CN110299275B

CN110299275B - Transmission rod and scanning electron microscope

Info

Publication number: CN110299275B
Application number: CN201910594287.8A
Authority: CN
Inventors: 张洪彬; 杨瑞伟; 王伯彦
Original assignee: Interface Optoelectronics Shenzhen Co Ltd; Interface Technology Chengdu Co Ltd; General Interface Solution Ltd
Current assignee: Interface Optoelectronics Shenzhen Co Ltd; Interface Technology Chengdu Co Ltd; General Interface Solution Ltd
Priority date: 2019-07-03
Filing date: 2019-07-03
Publication date: 2021-07-30
Anticipated expiration: 2039-07-03
Also published as: CN110299275A

Abstract

The invention relates to a transmission rod and a scanning electron microscope, wherein the transmission rod comprises: a carrier; the clamping device is arranged on the carrier; the first driving device is arranged on the carrier and used for driving the clamping device to act so as to enable the clamping device to clamp or release the sample table; and the second driving device is connected with the carrier and used for driving the carrier to move in a first direction and a second direction so as to drive the clamping device to move in the first direction and the second direction, so that the clamping device can extend into or withdraw from a vacuum chamber of a scanning electron microscope, wherein the first direction is opposite to the second direction. When the conveying rod provided by the invention is used for conveying and sampling, the clamping device can clamp or loosen the sample table by controlling the first driving device, and the carrier is driven to extend into or withdraw from the vacuum bin of the scanning electron microscope by controlling the second driving device, so that the whole process is simple and convenient without complicated operation.

Description

Transmission rod and scanning electron microscope

Technical Field

The invention relates to the technical field of scanning electron microscopes, in particular to a transmission rod and a scanning electron microscope.

Background

Scanning electron microscopes are electron-optical imaging instruments that use a very fine electron beam to scan the surface of a sample, the interaction of the high energy electron beam with the material produces various signals that are received by a suitable Detector (Detector), amplified by an Amplifier (Amplifier), and then sent to a Braun Tube (Braun Tube) for imaging.

Need place the sample earlier on the sample bench when using scanning electron microscope, then be connected transfer rod and sample platform to utilize the transfer rod to send the sample platform of placing the sample into the vacuum chamber, separately take out the transfer rod with transfer rod and sample platform afterwards, make the sample platform remain in the vacuum chamber, scan. After the scanning is finished, the conveying rod firstly extends into the vacuum bin to be connected with the sample table, then the sample table is moved out of the vacuum bin by the vacuum rod, and then the conveying rod is separated from the sample table, so that one-time sample conveying and sampling operation of a sample is finished. However, when the sample is fed and sampled by the conventional transfer rod, each step is manually completed, and the operation is complicated.

Disclosure of Invention

The invention provides a transmission rod and a scanning electron microscope, and aims to enable sample feeding and sampling operations of a sample to be simpler and more convenient.

A transfer bar comprising: a carrier; the clamping device is arranged on the carrier; the first driving device is arranged on the carrier and used for driving the clamping device to act so as to enable the clamping device to clamp or release the sample table; and the second driving device is connected with the carrier and used for driving the carrier to move in a first direction and a second direction so as to drive the clamping device to move in the first direction and the second direction, so that the clamping device can extend into or withdraw from a vacuum chamber of a scanning electron microscope, wherein the first direction is opposite to the second direction.

Further, the carrier comprises a first pipe body, the clamping device is arranged at a first end of the first pipe body, the first driving device is arranged in the first pipe body, and the second driving device is connected with a second end of the first pipe body.

Further, the gripping device includes: the fixing part is fixedly connected with the first end of the first pipe body; the movable part is connected with the first end of the first pipe body in a rotating mode, the first driving device is used for driving the movable part to rotate relative to the first pipe body, and therefore the movable part is close to the fixed part or far away from the fixed part, and clamping or loosening of the sample platform is achieved.

Furthermore, the clamping device also comprises a push rod, the push rod is arranged in the first pipe body in a penetrating mode and is rotationally connected with the movable part, and the axis of the push rod rotating relative to the movable part and the axis of the movable part rotating relative to the first pipe body are not coaxial; the push rod is used for receiving the force application of the first driving device so as to push the movable part to rotate relative to the first pipe body.

