CN106054410A - Silicon-based micro-ring-light router based on black phosphorus - Google Patents
Silicon-based micro-ring-light router based on black phosphorus Download PDFInfo
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- CN106054410A CN106054410A CN201610599096.7A CN201610599096A CN106054410A CN 106054410 A CN106054410 A CN 106054410A CN 201610599096 A CN201610599096 A CN 201610599096A CN 106054410 A CN106054410 A CN 106054410A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
- G02F1/0115—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass in optical fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/2934—Fibre ring resonators, e.g. fibre coils
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
- G02B6/29382—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM including at least adding or dropping a signal, i.e. passing the majority of signals
- G02B6/29383—Adding and dropping
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a silicon-based micro-ring-light router based on black phosphorus. The router comprises a bus optical waveguide I and a bus optical waveguide II which are parallel to each other; a micro ring is installed between the bus optical waveguide I and the bus optical waveguide II; the micro ring is connected with an electrode; the whole or partial region of the micro ring are provided with a black phosphorus layer; the micro ring provided with the black phosphorus layer comprises a micro ring silicon layer, a first isolation dielectric layer, a black phosphorus layer, a second isolation dielectric layer, a micro ring silicon layer and a cladding; one side of the black phosphorus layer extends under the electrode. The silicon-based micro-ring-light router is capable of selecting and separating optical signals having a specific wavelength value flexibly and in real time; The device has advantages of flexible design, fast reaction speed, low energy consumption, convenient use, and satisfies different wavelength division multiplexing requirements; by applying different bias voltages to different electrodes, it is possible to realize the selection of optical signals of different wavelengths to realize the optical routing function.
Description
Technical field
The invention belongs to integrated optics technique field, disclose a kind of silicon-based micro ring optical router based on black phosphorus, by containing
There is black phosphorus to couple composition with silicon-based micro ring and two straight wave guides of electrode, can be used for realizing OWDM and optical routing function.
Background technology
In dielectric substrate, silicon (SOI, Silicon on Insulator) material has high index-contrast, can be at CMOS
(Complementary-Metal-Oxide-Semiconductor) photonic device of compact conformation is realized under compatible technology.By
The micro-ring resonator that ring optical waveguide and direct light waveguide are coupled to form is the optical filter of a compact conformation, and it can be used to
Build the integrated optical device of multiple different purposes, pass including photomodulator, photoswitch, optical add-drop multiplexer, optical router, light
Sensor etc..Theory and experimentation in recent years also indicate that, silicon-based micro ring resonance structure can largely reduce device
Size to adapt to higher integrated level, and have be suitable for using single chip integrated technique to make, cascade form many more flexibly
The outstanding advantages such as change.Therefore micro-ring resonant structure based on SOI material is for making low cost, high-performance and compact conformation
Photoelectric device is significant.
After Graphene, two dimensional crystal material, due to the optics of its excellence and electrology characteristic, becomes semi-conducting material and grinds
The new direction studied carefully.Department of physics of Fudan University Zhang Yuanbo teaches seminar and is found that a kind of New Two Dimensional semi-conducting material is black
Phosphorus.Black phosphorus is the two-dimentional phosphorus atoms layer of a kind of monolayer honeycomb shape lattice structure, and it has extraordinary semiconductor property, integrated
Circuit and integrated optics field have boundless application prospect；There is good electron mobility (～1000cm2/Vs),
Also have the highest leakage current modulation rate (being 10000 times of Graphene), and there is saturated absorption characteristic；And it has one
The quasiconductor band gap of 0.3eV, is equivalent to the photon wavelength of 4.1 μm, and this shows that black phosphorus can be used in broadband optical modulation.This of black phosphorus
A little characteristics make it can give full play to its advantage on an optical modulator (see document Rui Zhang, et al.Broadband
black phosphorus optical modulator in visible to mid-infrared spectral
range.)；And utilize same principle can realize the function of optical routing.Black phosphorus nano belt (phosphorene nanofibbon,
PNR) also receiving much attention because of its special local edge, research shows that hydrogen is saturated and black phosphorus after the saturated two class passivation patterns of fluorine is received
Rice can change along with the change of extra electric field with its band gap that (see document Zhang Long, ten thousand wave brightness, Xu Fuming, etc. black phosphorus nanometer band
The regulation and control of minor structure).
