CN206153760U - Correlation formula multifocus laser separation fragility transparent material's device - Google Patents
Correlation formula multifocus laser separation fragility transparent material's device Download PDFInfo
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- CN206153760U CN206153760U CN201621080788.2U CN201621080788U CN206153760U CN 206153760 U CN206153760 U CN 206153760U CN 201621080788 U CN201621080788 U CN 201621080788U CN 206153760 U CN206153760 U CN 206153760U
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Abstract
The utility model discloses a correlation formula multifocus laser separation fragility transparent material device, including two sets of multifocus laser processing system and a three -dimensional work platform, every set of multifocus laser processing system all includes laser instrument, leaded light mirror, beam expanding lens and a set of multifocus lens group, and laser instrument, leaded light mirror, beam expanding lens and multifocus lens group are located same light path in proper order, the two sets of system of processing fragility transparent material both sides with the optical axis correlation, make the inside focus quantity of fragility transparent material double to improve fragility transparent material and measure absorptive homogeneity, messenger's fragility transparent material along the the thermal expansion homogeneity reinforcing of thickness direction to laser energy in the thickness direction. Laser multifocus light beam leaves the back, cools off rapidly and produces the tensile stress along fragility transparent material thickness direction, realizes the separation of laser to thick fragility transparent material. The utility model discloses a laser is to the separation of thick fragility transparent material's high quality, high efficiency, high success rate.
Description
Technical field
The utility model belongs to laser processing application technical field, and in particular to a kind of correlation multifocal separation by laser is crisp
Property transmission material device, the method is particularly suited for the separation of KDP optical crystal uniform thickness fragility transmission materials.
Background technology
Laser cracking process is that at present cutting separates fragility transmission material (such as glass, optical glass, optical crystal), is obtained
A kind of effective ways of high-quality separation edge.The method be using laser condensing lens by laser beam focus transparent material table
Face or inside, using the fragility transmission material absorptivity higher to certain wave band of laser (such as laser beam of 10.6 mu m wavebands) table is formed
Face absorbs laser energy, heats fragility transmission material surface；Or using the suction relatively low to certain wave band of laser of fragility transmission material
Yield (such as laser beam of 1.06 mu m wavebands) forms body and absorbs laser energy, fragility transmission material is integrally heated, so that crisp
Property material surface or inside because of expanded by heating, produce compared with huge pressing stress.With the movement for focusing on laser beam, it is heated place's material and exists
Rapid cooling meat in the presence of the convection current of air and the heat loss through conduction of material internal, forms larger tension.When what is formed
Tension exceedes the fracture threshold value of material, and fragility transmission material will produce running crack and divide automatically along laser scanning direction
From or mechanical external force effect under separate, realize the detached purpose of laser cutting.
Compared with mechanical cutting method, laser cracking process have the advantages that joint-cutting it is straight, without chip, without micro-flaw.But
The maximum defect of this laser cracking process is only one of which Laser Focusing point, and either face absorbs or body absorpting form all can make
Fragility transmission material is extremely uneven to the absorption of laser energy on vertical thickness along separating, so as to cause through-thickness to produce
Stress difference it is larger.With the increase of material thickness, single focal argon laser causes the inequality of material through-thickness energy absorption
Even property is increasingly severe, and its result is to be difficult the crack orientation that control thermal stress is produced, and easily makes crackle along fragile material thickness
Directional Extension is out of control, and the entirety for causing material bursts.
Fragility transmission material defect is separated for single focal argon laser, various multifocal separation by laser methods is occurred in that, one
Determine to overcome the detached defect of single focal argon laser in degree.But existing multifocal separation by laser is mostly using the side of reflective focusing
Method produces multifocal dot laser (such as Chinese invention patent ZL201210118371.0), laser during constantly reflection is propagated,
Laser makes laser energy constantly lose because of diverging, causes the laser spot negligible amounts for producing, and the energy of each laser spot
Amount difference in distribution is larger, though the stress that through-thickness is produced has improvement, but still there is non-uniform phenomenon, and with material thickness
Increase, non-uniform phenomenon is more serious, therefore laser cutting separation material thickness nevertheless suffers from limiting.Additionally, this reflective poly-
Jiao produces multifocal method due to the inherent shortcoming of method for designing, makes the position of laser multifocal generation and the energy point of focus
Cloth all can not be carried out according to optimal design, affect cutting separation material thickness and quality.
