CN106199837A - A kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide - Google Patents
A kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide Download PDFInfo
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- CN106199837A CN106199837A CN201610597341.0A CN201610597341A CN106199837A CN 106199837 A CN106199837 A CN 106199837A CN 201610597341 A CN201610597341 A CN 201610597341A CN 106199837 A CN106199837 A CN 106199837A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
- G02F1/0018—Electro-optical materials
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Glass Compositions (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention belongs to integrated optics or technical field of photo communication, disclose a kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide.Including at least one micro-loop optical router, described micro-loop optical router includes two bus fiber waveguides I being parallel to each other and bus fiber waveguide II, it is provided with micro-loop between described bus fiber waveguide I and bus fiber waveguide II, described micro-loop connects electrode, the region in whole or in part of described micro-loop is provided with graphene layer, the micro-loop being provided with graphene layer includes fluoride waveguide or chalcogenide glass ducting layer the most successively, lower sealing coat, graphene layer, upper sealing coat, fluoride waveguide or chalcogenide glass ducting layer and covering, the side of described graphene layer extends to the lower section of electrode.It is used as to realize optical routing function.
Description
Technical field
The invention belongs to integrated optics or technical field of photo communication, disclose a kind of based on fluoride waveguide or chalcogenide glass
The Graphene mid-infrared light router of waveguide, is coupled with two straight wave guides by the micro-loop containing Graphene and electrode and constitutes, available
In realizing OWDM and optical routing function.
Background technology
On-chip optical interconnection network is the optical communication network realized on chip, includes optical link and exchange joint in physical layer
Point two parts.Optical link is the optical signal transmission path being made up of laser instrument, manipulator, fiber waveguide, detector, each exchange
Node is realized the data transmit-receive of node by an optical router, it is contemplated that the requirement to communication bandwidth of the on-chip optical interconnection network,
Also need to use wavelength-division multiplex technique.Theory and experimentation in recent years also indicate that, micro-ring resonant structure can be largely
The size of upper reduction device is to adapt to higher integrated level, and has applicable employing single chip integrated technique making, cascade shape
Formula is more flexible and changeable waits outstanding advantages.Therefore micro-ring resonant structure is for making low cost, high-performance and compact conformation
Photoelectric device is significant.
Middle-infrared band is an important wave band in electromagnetic wave, and it is in sensing, environmental monitoring, biomedical applications, heat
The fields such as imaging have highly important application.Middle infrared material based on this service band is at modern defense and photoelectricity pair
Anti-technology plays an important role.Along with the development of infrared technique, the combination property of centering infrared device it is also proposed that
Higher requirement, such as, has high optical quality at service band, easily realizes large scale high optical quality and complex shape
Prepared by shape, low cost etc..Up to the present, the research great majority of silicon based optoelectronic devices are near infrared band, mainly with
1550nm is main, and silica-based middle infrared wavelength device is due to reasons such as material restrictions, and research and development is slower.But mid-infrared silicon
Base optical electronic part has plurality of advantages: much larger than the plasma dispersion effect of near infrared band, two-photon absorption compares near-infrared
Wave band weakens significantly, and process is bigger thus makes simple, cost reduction, the knot being difficult to make of more near infrared bands
Structure.Therefore, studying and make silica-based mid-infrared device is an extremely important and significant problem.The mid-infrared road of the present invention
It is device important in mid-infrared application by device.
As a nova of material circle, Graphene opens the gate of two-dimensional material, and expedites the emergence of out a series of performance
Excellent, the opto-electronic device of flexible design.Graphene is the monolayer carbon atom being arranged in bi-dimensional cellular shape lattice structure, and it is at electricity
, the good characteristic of optics, mechanically and thermally mechanics make other material a lot of unmatch.Silicon optoelectronic device based on Graphene
Being adapted to optics in chip level can be compatible with CMOS technology, and has good stability and reliability.Due to
Under the carrier mobility room temperature of Graphene the highest, so its fermi level can be modulated by band filling effect rapidly, enter
And its absorption for light can be modulated at a high speed.The light of Graphene absorbs and is independently of optical wavelength simultaneously, almost covers institute
Some telecommunication communication bandwidths, this most just means that this this material can carry out wide bandwidth operation.
