CN110315399A - The fine gear finishing processing device and processing method of near-field ultrasound cavitation compound fluid shearing - Google Patents

The fine gear finishing processing device and processing method of near-field ultrasound cavitation compound fluid shearing Download PDF

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Publication number
CN110315399A
CN110315399A CN201910602790.3A CN201910602790A CN110315399A CN 110315399 A CN110315399 A CN 110315399A CN 201910602790 A CN201910602790 A CN 201910602790A CN 110315399 A CN110315399 A CN 110315399A
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China
Prior art keywords
fine gear
polishing
fluid
ultrasound cavitation
lower tray
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CN201910602790.3A
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Chinese (zh)
Inventor
郭策
刘佳
杨胜强
李文辉
李秀红
张栋梁
杨丰毓
姚炳廷
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Taiyuan University of Technology
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Taiyuan University of Technology
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Priority to CN201910602790.3A priority Critical patent/CN110315399A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention belongs to Precision and Ultra-precision Machining fields, are related specifically to the fine gear finishing processing device and processing method of a kind of near-field ultrasound cavitation compound fluid shearing.Including near-field ultrasound cavitation system, fluid shearing system and polishing fluid circulation, near-field ultrasound cavitation system includes supersonic generator, PZT (piezoelectric transducer), amplitude transformer, top tray, lower tray and accurate bracket;The supersonic generator is connect with PZT (piezoelectric transducer) by conducting wire, PZT (piezoelectric transducer) is connect with amplitude transformer by studs, it is provided in amplitude transformer for the ring flange fixed with accurate bracket, amplitude transformer is bolted with top tray, lower tray is set below top tray, fine gear is provided in lower tray, fine gear is bolted with fixture.The cavitation bubble and solid abrasive particles particle of polishing fluid of the present invention can effectively clean minute groove structural interface, to realize efficient, accurate, the green and flexible skin processing of fine gear.

Description

The fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing and processing Method
Technical field
The invention belongs to Precision and Ultra-precision Machining fields, are related specifically to a kind of near-field ultrasound cavitation compound fluid shearing Fine gear finishing processing device and processing method.
Background technique
As product is increasingly to miniaturization, intelligence and miniaturization development, the Finishing of part with microstructure The latency development direction of micro-workpiece manufacture will be become.Minute groove constitutional detail with function of surface such as micro-channel, micro- Thin rib, fine slot, fine pit etc., so that traditional precision and ultraprecise processing method is extremely difficult to preferably process matter Amount and processing efficiency.
Fine gear is the Typical Representative of part with microstructure.Fine gear with minute groove structure feature is miniature The frontier science and technology products such as the gyroscope of satellite and minute vehicle, military microrobot and MEMS it is main transmission and Power part.But the groove structure of fine gear brings many inconvenience to its manufacture and processing technology, technology obtains at present Fine Gear Processing precision it is lower, and gear quality is not generally high.This results in promoting fine gear quality and must rely on Final processing technology --- skin processing.
In 0.1-10 mm between the outer diameter of fine gear is general, thus its groove structure easily become in skin processing it is thin Weak link.Skin processing is carried out to minute groove structure, it is necessary to previous procedure is stayed in into the various defects on body structure surface, Such as surface relief injustice, incomplete seamed edge, burr, scuffing of colliding with, microfissure removal, to guarantee the complete of groove structure Whole property.Currently, fine-structure element mainly promotes its processing essence by traditional polishing processing method such as polishing processes and Trimming Degree and reduce surface roughness value, these methods are generally mostly operated by experience, not only time-consuming, great work intensity and And processing efficiency and precision are all relatively low, it is more difficult to guarantee processing quality;Although also having part ultrasonic cleaning and chemical process etc. non- Traditional polishing processing method proposes, but applies and more limit to.Patent (ZL201410400983.8) discloses a kind of ultrasound control The shear thickening polishing method and device of system, it is this for the shear thickening polishing method of complex-curved proposition ultrasonic wave control Method shears the holding power of solid particle in fluid by far field ultrasound-enhanced, but the effect of far field ultrasonic cavitation is more It is faint, it is limited to solid particle impact invigoration effect promotion, therefore it is difficult to have larger range to the surface quality of minute groove structure Improvement.
For above-mentioned fine gear skin processing demand, the polishing processing method to fine gear is needed to improve, if Reasonable fine gear finishing process is counted, realizes that the surface quality of fine gear is promoted.