The optical communication network set up by opto-electronic devices such as laser instrument, photomodulator, optical fiber, photo-detectors has low damage
, low time delay, the advantage such as big bandwidth and electromagnetism interference.Light WDM technology is the most successful, the most most widely used light
Multi-channel Technology, has established material base for building the fiber optic network of vast capacity, and has been suitable for OWDM and light path
The most increasingly it is subject to by technology and OWDM or optical routing components and parts with broadband, reliable and stable, extensibility etc.
To paying close attention to and paying attention to.
Summary of the invention
The present invention provides a kind of silicon-based micro ring optical router based on black phosphorus, solves that graphite is dilute itself does not has band gap, is difficult to
The problem highly integrated with other optics.
For reaching above-mentioned purpose, the technical solution used in the present invention is as follows:
A kind of silicon-based micro ring optical router based on black phosphorus, described micro-loop optical router includes two buses being parallel to each other
Fiber waveguide I and bus fiber waveguide II, be provided with micro-loop, described micro-loop between described bus fiber waveguide I and bus fiber waveguide II
Connecting and have electrode, the region in whole or in part of described micro-loop is provided with black phosphorus layer, and the micro-loop being provided with black phosphorus layer depends on from bottom to up
Secondary include micro-loop silicon layer, the first spacer medium layer, black phosphorus layer, the second spacer medium layer, micro-loop silicon layer and covering, described black phosphorus layer
Side extend to the lower section of electrode.
In technique scheme, described bus fiber waveguide I, bus fiber waveguide II and micro-loop are placed in the titanium dioxide of soi structure
The top of silicon buffer layer.
In technique scheme, described black phosphorus layer is parallel to each other with silicon dioxide cushion.
In technique scheme, the cross section of linear light waveguide I, bus fiber waveguide II and micro-loop all uses ridge waveguide to tie
Structure.
In technique scheme, described bus fiber waveguide I is identical with the geometry of bus fiber waveguide II；Described total linear light
Waveguide I, bus fiber waveguide II are identical with the duct height of micro-loop；Bus fiber waveguide I and bus fiber waveguide II cross section
The ridge width of ridge optical waveguide structure is identical with the ridge width of the ridge optical waveguide structure of micro-loop cross section.
In technique scheme, micro-loop is identical with the coupling distance of bus fiber waveguide I and bus fiber waveguide II.
In technique scheme, the material of described black phosphorus layer, by being passivated black phosphorus nano belt, can be that hydrogen is saturated or fluorine is saturated
The black phosphorus nano belt of two class passivation patterns.
In technique scheme, the first described spacer medium layer and the second spacer medium layer are insulant, Ke Yishi
One of Si oxide, silicon nitrogen oxides, boron nitride.
In technique scheme, when the quantity of micro-loop optical router is more than or equal to 2, each micro-loop optical router is connected
Connect.
Compared with prior art, beneficial effects of the present invention:
The present invention, based on soi structure, can use commercial SOI wafer to make, compatible with CMOS technology, and device energy
Consume low good stability, it is simple to interconnect with Other Devices.
The present invention uses and inserts a point composite micro-ring resonant structure, decreases device size area to a great extent so that
Component compact, it is simple to integrated.
By electrode, black phosphorus layer is applied different bias voltages, modulate the resonance wavelength in micro-loop flexibly, thus
Can select flexibly and in real time and isolate the optical signal with specific wavelength value.
Meanwhile, the device flexible design of the present invention, energy consumption are relatively low, easy to use, can be by bus fiber waveguide I being connected
Fetch carry out multiple elementary cell cascade make for meeting different wavelength-division multiplex requirements；The signal of telecommunication is applied to black phosphorus by electrode
On layer, producing bias field, along with the change of electric field, its band gap also there will be change, because the change of band gap can change black phosphorus
Absorption characteristic to special wavelength light, and then control the resonance of special wavelength light.By electrode is applied different bias voltages,
The selection of different wave length optical signal can be realized to realize optical routing function.Relative to Graphene micro-loop router by change
Electric field controls Graphene effective refractive index, the band gap of black phosphorus is direct band gap, and i.e. bottom conduction band and valence band top is at same position,
This means that black phosphorus can reduce the loss of light in light path with light direct-coupling.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the cross-sectional structure figure of the micro-loop comprising black phosphorus layer in the present invention.
