CN108037563A - A kind of micro-loop optical transmission apparatus of asymmetric reflective and preparation method thereof - Google Patents

A kind of micro-loop optical transmission apparatus of asymmetric reflective and preparation method thereof Download PDF

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Publication number
CN108037563A
CN108037563A CN201711285335.2A CN201711285335A CN108037563A CN 108037563 A CN108037563 A CN 108037563A CN 201711285335 A CN201711285335 A CN 201711285335A CN 108037563 A CN108037563 A CN 108037563A
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CN
China
Prior art keywords
micro
loop
substrate
transmission apparatus
optical transmission
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Pending
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CN201711285335.2A
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Chinese (zh)
Inventor
陈钰杰
杨灼辉
张彦峰
余思远
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Sun Yat Sen University
National Sun Yat Sen University
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National Sun Yat Sen University
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Priority to CN201711285335.2A priority Critical patent/CN108037563A/en
Publication of CN108037563A publication Critical patent/CN108037563A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133Functions

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The present invention relates to a kind of micro-loop optical transmission apparatus of asymmetric reflective, including substrate, micro-loop on substrate is set, the upload straight wave guide on rear side of micro-loop on substrate is set, the download straight wave guide on front side of micro-loop on substrate is set, and the scattering object positioned at micro-loop left/right on substrate is set.

