters the cleaning / drying chamber 16 from its opening due to its own weight, and the lower end portion. Is supported by the guide head 28. At this time, the guide head 28 can be moved upward from the opening / closing door 35 to reduce the clearance between the guide head 28 and the lower end of the work support frame 2. In FIG. 8D, when the cleaning head 31 moves below the cleaning / drying chamber 16, the work support frame 2 is carried into the cleaning / drying chamber 16 while being guided from the first guide rail 17 to the second guide rail 22 on both sides. The 8E, even if the cleaning head 31 moves to the lower part of the cleaning / drying chamber 16 and the guide head 28 moves away from the work support frame 2, the work support frame 2 is locked to the frame of the second guide rail 22. It latches and is hold | maintained at the part 27a (refer Fig.5 (a)).

  Next, in FIG. 8F, the suction cylinder (not shown) is operated to pull the shaft 25 in the direction of the arrow, so that the second guide rail 22 connected via the support plate 24 also moves in the same direction, and the suction head 26. Be drawn to. When the surface opposite to the workpiece adhesive surface of the adhesive tape 13 affixed to the workpiece support frame 2 comes into contact with the suction surface 26a, air suction is performed through the suction hole 26b, and the workpiece W is attracted to the suction surface 26a via the adhesive tape 13. (See FIG. 5B).

  Next, when the rotating cylinder 21 is operated in FIG. 8G and the cylinder rod is pulled in the direction of the arrow, the base 19 rotates 90 degrees about the rotating shaft 20 and returns from the vertical posture to the horizontal posture. At this time, since the pushing of the contact portion 38 by the roller 19 a is released, the opening / closing door 35 closes the opening portion by the pulling force of the spring 37. When the cleaning / drying chamber 16 is sealed, the cleaning liquid is sprayed from the cleaning nozzle 29 toward the workpiece W while the cleaning head 31 is reciprocated up and down in FIG. 8H. The moving speed and cleaning time of the cleaning head 31 can be arbitrarily set depending on the workpiece W. The cleaning liquid after cleaning is discharged from the outlet 39 to the outside. When the cleaning of the workpiece W is completed, the workpiece W is dried by blowing high-pressure air or warm air from the drying nozzle 30 while reciprocating the cleaning head 31 up and down. Air containing moisture in the cleaning / drying chamber 16 is exhausted from the exhaust port 40 to the outside.

Next, the work carry-out operation after cleaning and drying will be described with reference to FIGS. 9I to 9O.
In FIG. 9I, when the cleaning / drying operation is completed, the cleaning head 31 temporarily moves below the second guide rail 22 (in the direction of the arrow) and stands by. Next, in FIG. 9J, the rotation cylinder 21 is operated to extend the cylinder rod in the direction of the arrow, and the base 19 rotates 90 degrees about the rotation shaft 20 to change the posture from the horizontal posture to the vertical posture. At this time, as the base 19 rotates, the roller 19 a contacts and presses against the contact portion 38 of the opening / closing door 35 of the cleaning / drying chamber 16, so that the opening / closing door 35 opens against the pulling force of the spring 37. Is done.

  Next, in FIG. 9K, when the suction head 26 is released and the suction cylinder (not shown) is operated to extend the shaft 25 in the direction of the arrow in the figure, the second guide rail 22 is interposed via the support plate 24. Is located directly below the opening. At this time, since the workpiece support frame 2 is held and moved while being locked to the frame locking portion 27a of the second guide rail 22, it moves to a position directly above the guide head 28. Next, in FIG. 9L, when the cleaning head 31 waiting in the lower part of the cleaning / drying chamber 16 is moved upward (in the direction of the arrow in the figure), the guide head 28 remains in contact with the lower end of the work support frame 2. Push up along the two guide rails 22. When the work support frame 2 passes through the opening of the cleaning / drying chamber 16, high-pressure air or hot air is blown from both sides of the air blowing part 36 facing the work support frame 2, After the cleaning surface is dried again, it is transferred to the first guide rail 17.