Summary of the invention
The present invention is directed to the characteristics of fine gear skin processing, to promote the energy of solid abrasive particulate abrasive and polishing Power reduces the residual burr of side wall construction, reduces the surface roughness of trench bottom surfaces and side wall construction, and then realize fine gear Skin processing, the fine gear finishing processing device and processing method of a kind of shearing of near-field ultrasound cavitation compound fluid are provided.
The present invention takes following technical scheme: a kind of fine gear skin processing of near-field ultrasound cavitation compound fluid shearing Device, including near-field ultrasound cavitation system, fluid shearing system and polishing fluid circulation, near-field ultrasound cavitation system includes Supersonic generator, PZT (piezoelectric transducer), amplitude transformer, top tray, lower tray and accurate bracket;The supersonic generator and piezoelectricity Energy converter is connected by conducting wire, and PZT (piezoelectric transducer) connect with amplitude transformer by studs, be provided in amplitude transformer for essence The fixed ring flange of close bracket, amplitude transformer are bolted with top tray, and lower tray is arranged below top tray, sets in lower tray It is equipped with fine gear, fine gear is bolted with fixture.
Accurate bracket includes moving horizontally component, vertically mobile member and mobile pallet, described to move horizontally component one end It is provided with the hole for fixing amplitude transformer ring flange, the other end of component is moved horizontally and the vertically mobile member for being provided with interior straight trough is logical It crosses and is bolted;The end of vertically mobile member is bolted with mobile pallet;The dynamic pallet is used to support entirely Accurate bracket;Vertically mobile member is provided with vertical graduation apparatus;The mobile pallet is provided with angle of revolution scale.
Fluid shearing system includes polishing pond, motor, belt transmission system, retarder and propeller, polishes and is equipped in pond Polishing fluid, polishing pond outer wall are fixed with motor and retarder, and retarder is connect with motor by belt transmission system;Propeller It is placed in polishing bottom of pond portion, and is connect with retarder by shaft coupling.
Polishing fluid circulation includes circulation line and hydraulic pump, and circulation line includes upper circular tube road and lower circulation pipe Road;Upper circular tube road one end is connect with the left upper end in polishing pond, and the other end is connect with hydraulic pump upper end;One end of lower circulation line It is connect with hydraulic pump lower end, the other end is connect with the bottom righthand side in polishing pond.
Fixture is fixed on polishing pond side wall, and keeps being parallel to each other between top tray and lower tray.
PZT (piezoelectric transducer), amplitude transformer, top tray, lower tray and fine gear keep coaxial arrangement.
Spacing between top tray and lower trayhMeet following relationship:
, in formula,nFor even number,λFor the wavelength of ultrasonic wave.Top tray and lower tray are arranged in this way can guarantee top tray The incident acoustic wave of radiation reaches maximum with the received reflected acoustic wave of lower tray and is superimposed, and is throwing to play and strengthen ultrasonic wave The ability of near-field ultrasound cavitation effect occurs in light liquid.The ultrasonic wave for being 20 kHz for frequency, polishing fluid is approximately aqueous solution,h37.5mm can be successively taken as according to fine gear width, 75mm, 111mm are equivalent.
Polish the central axis and fine Gear axis keeping parallelism in pond.
A kind of processing method of the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing, including it is following Step,
1) one end of fine gear is fixed in the lower tray of near-field ultrasound cavitation generating system, and passes through spiral shell with fixture It tethers and connects;
2) according to fine gear material, corresponding polishing fluid is selected, and is added it in polishing pond;
3) adjustment precision bracket probes into the top tray of near field ultrasonic cavitation generating system in polishing pond, and protects with lower tray Hold axisymmetrical;
4) fluid circulation system is opened, the pressure and speed of polishing fluid are adjusted by hydraulic pump, to make polishing fluid from polishing pond Lower end extraction and from upper end be pumped into;
5) motor is opened, so that propeller revolution at a high speed and generates in polishing fluid in the gap of top tray and lower tray Fluid shearing effect;
6) start ultrasonic generator, by adjusting supersonic frequency and amplitude, generated in the gap of top tray and lower tray Strong ultrasound cavitation effect;
7) comprehensive adjustment near-field ultrasound cavitation system and fluid shearing system, to realize the skin processing of fine gear;
8) after processing is completed, another end face of fine gear is fixed on to the lower tray of near-field ultrasound cavitation generating system On, repeat the skin processing that above step completes fine gear.