Utility model content
Single the problems of focal argon laser and existing multifocal separation by laser fragility transmission material, this practicality for more than
It is new to propose a kind of correlation multifocal separation by laser fragility transmission material device, it is therefore intended that to realize that laser is saturating to thick fragility
Penetrate high-quality, high efficiency, the separation of high success rate of material.
A kind of device of correlation multifocal separation by laser fragility transmission material that the utility model is provided, its feature exists
In the device includes two sets of multifocal laser-processing systems and a three-dimensional workbench；Wherein often cover multifocal Laser Processing
System includes laser instrument, guide-lighting mirror, beam expanding lens and one group of multifocal lens group, the laser instrument, guide-lighting mirror, beam expanding lens and many
Focus lens group is sequentially located in same light path；
When the device works, the three-dimensional workbench is located in the middle of two sets of multifocal lens groups, is treated for installing and making
Processing fragility transmission material is along the direction movement perpendicular to laser beam optical axis；One group of multifocal lens group is used to make laser beam
It is refracted angle to differ, the position that focus is produced on optical axis is also unequal, to form multiple focus points；It is described more than two sets
It is same that the laser of focal argon laser system of processing output is located at respectively fragility transmission material thickness both sides by the multifocal laser beam
On optical axis, and reversely the laser spot quantity for doubling is produced in fragility transmission material mutually to penetrating, to improve fragility transmission material
Uniformity on material through-thickness to laser energy absorption, makes the expanded by heating uniformity of fragility transmission material through-thickness
Strengthen, after laser multifocal light beam leaves, cool down rapidly along fragility transmission material thickness direction and produce tension, realize laser
Separation to thick fragility transmission material.
The utility model has advantages below：
1st, it is coaxial reversely to penetrating using two sets of multifocal laser-processing systems, laser is made in fragility transmission material, along thick
Degree optical axis direction produces multiple focuses, can significantly improve separation by laser fragility transmission material thickness direction and laser energy is inhaled
Uneven problem is received, so as to significantly reduce the thermal stress difference of fragility transmission material through-thickness generation, improves laser point
From cut quality, smooth, precipitous, the otch end face without chipping is obtained, increased the controllability in the direction of material cutting track, made
The very big circular arc of curvature can also carry out high-quality safe cutting separation.
2nd, coaxial reversely to penetrating in fragility transmission material both sides using two sets of multifocal laser-processing systems, what it was produced swashs
Optical focus quantity is that the focus quantity for more than twice of a set of multifocal laser-processing system making laser is multiplied, cleavable
Separate thicker fragility transmission material.
3rd, using the focus produced by the multifocal lens group as constituted with the mode such as aperture or diameter difference focus lamp
The Energy distribution of quantity, position and each focus can pass through the spacing for freely adjusting each focusing lens in multifocal lens group
From changing, it is to avoid the Energy distribution of reflective multifocal dot laser is uneven and each focal position of laser etc. can not be adjusted freely
The defect of section, with bigger actually used value.
4th, the utility model is not limit to the thickness of fragility transmission material, because cutting detached fragility transmission material
Thickness it is bigger, the number of lenses of required different focal is more, and laser power is bigger, so theoretically, the method is not received
Cutting separates the restriction of fragility transmission material thickness.
Description of the drawings
Fig. 1 is correlation multifocal separation by laser fragility transmission material schematic device.
Fig. 2 is the multifocal of one of lens set building form in correlation multifocal separation by laser fragility transmission material device
Lens set and light path schematic diagram.
Fig. 3 is to penetrating make lens set building form in multifocal separation by laser fragility transmission material device two multifocal
Lens set and light path schematic diagram.