Furthermore, the first driving device comprises an electromagnet, the electromagnet is arranged in the first pipe body, and the electromagnet can drive the push rod to move in the first direction after being electrified, so that the movable part rotates relative to the first pipe body; and/or the carrier further comprises a first supporting ring, the outer wall of the first supporting ring is tightly matched with the inner wall of the first pipe body, and the push rod penetrates through the first supporting ring and can move relative to the first supporting ring in the first direction and the second direction.

Furthermore, the first driving device further comprises an elastic piece, and the push rod can apply force to the elastic piece when moving in the first direction, so that the elastic piece deforms, and the push rod is reset through the elasticity of the elastic piece when the electromagnet is powered off.

Further, the second driving device includes: a support on which the first tube is disposed and which is movable relative to the support in the first and second directions; the body of the motor is fixed on the supporting piece; and the gear of the gear rack transmission mechanism is connected with the main shaft of the motor, and the rack of the gear rack transmission mechanism is connected with the second end of the first pipe body.

Further, the support member includes: the motor is fixed on the second pipe body, the outer wall of the second support ring is tightly matched with the inner wall of the second pipe body, and the first pipe body is arranged in the second support ring in a penetrating mode and can move relative to the second support ring in the first direction and the second direction; and/or the second driving device further comprises: the two conductive sliding rails are respectively arranged on two sides of the rack, and are respectively electrically connected with the wiring end of the electromagnet; the two electric brushes are respectively in electrical contact with the two conductive sliding rails, and the two electric brushes are respectively connected with two electrodes of a power supply; the conductive sliding rail can slide relative to the electric brush in the first direction and the second direction, and the conductive sliding rail and the electric brush are kept in electrical contact when sliding relative to the electric brush.

A scanning electron microscope, comprising: a vacuum bin; the sample table is used for supporting and placing a sample; a transfer rod for placing the sample stage in the vacuum chamber or for removing the sample stage from the vacuum chamber, wherein the transfer rod is as described above.

Furthermore, a connecting hole and a bayonet are arranged on the sample platform; the fixed part of the conveying rod can extend into the connecting hole, and the movable part of the conveying rod is provided with a clamping block matched with the bayonet; when the movable part faces the fixed part and rotates, the clamping block can be clamped in the clamping opening, and when the movable part is far away from the fixed part and rotates, the clamping block can be withdrawn from the clamping opening.

When the conveying rod provided by the invention is used for conveying and sampling, the clamping device can clamp or loosen a sample picture by controlling the first driving device, and the carrier is driven to extend into or withdraw from the vacuum bin of the scanning electron microscope by controlling the second driving device.

Drawings

FIG. 1 is a schematic view of a transfer rod in accordance with the present invention in use with a vacuum chamber;

FIG. 2 is a schematic partial cross-sectional view of a transfer bar provided in accordance with the present invention;

FIG. 3 is a schematic structural diagram of a sample stage according to the present invention;

FIG. 4 is a top view of a sample stage provided by the present invention;

FIG. 5 is a schematic cross-sectional view taken along line C-C of FIG. 2 in accordance with the present invention;

fig. 6 is a side projection view of a transfer bar provided by the present invention.

Detailed Description

To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. However, the present invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "secured to," mounted on, "or provided with" another element, or the like, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" or "contiguous" to another element, it can be directly connected or intervening elements may also be present.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

As shown in fig. 1, the present invention provides a scanning electron microscope, which includes a sample stage 100, a transmission rod 200, and a vacuum chamber 300. The sample table 100 is used for supporting and placing a sample 400, and the transmission rod 200 is used for being connected with the sample table 100 so as to place the sample table 100 on a support table 301 in a vacuum chamber 300 to perform scanning detection on the sample 400 on the sample table 100, wherein after the sample table 100 is placed in the vacuum chamber 300, the transmission rod 200 is disconnected from the sample table 100 and exits the vacuum chamber 300. After the sample 400 is scanned and detected, the transmission rod 200 is inserted into the vacuum chamber 300, so that the transmission rod 200 is connected with the sample stage 100 to take out the sample stage 100, and after the sample stage 100 is taken out from the vacuum chamber, the transmission rod 200 is disconnected from the sample stage 100.