The working principle of the invention is: the ultrasonic wave that near-field ultrasound cavitation system generates passes through PZT (piezoelectric transducer), amplitude transformer Incident acoustic wave is formed in polishing fluid with top tray, incident acoustic wave, which encounters lower tray again, can occur the reflection of sound wave, to be formed Reflected acoustic wave;Ultrasonic wave will form stable ultrasonic energy by repeatedly incident and reflection between top tray and lower tray State;The ultrasonic wave of some strength can form cavitation effect in polishing fluid, generate the cavitation gas largely with cleaning effect Bubble, and the gap area between top tray and lower tray can make full use of the energy state of ultrasonic wave and strengthen near field to play Ultrasonic cavitation purpose.At the same time, fluid shearing system makes the solid abrasive particle in polishing fluid generate one to fine gear Determine grinding and the polishing action of degree.Therefore, when the near-field ultrasound cavitation compound fluid shearing fine gear of skin processing, near field is super On the one hand the cavitation bubble with certain energy that acoustic cavitation system generates can directly generate fine gear channel structure strong Power cleaning, on the other hand, cavitation bubble by shock peening solid particle, can further be promoted solid abrasive particulate abrasive and The ability of polishing.
Compared with prior art, the beneficial effects of the present invention are: 1) overcoming traditional part with microstructure far field ultrasound clearly Wash the low problem of journey cavitation effect utilization rate;2) solid particle of millimeter magnitude in single fluid shear history is avoided It is easy to collide with to the generation of structure wall surface, and the problem of the solid particle impact energy deficiency of micro-nano magnitude;3) present invention proposes Near-field ultrasound cavitation compound fluid shearing skin processing rely on near-field ultrasound cavitation bubble strengthen solid particle impact principle, The ability of solid abrasive particulate abrasive and polishing can be substantially improved;4) cavitation bubble of polishing fluid and solid abrasive particles particle energy Enough effectively cleaning minute groove structural interfaces, to realize efficient, accurate, the green and flexible skin processing of fine gear.
Detailed description of the invention
The theory structure schematic diagram of Fig. 1 device of the present invention;
Fig. 2 near-field ultrasound cavitation compound fluid shears skin processing mechanism schematic diagram;
Fig. 3 is to move horizontally component schematic diagram;
Fig. 4 is vertically mobile member schematic diagram;
Fig. 5 is mobile pallet schematic diagram;
In figure: 1- supersonic generator, 2- PZT (piezoelectric transducer), 3- amplitude transformer, 4- precision bracket, 5- top tray, 6- subtle gear, 7- lower tray, 8- fixture, 9- polishing pond, 10- motor, 11- belt transmission system, 12- retarder, 13- propeller, 14- are hydraulic Pump, 15- polish fluid circulation, 16- polishing fluid, 17- ultrasonic wave, 18- fluid shearing, 19- cavitation bubble, 20- grit particles.
Specific embodiment
With reference to the accompanying drawing 1, the present invention will be described in detail.
A kind of fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing, including near-field ultrasound cavitation system System, fluid shearing system and polishing fluid circulation, near-field ultrasound cavitation system includes supersonic generator 1, piezoelectric energy-conversion Device 2, amplitude transformer 3, top tray 5, lower tray 7 and accurate bracket 4;The supersonic generator 1 passes through conducting wire with PZT (piezoelectric transducer) 2 Connection, PZT (piezoelectric transducer) 2 connect with amplitude transformer 3 by studs, be provided in amplitude transformer 3 for the fixation of accurate bracket Ring flange, amplitude transformer 3 are bolted with top tray 5, and lower tray 7 is arranged below top tray 5, is provided in lower tray 7 micro- Serration wheel 6, fine gear 6 are bolted with fixture 8;
Fluid shearing system includes polishing pond 9, motor 10, belt transmission system 11, retarder 12 and propeller 13, polishes pond 9 In be equipped with polishing fluid 16, polishing 9 outer wall of pond is fixed with motor 10 and retarder 12, and retarder 12 and motor 10 pass through band and pass Dynamic system 11 connects;Propeller 13 is placed in polishing 9 bottom of pond, and is connect with retarder 12 by shaft coupling;
Polishing fluid circulation includes circulation line 15 and hydraulic pump 14, and circulation line 15 includes upper circular tube road and lower circulation pipe Road;Upper circular tube road one end is connect with the left upper end in polishing pond 9, and the other end is connect with 15 upper end of hydraulic pump;Lower circulation line One end is connect with 14 lower end of hydraulic pump, and the other end is connect with the bottom righthand side in polishing pond 9.