Specific embodiment
The utility model is using center with the different focus lamp of different-diameter aperture and focal length or different-diameter and focal length
Focus lamp composition multifocal lens group, laser beam is divided into into several parts, using multifocal lens group, make every fraction of laser light
Beam produces different Refractive focusing angles, so as to form multiple focuses on optical axis after multifocal lens group.Each focus it
Between distance and energy density can according to demand design calculating.Distinguished using two sets of laser instrument systems of processing and multifocal lens group
The thickness direction both sides of fragility transmission material, and light shaft coaxle are placed in reversely to penetrating, Jiao for producing fragility transmission material inside
Point doubles, improve the uniformity to laser energy absorption on fragility transmission material through-thickness, make fragility transmit material
The expanded by heating uniformity of material through-thickness strengthens.After laser multifocal light beam leaves, along fragility transmission material thickness direction
Cool down rapidly and produce more uniform tension, realize high-quality, high efficiency, high success rate of the laser to thick fragility transmission material
Separation.
A kind of device of correlation multifocal separation by laser fragility transmission material that the utility model is provided, including more than two sets
Focal argon laser system of processing and a three-dimensional workbench.Wherein often covering multifocal laser-processing system includes laser instrument, leads
Light microscopic, beam expanding lens and one group of multifocal lens group.For every set multifocal laser-processing system, its laser instrument, guide-lighting mirror, expand
Mirror and multifocal lens group are sequentially located in same light path.Two sets of multifocal laser-processing system output multifocal laser beam difference
Positioned at fragility transmission material thickness both sides with optical axis, and reversely mutually to penetrating, swashing of doubling is produced in fragility transmission material
Optical focus quantity.Three-dimensional workbench is located in the middle of two sets of multifocal lens groups, for fixing and moving fragility transmission to be processed
Material.
The utility model lists the building form of two kinds of multifocal lens groups, and the first is with not by a series of centers
With diameter aperture and the different focus lamp composition of focal length, the hole diameter on first piece focus lamp is straight more than the aperture of second
Footpath, later the hole diameter on focus lamp successively decrease successively.On focus lamp hole diameter size be according to practical laser beam diameter come
It is determined that, and guarantee that hole diameter is less than diameter of the practical laser beam on focus lamp surface on focus lamp.Wherein hole diameter
The confocal Energy distribution of size is directly related, and hole diameter is less, energy density ratio shared by the laser spot of the focus lamp
It is bigger.On each focus lamp hole diameter should from first piece band aperture focus lamp start to count, before focus lamp hole diameter
The Energy distribution of laser spot below produced by aperture focus lamp can be affected.
Second multifocal lens group is made up of a series of focus lamp of different-diameters and focal length, and the diameter of focus lamp is by reality
Border lasing beam diameter is determining.Now, laser beam need to be expanded using larger multiple beam expanding lens, increase lasing beam diameter, make to swash
Beam diameter is more than first piece focus lamp diameter, and second, third and later focus lamp diameter successively decrease successively, and eyeglass is straight
Footpath is respectively less than diameter of the laser on the lens surface.Wherein, the size of focus lamp diameter, the focal length and laser diameter herein is determined
The energy proportion of laser spot produced by the focus lamp is determined.When focus lamp diameter closer to laser beam in diameter herein, then
The laser spot energy proportion that this focusing lens is produced is bigger.
Each can be moved with the different focusing lens of aperture or diameter along laser beam axis direction in multifocal lens group, by
This position and Energy distribution to control each produced laser spot.For example, two panels focusing lens distance is widened, then two
Two laser spot distances produced by piece focus lamp can be widened, and the energy allocation proportion of two laser spots will also produce phase
Should change.Can be adjusted according to actual demand in actual applications.
Whether the multifocal lens group with aperture focus lamp or diameter difference focus lamp composition can cause laser energy
Loss, its loss amount is about between 5%-15%, and the energy loss of laser is related to the thickness of each focus lamp in lens set.
The thickness of focus lamp is less, then the energy loss of laser is less.In actual applications, should try one's best using the less focus lamp of thickness
To constitute multifocal lens group, the energy loss of laser is reduced.