Fig. 3 is bus fiber waveguide I and the cross-sectional structure figure of bus fiber waveguide II in the present invention.
Fig. 4 be under hydrogen saturated passivation pattern the band gap of the black phosphorus nano belt of two class different structures with electric field change schematic diagram.
Fig. 5 is the scattergram of the electric field of the fundamental mode modulus value of the micro-loop lightguide cross section comprising black phosphorus layer in the present invention.
Fig. 6 is the scattergram of electric field of the fundamental mode modulus value on bus fiber waveguide I cross section in the present invention.
The scattergram of electric field in micro-loop when Fig. 7 is optical signals 3 output port output in the present invention.
The scattergram of electric field in micro-loop when Fig. 8 is optical signals 2 output port output in the present invention.
Detailed description of the invention
All features disclosed in this specification, or disclosed all methods or during step, except mutually exclusive
Feature and/or step beyond, all can combine by any way.
The present invention will be further described below in conjunction with the accompanying drawings:
Below in conjunction with embodiment, the invention will be further described, and described embodiment is only a present invention part
Embodiment, is not whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art is not making
Obtained under creative work premise other used by embodiment, broadly fall into protection scope of the present invention.
In conjunction with accompanying drawing, the silicon-based micro ring optical router based on black phosphorus of the present invention, including at least one micro-loop optical router,
Described micro-loop optical router includes two bus fiber waveguides I18 being parallel to each other and bus fiber waveguide II19, described total linear light
Being provided with micro-loop 5 between waveguide I18 and bus fiber waveguide II19, described micro-loop 5 connects electrode 13, the entirety of described micro-loop 5
Or subregion is provided with black phosphorus layer, the micro-loop being provided with black phosphorus layer includes that micro-loop silicon layer 51, first is isolated the most successively
Dielectric layer 61, black phosphorus layer the 8, second spacer medium layer 62 and micro-loop silicon layer 51 and covering 20, the side of described black phosphorus layer 8 extends to
The lower section of electrode 13.I other words, black phosphorus layer 8 is arranged on micro-loop 5 through the first spacer medium layer 61 and the second spacer medium layer 62
Between micro-loop silicon layer 51.
Described bus fiber waveguide I18, bus fiber waveguide II19 and micro-loop 5 are placed in the silicon dioxide cushion 12 of soi structure
Top.Wherein soi structure includes silicon substrate the most successively and silicon dioxide intermediate layer and silicon layer, i other words total linear light
Waveguide I18, bus fiber waveguide II19 and micro-loop 5 are processed by methods such as etchings by the silicon layer of the superiors, the bag of the present invention
Layer 20 is i.e. positioned at the air layer of the top.
Wherein, the subtended angle 7 that micro-loop is circular is controlled by the scope that the black phosphorus layer of the present invention covers by black phosphorus layer, and conduct
A kind of preferably mode of the present invention, black phosphorus layer is arranged near micro-loop 5 cross section electromagnetic field intensity maximum.
Described black phosphorus layer 8 is parallel to each other with silicon dioxide cushion 12.
The cross section of bus fiber waveguide I18, bus fiber waveguide II19 and micro-loop 5 all uses ridge waveguide structure.
Described bus fiber waveguide I18 is identical with the geometry of bus fiber waveguide II19；Described bus fiber waveguide I18, total
Linear light waveguide II19 is identical with the duct height of micro-loop 5；Bus fiber waveguide I18 and the ridge of bus fiber waveguide II19 cross section
The ridge wide 17 of type optical waveguide structure is wide with the ridge of the ridge optical waveguide structure of micro-loop 5 cross section 14 identical.
Micro-loop 5 is identical with the coupling distance of bus fiber waveguide I18 and bus fiber waveguide II19.
The material of described black phosphorus layer, by being passivated black phosphorus nano belt, can be that hydrogen is saturated or saturated two classes of fluorine are passivated the black of patterns
Phosphorus nano belt is made.
The first described spacer medium layer and the second spacer medium layer are insulant, can be Si oxide, silicon nitrogen oxygen
One of compound, boron nitride.
