CN110361798A - One kind being based on surface plasmon waveguide bandstop filter - Google Patents

One kind being based on surface plasmon waveguide bandstop filter Download PDF

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Publication number
CN110361798A
CN110361798A CN201810252883.3A CN201810252883A CN110361798A CN 110361798 A CN110361798 A CN 110361798A CN 201810252883 A CN201810252883 A CN 201810252883A CN 110361798 A CN110361798 A CN 110361798A
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China
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elongated hole
direction elongated
waveguide
resonant cavity
vertical direction
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CN201810252883.3A
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Inventor
肖功利
杨秀华
杨宏艳
李海鸥
张法碧
傅涛
孙堂友
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Priority to CN201810252883.3A priority Critical patent/CN110361798A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/008Surface plasmon devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The present invention is a kind of based on surface plasmon polariton waveguide bandstop filter, is mainly made of metal film, waveguide, resonant cavity;The elongated rectangular opening of waveguide, resonant cavity are square U-shaped, i.e., are made of a horizontal direction elongated hole and two vertical direction elongated holes.Horizontal direction elongated hole connects with two vertical direction elongated holes, and the shape and size of two vertical direction elongated holes are identical, and horizontal direction elongated hole and two vertical direction elongated holes are the rectangular opening of strip, which is the rectangle of rule.The filter has that structure is simple, package dimension is small, multi-mode, transmissivity are high, passband is smooth, stopband is relatively narrow, controllability and good quality factor.It can be by changing the adjustable bandwidth of rejection of structural parameters.The result shows that stopband transmittance can be down in 0.01, passband max transmissive is than up to 0.98, and top distribution is smooth.The filter has good application prospect in micronano optical integrated device.