Accurate bracket 4 is mainly formed by moving horizontally component 41, vertically mobile member 42 and mobile pallet 43;The level 41 one end of mobile member is provided with the hole for fixing amplitude transformer ring flange, moves horizontally the other end of component 41 and is provided with interior straight trough Vertically mobile member 42 be bolted;The end of vertically mobile member 42 is bolted with mobile pallet 43;Institute The dynamic pallet 43 stated is used to support entire accurate bracket;Vertically mobile member 42 is provided with vertical graduation apparatus, accurately controls near field The vertical shift distance of ultrasonic cavitation system;The mobile pallet 43 is provided with angle of revolution scale, accurately controls near-field ultrasound The angle of revolution of cavitation system.
Fixture 8 is fixed on polishing 16 side wall of pond, and keeps being parallel to each other between top tray 5 and lower tray 7.
PZT (piezoelectric transducer) 2, amplitude transformer 3, top tray 5, lower tray 7 and fine gear 6 keep axisymmetrical.
Spacing between top tray 5 and lower tray 7hMeet following relationship:, in formula,nFor even number,λFor ultrasonic wave Wavelength.
Polish the central axis and fine 6 axis keeping parallelism of gear in pond 9.
A kind of processing method of the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing, including it is following Step,
1) one end of fine gear 6 is fixed in the lower tray 8 of near-field ultrasound cavitation generating system, and passed through with fixture 9 It is bolted;
2) according to fine gear material, corresponding polishing fluid is selected, and is added it in polishing pond;
3) adjustment precision bracket 4 probes into the top tray 5 of near field ultrasonic cavitation generating system in polishing pond 9, and and subiculum Disk 7 keeps axisymmetrical;
4) open fluid circulation system, by hydraulic pump 15 adjust polishing fluid 16 pressure and speed, so as to make polishing fluid 16 from It polishes the lower end extraction in pond 9 and is pumped into from upper end;
5) open motor 10, so as to propeller 13 in polishing fluid 16 revolution at a high speed and between top tray 5 and lower tray 7 Fluid shearing effect is generated in gap;
6) start ultrasonic generator, by adjusting supersonic frequency and amplitude, generated in the gap of top tray and lower tray Strong ultrasound cavitation effect;
7) comprehensive adjustment near-field ultrasound cavitation system and fluid shearing system, to realize the skin processing of fine gear 6;
8) after processing is completed, another end face of fine gear 6 is fixed on to the lower tray of near-field ultrasound cavitation generating system On 7, repeat the skin processing that above step completes fine gear 11.
Illustrate that near-field ultrasound cavitation compound fluid shears skin processing mechanism below with reference to Fig. 2: firstly, fluid shearing system So that the solid abrasive particle in polishing fluid 16 can generate a degree of grinding and polishing action to fine gear 6;Secondly, super Sound wave enters in polishing fluid 11 by PZT (piezoelectric transducer) 2, amplitude transformer 3 and top tray 5, and by sending out between lower tray 7 Raw multiple sound wave reflection and refraction action, further enhance the intensity of ultrasonic wave;The ultrasonic wave of some strength is in 5 He of top tray Strong near field cavitation effect is produced between lower tray 7;Near-field ultrasound cavitation effect is generated small with certain energy On the one hand bubble directly can generate strength to fine 6 groove structure of gear and clean, on the other hand, micro-bubble is strong by impact Change solid particle, can further promote the ability of solid abrasive particulate abrasive and polishing.
The above is only the embodiment of the present invention, are not intended to limit the scope of the invention, all to be said using the present invention Equivalent structure or equivalent flow shift made by bright book content is applied directly or indirectly in other relevant technical fields, Similarly it is included within the scope of the present invention.