Description

A kind of micro-loop optical transmission apparatus of asymmetric reflective and preparation method thereof
Technical field
The present invention relates to optical communication applications and integrated opto-electronic device field, more particularly, to a kind of asymmetric reflective Micro-loop optical transmission apparatus and preparation method thereof.
Background technology
In optics, the research of stealthy aspect continue for a nearly century.The list of the concept requirement light of optical invisible To permeability.Space is divided into two parts by stealth material, is respectively inner space and the exterior space of material parcel.From exterior sky Between incide light requirement energy areflexia on stealth material and scattering pass through stealth material so that inside is able to observe that outside Situation.And the light being transmitted to from inner space on stealth material then requires that strong reflection and scattering occurs, make as few as possible Interior lights be transmitted to exterior space, observed by exterior space.Transmit and reflect in optical transport light path this requires breaking Long-range navigation thatch reciprocity, realize light transmission and reflection asymmetry.
The content of the invention
The goal of the invention of the present invention is to provide a kind of micro-loop optical transmission apparatus, it can realize the asymmetric anti-of optical transport Penetrate, or even realize the unidirectional areflexia of optical transport.
To achieve the above object, the technical solution taken of the present invention is:
A kind of micro-loop optical transmission apparatus of asymmetric reflective, including substrate, micro-loop on substrate is set, is set on substrate Upload straight wave guide on rear side of micro-loop, sets the download straight wave guide on front side of micro-loop on substrate, and is arranged on lining The scattering object positioned at micro-loop left/right on bottom.
According to non-Hermitian quantum mechanics, its Hamiltonian of open quantized system has the characteristic of non-Hermitian, i.e. Hamilton The non-Hermitian conjugate of nondiagonal element of matrix, if nondiagonal element is real number, it is unequal that non-hermiticity shows as nondiagonal element.This Kind system still has complete real energy eigenvalues under specific potential-energy function.Due to optics holography equation and Xue Ding The similitude of straightforward words equation, can simulate this quantum appearance with optical system.In integrated photonics system, with Hamiltonian What nondiagonal element characterized in the s-matrix of corresponding reflection system optics change procedure is system to different directions incident optical signal Reflectivity.In the integrated photonics system for having gain or loss or both to have concurrently, under specific index distribution, it is System still has complete real frequency spectrum, and s-matrix has non-hermiticity, therefore reflection of the system to different directions incident optical signal Rate is unequal, i.e., asymmetrical reflection.
The system being made of micro-loop and upload straight wave guide, download straight wave guide can be considered as closure when being in Critical Coupling state System, its s-matrix are Hermitians, and micro-loop has identical reflection for the pattern of two kinds of counter-propagates clockwise and anticlockwise Rate, and reflectivity is 0 under perfect state.When introducing scattering object in the outside of micro-loop, scattering object can significantly increase micro-loop Loss, at this time system there is non-hermiticity, adjusting the parameter of scattering object can cause micro-loop for clockwise and anticlockwise two The pattern of kind counter-propagate has different reflectivity, i.e. asymmetric reflective, and list can be realized under suitable scattering object parameter To unreflected optical transport.
This micro-loop optical transmission apparatus proposed by the present invention can realize the asymmetric reflective of optical transport, break reflection Reciprocity, realizes one of two big requirements of optical invisible.In addition, side of the structure for control optical transport in integrated photonics To having great importance, it can be integrated as a kind of new non-reciprocal device realized using asymmetric reflective The available solutions of isolator, circulator etc. in photonic propulsion.Further, since structure is extremely simple, and COMS process compatibles, so device Part is easily integrated, and production cost is low, has larger market potential.
Preferably, the coupling uploaded between straight wave guide, download straight wave guide and micro-loop is at or approximately at Critical Coupling state.
Preferably, the loss of micro-loop should be as low as possible, and the side wall of the micro-loop should be as smooth as possible.
Preferably, the size of the scattering object in a quarter resonance wavelength between resonance wavelength.
Preferably, straight wave guide is uploaded, download the width of straight wave guide and micro-loop and should can highly make more than 90% light field Energy transmits in the waveguide.
Preferably, the refractive index of the substrate is less than micro-loop, upload straight wave guide, download straight wave guide, the refractive index of scattering object.
Preferably, the material of the substrate is silica, and micro-loop, upload straight wave guide, download straight wave guide, the material of scattering object Expect for silicon nitride or silicon.
Meanwhile present invention also offers the preparation method of more than one devices, its particular content are as follows:
S1. certain thickness light waveguide-layer is grown on substrate;
S2. the spin coating photoresist on light waveguide-layer, then carries out graph exposure and development obtains mask pattern;
S3. performed etching according to mask pattern, obtain the structure being made of light waveguide-layer, photoresist is removed, obtain micro-loop light Transmission apparatus.
Compared with prior art, the advantages of the present invention are:
Non- Hermiticity of the micro-loop optical transmission apparatus of asymmetric reflective provided by the invention based on open optical system, Ke Yishi The asymmetric reflective optical transport of existing micro-loop system.Under suitable scattering object parameter, it might even be possible to reach unidirectional unreflected effect Fruit.The device has asymmetric reflective extinction ratio height, easy to process, the characteristics of being easily integrated, has the application prospect of height.
Brief description of the drawings
Fig. 1 is the front schematic view of device.
Fig. 2 is the schematic cross-section of device.
Fig. 3 for no scattering object when micro-loop numerical simulation result figure.
Fig. 4 is that there are the numerical simulation result figure of micro-loop during scattering object.
Fig. 5 is the preparation flow figure of device.
Embodiment
To make the technical means, the creative features, the aims and the efficiencies achieved by the present invention easy to understand, with reference to The drawings and specific embodiments, how the present invention is further explained implements.
As shown in Figure 1, 2, the micro-loop optical transmission apparatus of asymmetric reflective provided by the invention includes substrate, is arranged on substrate On micro-loop, the upload straight wave guide on rear side of the micro-loop on substrate is set, set on substrate on front side of micro-loop Straight wave guide is downloaded, and the scattering object positioned at micro-loop left/right on substrate is set.In Fig. 1,1 is substrate, and 2 be upload Straight wave guide, 3 is download straight wave guide, and 4 be micro-loop, and 5 be scattering object.
Fig. 3 for no scattering object when micro-loop numerical simulation result figure, numerical simulation the result shows that, it is micro- during no scattering object Either the reflection of pattern is all very weak clockwise or counterclockwise in ring, is similar to areflexia and both are of substantially equal, say It is bright at this time, the reflection of micro-loop is symmetrical.Fig. 4 is that there are the numerical simulation result figure of micro-loop during scattering object, the knot of numerical simulation Fruit shows, when, there are during the scattering object of certain parameter, the reflection in one of direction can be significantly enhanced, such as Fig. 4 institutes in micro-loop Show, the reflection enhancement of clockwise mode is close to ten times, and anticlockwise reflection is held essentially constant, and is similar to without anti- Penetrate, i.e. the reflection of micro-loop at this time has obvious asymmetry, is similar to have unidirectional unreflected property.
Meanwhile present invention also offers the preparation method of more than one devices, such as Fig. 5(a)、(b)、(c)It is shown, its technique Process step is as follows:
S1. certain thickness light waveguide-layer is grown on substrate;
S2. the spin coating photoresist on light waveguide-layer, then carries out graph exposure and development obtains mask pattern;
S3. performed etching according to mask pattern, obtain the structure being made of light waveguide-layer, photoresist is removed, obtain micro-loop light Transmission apparatus.
Finally illustrate, the foregoing is merely the embodiment of the present invention, is not intended to limit the scope of the invention, every The equivalent structure or equivalent flow shift made using description of the invention and accompanying drawing content, is directly or indirectly used in other Relevant technical field, is included within the scope of the present invention.