When the quantity of micro-loop optical router is more than or equal to 2, each micro-loop optical router is connected in series, by difference
The electrode 13 of micro-loop 5 applies different bias voltages to realize wavelength-division multiplex function.
When the optical signal with multiple co-wavelength value wavelength-division multiplex inputs from the input port 1 of bus fiber waveguide I18, can
By electrode 13, black phosphorus layer 8 is applied bias voltage, in order to modulate the resonance wavelength of micro-loop 5, such that it is able to select and isolate
The optical signal with specific wavelength value exports from the output port 3 of bus fiber waveguide II19, and remaining optical signal is from bus light wave
The output port 2 leading I18 exports.
The operation principle of a kind of silicon-based micro ring optical router based on black phosphorus of the present invention is: can be by electrode to black phosphorus layer
Apply bias voltage and modulate the band gap of black phosphorus, to change black phosphorus layer for the absorption of optical signal, Jin Ergai in the fiber waveguide of place
Become the numerical value of harmonic light wavelength in micro-loop；By electrode, black phosphorus layer can be applied different bias voltages to come in real time, flexibly
Selective resonance optical wavelength, and by defeated by the signal output port of bus fiber waveguide II for the optical wavelength signal that meets micro-ring resonant condition
Go out, it is achieved it separates with other different wave length optical signals, it is achieved optical routing or wavelength-division multiplex function.
Embodiment
The gross thickness 9 of micro-loop and two bus fiber waveguide silicon layers is about 340nm；Micro-loop and two bus fiber waveguides are transversal
The ridge wide 14 and 17 of the ridge waveguide structure in face is about 400nm；For ensureing the single mode transport of optical signal in waveguide, micro-loop and
The ridge width of the ridge waveguide structure of two bus lightguide cross sections should be greater than or equal to 260nm；Described black phosphorus layer 8 should be set
Count near micro-loop cross section electromagnetic field intensity maximum, i.e. black phosphorus layer should be at 200nm with the distance 10 at ridge optical waveguide top
Left and right.
Fig. 5 is after being coupled into the optical signal that wavelength is 1550nm (optic communication best transmission window) in micro-loop, containing black
The modulus value scattergram of the electric field of the fundamental mode of the cross-section of the part micro-loop of phosphorous layer, it is seen that black phosphorus layer is generally within ridge light wave
Lead at the maximum of interior electromagnetic field, and optical signal is created certain absorption；Fig. 6 is when to the input of bus fiber waveguide I18
When port 1 input wavelength is the optical signal of 1550nm, the modulus value scattergram of electric field of the fundamental mode on bus lightguide cross section, it is seen that light
Field is transmitted by good being limited in ducting layer.
Fig. 4 be the black phosphorus nano belt of the saturated lower two class different structures of hydrogen under passivation pattern band gap with the signal of electric field change
Figure, it can be seen that along with the enhancing of electric field, its band-gap energy declines rapidly.The loss after light transmits one week in micro-loop can be changed,
And then it is mobile that the optical wavelength that resonance occurs in micro-loop can be made to produce, and changes original resonance characteristic.
Further, if Fig. 7 with Fig. 8 is in the present invention after the different bias voltages of black phosphorus layer applying, silicon-based micro ring optical routing
Distribution map of the electric field in device, by Fig. 7 can be seen that when applying certain bias voltage to black phosphorus layer, optical signals bus fiber waveguide
The output port 3 coupling output of II；As shown in Figure 8, at another bias voltage, defeated by by bus fiber waveguide I of its optical signal
Go out end 2 output, reach to separate the optical signal function of different wave length.
Further, owing to the change of black phosphorus gap causes it to change for the absorption of light field in micro-loop fiber waveguide,
And then change the numerical value of harmonic light wavelength, such that it is able to the numerical value of the bias voltage applied via electrode comes in real time, flexibly
Select different harmonic light wavelength so that selected harmonic light wavelength is from the output port 2 of bus fiber waveguide I or total linear light
The output port 3 of waveguide II exports, thus realizes the function of OWDM or optical routing.