As shown in fig. 2, in the present embodiment, the transfer lever 200 mainly includes the gripping device 10, the first driving device 20, the carrier 30, and the second driving device 40. Wherein the gripping device 10 and the first driving device 20 are both disposed on the carrier 30, and the first driving device 20 is used for driving the gripping device 10 to move so as to grip or release the sample table 100. The second driving device 40 is connected to the carrier 30 and is used for driving the carrier 30 to move in a first direction a and a second direction B, so as to drive the gripping device 10 to move in the first direction a and the second direction B, so that the gripping device 10 can extend into or withdraw from a vacuum chamber of a scanning electron microscope, wherein the first direction a is opposite to the second direction B. In this embodiment, when the carrier 30 moves in the first direction a, the clamping device 10 may be driven to extend into the vacuum chamber of the sem, and when the carrier 30 moves in the second direction B, the clamping device 10 may be driven to exit from the vacuum chamber 300 of the sem.

As shown in fig. 2, in the present embodiment, the gripping device 10 includes a fixed portion 1 and a movable portion 2, wherein the fixed portion 1 is fixedly disposed on a carrier 30, the movable portion 2 is rotatably disposed on the carrier 30, and a first driving device 20 is connected to the movable portion 2 for driving the movable portion 2 to rotate relative to the carrier 30, i.e., driving the movable portion 2 to rotate relative to the fixed portion 1, so as to make the movable portion 2 approach or separate from the fixed portion 1, thereby clamping or releasing the sample stage 100.

Specifically, in the present embodiment, the movable portion 2 includes a first connecting section 21 and a second connecting section 22 which are arranged perpendicular to each other, and the movable portion 2 is formed into a substantially L-shaped structure, wherein the first connecting section 21 is hinged on the carrier 30, and the second connecting section 22 is used for cooperating with the fixed portion 1 to clamp or release the sample table 100.

As shown in fig. 3, in the present embodiment, the sample stage 100 is provided with a connection hole 50, and when the gripping device 10 grips the sample stage 100, the fixed part 1 extends into the connection hole 50, and the movable part 2 rotates toward the fixed part 1 and abuts against the sample stage 100. When the clamping device 10 is required to release the sample table 100, only the movable part 2 needs to be driven to rotate reversely.

In addition, as shown in fig. 3 and 4, in the present embodiment, a bayonet 60 is further disposed on the sample stage 100, a latch 23 matching with the bayonet 60 is disposed on the movable portion 2, and the specific latch 23 is disposed on the second connecting segment 22 of the movable portion 2. When the clamping device 10 clamps the sample stage 100, the movable part 2 rotates towards the fixed part 1, and when the movable part 2 abuts against the sample stage 100, the clamping block 23 can be clamped in the clamping opening 60, so that the clamping device 10 can clamp the sample stage 100 more stably. When the clamping device 10 releases the sample table 100, the movable part 2 rotates away from the fixed part 1, and the latch 23 can be withdrawn from the bayonet 60.

As shown in fig. 3, in the present embodiment, the sample stage 100 has a substantially trapezoidal structure, and includes an upper surface 101 and a lower surface 102 disposed oppositely, and a first surface 103, a second surface 104, a third surface 105, and a fourth surface 106 located at the circumferential direction of the sample stage 100 and connected in sequence. Wherein, the upper surface 101 is used for placing a sample, the first surface 103 is provided with the connecting hole 50, and the fourth surface 106 is provided with the bayonet 60. It is understood that in other embodiments, the connection hole 50 and the bayonet 60 may be disposed on other surfaces of the sample stage 100.

As shown in fig. 2, in the present embodiment, the gripping device 10 further includes a push rod 3, and the push rod 3 is disposed on the carrier 30 and is movable in the first direction a and the second direction B relative to the carrier 30. The push rod 3 is rotatably connected to the movable part, and in particular, is hinged to the first connecting section 21 of the movable part 2. In addition, in the present embodiment, the axis of rotation of the pusher 3 with respect to the movable portion 2 is not coaxial with the axis of rotation of the movable portion 2 with respect to the carrier 30. In the present embodiment, the push rod 3 is used to receive the urging force of the first driving device so as to push the movable portion 2 to rotate relative to the carrier 30.