Claims (7)

1. a kind of fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing, it is characterised in that: including near field Ultrasonic cavitation system, fluid shearing system and polishing fluid circulation, near-field ultrasound cavitation system includes supersonic generator (1), PZT (piezoelectric transducer) (2), amplitude transformer (3), top tray (5), lower tray (7) and accurate bracket (4);
The supersonic generator (1) is connect with PZT (piezoelectric transducer) (2) by conducting wire, and PZT (piezoelectric transducer) (2) and amplitude transformer (3) are logical Studs connection is crossed, is provided in amplitude transformer (3) for the ring flange fixed with accurate bracket, amplitude transformer (3) and top tray (5) it is bolted, lower tray (7) is set below top tray (5), be provided with fine gear (6) in lower tray (7), it is fine Gear (6) is bolted with fixture (8);
Fluid shearing system includes polishing pond (9), motor (10), belt transmission system (11), retarder (12) and propeller (13), it polishes and is equipped with polishing fluid (16) in pond (9), polishing pond (9) outer wall is fixed with motor (10) and retarder (12), slows down Device (12) is connect with motor (10) by belt transmission system (11);Propeller (13) be placed in polishing pond (9) bottom, and with subtract Fast device (12) is connected by shaft coupling;
Polishing fluid circulation includes circulation line (15) and hydraulic pump (14), and circulation line (15) includes upper circular tube road under Circulation line;Upper circular tube road one end is connect with the left upper end of polishing pond (9), and the other end is connect with hydraulic pump (15) upper end;Under One end of circulation line is connect with hydraulic pump (14) lower end, and the other end is connect with the bottom righthand side of polishing pond (9).
2. the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing according to claim 1, special Sign is: the precision bracket (4) includes moving horizontally component (41), vertically mobile member (42) and mobile pallet (43), institute State and move horizontally component (41) one end and be provided with hole for fixing amplitude transformer ring flange, move horizontally the other end of component (41) with The vertically mobile member (42) for being provided with interior straight trough is bolted;The end of vertically mobile member (42) and movement pallet (43) It is bolted;The dynamic pallet (43) is used to support entire accurate bracket;Vertically mobile member (42) is provided with vertical quarter Spend table;The mobile pallet (43) is provided with angle of revolution scale.
3. the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing according to claim 2, special Sign is: the fixture (8) is fixed on polishing pond (16) side wall, and keeps mutually flat between top tray (5) and lower tray (7) Row.
4. the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing according to claim 3, special Sign is: PZT (piezoelectric transducer) (2), amplitude transformer (3), top tray (5), lower tray (7) and the fine gear (6) keeps coaxial Setting.
5. the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing according to claim 4, special Sign is: the spacing between the top tray (5) and lower tray (7)hMeet following relationship:
,
In formula,nFor even number,λFor the wavelength of ultrasonic wave.
6. the fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing according to claim 5, special Sign is: the central axis and fine gear (6) axis keeping parallelism in the polishing pond (9).
7. a kind of fine gear finishing processing device of near-field ultrasound cavitation compound fluid shearing as claimed in claim 6, It is characterized in that: including the following steps,
1) one end of fine gear (6) is fixed in the lower tray (8) of near-field ultrasound cavitation generating system, and and fixture (9) it is bolted;
2) according to fine gear (6) material, corresponding polishing fluid (16) is selected, is added in polishing pond (9);
3) adjustment precision bracket (4) probe into the top tray (5) of near field ultrasonic cavitation generating system in polishing pond (9), and Axisymmetrical is kept with lower tray (7);
4) fluid circulation system is opened, adjusts the pressure and speed of polishing fluid (16), by hydraulic pump (15) to make polishing fluid (16) it extracts out from the lower end of polishing pond (9) and is pumped into from upper end;
5) motor (10) are opened, so that propeller (13) is in the interior revolution at a high speed of polishing fluid (16) and in top tray (5) and subiculum Fluid shearing effect is generated in the gap of disk (7);
6) start ultrasonic generator, by adjusting supersonic frequency and amplitude, generated in the gap of top tray and lower tray Strong ultrasound cavitation effect;
7) comprehensive adjustment near-field ultrasound cavitation system and fluid shearing system, to realize the skin processing of fine gear (6);
8) another end face of fine gear (6) after processing is completed, is fixed on to the subiculum of near-field ultrasound cavitation generating system On disk (7), repeat the skin processing that above step completes fine gear (11).
CN201910602790.3A 2019-07-05 2019-07-05 The fine gear finishing processing device and processing method of near-field ultrasound cavitation compound fluid shearing Pending CN110315399A (en)

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Application publication date: 20191011