Additionally, the device architecture that multiple described micro-loop and two bus waveguides form can also be cascaded by the present invention,
The electrode selectivity of different micro-loop is applied different bias voltages, and then realizes the wavelength-division multiplex of multiple wavelength channels divides
Ripple or optical routing function；It is also possible to using the former delivery outlet of this device as signal input part, former delivery outlet is as signal
Outfan realizes the conjunction wave energy in wavelength-division multiplex.
Claims (9)
1. a silicon-based micro ring optical router based on Graphene, it is characterised in that include micro-loop optical router unit, micro-loop light
Router unit includes two bus fiber waveguides I (18) being parallel to each other and bus fiber waveguide II (19), described bus light wave
Leading and be provided with micro-loop (5) between I (18) and bus fiber waveguide II (19), described micro-loop connects electrode (13), described micro-loop
Region is provided with black phosphorus layer (8) in whole or in part, and the micro-loop being provided with graphene layer (8) includes micro-loop silicon layer the most successively
(51), the first spacer medium layer (61), black phosphorus layer (8), the second spacer medium layer (62), micro-loop silicon layer (51) and covering (20),
First spacer medium layer (61) and the second spacer medium layer (62) are arranged between the micro-loop silicon layer (51) of micro-loop (5).
Silicon-based micro ring optical router based on Graphene the most according to claim 1, it is characterised in that described bus light wave
Lead the top that I (18), bus fiber waveguide II (19) and micro-loop (5) are placed in the silicon dioxide cushion (12) of soi structure.
Silicon-based micro ring optical router based on Graphene the most according to claim 1, it is characterised in that described black phosphorus layer
(8) it is parallel to each other with silicon dioxide cushion (12).
Silicon-based micro ring optical router based on black phosphorus the most according to claim 1, it is characterised in that bus fiber waveguide I
(18), the cross section of bus fiber waveguide II (19) and micro-loop (5) all uses ridge waveguide structure.
Silicon-based micro ring optical router based on black phosphorus the most according to claim 1, it is characterised in that described bus fiber waveguide
I (18) is identical with the geometry of bus fiber waveguide II (19)；Described bus fiber waveguide I (18), bus fiber waveguide II (19) and
The duct height of micro-loop (5) is identical；Bus fiber waveguide I (18) and the ridge optical waveguide of both cross sections of bus fiber waveguide II (19)
The ridge width of structure is identical with the ridge width of the ridge optical waveguide structure of micro-loop cross section.
Silicon-based micro ring optical router based on black phosphorus the most according to claim 1, it is characterised in that micro-loop and bus light wave
The coupling distance leading I (18) and bus fiber waveguide II (19) is identical.
Silicon-based micro ring optical router based on black phosphorus the most according to claim 1, it is characterised in that described black phosphorus layer (8)
Material by being passivated black phosphorus nano belt, can be that hydrogen is saturated or the black phosphorus nano belt of the saturated two classes passivation patterns of fluorine.
Silicon-based micro ring optical router based on black phosphorus the most according to claim 1, it is characterised in that: the first described isolation
Dielectric layer (61) and the second spacer medium layer (62) are insulant, for one of Si oxide, silicon nitrogen oxides, boron nitride.
Silicon-based micro ring optical router based on black phosphorus the most according to claim 1, it is characterised in that when micro-loop optical router
The quantity of unit is more than or equal to 2, and each micro-loop optical router is connected in series.
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| CN201610599096.7A CN106054410A (en) | 2016-07-27 | 2016-07-27 | Silicon-based micro-ring-light router based on black phosphorus |
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Cited By (3)
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| CN107602912A (en) * | 2017-08-15 | 2018-01-19 | 昆明理工大学 | A kind of nano-meter flame retardantses for high polymer material |
| CN110673266A (en) * | 2019-09-19 | 2020-01-10 | 中国科学院半导体研究所 | Narrow-band optical filter based on high-order micro-ring resonator |
| CN113300965A (en) * | 2021-05-17 | 2021-08-24 | 桂林航天工业学院 | Cellular router for network-on-chip interconnection |
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| CN110673266A (en) * | 2019-09-19 | 2020-01-10 | 中国科学院半导体研究所 | Narrow-band optical filter based on high-order micro-ring resonator |
| CN113300965A (en) * | 2021-05-17 | 2021-08-24 | 桂林航天工业学院 | Cellular router for network-on-chip interconnection |
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Application publication date: 20161026 |