When cut fragility transmission material thickness increases, number of lenses in multifocal lens group can be increased, so as to increase
Produced laser spot quantity, and increase laser power, separated with the cutting for completing thicker fragility transmission material.
The utility model is applied to the various fragility transmission materials of cutting, such as quartz, optical glass, simple glass, Yi Jiduo
Plant optical crystal etc..Optical crystal such as potassium dihydrogen phosphate (KDP), sour lithium (LiNbO3-LN), potassium dideuterium phosphate (KD2PO4-
DKDP), lithium iodate (LiIO3-LI), KTP (KTiOPO4-KTP), barium metaborate (BaB2O4-BBO), three boric acid
Lithium (LiB3O5-LBO), potassium niobate (KNbO3-KN), boric acid caesium (CSB3O5-CBO), CLBO (LiCSB6O10-
CLBO), potassium fluoborate beryllium (KBe2BO3F2-KBBF) and sulphur silver gallium (AgGaS2-AGS), arsenic cadmium germanium (CdGeAs-CGA),
Phosphorus germanium zinc (ZnGeP2-ZGP)；Optical glass such as silicate, borate, phosphate, fluoride and chalcogenide compound series.
In order that the purpose of this utility model, technical scheme and advantage become more apparent, below in conjunction with accompanying drawing and enforcement
Example, is further elaborated to the utility model.It should be appreciated that instantiation described herein is only to explain
The utility model, is not used to limit the utility model.
The technical scheme that the utility model is provided can be completed by a kind of embodiment, the composition and light of multifocal lens group
There are two kinds of specific embodiments on road.Specific embodiment comprises the steps：
(1) a series of center band apertures or diameter difference focus lamp are constituted into two sets of multifocal lens groups.Wherein, each gathers
The quantity of focus lens, focal length, hole diameter or focus lamp diameter by cut fragility transmission material thickness, absorptivity, refraction
The parameters such as rate are determined.Each focusing lens spacing is adjusted, makes the focal position of laser of generation moderate.
(2) by laser instrument, guide-lighting mirror, beam expanding lens composition first laser system of processing, and multifocal lens group is placed in into the
Before one laser-processing system so as to light shaft coaxle.Wherein, the selection of laser type with institute's cutting material characteristic determine, can
Select CO2Laser instrument, optical fiber laser, YAG laser etc., the selection of each optics and eyeglass matches with laser instrument.
Second laser system of processing is constituted using the identical device of same first laser system of processing.First laser system of processing is same
The laser propagation direction of second laser system of processing is coaxially reverse.
(3) first, second laser instruments go out light simultaneously, two beam laser after guide-lighting mirror, beam expanding lens, by respective multifocal
Point lens set, in fragility transmission material to be processed multiple laser spots are produced.What two sets of multifocal laser-processing systems were produced
Laser spot quantity, spacing, Energy distribution etc. are identical.
(4) fragility transmission material to be processed is moved in the X-axis direction, multiple laser spots are acted on along thickness direction
Fragility transmission material, makes the fragility transmission material inner laser focus zone of action produce high-temperature area, produces larger compression.
And with the motion of fragility transmission material, laser spot leaves the fragility transmission material original zone of action to be processed, former active region is made
Domain temperature is reduced rapidly, produces larger tension, more than the fracture threshold value of fragility transmission material, makes fragility transmission material laser
Ftracture near the focus zone of action.And due to laser, to generate multiple focuses, i.e. fracture area extended with laser spot number
Identical multiple, increased laser cutting and separates depth, make fragility transmission material to be processed integrally ftracture.
As shown in figure 1, the utility model device includes two sets of multifocal laser-processing systems 90 and 91 and three-dimensional movement
Platform 14.First multifocal laser-processing system 90 includes laser instrument 1, speculum 2 and 3, beam-expanding collimation mirror 4 and multifocal lens
Group 5.Second laser system of processing 91 includes laser instrument 10, speculum 9 and 8, beam-expanding collimation mirror 7 and multifocal lens group 6.Its
In, lens set 5 and 6 has two kinds of building forms, respectively by a series of focusing lens different with different-diameter aperture and focal length
Composition is made up of a series of diameters focusing lens different with focal length.Two sets of multifocal lens groups 5 and 6 are respectively positioned to be cut
The thickness direction both sides of transmission fragile material 11 are separated, the direction of propagation of the focusing laser beam of output is reverse with optical axis.It is to be cut
Separate transmission fragile material 11 to be arranged in three-dimensional mobile platform 14, drive transmission fragile material 11 along tri- direction movements of XYZ.