Heavy metal fluoride glass with Fluorozirconate glass as representative is French reyn university Poulain in 1975 et al.
The novel glass for infrared rays developed rapidly after finding fluorine mistake silicate glass, it is with printing opacity model the widest from ultraviolet to mid-infrared
Enclose, nontoxic and preferable physicochemical properties obtain the most attention of people, and particularly it is likely at 2.5 μm～3 μ m
Inside there is extremely low loss.Along with the maturation of fluoride glass fiber waveguide manufacturing technology, fluoride waveguide has obtained reality
Application (strong see document Yuan Xin, model is had a surplus, Cao Guoxi etc. and saturating infrared large scale oxyfluoride glass is studied. infrared and laser work
Journey).The research of fluoride waveguide in recent years and heavy metal fluoride waveguide obtains the biggest progress, and its transmission window is 0.3 μm
～8 μm (see document Saad M.Heavy Metal Fluoride Glass Fibers and their applications),
Overcome the shortcoming that conventional waveguide transmission window is little.
Chalcogenide glass refers to that Se, Te are by master and introduce the glass that other metalloid element a certain amount of is formed with S, it
There is excellent saturating mid-infrared and splendid athermal performance (see document Li L, Zou Y, Musgraves J D, et
al.Chalcogenide glass planar photonics:from mid-IR sensing to 3-Dflexible
substrate integration[J].Proceedings of SPIE-The International Society for
Optical Engineering,2013,8600(4):86000K-86000K-6).Traditional integrated optical material, in mid-infrared
It is restricted during the application of field, and chalcogenide glass can overcome the restriction of this respect.Chalcogenide glass has longer the most infrared section
Only wavelength, can cover 3 atmospheric windows.Additionally, chalcogenide glass is as amorphous material, it is not necessary to strict Lattice Matching,
Can be integrated with any backing material.This is that it has the widest range of application in integrated optics field.
Along with the fast development of science and technology increases with the swift and violent of communications field transinformation, optical transmission of information network is also
Arise at the historic moment.Optical transport network has the advantages such as broadband, Large Copacity, dependable performance, anti-interference strong security.OWDM skill
Art is the most successful, the most most widely used optical channel multiplex technique, has established material for building the fiber optic network of vast capacity
Basis, and be suitable for OWDM and optical routing technology and there is the light wavelength-division of broadband, reliable and stable, extensibility etc. again
With or optical routing components and parts the most increasingly receive publicity and pay attention to.
Summary of the invention
The present invention provides a kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide, solves
Can solve silica-based waveguides can not be by the shortcoming of mid-infrared light, it is achieved the wavelength-division multiplex requirement to mid-infrared.
For solving above-mentioned technical problem, the technical solution adopted in the present invention is:
A kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide, it is characterised in that bag
Including at least one micro-loop optical router, described micro-loop optical router includes two bus fiber waveguides I being parallel to each other and total linear light
Waveguide II, is provided with micro-loop between described bus fiber waveguide I and bus fiber waveguide II, described micro-loop connects electrode, described
The region in whole or in part of micro-loop is provided with graphene layer, and the micro-loop being provided with graphene layer includes fluoride the most successively
Waveguide or chalcogenide glass ducting layer, lower sealing coat, graphene layer, upper sealing coat, fluoride waveguide or chalcogenide glass ducting layer and
Covering, the side of described graphene layer extends to the lower section of electrode.
Described bus fiber waveguide I, bus fiber waveguide II and micro-loop are placed in the top of the silicon dioxide cushion of soi structure.
Described graphene layer is parallel to each other with silicon dioxide cushion.
The material of bus fiber waveguide I, bus fiber waveguide II and micro-loop be material be Fluorozirconate glass, Fluoroaluminate glass
Deng fluoride glass, it is also possible to for chalcogenide glass, can be Ge23Sb7S70、As2Se3、As2S3One of material.
Described bus fiber waveguide I is identical with the geometry of bus fiber waveguide II；Described bus fiber waveguide I, bus light wave
Lead II identical with the duct height of micro-loop；The width of the optical waveguide structure of bus fiber waveguide I and bus fiber waveguide II cross section
Identical with the width of the optical waveguide structure of micro-loop cross section.
