CN110303242A - A kind of index-matching fluid auxiliary optical glass microlens laser cutting method - Google Patents
A kind of index-matching fluid auxiliary optical glass microlens laser cutting method Download PDFInfo
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- CN110303242A CN110303242A CN201910752343.6A CN201910752343A CN110303242A CN 110303242 A CN110303242 A CN 110303242A CN 201910752343 A CN201910752343 A CN 201910752343A CN 110303242 A CN110303242 A CN 110303242A
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- optical glass
- matching fluid
- laser
- lenticule
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The present invention discloses a kind of index-matching fluid auxiliary optical glass microlens laser cutting method, is related to optical glass lenticule cutting technique field, comprising: step 1: according to material to be cut, that is, optical glass lenticule, selecting suitable index-matching fluid；Step 2: index-matching fluid being placed in open containers, according to the overall structure of material to be cut and surface micro-structure size, selects suitable index-matching fluid depth, and material to be cut is placed in index-matching fluid；Step 3: opening laser cutting device, using continuous/pulse laser, laser spot is incident to inside optical glass microlens material by index-matching fluid, by thermal stress caused by laser spot, completes cutting separation.Index-matching fluid auxiliary optical glass microlens laser cutting method provided by the invention, avoiding optical glass micro-lens surface structure makes laser spot lead to the problem of birefringence, keeps the laser cutting effect of optical glass lenticule good.
Description
Technical field
The present invention relates to optical glass lenticule cutting technique fields, more particularly to a kind of index-matching fluid fill-in light
Learn glass microlens laser cutting method.
Background technique
Optical glass lenticule refers on the basis of traditional optical glass lens, and a series of units are prepared on its surface
Characteristic dimension is hundreds of nanometers of micro-structures to some tens of pm, so that it is special so that optical glass lenticule is had special geometric optics
Property.Its typical device, such as optical glass microlens array, optical camera, diffraction optical device, curved refractive-diffraction light
Element etc. is learned, is the basic material that China needs, is widely used in precise guidance, large laser equipment, high power/ultra high power
The necks such as optical system, laser weapon, optical imagery, optical detection, communication interconnection, laser precision machining, biologic medical, VR/AR
In domain.
At this stage the cutting and separating method of optical glass lenticule mechanically based on.Its main cutting and separating method
Have diamond cutter scribing line after break piece separation, sawing, saw blade cutting etc., be faced with cut quality is poor, cutting speed slowly, technique stream
Journey is cumbersome, needs a series of problems, such as subsequent sanding and polishing.The cutting separation of the optical glass lenticule of high quality is faced with many
Problem.
Laser cutting can effectively solve optical glass material machine cuts problem encountered at this stage.And it is traditional
Laser cutting has special optical texture due to optical glass micro-lens surface, it will laser spot is made to generate uncontrollable two
Secondary refraction/focusing effect influences laser spot to make to generate aberration or other uncontrollable laser spots in laser focusing
Focusing effect cause to cut isolated failure so that processing quality be made to be deteriorated and uncontrollable.Therefore, it is cut by laser optics glass
The problem of glass lenticule most critical is to avoid optical glass micro-lens surface micro-structure that laser spot is made to generate birefringence effect.
Summary of the invention
The object of the present invention is to provide a kind of index-matching fluid auxiliary optical glass microlens laser cutting methods, with solution
Certainly the above-mentioned problems of the prior art avoids optical glass micro-lens surface structure that laser spot is made to generate asking for birefringence
Topic, keeps the laser cutting effect of optical glass lenticule good.
To achieve the above object, the present invention provides following schemes:
The present invention provides a kind of index-matching fluid auxiliary optical glass microlens laser cutting method, including walks as follows
It is rapid:
Step 1: according to the material of optical glass lenticule to be cut, selecting the refractive index with optics glass microlens material
Same or similar index-matching fluid；
Step 2: index-matching fluid being placed in open containers, according to the whole of separation optical glass lenticule to be cut
Body structure and surface micro-structure size select suitable index-matching fluid depth, and optical glass lenticule are horizontally arranged
In in index-matching fluid；
Step 3: opening laser cutting device, using continuous/pulse laser, laser spot is entered by index-matching fluid
It is incident upon inside optical glass microlens material, and material is made to absorb laser energy, generate high temperature inside optical glass lenticule
Region, mobile laser spot, to complete cutting separation.
Optionally, in the step 2, the depth of index-matching fluid is greater than the height of optical glass lenticule to be cut.