As shown in fig. 2, in the present embodiment, the first driving device 20 includes an electromagnet 4 and an elastic member 5. Wherein the electromagnet 4 is fixed on the carrier 30 for applying a force to the push rod 3 for moving it in the first direction a. In addition, in the present embodiment, the push rod 3 has magnetism, and the electromagnet 4 can generate a magnetic field after being energized so as to drive the push rod 3 to move in the first direction a, thereby rotating the movable portion 2 relative to the carrier 30. Meanwhile, when the push rod 3 moves in the first direction a, the elastic member 5 is applied with force, so that the elastic member 5 deforms, and thus the push rod 3 is reset by the elastic force of the elastic member 5 when the electromagnet 4 is powered off.

In this embodiment, the electromagnet 4 is located at an end of the push rod 3 away from the movable portion 2, and in this embodiment, the two are spaced apart from each other. The electromagnet 4 generates the same magnetism as the push rod 3 after being electrified, so as to push the push rod 3 to move in the first direction a, thereby increasing the interval between the second connecting section 22 of the movable part 2 and the fixed part 1, and enabling the clamping device 10 to release the sample table 100.

It will be appreciated that in other embodiments, the push rod 3 may be non-magnetic, and the electromagnet 4 may have a force application rod, and the force application rod may move in the first direction and the second direction after the electromagnet 4 is powered, and may be connected to the push rod 3 to drive the push rod 3 to move.

In addition, in the embodiment, the elastic member 5 is a spring and is disposed at an end of the push rod 3 away from the electromagnet 4, that is, the elastic member 5 is pressed when the push rod 3 moves in the first direction a. Specifically, as shown in fig. 2 and 5, in the present embodiment, the push rod 3 is a cylinder, an end of the push rod 3, which is away from the electromagnet 4, is provided with a notch 31, the notch 31 is opened from an end surface of the end and extends along the second direction B, wherein the notch 31 penetrates through the push rod 3 in a radial direction of the push rod 3 to form a horizontal plane 32 and a vertical plane 33 on the push rod 3, which are perpendicular to each other, and the horizontal plane 32 is parallel to the first direction a. In the present embodiment, the carrier 30 is provided with a stopping portion 30a, and the elastic member 5 is disposed on the horizontal surface 32 and between the stopping portion 30a of the carrier 30 and the vertical surface 33.

It will be appreciated that in other embodiments, the resilient member 5 may be located at an end of the push rod 3 remote from the movable portion 2, and the electromagnet 4 may be located at an end of the push rod 3 remote from the resilient member 5. Of course, in other embodiments, the elastic member 5 may be omitted, and the push rod 3 may be driven to move in the first direction a when the electromagnet 4 is energized in the forward direction, and the push rod 3 may be driven to move in the second direction B when the electromagnet is energized in the reverse direction. In addition, in other embodiments, the push rod 3 may also be a square column or the like.

As shown in fig. 2 and 5, in the present embodiment, the carrier 30 includes a first tube 6 and a first support ring 7, an outer wall 71 of the first support ring 7 is connected to an inner wall 61 of the first tube 6, wherein the first support ring 7 is tightly fitted with the first tube 6, for example, an interference fit may be provided therebetween. Further, in order to make the installation of the first support ring 7 in the first pipe body 6 more stable, as shown in fig. 2, in the present embodiment, the inner wall 61 of the first pipe body 6 is provided with an annular groove 62, and the first support ring 7 is embedded in the annular groove 62.

The push rod 3 is inserted into the first support ring 7 and can move relative to the first support ring 7 in a first direction a and a second direction B. I.e. the push rod 3 and the first support ring 7 are loosely fitted, e.g. in a clearance fit. In addition, in order to make the movement of the push rod 3 in the first direction a and the second direction B more stable, the number of the first support rings 7 is two or more, wherein in the present embodiment, the number of the first support rings 7 is two, so as to facilitate the assembly. It will be appreciated that in other embodiments, the first support ring may be omitted and the push rod 3 directly engages the first tubular body 6.

As shown in fig. 2, in the present embodiment, the first tube 6 is a circular tube and has a first end 6a and a second end 6b, an end surface of the first end 6a is provided with an opening 63, an end surface of the second end 6b is provided with an opening 64, and the opening 63 and the opening 64 are communicated with a hollow portion of the first tube 6, that is, the first tube 6 is a circular tube with two open ends. The clamping device 10 is arranged at the first end 6a of the first pipe body 6, specifically, the fixing part 1 is fixedly connected to the first end 6a of the first pipe body 6, the movable part 2 is hinged to the first end 6a of the first pipe body 6, and the movable part 2 and the fixing part 1 are arranged at intervals. The electromagnet 4 is fixed inside the first tubular member 6, and the second end 6b of the first tubular member 6 is connected to the second driving device 40. In addition, the push rod 3 can penetrate through the first tube 6 from the opening 63 to be connected with the movable part 2.

In this embodiment, the first driving device 20 is disposed in the first pipe 6, that is, the electromagnet 4 is disposed in the first pipe 6, so that not only the volume of the whole conveying rod can be reduced, but also the first driving device 20 can be shielded and protected by the first pipe. In addition, in this embodiment, in order to conveniently set up devices such as electromagnet 4 in first pipe 6, first pipe 6 may be formed by splicing and assembling two or more arc-shaped plates.

In addition, as shown in fig. 2, the stopping portion 30a is a flange structure disposed at the first end 6a, the flange structure has an inner wall of the first end 6a extending inwards, the flange structure is opposite to the hollow portion of the first tube 6, and the flange structure does not completely cover the opening 63 of the first end 6a, and the elastic member 5 is located between the flange structure and the vertical surface 33 of the push rod 3.

It will be appreciated that in other embodiments, the carrier 30 may be provided in a plate-like, rod-like, etc. configuration.

As shown in fig. 2, in the present embodiment, the second driving device 40 includes a support 8, and a motor driving assembly 9 that drives the support 8 to reciprocate in the first direction a and the second direction B; in the present embodiment, the motor drive assembly 9 includes a motor 91 and a rack and pinion gear 92. Wherein the first tubular body 6 is arranged on a support 8 and can move in a first direction a and a second direction B with respect to the support 8; the body 911 of the motor 91 is fixed on the support member 8, the gear 921 of the rack-and-pinion transmission mechanism 92 is connected with the main shaft 912 of the motor 91, and the rack 922 of the rack-and-pinion transmission mechanism 92 is connected with the second end of the first pipe body 6. In addition, in actual use, the position of the second tube 81 is fixed relative to the position of the vacuum chamber of the scanning electron microscope, and the rack 922 is driven to move linearly when the motor 91 rotates. It is understood that in other embodiments, the rack and pinion mechanism 92 may be replaced by a screw drive mechanism or the like.

In this embodiment, the motor 91 can drive the first pipe 6 to move in the first direction a during forward rotation, i.e. drive the first pipe 6 to extend into the vacuum chamber of the sem, and further drive the clamping device 10 to enter the vacuum chamber of the sem. When the motor 91 rotates reversely, the first tube 6 is driven to move in the second direction B, i.e., the first tube 6 is driven to exit from the vacuum chamber of the sem, and the clamping device 10 is driven to exit from the vacuum chamber of the sem.

Specifically, as shown in fig. 2 and 5, in the present embodiment, the support 8 includes a second pipe 81 and a second support ring 82. In this embodiment, the outer wall 821 of the second support ring 82 is connected to the inner wall 811 of the second pipe 81, wherein the second support ring 82 is tightly fitted to the second pipe 81, for example, an interference fit may be provided therebetween. Further, in order to make the installation of the second support ring 82 in the second pipe 81 more stable, as shown in fig. 2, in the present embodiment, the inner wall 811 of the second pipe 81 is provided with an annular groove 812, and the second support ring 82 is embedded in the annular groove 812.

In this embodiment, the second pipe 81 has a first end 81a and a second end 81b, an opening 813 is provided on an end surface of the first end 81a, an opening 814 is provided on an end surface of the second end 81b, and both the opening 813 and the opening 814 communicate with a hollow portion of the second pipe, that is, the second pipe 81 is also a pipe with both ends open. As shown in fig. 2, in the present embodiment, the motor 91 is fixed at the second end 81b of the second tube 81, and the first tube 6 extends into the second tube 81 from the opening 813 of the first end 81 a.

The first pipe 6 is inserted into the second support ring 82 and is movable in the first direction a and the second direction B relative to the second support ring 82. I.e. there is a loose fit, e.g. a clearance fit, between the first tube 6 and the second support ring 82. The first tube 6 can extend out of the second tube 81 through the opening 813 when moving in the first direction a, and the rack 922 can extend into the second tube 81 through the opening 814.