Micro-loop is identical with the coupling distance of bus fiber waveguide I and bus fiber waveguide II.
The material of described graphene layer is made up of single-layer graphene material.
When the quantity of micro-loop optical router is more than or equal to 2, each micro-loop optical router is connected in series.
Compared with prior art, the method have the advantages that
The present invention, can not lacking by mid-infrared light relative to silica-based waveguides based on fluoride waveguide or chalcogenide glass waveguide
Point, fluoride waveguide or chalcogenide glass waveguide have wider and smooth transmitance to middle infrared spectrum, thus can realize centering
Infrared route.
The present invention, based on soi structure, can use commercial SOI wafer to make, compatible with CMOS technology, and device energy
Consume low good stability, it is simple to interconnect with Other Devices.
The present invention uses micro-ring resonant structure, decreases device size area to a great extent so that device architecture is tight
Gather, it is simple to integrated.
By electrode, graphene layer is applied different bias voltages, modulate the resonance wavelength in micro-loop flexibly, from
And can select flexibly and in real time and isolate the optical signal with specific wavelength value.
Meanwhile, the device flexible design of the present invention, energy consumption are relatively low, easy to use, can be by bus fiber waveguide I being connected
Fetch carry out multiple elementary cell cascade make for meeting different wavelength-division multiplex requirements；By different electrodes is applied difference
Bias voltage, it is possible to achieve the selection of middle-infrared band different wave length optical signal is to realize optical routing function.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the cross-sectional structure figure of the micro-loop comprising graphene layer in the present invention.
Fig. 3 is bus fiber waveguide I and the cross-sectional structure figure of bus fiber waveguide II in the present invention.
Fig. 4 is the scattergram of the electric field of the fundamental mode modulus value of the micro-loop lightguide cross section comprising graphene layer in the present invention.
Fig. 5 is the scattergram of electric field of the fundamental mode modulus value on bus fiber waveguide I cross section in the present invention.
Fig. 6 is the bias voltage graph of a relation that in the present invention, Graphene chemical potential and Graphene are applied in.
Fig. 7 is the Graphene relation that its complex refractivity index changes along with its chemical potential when the light of 2.5 mum wavelengths in the present invention
Figure.
When Fig. 8 is the bias voltage that in the present invention, graphene layer is applied in, the transmitance of its bus waveguide I and operation wavelength
Variation relation figure.
When Fig. 9 is that in the present invention, graphene layer is applied in another bias voltage, the transmitance of its bus waveguide I and operating wave
Long variation relation figure.
Figure 10 is the optical signal that resonance occurs in present invention scattergram of electric field vertical component in micro-loop.
Figure 11 is the optical signal scattergram of electric field vertical component in micro-loop in the present invention away from resonance wavelength.
Detailed description of the invention
Below in conjunction with embodiment, the invention will be further described, and described embodiment is only a present invention part
Embodiment, is not whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art is not making
Obtained under creative work premise other used by embodiment, broadly fall into protection scope of the present invention.
In conjunction with accompanying drawing, the Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide of the present invention,
Including at least one micro-loop optical router, described micro-loop optical router includes that two bus fiber waveguides I18 being parallel to each other are with total
Linear light waveguide II19, is provided with micro-loop 5 between described bus fiber waveguide I18 and bus fiber waveguide II19, described micro-loop 5 connects
Electrode 13, the region in whole or in part of described micro-loop 5 is had to be provided with graphene layer, be provided with the micro-loop of graphene layer from bottom to up
Include fluoride waveguide or chalcogenide glass ducting layer 51, lower sealing coat 61, graphene layer 8, upper sealing coat 62 and fluoride successively
Waveguide or chalcogenide glass ducting layer 51 and covering 20, the side of described graphene layer 8 extends to the lower section of electrode 13.I other words,
Graphene layer 8 through lower sealing coat 61 and upper sealing coat 62 be arranged on the fluoride waveguide of micro-loop 5 or chalcogenide glass ducting layer 51 it
Between.
Described bus fiber waveguide I18, bus fiber waveguide II19 and micro-loop 5 are placed in the silicon dioxide cushion 12 of soi structure
Top.The covering 20 of the present invention is i.e. positioned at the air layer of the top.