Description

One kind being based on surface plasmon waveguide bandstop filter
Technical field
The present invention is about micronano optical technical field, and in particular to one kind is based on surface plasmon polariton waveguide bandreject filtering Device.
Background technique
Surface plasma excimer (Surface Plasmon Polartions, SPPs) is along metal-dielectric interface A kind of special electromagnetic surface wave of upper propagation.It is that a kind of by free electron and photon interacted of the local in metal surface is formed Mixed activation state.In this interaction, the free electron under light-wave irradiation is collected when identical as its resonant frequency Oscillation body, the interaction between this surface charge oscillation and light wave electromagnetic field just constitute SPPs with unique properties. Surface plasma excimer SPPs device is world today's research hotspot and developing direction.
With the development of science and technology, information technology has profoundly affected the life style of the mankind, at the same time, people are for high speed Information transmission and processing have higher requirement, and it is expected scientific research personnel can find small in size, high-precision, high-speed it is new Generation opto-electronic device.Along with the progress of nanosecond science and technology, many surface plasma optical devices are constantly pushed ahead, each A field plays increasingly important role.And filter just plays one of key player in optical integrated device.
The device that filter has processing to act on as a kind of pair of signal, also as a kind of carrier for eliminating interference, it is medical, The fields such as military, communication have a wide range of applications.But due to traditional filter package size, in terms of by It restricts, optoelectronic areas development cannot be well adapted to.And surface phasmon optical filter has that package dimension is small, function Advantage low, easy of integration etc. is consumed, more and more people's concern and research are caused.
In recent years, surface plasma waveguide filter is suggested and is studied.For example, someone devises Q-RING The horizontal chamber of chamber, Q-RING, the isostructural bandstop filter of rectangle ring cavity, all from different angles to transmissivity, multi-mode, adjustable Section etc. is analyzed and researched.Although these structures have many advantages, such as that small in size, adjustable, stopband mode is more, also deposit In place of the deficiencies of transmissivity of stopband is slightly higher, passband transmissivity is slightly lower, and curve is not smooth enough and quality factor are lower.In order to Overcome the shortcomings of above-mentioned and obtain good filter characteristic, the utility model proposes one kind to be based on surface plasmon polariton waveguide Bandstop filter.
Summary of the invention
The purpose of the present invention is design a kind of surface plasmons bandstop filter.In original surface plasmons On the basis of filter, the structure on metal film is further improved, by height, width and the position etc. that change resonant cavity Parameter, it can be found that this structure can effectively adjust the performances such as bandstop filter transmissivity, bandwidth, resonance mode.
The present invention specifically devises a kind of surface plasmons bandstop filter, this filter is mainly by metal film, humorous The chamber that shakes is constituted with waveguide.Resonant cavity and waveguide are nested in metal film surface, and waveguide rectangular configuration in long strip is humorous Vibration chamber is square U-shaped structure, and internal institute filled media is air.Resonant cavity horizontal direction elongated hole is parallel to waveguide Pipe, two elongated holes of resonant cavity vertical direction are symmetrical about horizontal direction elongated hole vertical direction middle line, and resonant cavity hangs down The height and width of histogram to two elongated holes are equal.The left parallel of planar light from waveguide is incident to the right, and transmitted light is from wave The right side of conduit is emitted;Planar light can also be incident to the left in parallel from the right side of waveguide simultaneously, and transmitted light is from a left side for waveguide Side outgoing.
The thickness of the metal film can arbitrarily meet the thickness of phasmon filter operating condition.
The dielectric material can arbitrarily meet the material of phasmon filter operating condition, in order to obtain filter Optkmal characteristics use air as dielectric material.
The metal membrane material is any one in gold, silver, and optimal material is gold.
The metal film length is 2400nm, width 2000nm.
Compared with existing phasmon filter, the advantages of surface plasmons bandstop filter of the present invention are as follows: 1. Planar light is incident to the right on the left of waveguide, and photon and metal surface generate surface phasmon, surface plasma excimer SPPs along waveguide transmissions, pass through resonant cavity and be coupled to it is intracavitary, to realize that resonance coupling acts on, under this effect, So that the phasmon filter that light transmission enhancing, quality factor improve;2. can be made by the structural parameters for changing resonant cavity Phasmon waveguide filter have multi-mode, passband is smooth, transmission coefficient is high, stopband is relatively narrow, transmission peaks are adjustable, frequency-selecting is special Property good and good quality factor.3. structure is simple, easy to process, package dimension is small, and integrated level is high, is micro-nano Integrated Light Electronic device provides a kind of new phasmon filter.
Detailed description of the invention
Fig. 1 is a kind of schematic perspective view of surface phasmon bandstop filter of the present invention.
Fig. 2 is a kind of planar structure schematic diagram of surface phasmon bandstop filter of the present invention.
Transmitted light spectrogram when Fig. 3 is resonant cavity horizontal direction elongated hole different length of the present invention.
Transmitted light spectrogram when Fig. 4 is resonant cavity horizontal direction elongated hole different in width of the present invention.
Transmitted light spectrogram when Fig. 5 is resonant cavity vertical direction elongated hole different length of the present invention.
Transmitted light spectrogram when Fig. 6 is resonant cavity horizontal direction elongated hole different location of the present invention.
Figure label are as follows: 1, metal film;2, waveguide;3, resonant cavity;4-1, horizontal direction elongated hole;4-2, vertical direction Elongated hole.
Specific embodiment
With reference to the accompanying drawing and the present embodiment is further explained explanation to the present invention.
Fig. 1 is the schematic perspective view of this surface plasmons bandstop filter.Including metal film 1, waveguide 2, Resonant cavity 3, metal film is golden film in this example, metal film stereochemical structure be in be cuboid, thickness meets work, When working best, length 2400nm, width 2000nm.It is embedded with the rectangular U-shaped body structure of waveguide cuboid resonant cavity In metal film body, filled media is air in waveguide resonant cavity body.The thickness and length of waveguide and metal film are equal Equal, position is embedded at the following one third of metal film.And resonant cavity is embedded in the interposition of metal film vertical direction Set, the shortest distance away from waveguide be 10nm, and two vertical direction it is intracavitary width it is equal with waveguide width.