  In FIG. 9M, when the work support frame 2 is pushed up to the first guide rail 17 by the guide head 28 as the cleaning head 31 moves upward, the first guide rail 17 operates a drive source (not shown). Then, the state shifts from the state shown in FIG. 4C to the state shown in FIG. 4B, and the work support frame 2 is clamped on both sides. Next, in FIG. 9N, when the rotating cylinder 21 is operated and the cylinder rod is pulled in the direction of the arrow, the base 19 rotates 90 degrees about the rotating shaft 20 and returns from the vertical posture to the horizontal posture. At this time, since the pushing of the contact portion 38 by the roller 19 a is released, the opening / closing door 35 closes the opening portion by the pulling force of the spring 37. When the first guide rail 17 is in a horizontal position, the state shifts from the state of FIG. 4B to the state of FIG. 4D, and the work support frame 2 is placed on the base 19. The cleaning head 31 stands by at a position where the cleaning head 31 is moved up to the vicinity of the opening of the cleaning / drying chamber 16.

  Next, in FIG. 9O, the work support frame 2 is gripped from the base 19 by the chuck hand 18 and stored in the supply magazine 3. When the chuck hand 18 returns the workpiece support frame 2 after cleaning and drying to the supply magazine 3, the elevator mechanism 4 is operated, and the supply magazine 3 is raised or lowered to grip and remove a new workpiece support frame 2. Take out to stage P. Then, the work loading / unloading operation described in FIGS. 8A to 9O is repeatedly performed.

  The chuck hand 18 may be integrated with the first transfer device 41 or may be a separate body.

It is a top view of a cutting device. It is a front view of the cutting device of FIG. It is a left view of the cutting device of FIG. It is the top view which shows the structure of a 1st guide rail, a front view, and the state figure which shows opening / closing operation | movement. It is a front view, a right side view, a top view, a front view and a right side view of the suction head of the second guide rail. It is explanatory drawing of the drive mechanism of the cleaning head, and explanatory drawing which looked at the cleaning head from the nozzle surface. It is explanatory drawing of a workpiece | work support frame. It is explanatory drawing of the workpiece | work carrying-in operation | movement to a workpiece | work washing | drying apparatus. It is explanatory drawing of the workpiece carrying-out operation | movement from a workpiece | work washing drying apparatus. It is explanatory drawing of a workpiece | work support frame.

Explanation of symbols

W Work 1 Work supply part 2 Work support frame 3 Supply magazine 4 Elevator mechanism 5 Rotary table 6 Cutting part 7a, 7b Cutting blade 8a, 8b Spindle part 9a, 9b Moving body 10 Moving rail 11 Intake port 12 Work washing dryer 13 Adhesive tape 14a Rectangular hole 14b Dummy hole 15 Partition frame 16 Washing / drying chamber 17 First guide rail 17a, 27a Frame locking part 18 Chuck hand 19 Base 19a Roller 20 Rotating shaft 21 Rotating cylinder 22 Second guide rail 24 support plate 25 shaft 26 suction head 26a suction surface 26b suction hole 28 guide head 29 cleaning nozzle 30 drying nozzle 31 cleaning head 32 belt chain 33 pulley 34 belt drive motor 35 opening / closing door 36 air blowing portion 37 spring 38 abutting portion 39 Drain port 40 Exhaust port 41 First transport device 42 Second transport device 43 First transport rail 44 Second transport rail

Claims (12)