Wherein, the subtended angle 7 that micro-loop is circular is controlled by the scope that the graphene layer of the present invention covers by graphene layer, and
As a kind of preferably mode of the present invention, graphene layer is arranged near micro-loop 5 cross section electromagnetic field intensity maximum.
Described graphene layer 8 is parallel to each other with silicon dioxide cushion 12.
The material of bus fiber waveguide I18, bus fiber waveguide II19 and micro-loop 5 is Fluorozirconate glass, Fluoroaluminate glass
Deng fluoride glass, it is also possible to for chalcogenide glass, can be Ge23Sb7S70、As2Se3、As2S3One of material.
Described bus fiber waveguide I18 is identical with the geometry of bus fiber waveguide II19；Described bus fiber waveguide I18, total
Linear light waveguide II19 is identical with the duct height of micro-loop 5；Bus fiber waveguide I18 and the light of bus fiber waveguide II19 cross section
Wide the 17 of waveguiding structure and the optical waveguide structure of micro-loop 5 cross section wide 14 identical.
Micro-loop 5 is identical with the coupling distance of bus fiber waveguide I18 and bus fiber waveguide II19.
The material of described graphene layer is made up of single-layer graphene (SLG) material.
When the quantity of micro-loop optical router is more than or equal to 2, each micro-loop optical router is connected in series, by difference
The electrode 13 of micro-loop 5 applies different bias voltages to realize wavelength-division multiplex function.
When the optical signal with multiple co-wavelength value wavelength-division multiplex inputs from the input port 1 of bus fiber waveguide I18, can
By electrode 13, graphene layer 8 is applied bias voltage, in order to modulate the resonance wavelength of micro-loop 5, such that it is able to select and separate
The optical signal going out to have specific wavelength value exports from the output port 3 of bus fiber waveguide II19, and remaining optical signal is from total linear light
The output port 2 of waveguide I18 exports.
The work of a kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide of the present invention is former
Reason is: by electrode, graphene layer can be applied bias voltage and modulate chemical potential and the fermi level of Graphene, to change
The complex refractivity index of graphene layer and then change graphene layer are for the absorption of optical signal in the fiber waveguide of place, and then change in micro-loop
The numerical value of harmonic light wavelength；Can by electrode to graphene layer apply different bias voltages come in real time, select flexibly humorous
Shake optical wavelength, and the optical wavelength signal that will meet micro-ring resonant condition exported by the signal output of bus fiber waveguide II, it is achieved
It separates with other different wave length optical signals, it is achieved optical routing or wavelength-division multiplex function.
Embodiment
The gross thickness 9 of micro-loop and two bus fiber waveguide silicon layers is about 340nm, and material is chalcogenide glass；Micro-loop and two
Wide 14 and the 17 of the waveguiding structure of individual bus lightguide cross section are about 400nm；For ensureing that in waveguide, optical signal at least can
Single mode transport, the thickness of the waveguiding structure of micro-loop and two bus lightguide cross sections should be greater than or equal to 247nm；Described graphite
Alkene layer 8 should be designed near micro-loop cross section electromagnetic field intensity maximum, i.e. graphene layer and the distance at fiber waveguide top
10 should be at about 200nm.
Fig. 4 is after being coupled into the optical signal that wavelength is 2.5 μm (optic communication best transmission window) in micro-loop, graphitiferous
The modulus value scattergram of the electric field of the fundamental mode of the cross-section of the part micro-loop of alkene layer, it is seen that graphene layer is generally within type light wave
Lead at the maximum of interior electromagnetic field, and optical signal is created certain absorption；Fig. 5 is when to the input of bus fiber waveguide I18
When port 1 input wavelength is the optical signal of 2.5 μm, the modulus value scattergram of electric field of the fundamental mode on bus lightguide cross section, it is seen that light
Field is transmitted by good being limited in ducting layer.
Owing to grapheme material has higher carrier mobility, so its fermi level can be by being applied by electrode
Bias voltage change its chemical potential come be modulated by band filling effect rapidly, and then can high speed modulation its for light
The absorption of signal；Fig. 6 illustrates the applying bias voltage that the chemical potential of Graphene is as on electrode applying and strains mutually
Change, when Fig. 7 illustrates the optical signal that wavelength is 2.5 μm when the chemical potential of Graphene changes, single-layer graphene (SLG) material
Complex refractivity index also can occur to change accordingly；
Further, when in micro-loop the optical signals of transmission make the effective mould of optical signal in the modulating action of Graphene
When formula refractive index changes, the particularly change of light field effective refractive index imaginary part, can change after light transmits one week in micro-loop
Loss, and then it is mobile to make to occur the optical wavelength of resonance to produce in micro-loop, changes original resonance characteristic.