Shown in Figure 2, resonant cavity is square U-shaped, i.e., by a horizontal direction elongated hole 4-1 and two Vertical Squares It is formed to elongated hole 4-2.Horizontal direction elongated hole connects with two vertical direction elongated hole 4-2, two vertical direction elongated holes The shape and size of 4-2 are identical, and horizontal direction elongated hole 4-1 and two vertical direction elongated hole 4-2 are strip Rectangular opening.
Fig. 2 show the planar structure schematic diagram of this surface plasmons bandstop filter, structural parameters L, I, D, H, W, S, T, Z, G are respectively input/output port at a distance from resonant cavity boundary, two vertical direction elongated hole outer boundaries of resonant cavity Distance, the length of resonant cavity horizontal direction elongated hole, the height of resonant cavity vertical direction elongated hole, dielectric waveguide width are humorous The width of vibration chamber vertical direction elongated hole, the width of resonant cavity horizontal direction elongated hole, resonant cavity vertical direction elongated hole and wave Conduit couples spacing, and resonant cavity horizontal direction elongated hole couples spacing with waveguide.Wherein L, W, S, Z are fixed to 600nm, 100nm, 100nm, 10nm.The initial value of remaining parameter is I=800nm, D=600nm, H=1010nm, T=180nm, G= 10nm.When actual implementation sheet is practical, the additional layer medium substrate under metal film is needed, which can be silicon (Si) or silica (SiO2)。
When the invention works: the left parallel of this example flat light from waveguide is incident to the right, and incident light is through resonance coupling Into resonant cavity, so that transmitted light is emitted from the right side of waveguide.When SPPs is along waveguide transmissions, by resonant cavity coupling It closes intracavitary, is transmitted respectively to two vertical direction elongated holes intracavitary, when SPPs wave meets phase cancellation condition, transmitted light Trough can be generated by composing.Under this cancellation conditioning, so that making the transmission of light enhances.
Pass through the length and width of change resonant cavity horizontal direction elongated hole 4-1 and position and the length of vertical direction elongated hole 4-2 The parameters such as degree can effectively adjust the transmission phenomenon of light.Make this filter that a multi-mode, transmissivity height, stopband may be implemented Relatively narrow transmitted spectrum.
The Thoughts of this example are: organizing work under conditions of structural parameters fixation and initial value.1. working as resonance When changing within the scope of length D=300nm~600nm of chamber horizontal direction elongated hole, the transmitted spectrum result obtained is referring to such as Fig. 3;2. when changing within the scope of width T=180nm~360nm of resonant cavity horizontal direction elongated hole, transmitted spectrum result As shown in Figure 4;3. being obtained when being adjusted within the scope of height H=1110nm~1410nm of resonant cavity vertical direction elongated hole Transmitted spectrum result referring to Fig. 5;4. when resonant cavity horizontal direction elongated hole couples spacing G=10nm~25nm model with waveguide When enclosing interior variation, result is as shown in Figure 6.
Following result is obtained by using this phasmon filter simulating, verifying below with reference to this example embodiment:
Fig. 3 is the transmitted light spectrogram of resonant cavity horizontal direction elongated hole 4-1 different length.Abscissa in figure indicates plane Light incident wavelength, ordinate indicate the transmissivity of light outgoing, also referred to as transmission coefficient, service band be 1500nm~ 4000nm, visible four kinds of different transmission spectrum curves are respectively the emulation of resonant cavity horizontal direction elongated hole different length in figure As a result, the length D of its horizontal direction elongated hole is respectively 300nm, 400nm, 500nm, 600nm.By the result in figure as it can be seen that The transmission spectrum curve of D=600nm makes analysis from figure, and two transmission troughs occurs in transmission spectrum curve, two troughs Transmissivity it is very low can bottom transmit trough (Mode1) and second to 0.01, first and transmit passband between trough (Mode2) There is good flatness, and the transmissivity of passband is up to 0.98.As horizontal direction extends the reduction of hole length, first transmission Trough corresponds to bandwidth of rejection and becomes narrow gradually, and apparent blue-shifted phenomenon occurs in transmission spectral line, but transmissivity remains unchanged substantially.
Fig. 4 is the transmitted light spectrogram of resonant cavity horizontal direction elongated hole 4-1 different in width.Abscissa and ordinate in figure Expression it is identical as Fig. 3, service band is also constant.Visible three kinds of different transmission spectrum curves are respectively resonant cavity in figure Horizontal direction elongated hole different in width simulation result, the width T of horizontal direction elongated hole be respectively 180nm, 240nm, 300nm, 360nm.By the result in figure as it can be seen that second transmission trough is corresponding as horizontal direction extends the increase of hole width Bandwidth of rejection becomes narrow gradually.It transmits spectral line and apparent blue-shifted phenomenon occurs, but transmissivity is held essentially constant.Change so above-mentioned Two parameters not only can effectively select bandwidth, but also demonstrate filter simultaneously with good selecting frequency characteristic.
Fig. 5 is the transmitted light spectrogram of resonant cavity vertical direction elongated hole 4-2 different length.Abscissa and ordinate in figure Expression it is identical as Fig. 3, service band be 2000nm~5500nm.The transmission spectrum curve difference that visible three kinds different in figure For resonant cavity vertical direction elongated hole different in width as a result, the length H of its vertical direction chamber be respectively 1110nm, 1210nm, 1310nm,1410nm.By the result in figure as it can be seen that as vertical direction extends the increase of hole length, first transmission trough pair Bandwidth of rejection is answered to become narrow gradually.It transmits spectral line and apparent Red Shift Phenomena occurs, but transmissivity remains unchanged.First transmission trough The full width at half maximum (FWHM) of transmission spectrum just becomes smaller, to improve the quality factor performance of this filter.
Fig. 6 is the transmitted light spectrogram of resonant cavity horizontal direction elongated hole 4-1 different location.It is above-mentioned just for a certain mode For, in order to effectively change the performance of the filter simultaneously.Need to adjust the position of resonant cavity horizontal direction elongated hole 4-1 To realize.It is moved up with resonant cavity horizontal direction elongated hole 4-1 by step-length 5nm, is to change resonant cavity horizontal direction to extend Hole couples spacing G with waveguide, when G is respectively 10nm, 15nm, 20nm, 25nm.Its result is referring to Fig. 6, with the increasing of G value Greatly, first transmission trough narrows with bandwidth of rejection corresponding to second transmission trough, transmission spectra shift 74nm, and first Pass band width is improved between a transmission trough and second transmission trough.Full width at half maximum (FWHM) minimum reaches 10nm, makes product Prime factor greatly improves, therefore the filter has obtained further improvement in performance.
The further specific explanations explanation of above embodiment, only technical solution of the present invention and purpose, is not intended to The limitation present invention, for those skilled in the art, all within the scope of disclosure of the invention, that is done any repairs Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.

