CN205881870U - Take automatic positioning device's scanning electron microscope sample platform - Google Patents
Take automatic positioning device's scanning electron microscope sample platform Download PDFInfo
- Publication number
- CN205881870U CN205881870U CN201620702355.XU CN201620702355U CN205881870U CN 205881870 U CN205881870 U CN 205881870U CN 201620702355 U CN201620702355 U CN 201620702355U CN 205881870 U CN205881870 U CN 205881870U
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- CN
- China
- Prior art keywords
- sample
- mounting seat
- installation position
- exchange
- automatic positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a take automatic positioning device's scanning electron microscope sample platform includes: sample cavity is equipped with sample work position, the scanning element is installed lie in sample installation position in the sample cavity directly over, through the motor system in X, the rebound of Y side, the exchange storehouse is equipped with sample installation position, with the sample cavity intercommunication still is equipped with the sample and imports and exports and exchange the door, mobile rail transmit the sample between sample cavity and the exchange storehouse, the sample mount pad is installed mobile rail is last remove between sample installation position and the sample work position, the commuting lever, one end is connected sample mount pad, one end stretch out the exchange storehouse, the camera is installed and is located in the storehouse in the exchange directly over the sample installation position, the controller is equipped with navigation module, navigation module arrives with the translation of control scanning unit on the observation position who corresponds according to assigned position on the image at the sample mount pad.
Description
Technical field
This utility model relates to scanning microscope, particularly to the sample platform of scanning electronic microscope of a kind of band automatic positioning equipment.
Background technology
Scanning electron microscope can be used to observe and detect heterogeneous organic material, inorganic material and micron, submicron office
Surface character in the range of portion.Owing to image depth is big, therefore gained scanning electron image is rich in third dimension, has three-dimensional configuration,
Can provide the surface information more much more than other optical microscopes, this feature can be supplied to the shape that user is more valuable
Looks information, is conducive to the understanding to macro morphology.
Modern scanning electron microscope all has large cavity, is the most all equipped with 100mm diameter sample switch room, can use diameter
Sample stage within 100mm, it means that can get on the conduction a lot of powder of sticker or bulk sample, sample more than, itself
It is easy for confusion, and scanning electron microscope minimum amplification 30 times (SU8010, operating distance 8mm), screen viewing area sample is big
Little for 0.57cm × 0.43cm, it is hardly visible the overall picture of all samples, is thus difficult to fast searching to needing the sample observed；
It addition, the searching of sample is that this is a process taken time and effort by moving back and forth trace ball (conventional means), particularly with
When being stained with the sample of more than 20 on one sample stage, the most more.
Also having and positioned sample by position sensor, the patent documentation authorizing Publication No. CN102246081A is public
Open a kind of scanning microscope to include for housing the estrade of sample, sweep mechanism, for detecting detecting of the region of sample being
System, position sensor and controller.Sweep mechanism is designed between at least two axial location translate estrade.Investigation system
Including optical element and the optical sensor with reading region, wherein, read the side that region intersects in the ideal orientation with estrade
Upwardly extend.Position sensor is for measuring the lateral attitude of estrade and/or the orientation of estrade.Controller is for according to reality, horizontal
To position and/or actual measurement orientation regulation investigation system.
But use microscope per se with photographic head can not complete location, and positioned by sensor and not only to tie
Increasingly complex and location the precision of structure is the highest, and the quick positioning system hence setting up a set of sample position is the most urgent.
Utility model content
This utility model provides the sample platform of scanning electronic microscope of a kind of band automatic positioning equipment, to solve existing scanning electron microscope
The problem that the location efficiency of sample order is low.
A kind of sample platform of scanning electronic microscope of band automatic positioning equipment, including:
Sample bin, is provided with sample working position；
Scanning element, is positioned at the surface of sample installation position, by motor system in X, Y side in being arranged on described sample bin
Move up；X, Y-direction is two axis directions in modal xy coordinate system.
Exchange storehouse, is provided with sample installation position, connects with described sample bin, is additionally provided with sample and imports and exports and exchange door；
Moving guide rail, transmits sample between described sample bin and exchange storehouse；
Sample mounting seat, is arranged on described moving guide rail, moves between described sample installation position and sample working position；
Commuting lever, one end connects described sample mounting seat, and exchange storehouse is stretched out for promoting sample mounting seat described in one end
Moving guide rail moves；
Photographic head, is positioned at the surface of described sample installation position for shooting whole sample mounting seat in being arranged on exchange storehouse
On sample overall；
Controller, is provided with navigation module, and described navigation module is according to specifying position with control on the image of sample mounting seat
Scanning element processed moves on the observation place of correspondence.