Multifocal lens group 5 and 6 has two kinds of building forms, and the first building form and light path schematic diagram are as shown in Figure 2.Mirror
Piece group is made up of a series of narrow meshed focusing lens in centers, and the thickness of each focusing lens is as thin as possible, to reduce laser energy
The loss of amount.Distance, each focusing lens hole diameter are cut point by actual between each focusing lens focal length, each focusing lens
Determine from fragility transmission material thickness, refractive index, absorptivity etc..Cut separation material thickness is thicker, then each focusing lens are burnt
Away from longer, distance is bigger between each focus lamp, and each focusing lens hole diameter is bigger；Institute's cutting material refractive index is bigger, then respectively
Focusing lens focal length is longer, and distance is bigger between each focus lamp, and each focus lamp hole diameter is constant；Institute's cutting material absorptivity is got over
Height, then distance is constant between each focusing lens focal length and each focus lamp, and each focusing lens hole diameter is bigger.Aperture on focus lamp
Presence make laser beam be divided into different parts.Because the laser beam of every part is through focusing lens quantity difference, and draw
Play refraction angle different, the focus position of generation is also different, so as to form multiple laser spots.Such as Fig. 2, first laser adds
The laser beam of work system output forms the laser beam 15 of beam-expanding collimation after beam-expanding collimation mirror 4；Laser beam 15 gathers through conventional
After burnt mirror 50, formed and focus on laser beam 16.The a part of laser beam for focusing on laser beam 16 passes through the central small hole of the first focus lamp 51
52 form focusing laser beam 17, and another part laser beam is formed by secondary focusing and focused on through after the eyeglass of the first focus lamp 51
Laser beam 18.Hereafter, a part of laser beam of laser beam 17 is focused on again directly through the shape of 53 central small hole of the second focusing lens 54
Into focusing on laser beam 19, and focus at the point 25 of optical axis 60.Because the diameter of 53 central small hole of the second focusing lens 54 is less than the
The central small hole 52 of one focus lamp 51 so that another part laser beam of laser beam 17 forms secondary focusing and swashs through focusing lens 53
Light beam 20, and focus at the point 24 of optical axis 60.And secondary focusing laser beam 18 forms three focusing again through focusing lens 53
Laser beam 21, and focus on an optical axis 60 23 at.Obviously, the laser beam of focus point 25 19 is gathered by a focus lamp 50
Jiao, the laser beam 20 of focus point 24 is focused on by two focus lamps 50 and 51, and the laser beam 21 of focus point 23 passes through three focus lamps
50th, 51 and 53 focus on, thus make focusing laser beam 19,20 and 21 3 part of laser beam be refracted angle and differ, in optical axis
The position that focus is produced on 60 is also unequal, so as to form three focus points.More through focusing lens number, laser beam is rolled over
Firing angle degree is bigger, produces the position of focus point the closer to multifocal lens group 5.In the same manner, by with the identical structure of multifocal lens group 5
The multifocal mirror of the conventional focus lamp 55 of quantity, the focus lamp 56 with aperture 57 and the focus lamp 59 with aperture 58 composition
Piece group 6, also will produce three focus points 34,35 and 36 on optical axis 60.
It is coaxial reversely to penetrating due to two sets of multifocal laser-processing systems, the focus quantity that laser is produced is increased as one
The twice of set laser-processing system, the laser spot quantity for making generation is maximized.The rest may be inferred, when band aperture focus lamp and routine
When focus lamp is N pieces, then two sets of laser-processing systems can produce 2N laser spot.