Claims (6)

1. one kind is based on surface plasmon polariton waveguide bandstop filter.Including metal film (1), waveguide (2), resonant cavity (3); Waveguide resonant cavity is embedded on metal film, the elongated rectangular opening of waveguide, the thickness and length of waveguide and metal film It spends equal;Resonant cavity is square U-shaped, i.e., by a horizontal direction elongated hole 4-1 and two vertical direction elongated hole 4-2 groups At.Horizontal direction elongated hole connects with two vertical direction elongated hole 4-2, the shape and ruler of two vertical direction elongated hole 4-2 Very little identical, horizontal direction elongated hole 4-1 and two vertical direction elongated hole 4-2 are the rectangular opening of strip, the rectangle Hole is the rectangle of rule.Waveguide resonant cavity filled media is air.
2. according to claim 1 a kind of based on surface plasmon polariton waveguide bandstop filter, it is characterised in that: resonance Chamber horizontal direction elongated hole 4-1 and vertical direction elongated hole 4-2 is the rectangular opening of strip.
3. according to claim 1 or 2 a kind of based on surface plasmon polariton waveguide bandstop filter, it is characterised in that: The shape and size of two vertical direction elongated hole 4-2 of resonant cavity are identical.
4. a kind of surface plasmons bandstop filter according to claim 1 or 2, it is characterised in that: resonant cavity water Square to elongated hole 4-1 length between 300nm~600nm, width is between 180nm~360nm.
5. according to claim 1 or 2 a kind of based on surface plasmon polariton waveguide bandstop filter, it is characterised in that: The length of resonant cavity vertical direction elongated hole 4-2 is between 1010nm~1410nm.
6. according to claim 1 or 4 a kind of based on surface plasmon polariton waveguide bandstop filter, it is characterised in that: Distance of the resonant cavity horizontal direction elongated hole 4-1 away from waveguide is between 10nm~25nm.
CN201810252883.3A 2018-03-26 2018-03-26 One kind being based on surface plasmon waveguide bandstop filter Pending CN110361798A (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN111370820A (en) * 2020-03-20 2020-07-03 厦门大学 Adjustable band elimination filter based on artificial surface plasmon

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111370820A (en) * 2020-03-20 2020-07-03 厦门大学 Adjustable band elimination filter based on artificial surface plasmon
CN111370820B (en) * 2020-03-20 2021-05-25 厦门大学 Adjustable band elimination filter based on artificial surface plasmon

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