Photographic head can the most directly be bought, the image of sample mounting seat in the shooting of sample installation position, and will figure
As importing the positioning software of navigation module, then carry out sample preparation → take pictures → preserve → rotate 180 by existing positioning software
Degree → import → location (selecting 2 point about sample stage center) → with the picture that imports as standard, such that it is able to by mouse point
Arbitrary sample in sampling product mounting seat, translation mechanism drives scanning element to the position of counter sample.
Compared with prior art, this utility model has the advantage that sample realizes equal proportion and shows, it is not necessary to seek back and forth
Look for, it is achieved quickly position, reduce the abrasion of motor system, it is most important that reduce the time finding sample, improve testing efficiency.
In order to prevent sample mounting seat from skidding off moving track, it is preferred that be provided with in described exchange storehouse and prevent sample mounting seat
Run off the first positioning baffle of described moving track.
The sample mounting seat shot for each photographic head is all located at same position, when reducing the image procossing of positioning software
Between, it is preferred that in described first positioning baffle and described sample mounting seat, at least one is provided with first on both contact surfaces
Electric magnet, another is provided with the first magnetic part attracted by the first electric magnet on the contact surface.First electric magnet energising then positions
Sample mounting seat.In order to prevent sample mounting seat from skidding off moving track, it is preferred that be provided with in described sample bin and prevent sample from installing
Seat runs off the limit sensors of described moving track.
During use, select to be applicable to arbitrary dimensional standard sample stage that scanning electron microscope uses, according to the test need of tester
Ask and prepare sample.Sample stage is fixed in sample mounting seat, shoots sample mounting seat overall picture by photographic head 6, store into
Picture format, by positioning software, imports image.Select left and right two point at sample stage center, orientate 1st point, 2st respectively as
Point.I.e. complete Sample location.When looking for sample in sample mounting seat after positioning, if which sample of click, Ke Yishi
Sample mounting seat is automatically moved to need the sample position (now set is that sample mounting seat moves) of test, side very directly perceived
Just, greatly reduce and use roller to move back and forth the time finding sample, and decrease the loss of roller.Especially modern scanning
Electronic Speculum is substantially all the outfit analytical tool such as energy disperse spectroscopy, spectrometer, and shoots bar used when SEM picture and test EDS data
Part is substantially different.Conventional method of testing is exactly first to be SEM, then is EDS, and this means that etc. when being EDS, again
Use roller to backtrack, waste time and energy very much.There is sample positioning system, just can the most quickly realize wanting which is surveyed just uses mouse
Click on the facility of which sample.
The beneficial effects of the utility model:
The sample platform of scanning electronic microscope of band automatic positioning equipment of the present utility model, simple in construction, it is achieved quickly determining of sample
Position, improves testing efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the left view schematic diagram of Fig. 1.
Fig. 3 is the internal structure schematic diagram in exchange storehouse of the present utility model.
Detailed description of the invention
As shown in Figures 1 to 3, the sample platform of scanning electronic microscope of the band automatic positioning equipment of the present embodiment, including:
Sample bin 1, is provided with sample working position；
Scanning element, is positioned at the surface of sample installation position in being arranged on sample bin 1, by motor system in X, Y-direction
Upper movement；
Exchange storehouse 2, is provided with sample installation position 21, connects with sample bin 1, is additionally provided with sample and imports and exports 22 and exchange door
23；
Moving track 3, connection sample bin 1 and exchange storehouse 2, connectivity part is provided with switch gate；
Sample mounting seat 4, is arranged on moving track 3, moves between sample installation position 21 and sample working position；
Commuting lever 5, one end connects sample mounting seat 4, and exchange storehouse 2 is stretched out for promoting sample mounting seat 4 moving in one end
Track moves, and is additionally provided with the guide post 51 being arranged in parallel with commuting lever 5, and guide post is slidably installed and is the fixing connection of commuting lever 5
Fixed plate 52 on.
Photographic head 6, is positioned at the surface of sample installation position for shooting whole sample mounting seat 4 in being arranged on exchange storehouse 2；
Controller, is provided with navigation module, and navigation module is according to specifying position to control to sweep on the image of sample mounting seat
Retouch unit to move on the observation place of correspondence.
The limit sensors preventing sample mounting seat from running off moving range it is provided with in sample bin.