Optionally, the laser cutting device in the step 3 includes laser, and the laser is connected with light by optical fiber
Fine coupler, the fiber coupler are connected with laser beam expanding lens, are coaxially arranged with focus lamp immediately below the laser beam expanding lens,
The focus lamp can move up and down；Open containers are provided with below the focus lamp, the open containers being capable of horizontal movement.
Optionally, the focus lamp is connected with Z axis movement mechanism, and the open containers are fixedly installed on three-dimensional movement platform
On；The Z axis movement mechanism and three-dimensional movement platform have been electrically connected controller.
The present invention achieves following technical effect compared with the existing technology:
Index-matching fluid auxiliary optical glass microlens laser cutting method provided by the invention, by using folding
Rate matching fluid infiltration optical glass lenticule is penetrated, makes optical texture special on optical glass lenticule full of index matching
Liquid, so that the optical glass lenticule with special construction to be changed into optical glass lenticule-refraction with planar structure
Rate matching fluid composite entity makes laser spot generate birefringence effect so as to avoid optical glass micro-lens surface micro-structure
It answers, and laser spot is incident to inside optical glass lenticule to and is generated the hot-drawn stress more than Tensile strength threshold value,
To complete the cutting separation of optical glass lenticule.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without any creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is that index-matching fluid auxiliary optical glass microlens laser cutting method principle provided by the invention is shown
It is intended to；
Fig. 2 is the entirety of index-matching fluid auxiliary optical glass microlens laser cutting method provided by the invention
Equipment schematic diagram；
Wherein, 1 it is index-matching fluid, 2 be optical glass lenticule, 3 be open containers, 4 be laser beam, 5 is sharp
Light device, 6 be optical fiber, 7 be fiber coupler, 8 be laser beam expanding lens, 9 be focus lamp, 10 be Z axis movement mechanism, 11 be three maintenance and operations
Moving platform, 12 are laser spot.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of index-matching fluid auxiliary optical glass microlens laser cutting methods, with solution
Certainly the above-mentioned problems of the prior art avoids the problem that laser spot generates birefringence, makes swashing for optical glass lenticule
Light good cutting effect.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
Laser cutting basic principle is that laser spot is incident to inside optical glass material using continuous or pulse laser
Or material surface, and material is made to absorb laser energy, to generate high-temperature area inside optical glass.With laser spot
Mobile, the heating effect of laser spot will generate thermal expansion and thermal pinch in material internal, so that generating is more than material
The hot-drawn stress of tensile strength threshold value, to make optical glass material generate through-wall crack and extend forward, to complete to cut
Separation.
The present invention provides a kind of index-matching fluid auxiliary optical glass microlens laser cutting method, as shown in Figure 1, its
Basic process steps are divided into 3 steps:
Step 1: according to the material of separation optical glass lenticule to be cut, selecting suitable index-matching fluid 1.Its institute
1 refractive index of index-matching fluid of use should be as same or similar with the refractive index of 2 material of optics glass microlens as possible.Wherein
As shown in Fig. 2, laser 5 is connected with fiber coupler 7 by optical fiber 6, fiber coupler 7 connects device structure needed for the present invention
There are laser beam expanding lens 8, focus lamp 9 is coaxially arranged with immediately below laser beam expanding lens 8, focus lamp 9 can move up and down；Focus lamp 9
Lower section is provided with open containers 3, and open containers 3 being capable of horizontal movement.Specifically, focus lamp 9 is connected with Z axis movement mechanism 10,
Open containers 3 are fixedly installed in three-dimensional movement platform 11；Z axis movement mechanism 10 and three-dimensional movement platform 11 have been electrically connected
Controller.
Step 2: according to overall structure/surface micro-structure size of isolated optical glass lenticule 2 to be cut, selection is closed
Suitable 1 depth of index-matching fluid, and index-matching fluid 1 is poured into open containers 3.Wherein, index-matching fluid 1 is necessary
Guarantee to be higher than material overall structure/surface micro-structure, and it is whole that index-matching fluid 1 with 2 groups of optics glass microlens is combined into one
Body.To which the optical glass lenticule 2 with special construction to be changed into optical glass lenticule-refraction with planar structure
Rate matching fluid composite entity.Meanwhile 1 depth of index-matching fluid cannot be too deep, so that it is excessively high to avoid index-matching fluid 1 from absorbing
Laser energy.It penetrates rate matching fluid needs and covered optical glass micro-lens surface micro-structure, to avoid optical glass lenticule
Generate birefringence effect.Meanwhile index-matching fluid thickness cannot be blocked up, so that it is excessive sharp to avoid index-matching fluid from absorbing
Light energy
Step 3: opening laser equipment, using the laser beam 4 of continuous/pulse, laser spot 12 is incident to optics glass
2 material internal of glass lenticule, and material is made to absorb laser energy, to generate high-temperature area inside optical glass lenticule 2.