In the work support frame that adheres and supports the work by attaching an adhesive tape to the ring-shaped frame,
A work support frame, wherein a rectangular hole is formed along a diagonal direction of a rectangular frame, and an adhesive tape is adhered along a partition frame surrounding the rectangular hole. In a workpiece cleaning and drying apparatus for cleaning and drying a workpiece to be cut while being adhesively supported by an adhesive tape adhered to a workpiece support frame,
A workpiece transfer mechanism that changes the workpiece support frame after cutting from a horizontal posture to a vertical posture and carries it into and out of the cleaning and drying chamber;
A cleaning / drying mechanism for cleaning and drying the workpiece while moving the cleaning / drying nozzle while closing the cleaning / drying chamber in which the workpiece supporting frame is stored by the workpiece transfer mechanism and fixing the workpiece supporting frame in a vertical posture. A workpiece cleaning and drying apparatus characterized by that. The workpiece transfer mechanism
A first guide rail capable of changing the posture to a vertical posture while positioning the workpiece support frame body in a horizontal posture after cutting the workpiece;
A second guide rail that guides the workpiece support frame from the first guide rail in a vertical posture into the cleaning and drying chamber in a vertical posture;
3. The work washing and drying apparatus according to claim 2, further comprising a guide head that moves from the first guide rail in a vertical posture to the second guide rail while receiving the lower end of the work support frame.   The first guide rail includes a first position where the workpiece support frame can be placed in a horizontal posture, a second position where the workpiece support frame is sandwiched and positioned from both sides, and a planar portion of the workpiece support frame. 4. The workpiece cleaning / drying apparatus according to claim 3, wherein the workpiece cleaning / drying apparatus is opened and closed to a third position allowing movement in the longitudinal direction while guiding the guide.   4. The workpiece cleaning / drying apparatus according to claim 3, wherein the guide head is provided integrally with the cleaning nozzle and the drying nozzle.   When the first guide rail changes its posture from a horizontal posture to a vertical posture, the first guide rail and the second guide rail communicate with each other by opening the open / close door of the closed washing / drying chamber. 4. The work washing and drying apparatus according to claim 3, wherein the door is closed when the rail returns to a horizontal posture.   4. The workpiece cleaning / drying apparatus according to claim 3, wherein the second guide rail is formed in a U-shaped cross section, and is formed with a locking portion that prevents the workpiece support frame body from moving due to its own weight in a vertical posture. . The washing and drying mechanism
A drive source that moves the work support frame guided in a vertical position on the second guide rail in the cleaning / drying chamber together with the second guide rail;
A suction head that sucks and holds the pressure-sensitive adhesive tape surface opposite to the workpiece attachment surface;
3. A workpiece cleaning apparatus according to claim 2, further comprising a cleaning nozzle for spraying and cleaning the cleaning liquid while moving in a vertical direction so as to face the workpiece held by the suction head, and a drying nozzle for drying by air blow. Drying equipment.   9. The workpiece cleaning / drying apparatus according to claim 8, wherein an air blow-out unit for drying both surfaces of the workpiece carried out of the chamber after cleaning / drying is provided in the vicinity of the open / close door in the cleaning / drying chamber. A workpiece supply unit for storing the workpiece support frame in which the workpiece is adhesively supported on the adhesive tape attached to the workpiece support frame; and
A cutting part for cutting the work while fixing the work support frame supplied from the work supply part to the rotary table;
The workpiece washing and drying apparatus according to any one of claims 2 to 9, wherein the workpiece supported by the workpiece support frame after cutting is washed and dried.
The workpiece support frame supplied from the workpiece supply unit is transported to the cutting unit and cut, and the workpiece support frame after cleaning and drying by the workpiece cleaning and drying apparatus is stored in the workpiece supply unit again. Cutting device. A plurality of conveying means are provided for holding the workpiece support frame drawn from the workpiece supply unit to the first guide rail and conveying it to the rotary table, and conveying the cut workpiece support frame from the rotary table to the first guide rail. ,
11. The operation of conveying the work support frame from the first guide rail to the rotary table and the operation of conveying the work support frame after cutting from the rotary table to the first guide rail are parallel to each other. The cutting device as described. First and second transport means for holding the work support frame can reciprocate between the first guide rail and the rotary table along the first and second transport rails provided in the upper part of the apparatus. The cutting device according to claim 11, wherein the cutting device is provided on the cutting device.

Images