CN110324019A - 具有嵌入式边界环的耦合谐振器滤波器 - Google Patents

具有嵌入式边界环的耦合谐振器滤波器 Download PDF

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Publication number
CN110324019A
CN110324019A CN201910217433.5A CN201910217433A CN110324019A CN 110324019 A CN110324019 A CN 110324019A CN 201910217433 A CN201910217433 A CN 201910217433A CN 110324019 A CN110324019 A CN 110324019A
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CN
China
Prior art keywords
resonator
crf
electrode
boundary
piezoelectric layer
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Pending
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CN201910217433.5A
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English (en)
Chinese (zh)
Inventor
苏珊·克罗伊策
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Qorvo US Inc
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Qorvo US Inc
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Publication of CN110324019A publication Critical patent/CN110324019A/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/584—Coupled Resonator Filters [CFR]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0095—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201910217433.5A 2018-03-28 2019-03-21 具有嵌入式边界环的耦合谐振器滤波器 Pending CN110324019A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862649339P 2018-03-28 2018-03-28
US62/649,339 2018-03-28
US16/287,277 US11095267B2 (en) 2018-03-28 2019-02-27 Coupled resonator filter with embedded border ring
US16/287,277 2019-02-27

Publications (1)

Publication Number Publication Date
CN110324019A true CN110324019A (zh) 2019-10-11

Family

ID=68055614

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910217433.5A Pending CN110324019A (zh) 2018-03-28 2019-03-21 具有嵌入式边界环的耦合谐振器滤波器

Country Status (4)

Country Link
US (1) US11095267B2 (cg-RX-API-DMAC10.html)
JP (1) JP7405513B2 (cg-RX-API-DMAC10.html)
KR (1) KR102658389B1 (cg-RX-API-DMAC10.html)
CN (1) CN110324019A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
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CN114070224A (zh) * 2020-08-06 2022-02-18 诺思(天津)微系统有限责任公司 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备
CN116131798A (zh) * 2022-11-22 2023-05-16 河源市艾佛光通科技有限公司 一种固态体声波谐振器及其制作方法

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US11509287B2 (en) 2018-12-14 2022-11-22 Qorvo Us, Inc. Bi-polar border region in piezoelectric device
US12316304B2 (en) * 2022-12-21 2025-05-27 Rf360 Singapore Pte. Ltd. Vertically coupled SAW resonators
US12620967B2 (en) 2023-03-17 2026-05-05 Skyworks Solutions, Inc. Enhanced bulk acoustic wave resonator performance using metallic bragg mirrors
CN121241512A (zh) * 2023-07-03 2025-12-30 株式会社村田制作所 压电器件
US20250219615A1 (en) * 2024-01-03 2025-07-03 Skyworks Global Pte Ltd. Bulk acoustic wave resonator with bragg grating embedded in electrode

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US20120248941A1 (en) * 2011-03-29 2012-10-04 Avago Technologies Wireless Ip (Singapore) Pte. Lt Stacked bulk accoustic resonator and method of fabricating the same
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US8330325B1 (en) * 2011-06-16 2012-12-11 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer
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US20150349747A1 (en) * 2014-05-29 2015-12-03 Avago Technologies General Ip ( Singapore) Pte. Ltd. Capacitive coupled resonator device with air-gap separating electrode and piezoelectric layer

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114070224A (zh) * 2020-08-06 2022-02-18 诺思(天津)微系统有限责任公司 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备
CN116131798A (zh) * 2022-11-22 2023-05-16 河源市艾佛光通科技有限公司 一种固态体声波谐振器及其制作方法

Also Published As

Publication number Publication date
US20190305755A1 (en) 2019-10-03
JP2019198066A (ja) 2019-11-14
KR102658389B1 (ko) 2024-04-16
JP7405513B2 (ja) 2023-12-26
US11095267B2 (en) 2021-08-17
KR20190113670A (ko) 2019-10-08

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