In addition, in order to make the first movement in the first direction a and the second direction B more stable, the number of the second support rings 82 is two or more, wherein in the present embodiment, the number of the second support rings 82 is two, so as to facilitate the assembly. In this embodiment, first tube 6 can be retracted into second tube 81, so that the volume of the transfer rod can be further reduced, and second tube 81 can be used to protect first tube 6.

As shown in fig. 2 and 6, in the present embodiment, the second driving device 40 further includes two conductive sliding rails 401 and two brushes 402. The two conductive sliding rails 401 are disposed on two sides of the rack 922 and electrically connected to two terminals of the electromagnet 4 respectively. In the present embodiment, the electromagnet 4 includes an electromagnetic coil 41 and an iron core 42, and two terminals of the electromagnet 4 are two ends of the electromagnetic coil 41. The two electric brushes 402 are respectively in electrical contact with the two conductive sliding rails 401, and the two electric brushes 402 are respectively connected with two electrodes of a power supply; the conductive sliding rail 401 can slide relative to the brushes 402 in the first direction a and the second direction B, and when the conductive sliding rail 401 slides relative to the brushes 402, the two can also keep electrical contact, that is, after the two brushes 402 are connected with two electrodes of a power supply, the electromagnetic coil 41 can be powered.

In addition, in the present embodiment, two ends of the electromagnetic coil 41 may extend out of the first tube 6 from the second end opening 64 of the first tube 6 so as to be connected with the two conductive sliding rails 401. It is understood that in other embodiments, two conductive sliding rails 401 may extend into the first tube 6 from the second end opening 64 of the first tube 6 to connect with two ends of the electromagnetic coil 41.

In addition, in this embodiment, the rack 922 is made of steel and has conductivity, and an insulating layer 403 (shown in fig. 6) is further disposed between the conductive sliding rail 401 and the rack 922. In the present embodiment, the power supply is a dc power supply, that is, the motor 91 is a dc motor 91, and the electromagnet 4 is a dc electromagnet 4. As shown in fig. 6, in the present embodiment, the on/off of the motor 91 is controlled by a switch K1, and the on/off of the electromagnet 4 is controlled by a switch K2. It can be understood that other switches are provided in the present embodiment to control the forward and reverse energization of the motor 91, and further control the forward and reverse rotation of the motor 91. Certainly, in actual use, the switch K1 is a multi-position switch, so that the switch K1 can simultaneously have the functions of controlling the on/off of the motor 91 and controlling the forward and reverse rotation of the motor 91.

As shown in fig. 1, in this embodiment, an exchange chamber 500 is further disposed outside the vacuum chamber 300, a chamber door (defined as a first chamber door 302) of the vacuum chamber 300 is opened, the vacuum chamber 300 is communicated with the exchange chamber 500, the exchange chamber 500 also has a chamber door (defined as a second chamber door 501), when in use, the sample 400 is fixed on the sample stage 100, and then the second chamber door 501 is opened to place the sample stage 100 in the exchange chamber 500. The sidewall of the exchange bin 500 is provided with a through hole 502, the first tube 6 of the conveying rod 200 can drive the clamping device 10 to extend into the exchange bin 500 from the through hole 502 to be connected with the sample stage 100, that is, the fixing portion 1 of the clamping device 10 extends into the connecting hole 50 of the sample stage, the movable portion 2 abuts against the sidewall of the sample stage, and the clamping block 23 is clamped in the bayonet 60. Then, the first chamber door 302 is opened, the motor 91 is used for rotating forward to drive the first tube 6 to move in the first direction, so that the clamping device 10 drives the sample stage 100 to enter the vacuum chamber 300, and the sample stage 100 is placed on the support table 301. Subsequently, the electromagnet 4 is powered on to drive the push rod 3 to move in the first direction, so that the movable part is separated from the sample stage 100 (i.e. the clamping device releases the sample stage), at this time, the motor 91 rotates reversely to withdraw the first tube 6 from the vacuum chamber 300, and then the first chamber door 302 is closed, so that the sample feeding operation of the sample 400 is completed. It is understood that the sample 400 can be taken out from the vacuum chamber 300 by similar methods, and the sampling operation of the sample 400 is realized, and the embodiment is not described herein too much.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A transfer bar, comprising:

a carrier;