Further, when being that in the present invention, graphene layer applies certain bias voltage such as Fig. 8, the transmitance of its bus waveguide I
With the variation relation figure of operation wavelength, as can be seen from Figure when applying certain bias voltage to graphene layer, this micro-loop structure
Obviously resonance phenomena is created at 2.5 μm；As it is shown in figure 9, now this micro-loop structure applies another to graphene layer
The optical signal generation resonance that wavelength will be selected to be 2.524 μm during bias voltage, it is achieved that reach to separate different middle infrared wavelength
Optical signal function.
Further, if Figure 10 with Figure 11 is in the present invention after the different bias voltages of graphene layer applying, silicon-based micro ring light
Distribution map of the electric field in router, by can be seen that in Figure 10 that, when applying certain bias voltage to graphene layer, optical signals is total
The output port 2 coupling output of linear light waveguide II；As shown in figure 11, at another bias voltage, its optical signal will be by total linear light
The outfan 3 of waveguide I exports, and reaches to separate the optical signal function of different wave length.
Additionally, the device architecture that multiple described micro-loop and two bus waveguides form can also be cascaded by the present invention,
The electrode selectivity of different micro-loop is applied different bias voltages, and then realizes the wavelength-division multiplex of multiple wavelength channels divides
Ripple or optical routing function；It is also possible to using the former delivery outlet of this device as signal input part, former delivery outlet is as signal
Outfan realizes the conjunction wave energy in wavelength-division multiplex.
Claims (8)
1. a Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide, it is characterised in that include
At least one micro-loop optical router, described micro-loop optical router includes two bus fiber waveguides I being parallel to each other and bus light wave
Leading II, be provided with micro-loop between described bus fiber waveguide I and bus fiber waveguide II, described micro-loop connects electrode, described micro-
The region in whole or in part of ring is provided with graphene layer, and the micro-loop being provided with graphene layer includes being fluorinated object wave the most successively
Lead or chalcogenide glass ducting layer, lower sealing coat, graphene layer, upper sealing coat, fluoride waveguide or chalcogenide glass ducting layer and bag
Layer, the side of described graphene layer extends to the lower section of electrode.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that, described bus fiber waveguide I, bus fiber waveguide II and micro-loop are placed in the upper of the silicon dioxide cushion of soi structure
Side.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that, described graphene layer is parallel to each other with silicon dioxide cushion.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that, the material of bus fiber waveguide I, bus fiber waveguide II and micro-loop is fluoride glass or chalcogenide glass, fluorination
Thing glass is any one in Fluorozirconate glass, Fluoroaluminate glass, and chalcogenide glass is in Ge23Sb7S70, As2Se3, As2S3
Any one.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that,
Described bus fiber waveguide I is identical with the geometry of bus fiber waveguide II；
Described bus fiber waveguide I, bus fiber waveguide II are identical with the duct height of micro-loop；
Bus fiber waveguide I and the width of bus fiber waveguide II cross section optical waveguide structure and the optical waveguide structure of micro-loop cross section
Width identical.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that, micro-loop is identical with the coupling distance of bus fiber waveguide I and bus fiber waveguide II.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that, the material of described graphene layer is made up of single-layer graphene material.
Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide the most according to claim 1,
It is characterized in that, when the quantity of micro-loop optical router is more than or equal to 2, and each micro-loop optical router is connected in series.
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| CN108037563A (en) * | 2017-12-07 | 2018-05-15 | 中山大学 | A kind of micro-loop optical transmission apparatus of asymmetric reflective and preparation method thereof |
| DE102020102534A1 (en) | 2020-01-31 | 2021-08-05 | Gesellschaft für angewandte Mikro- und Optoelektronik mit beschränkter Haftung - AMO GmbH | Semiconductor device and semiconductor device, and methods of manufacturing the same |
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