With the movement of laser spot 12, the heating effect of laser spot 12 will generate thermal expansion in material internal and be heat-shrinked effect
It answers, so that the hot-drawn stress more than Tensile strength threshold value is generated, to generate through-wall crack on optical glass lenticule 2
And extend forward, to complete cutting separation.
Index-matching fluid auxiliary optical glass microlens laser cutting method proposed by the present invention, it is micro- to optical glass
The high quality separation of mirror is of great significance.Compare and mechanical cutting method, the method are noncontact procession, material will not be made
Parting surface generates surface damage, to guarantee the quality of processing, typical cutting surfaces roughness is up to nanoscale rough degree.
It compares and conventional laser cutting method, the method that this method uses index-matching fluid auxiliary, by refractive index
It is integral with liquid with the combination of optics glass microlens.Have to which the optical glass lenticule with special construction to be changed into
Optical glass lenticule-index-matching fluid composite entity of planar structure.So as to avoid special on optical glass lenticule
Optical texture to the birefringence effect of laser beam, avoid in laser focusing and generate aberration, to improve laser
The focusing effect of light beam.Meanwhile the secondary focusing of laser beam is avoided, uncontrollable laser spot will not be generated, to avoid
The uncontrollable laser spot damage caused by secondary focusing of optical glass lenticule.
Specific examples are applied in the present invention, and principle and implementation of the present invention are described, above embodiments
Illustrate to be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art, according to
According to thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification
It should not be construed as limiting the invention.
Claims (4)
1. a kind of index-matching fluid auxiliary optical glass microlens laser cutting method, characterized by the following steps:
Step 1: according to the material of optical glass lenticule to be cut, selecting identical with the refractive index of optics glass microlens material
Or similar index-matching fluid；Its typical index-matching fluid constituent is water and methylene iodine fluoride；
Step 2: index-matching fluid being placed in open containers, is tied according to the whole of separation optical glass lenticule to be cut
Structure and surface micro-structure size select suitable index-matching fluid depth, and optical glass lenticule are placed horizontally at folding
It penetrates in rate matching fluid；
Step 3: opening laser cutting device, using continuous/pulse laser, laser spot is incident to by index-matching fluid
Inside optical glass microlens material, and material is made to absorb laser energy, generates high-temperature area inside optical glass lenticule,
Mobile laser spot, to complete cutting separation.
2. index-matching fluid auxiliary optical glass microlens laser cutting method according to claim 1, feature exist
In: in the step 2, the depth of index-matching fluid is greater than the height of optical glass lenticule to be cut, and should be as shallow as possible
To avoid index-matching fluid from absorbing excessive laser energy.
3. index-matching fluid auxiliary optical glass microlens laser cutting method according to claim 1, feature exist
In: the laser cutting device in the step 3 includes laser, and the laser is connected with fiber coupler by optical fiber, institute
It states fiber coupler and is connected with laser beam expanding lens, be coaxially arranged with focus lamp, the focus lamp immediately below the laser beam expanding lens
It can move up and down；Open containers are provided with below the focus lamp, the open containers being capable of horizontal movement.
4. index-matching fluid auxiliary optical glass microlens laser cutting method according to claim 3, feature exist
In: the focus lamp is connected with Z axis movement mechanism, and the open containers are fixedly installed in three-dimensional movement platform；The Z axis fortune
Motivation structure and three-dimensional movement platform have been electrically connected controller.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910752343.6A CN110303242A (en) | 2019-08-15 | 2019-08-15 | A kind of index-matching fluid auxiliary optical glass microlens laser cutting method |
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| CN201910752343.6A CN110303242A (en) | 2019-08-15 | 2019-08-15 | A kind of index-matching fluid auxiliary optical glass microlens laser cutting method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112157361A (en) * | 2020-10-19 | 2021-01-01 | 温州大学 | Anti-burning-out workbench of high-power laser cutting machine |
| CN115451681A (en) * | 2022-09-14 | 2022-12-09 | 苏州德龙激光股份有限公司 | Laser dodging baking device and method for battery pole piece |
| CN116393846A (en) * | 2023-06-08 | 2023-07-07 | 江西联创电子有限公司 | Laser cutting method and system for optical device |
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| CN112157361A (en) * | 2020-10-19 | 2021-01-01 | 温州大学 | Anti-burning-out workbench of high-power laser cutting machine |
| CN115451681A (en) * | 2022-09-14 | 2022-12-09 | 苏州德龙激光股份有限公司 | Laser dodging baking device and method for battery pole piece |
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