the clamping device is arranged on the carrier and comprises a fixed part, a movable part and a push rod, the fixed part is fixedly arranged on the carrier, the movable part is rotatably arranged on the carrier, the push rod is rotatably connected with the movable part, and the axis of the push rod rotating relative to the movable part is not coaxial with the axis of the movable part rotating relative to the carrier;

the first driving device is arranged on the carrier, and the push rod is used for receiving the force applied by the first driving device so as to push the movable part to rotate relative to the carrier and drive the clamping device to move so as to enable the clamping device to clamp or release the sample table;

and the second driving device is connected with the carrier and used for driving the carrier to move in a first direction and a second direction so as to drive the clamping device to move in the first direction and the second direction, so that the clamping device can extend into or withdraw from a vacuum chamber of a scanning electron microscope, wherein the first direction is opposite to the second direction.

2. The transfer bar of claim 1, wherein the carrier comprises a first tube, the gripping device is disposed at a first end of the first tube, the first drive device is disposed within the first tube, and the second drive device is interfaced with a second end of the first tube.

3. The transfer bar of claim 2, wherein the gripping device comprises:

the fixing part is fixedly connected with the first end of the first pipe body;

the movable part is connected with the first end of the first pipe body in a rotating mode, the first driving device is used for driving the movable part to rotate relative to the first pipe body, and therefore the movable part is close to the fixed part or far away from the fixed part, and clamping or loosening of the sample platform is achieved.

4. The transfer bar of claim 3, wherein the push rod is disposed through the first tube and is rotatably connected to the movable portion, wherein an axis of the push rod that rotates relative to the movable portion is not coaxial with an axis of the movable portion that rotates relative to the first tube; the push rod is used for receiving the force application of the first driving device so as to push the movable part to rotate relative to the first pipe body.

5. The transfer bar of claim 4, wherein the first driving device comprises an electromagnet disposed within the first tube, the electromagnet being operable to drive the push rod in the first direction when energized, thereby rotating the movable portion relative to the first tube; and/or

The carrier still includes first support ring, the outer wall of first support ring with the inner wall tight fit of first body, the push rod wears to establish in the first support ring, and can be in first direction with relative institute in the second direction supports the ring motion.

6. The transfer bar of claim 5, wherein the first driving means further comprises an elastic member, and the push rod applies a force to the elastic member when moving in the first direction to deform the elastic member so that the push rod is reset by the elastic force of the elastic member when the electromagnet is de-energized.

7. The transfer bar of claim 2, wherein the second drive means comprises:

a support on which the first tube is disposed and which is movable relative to the support in the first and second directions;

the body of the motor is fixed on the supporting piece;

and the gear of the gear rack transmission mechanism is connected with the main shaft of the motor, and the rack of the gear rack transmission mechanism is connected with the second end of the first pipe body.

8. The transfer bar of claim 7, wherein the support member comprises a second tube and a second support ring, the motor is fixed to the second tube, an outer wall of the second support ring is in close fit with an inner wall of the second tube, the first tube is inserted into the second support ring and is movable relative to the second support ring in a first direction and a second direction; and/or

The second driving device further comprises two conductive sliding rails and two electric brushes, the two conductive sliding rails are respectively arranged on two sides of the rack, and the two conductive sliding rails are respectively electrically connected with the wiring terminals of the electromagnet; the two electric brushes are respectively in electrical contact with the two conductive sliding rails, and the two electric brushes are respectively connected with two electrodes of a power supply; the conductive sliding rail can slide relative to the electric brush in the first direction and the second direction, and the conductive sliding rail and the electric brush are kept in electrical contact when sliding relative to the electric brush.

9. A scanning electron microscope, comprising:

a vacuum bin;

the sample table is used for supporting and placing a sample; and

the transfer arm of any of claims 1-8, for placing the sample stage in the vacuum chamber or for removing the sample stage from the vacuum chamber.

10. The scanning electron microscope of claim 9, wherein the sample stage is provided with a connecting hole and a bayonet;

the fixed part of the conveying rod can extend into the connecting hole, and the movable part of the conveying rod is provided with a clamping block matched with the bayonet; when the movable part rotates towards the fixed part, the clamping block can be clamped in the clamping opening, and when the movable part is far away from the fixed part, the clamping block can exit from the clamping opening.