Second building form and light path schematic diagram of multifocal lens group 5 and 6 is as shown in Figure 3.Multifocal lens group by
A series of different focusing lens composition of diameters, and the thickness of each focusing lens is as thin as possible, to reduce the loss of laser energy.
The different focusing lens diameter of distance, each diameter cuts separation by actual between each focusing lens focal length, each focusing lens
Fragility transmission material thickness, refractive index, absorptivity etc. are determined.Cut separation material thickness is thicker, then each focusing lens focal length
Longer, distance is bigger between each focus lamp, and the different focusing lens diameter of each diameter is less；Institute's cutting material refractive index is bigger,
Then each focusing lens focal length is longer, and distance is bigger between each focus lamp, and the different focusing lens diameter of each diameter is constant；Cut
Material absorptivity is higher, then distance is constant between each focusing lens focal length and each focusing lens, the different focusing lens of each diameter
Diameter is less because each focus lamp diameter is different, makes laser beam be divided into different parts, and the different piece of laser beam is passed through
The focus lamp of varying number is focused on, and makes various pieces produce the focusing of different refractivity, so as to produce multiple laser on optical axis
Focus.Such as Fig. 3, first laser system of processing generation laser beam is through the outgoing laser beam 70 of beam-expanding collimation mirror 4 through conventional focusing
After mirror 41, formed and focus on laser beam 71.The part for focusing on laser beam 71 directly focuses on optical axis 60, produces focus point 76；It is poly-
The another part of burnt laser beam 71 focuses on form focusing laser beam 72 again by focus lamp 42.Focus on a part for laser beam 72
Optical axis 60 is directly focused on, focus point 75 is produced, the another part of laser beam 72 is focused on by focus lamp 43, is focused on form poly- again
Burnt laser beam 73, and optical axis 60 is focused on, produce focus point 74.In the same manner, the laser beam of focus point 76 71 is by a focusing
Mirror 42 is focused on, and the laser beam 72 of focus point 75 is focused on by two focus lamps 41 and 42, and the laser beam 73 of focus point 74 passes through three
Focus lamp 41,42 and 43 is focused on, thus is made focusing laser beam 71,72 and 73 3 part of laser beam be refracted angle and differed,
The position that focus is produced on optical axis 60 is also unequal, so as to form three focus points.More, the laser through focusing lens number
Beam is refracted that angle is bigger, produces the position of focus point the closer to multi-focus lens set 5.In the same manner, by with the phase of multifocal lens group 5
With the focusing lens group 6 that the conventional focus lamp 44 of number of structures, focus lamp 45 and focus lamp 46 are constituted, also will produce on optical axis 60
Raw three focus points 80,81 and 82.
It is coaxial reversely to penetrating due to two sets of Laser Processings, the focus quantity that laser is produced is increased as a set of Laser Processing
The twice of system, the laser spot quantity for making generation is maximized.The rest may be inferred, when the different focus lamp of diameter is N pieces, then two
Set laser-processing system can produce 2N laser spot.
Its operation principle is first-selected according to actual cutting fragility transmission material thickness, refractive index, absorptivity etc., selects suitable
Laser instrument 1 and 10, and select the center of suitable parameters with the different focus lamp composition lens set 5 and 6 of aperture or diameter.Swash
The laser beam that laser instrument 1 and 10 in light system of processing 90 and 91 is exported simultaneously, the reflected mirror 2,3 of difference and speculum 9 and 8,
The beam-expanding collimation mirror 4 and 7 in laser-processing system 90 and 91 is imported, after being amplified collimation, into respective multifocal lens
Group 5 and 6, by the multiple focusing laser beams of the output of multifocal lens group 5 and 6 multiple sharing the same light is produced respectively in fragility transmission material 11
Axle laser spot 12, uniformly heats along the thickness direction of fragility transmission material 11.Then, fragility transmission material 11 is flat in three-dimensional loading
The drive lower edge X-direction of platform 14 is moved with certain speed, and transmission material 11 is heated portion of rapid cooling, in transmission material
Expect that 11 thickness directions form uniform tension, produce the micro-crack 13 through the whole thickness of transmission material 11, and along laser
Scanning track extends forward, until the terminal of transmission material 11.
After a multifocal laser cutting is separated to be finished, check whether fragility transmission material 11 is kept completely separate, if completely
Separate, then separate and terminate；If not being kept completely separate, three-dimensional article carrying platform is moved along X-axis opposite direction, carry out secondary cut point
From repetition said process, until fragility transmission material 11 is kept completely separate.
Example：
Example 1：
Using two YLM-150 models optical fiber lasers as first, second laser instrument, its output wavelength is 1070nm,
Maximum Power Output 150W.Cutting material is KDP optical crystals, and cut lengths are 150mm × 150mm × 150mm.It is respectively adopted
1 conventional focus lamp and 2 different focusing lens of diameter constitute two sets of identical lens sets, and eyeglass is passed through per Shu Jiguang
3 laser spots can be produced after group, laser spot spacing is 20mm, and the Energy distribution of laser (laser spot is along laser
Defeated direction is arranged in order) ratio be 30%, 30%, 40%.Two sets of laser-processing system common properties give birth to 6 laser spots, and two sets
The produced two group laser spot center distance of Laser Processing is 20mm.Experimental technique：By first, second laser-processing system
Go out light simultaneously, regulation laser output power is 140W, makes two sets of Laser Processings be internally formed 6 laser in KDP optical crystals
Focus, after under the drive of three-dimensional article carrying platform, KDP optical crystals are moved in X direction, and movement velocity is 0.6m/min, back and forth
Move back and forth.Experimental result：Optical crystal is separated along X-direction, is separated fracture and is put down clean smooth, non-microcracked generation, only
Need slightly polishing just can be applied needed for optical flat.
Example 2：
Using two SD-YAG-600W models Nd:Used as first, second laser instrument, its output wavelength is YAG laser
1064nm, Maximum Power Output 600W.Cutting material is quartz material, and cut lengths are 200mm × 200mm × 200mm.Respectively
Using 1 conventional focus lamp and 2 center two sets of identical lens sets of narrow meshed focus lamp composition, pass through per Shu Jiguang
3 laser spots can be produced after lens set, laser spot spacing is 30mm, and the Energy distribution of laser (swashs on laser spot edge
Optical transmission direction is arranged in order) ratio be 30%, 30%, 40%.Two sets of laser-processing system common properties give birth to 6 laser spots, and
The produced two group laser spot center distance of two sets of Laser Processings is 20mm.Experimental technique：By first, second Laser Processing
System goes out light simultaneously, adjusts two laser output powers and is 650W, makes two sets of Laser Processings be internally formed 6 in quartz material
Individual laser spot, after under the drive of three-dimensional article carrying platform, quartz move in X direction, movement velocity is 1.2m/min, past back and forth
Multiple repeatedly motion.Experimental result：Quartz material is separated along X-direction, is separated fracture and is put down clean smooth, non-microcracked generation, is only needed
Slightly polishing just can be applied needed for optical flat.
Example 3：
Using two YLR-500 models optical fiber lasers as first, second laser instrument, its output wavelength is 1070nm,
Maximum Power Output 500W.Cutting material is K9 optical glass, and cut lengths are 180mm × 180mm × 180mm.It is respectively adopted 1
Piece routine focus lamp and 3 center band two sets of identical lens sets of foraminate focusing lens composition, pass through per Shu Jiguang
4 laser spots can be produced after lens set, laser spot spacing is 20mm, and the Energy distribution of laser (swashs on laser spot edge
Optical transmission direction is arranged in order) ratio be 20%, 25%, 25%, 30%.Two sets of laser-processing system common properties give birth to 8 laser Jiao
Point, and the produced two group laser spot center distance of two sets of Laser Processings is 20mm.Experimental technique：First, second is swashed
Light system of processing goes out light simultaneously, and regulation laser output power is 450W, makes two sets of Laser Processing shapes inside K9 optical glass
Into 8 laser spots, after under the drive of three-dimensional article carrying platform, K9 optical glass does the circle of a diameter of 100mm in XZ planes
Shape is moved, and movement velocity is 0.8m/min, is moved back and forth back and forth.Experimental result：K9 optical glass ruptures along movement locus,
Circular arc shaped escape face is produced, fracture is separated and is put down clean smooth, non-microcracked generation, only needed during slightly polishing just can be applied
Required optical flat.
The utility model preferred embodiments are the foregoing is only, but the utility model should not be limited to the example and accompanying drawing institute
Disclosure.So it is every without departing from the equivalent or modification completed under spirit disclosed in the utility model, both fall within this reality
With novel protected scope.
Claims (6)
1. a kind of device of correlation multifocal separation by laser fragility transmission material, it is characterised in that the device is included more than two sets
Focal argon laser system of processing and a three-dimensional workbench；Wherein often covering multifocal laser-processing system includes laser instrument, leads
Light microscopic, beam expanding lens and one group of multifocal lens group, the laser instrument, guide-lighting mirror, beam expanding lens and multifocal lens group are sequentially located at
In same light path；
When the device works, the three-dimensional workbench is located in the middle of two sets of multifocal lens groups, for making fragility to be processed saturating
Material is penetrated along the direction movement perpendicular to laser beam optical axis；The multifocal lens group is used to rolled over the zones of different of laser beam
Firing angle degree is differed, so as to the position for producing focus on optical axis is also unequal, to form multiple focus points；Two sets of laser
The laser of device output produces respectively multiple laser spots respectively by multifocal lens group；Two sets of multifocal Laser Processings
System in fragility transmission material both sides with optical axis to penetrating, make fragility transmission material internal focal point doubles, it is saturating to improve fragility
Penetrate on material through-thickness to the uniformity of laser energy absorption, make the expanded by heating of fragility transmission material through-thickness equal
Even property strengthens；After laser multifocal light beam leaves, cool down rapidly along fragility transmission material thickness direction and produce tension, realize
Separation of the laser to thick fragility transmission material.
2. device according to claim 1, it is characterised in that the multifocal lens group is by one piece of conventional focus lamp and extremely
Pass successively with the different focus lamp composition of different-diameter aperture and focal length, the hole diameter on each focus lamp at Shao Erkuai centers
Subtract.
3. device according to claim 2, it is characterised in that the thickness of each focus lamp is as thin as possible, sharp to reduce
The loss of light energy；Distance, each focus lamp hole diameter cut separation by actual between each focus lamp focal length, each focus lamp
Fragility transmission material thickness, refractive index and absorptivity are determined；Cut separation material thickness is thicker, then each focus lamp focal length is got over
Long, distance is bigger between each focus lamp, and each focus lamp hole diameter is bigger；Institute's cutting material refractive index is bigger, then each focus lamp
Focal length is longer, and distance is bigger between each focus lamp, and each focus lamp hole diameter is constant；Institute's cutting material absorptivity is higher, then respectively
Distance is constant between focus lamp focal length and each focus lamp, and each focus lamp hole diameter is bigger.
4. device according to claim 1, it is characterised in that the multifocal lens group by least three pieces different-diameters and
The focus lamp composition of focal length, the diameter of each focus lamp successively decreases successively.
5. device according to claim 4, it is characterised in that the thickness of each focus lamp is as thin as possible, sharp to reduce
The loss of light energy；The different focusing lens diameter of distance, each diameter is by actual institute between each focus lamp focal length, each focus lamp
Cutting separates fragility transmission material thickness, refractive index and absorptivity and determines；Cut separation material thickness is thicker, then each focus lamp
Focal length is longer, and distance is bigger between each focus lamp, and the different focus lamp diameter of each diameter is less；Institute's cutting material refractive index is got over
Greatly, then each focus lamp focal length is longer, and distance is bigger between each focus lamp, and the different focus lamp diameter of each diameter is constant；Cut
Material absorptivity is higher, then distance is constant between each focus lamp focal length and each focus lamp, and the different focus lamp diameter of each diameter is got over
It is little.
6. according to arbitrary described device in claim 1 to 5, it is characterised in that each focus lamp in the multifocal lens group
Can move along laser beam axis direction, to control position and the Energy distribution of each produced laser spot.
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