Claims (7)

  1. A kind of 1. micro-loop optical transmission apparatus of asymmetric reflective, it is characterised in that:Including substrate, set micro-loop on substrate, The upload straight wave guide on rear side of micro-loop on substrate is set, the straight ripple of download on front side of micro-loop on substrate is set Lead, and the scattering object positioned at micro-loop left/right on substrate is set.
  2. 2. the micro-loop optical transmission apparatus of asymmetric reflective according to claim 1, it is characterised in that:It is described to upload straight ripple Lead, download coupling between straight wave guide and micro-loop at or approximately at Critical Coupling state.
  3. 3. the micro-loop optical transmission apparatus of asymmetric reflective according to claim 1 or 2, it is characterised in that:The micro-loop Side wall is smooth.
  4. 4. the micro-loop optical transmission apparatus of asymmetric reflective according to claim 3, it is characterised in that:The ruler of the scattering object It is very little in a quarter resonance wavelength between resonance wavelength.
  5. 5. the micro-loop optical transmission apparatus of asymmetric reflective according to claim 3, it is characterised in that:The refraction of the substrate Rate is less than micro-loop, upload straight wave guide, download straight wave guide, the refractive index of scattering object.
  6. 6. the micro-loop optical transmission apparatus of asymmetric reflective according to claim 5, it is characterised in that:The material of the substrate For silica, micro-loop, upload straight wave guide, download straight wave guide, the material of scattering object are silicon nitride or silicon.
  7. 7. a kind of preparation method of micro-loop optical transmission apparatus according to any one of claim 1 ~ 6 asymmetric reflective, it is special Sign is:Include following steps:
    S1. certain thickness light waveguide-layer is grown on substrate;
    S2. the spin coating photoresist on light waveguide-layer, then carries out graph exposure and development obtains mask pattern;
    S3. performed etching according to mask pattern, obtain the structure being made of light waveguide-layer, photoresist is removed, obtain micro-loop light Transmission apparatus.
CN201711285335.2A 2017-12-07 2017-12-07 A kind of micro-loop optical transmission apparatus of asymmetric reflective and preparation method thereof Pending CN108037563A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108873176A (en) * 2018-06-12 2018-11-23 东南大学 A kind of close-coupled three-dimensional Wavelength division multiplexer/demultiplexer and implementation method
CN109253836A (en) * 2018-10-18 2019-01-22 武汉大学 A kind of micro-loop optical vacuum meter

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101573658A (en) * 2006-12-27 2009-11-04 3M创新有限公司 Optical microresonator
CN103941345A (en) * 2014-05-06 2014-07-23 苏州大学 Two-dimensional stratified material based SOI (Semicon-on-insulator) base micro loop filter
CN104133270A (en) * 2014-07-18 2014-11-05 南京大学 On-chip tunable optical isolator based on active-passive optical micro cavity coupling system
CN105652378A (en) * 2016-01-22 2016-06-08 南京大学 Optical circulator
CN106199837A (en) * 2016-07-27 2016-12-07 电子科技大学 A kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101573658A (en) * 2006-12-27 2009-11-04 3M创新有限公司 Optical microresonator
CN103941345A (en) * 2014-05-06 2014-07-23 苏州大学 Two-dimensional stratified material based SOI (Semicon-on-insulator) base micro loop filter
CN104133270A (en) * 2014-07-18 2014-11-05 南京大学 On-chip tunable optical isolator based on active-passive optical micro cavity coupling system
CN105652378A (en) * 2016-01-22 2016-06-08 南京大学 Optical circulator
CN106199837A (en) * 2016-07-27 2016-12-07 电子科技大学 A kind of Graphene mid-infrared light router based on fluoride waveguide or chalcogenide glass waveguide

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ZHUOHUI YANG,ZENGKAI SHAO等: "Asymmetric backscattering of a SiNx microring resonator with a mie scatterer", 《2017 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP)》 *
ZHUOHUI YANG等: "Chirality and directional emission of a SiNx-based microring resonator with position controllable scatters", 《2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108873176A (en) * 2018-06-12 2018-11-23 东南大学 A kind of close-coupled three-dimensional Wavelength division multiplexer/demultiplexer and implementation method
CN109253836A (en) * 2018-10-18 2019-01-22 武汉大学 A kind of micro-loop optical vacuum meter

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Application publication date: 20180515