Exchange is provided with the first positioning baffle 7 preventing sample mounting seat 4 from running off moving track, the first positioning baffle 7 in storehouse 2
It is provided with two pieces, is arranged symmetrically in moving track 3 both sides；First positioning baffle 7 is provided with the first electric magnet on both contact surfaces
71, sample mounting seat 4 is provided with the first Magnet 41 attracted by the first electric magnet 71 on the contact surface.
In sum, the sample platform of scanning electronic microscope sample of the band automatic positioning equipment of the present embodiment realizes equal proportion to be shown,
Without finding back and forth, it is achieved quickly position, reduce the abrasion of motor system, it is most important that reduce the time finding sample, carry
High testing efficiency.
Claims (4)
1. the sample platform of scanning electronic microscope of a band automatic positioning equipment, it is characterised in that including:
Sample bin, is provided with sample working position；
Scanning element, is positioned at the surface of sample installation position, by motor system on X, Y-direction in being arranged on described sample bin
Mobile；
Exchange storehouse, is provided with sample installation position, connects with described sample bin, is additionally provided with sample and imports and exports and exchange door；
Moving guide rail, transmits sample between described sample bin and exchange storehouse；
Sample mounting seat, is arranged on described moving guide rail, moves between described sample installation position and sample working position；
Commuting lever, one end connects described sample mounting seat, and exchange storehouse is stretched out for promoting sample mounting seat in described movement in one end
Guide rail moves；
Photographic head, is positioned at the surface of described sample installation position for shooting in whole sample mounting seat in being arranged on exchange storehouse
Sample is overall；
Controller, is provided with navigation module, and described navigation module is according to specifying position to control to sweep on the image of sample mounting seat
Retouch unit to move on the observation place of correspondence.
2. the sample platform of scanning electronic microscope of band automatic positioning equipment as claimed in claim 1, it is characterised in that in described exchange storehouse
It is provided with the first positioning baffle preventing sample mounting seat from running off described moving track.
3. the sample platform of scanning electronic microscope of band automatic positioning equipment as claimed in claim 2, it is characterised in that described first location
In baffle plate and described sample mounting seat, at least one is provided with the first electric magnet on both contact surfaces, and another is on the contact surface
It is provided with the first magnetic part attracted by the first electric magnet.
4. the sample platform of scanning electronic microscope of band automatic positioning equipment as claimed in claim 1, it is characterised in that in described sample bin
It is provided with the limit sensors preventing sample mounting seat from running off moving range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620702355.XU CN205881870U (en) | 2016-06-29 | 2016-06-29 | Take automatic positioning device's scanning electron microscope sample platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620702355.XU CN205881870U (en) | 2016-06-29 | 2016-06-29 | Take automatic positioning device's scanning electron microscope sample platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205881870U true CN205881870U (en) | 2017-01-11 |
Family
ID=57695475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620702355.XU Expired - Fee Related CN205881870U (en) | 2016-06-29 | 2016-06-29 | Take automatic positioning device's scanning electron microscope sample platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205881870U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299275A (en) * | 2019-07-03 | 2019-10-01 | 业成科技（成都）有限公司 | Driven rod and scanning electron microscope |
| CN112397365A (en) * | 2019-08-14 | 2021-02-23 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN112710686A (en) * | 2020-12-14 | 2021-04-27 | 中国科学技术大学 | Method for opening scanning electron microscope sample box |
| CN115396579A (en) * | 2022-08-25 | 2022-11-25 | 昆明理工大学 | Method for automatically shooting scanning electron microscope |
-
2016
- 2016-06-29 CN CN201620702355.XU patent/CN205881870U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299275A (en) * | 2019-07-03 | 2019-10-01 | 业成科技（成都）有限公司 | Driven rod and scanning electron microscope |
| CN110299275B (en) * | 2019-07-03 | 2021-07-30 | 业成科技（成都）有限公司 | Transmission rod and scanning electron microscope |
| CN112397365A (en) * | 2019-08-14 | 2021-02-23 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN112397365B (en) * | 2019-08-14 | 2022-06-14 | 中国科学院上海硅酸盐研究所 | Sample table suitable for TIC3X three-ion-beam cutting instrument |
| CN112710686A (en) * | 2020-12-14 | 2021-04-27 | 中国科学技术大学 | Method for opening scanning electron microscope sample box |
| CN115396579A (en) * | 2022-08-25 | 2022-11-25 | 昆明理工大学 | Method for automatically shooting scanning electron microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170111 Termination date: 20170629 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |