CN110255194B - Automatic loading and unloading vehicle for semiconductor material plate - Google Patents
Automatic loading and unloading vehicle for semiconductor material plate Download PDFInfo
- Publication number
- CN110255194B CN110255194B CN201910522541.3A CN201910522541A CN110255194B CN 110255194 B CN110255194 B CN 110255194B CN 201910522541 A CN201910522541 A CN 201910522541A CN 110255194 B CN110255194 B CN 110255194B
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- rail
- material supporting
- push
- pushing
- vehicle body
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- 239000000463 material Substances 0.000 title claims abstract description 180
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 115
- 238000012546 transfer Methods 0.000 claims abstract description 14
- 210000001503 joint Anatomy 0.000 claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 claims abstract description 5
- 210000000078 claw Anatomy 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 16
- 230000001360 synchronised effect Effects 0.000 claims description 10
- 230000000712 assembly Effects 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 9
- 238000003032 molecular docking Methods 0.000 description 12
- 230000003028 elevating effect Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
Abstract
The invention relates to the field of loading and unloading of semiconductor material plates, in particular to an automatic loading and unloading vehicle for the semiconductor material plates, which comprises a vehicle body, a material supporting rail mechanism, a lifting mechanism, a material pushing and pulling driving mechanism, a butt joint mechanism, a control box and a battery, wherein an upper sliding rail and a lower sliding rail are respectively arranged at the upper end and the lower end in the vehicle body, the material pushing and pulling mechanism is arranged between the upper sliding rail and the lower sliding rail in a sliding manner, the material supporting rail mechanism is arranged at the left side and the right side in the vehicle body in a sliding manner through material supporting sliding block sliding rails, the lifting mechanism is arranged at the two sides of the upper part of the vehicle body and is connected with the material supporting rail mechanism, the lifting mechanism is used for driving the material supporting rail mechanism to move up and down to be in flush joint with an oven or a transfer station, the material pushing and pulling driving mechanism is arranged at the rear part of the vehicle body and is connected with the material pushing and pulling mechanism to slide along the upper sliding rail and the lower sliding rail, and the butt joint mechanism is arranged at the bottom of the vehicle body and is used for being hung and in the oven, the transfer station or the production platform. The invention replaces manual transportation in the loading and unloading process of the semiconductor material plate, thereby saving the time cost of manpower.
Description
Technical Field
The invention relates to the field of loading and unloading of semiconductor material plates, in particular to an automatic loading and unloading vehicle for semiconductor material plates.
Background
In the packaging production process of semiconductor chips, one process flow is that the chips are embedded into a material plate to be conveyed into an oven for baking and solidification, the oven is of a 32-layer structure, each oven can be filled with 32 material plates, the length and the width of each material plate are about half meter, the weight of each material plate is about 4Kg, at present, a handcart is filled by one person, the material plates are taken out of the handcart and are filled into the oven before being pushed into the oven; taking out the baking oven from the oven and loading the baking oven into a trolley; the whole process completely depends on manpower, is time-consuming and labor-consuming, and is easy to damage or pollute the material plate or the chips in the material plate.
Disclosure of Invention
The invention aims to provide an automatic loading and unloading vehicle for a semiconductor material plate, which is used for loading and unloading the material plate in the production process of semiconductor packaging, so that the problem that the whole process is carried manually when the semiconductor material plate is sent to an oven for solidification, the whole process is time-consuming and labor-consuming, and the material plate or chips in the material plate are easy to damage or pollute is solved.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: the utility model provides a semiconductor flitch automatic loading and unloading car, including the automobile body, hold in the palm the material rail mechanism, elevating system, push-pull material mechanism, push-pull material actuating mechanism, docking mechanism, control box and battery, wherein, the upper and lower both ends in the automobile body are provided with slide rail and lower slide rail respectively, slide between upper slide rail and the lower slide rail and establish push-pull material mechanism, push-pull material mechanism is used for carrying out the push-pull to the flitch, hold in the palm the left and right sides that the material rail mechanism was located in the automobile body through holding in the palm material slider slide rail slip, hold in the palm the material rail mechanism and be used for placing the flitch, elevating system sets up in the upper portion both sides of automobile body and is connected with holding in the palm the material rail mechanism, elevating system is used for driving holding in the palm the material rail mechanism and carries out the butt joint with oven or transfer station parallel and level, push-pull material actuating mechanism sets up in the rear portion of automobile body and is connected with push-pull material mechanism and is used for driving push-pull material mechanism and slides along upper slide rail and lower slide rail, docking mechanism sets up in the bottom of automobile body and is used for with oven, transfer station or production platform are used for controlling each mechanism of loading and unloading car, the battery sets up in the bottom of automobile body and is used for supplying power to the unloading car with the control box.
Further, hold in the palm material rail mechanism and hold in the palm material rail mounting bracket, hold in the palm material rail and crash bar, wherein, hold in the palm the front level of material rail mounting bracket and set up a plurality of and hold in the palm the material rail, hold in the palm the back one side of material rail mounting bracket and set up the crash bar.
Further, the material supporting rail is of a stainless steel sheet metal structure with a bending angle of 110 degrees, and grooves are formed in the two ends of the material supporting rail in a punching mode.
Further, the lifting mechanism is screw-nut transmission and comprises a lifting servo motor, a lifting screw rod and a screw rod sliding block, wherein an output shaft of the lifting servo motor is connected with the lifting screw rod through a coupling, the lifting screw rod is in threaded connection with the screw rod sliding block, and the screw rod sliding block is fixedly arranged on the material supporting rail mechanism.
Further, push-and-pull material mechanism includes push-and-pull material mounting bracket, the material claw, material claw board and material claw elevating system, wherein, push-and-pull material mounting bracket's top and bottom are provided with slider and lower slider respectively, go up slider and last slide rail sliding connection, lower slider and lower slide rail sliding connection, the front of material claw board sets up a plurality of material claw, material claw elevating system is screw nut transmission, material claw elevating system sets up and is close to the bottom at push-and-pull material mounting bracket's the back, be provided with the rectangle through-hole on the push-and-pull material mounting bracket, material in the material claw elevating system is grabbed the screw slider and is passed rectangle through-hole fixed connection and drive material claw board and reciprocate in material claw board's the back.
Further, the push-pull driving mechanism comprises a push-pull servo motor, a push-pull belt wheel transmission assembly and a push-pull synchronous shaft, wherein the push-pull servo motor is connected with the push-pull synchronous shaft through a coupler, two groups of push-pull belt wheel transmission assemblies are arranged on the push-pull synchronous shaft and drive the push-pull belt wheel transmission assembly to transmit, and the two groups of push-pull belt wheel transmission assemblies are respectively connected with the upper sliding block and the lower sliding block and drive the upper sliding block and the lower sliding block to slide along the upper sliding rail and the lower sliding rail.
Further, the docking mechanism is a buckle docking structure.
Furthermore, the bottom of the car body is also provided with casters, conductive wheels and positioning wheels, and the conductive wheels are used for eliminating static electricity generated by the loading and unloading car.
Further, the top of automobile body still is provided with the scanning rifle that is used for scanning two-dimensional code information.
Further, the rear part of the vehicle body is also provided with a handle for pushing the loading and unloading vehicle to advance.
The beneficial effects of the invention are as follows: the invention can be connected with an oven or other transfer devices, the whole semiconductor material plate is pushed into the oven by virtue of the pushing and pulling mechanism, and the semiconductor material plate is pulled into the material supporting rail mechanism for transfer and transfer after baking and solidification are finished, the material supporting rail mechanism can be adjusted to be aligned with other material loading and unloading platforms by the lifting mechanism in the transfer process for loading and unloading, meanwhile, the invention has the advantages of optimizing design, lightening weight, adopting modularized design and simple structure on the premise of ensuring structural strength, having reasonable design, replacing manual transportation in the process of loading and unloading the semiconductor material plate, and greatly saving labor and time cost.
Drawings
FIG. 1 is a perspective view of the truck of the present invention;
FIG. 2 is a left side view of the truck of the present invention;
FIG. 3 is a rear elevational view of the truck of the present invention;
FIG. 4 is a perspective view of a stock rail mechanism in the truck of the present invention;
fig. 5 is a perspective view of a push-pull mechanism in the truck of the present invention.
In the figure: the device comprises a vehicle body 1, a material supporting rail mechanism 2, a material supporting rail mounting frame 21, a material supporting rail 22, an anti-collision rod 23, a lifting mechanism 3, a lifting servo motor 31, a lifting screw rod 32, a screw rod sliding block 33, a material pushing and pulling mechanism 4, a material pushing and pulling mounting frame 41, a rectangular through hole 411, a material claw 42, a material claw plate 43, a material claw lifting mechanism 44, a material grabbing screw rod sliding block 441, an upper sliding block 45, a lower sliding block 46, a material pushing and pulling driving mechanism 5, a material pushing and pulling servo motor 51, a material pushing and pulling belt wheel transmission assembly 52, a material pushing and pulling synchronous shaft 53, a butt joint mechanism 6, a buckle 61 buckle, a buckle frame 62, a tripping rod 63, a control box 7, an 8 battery, a 9 upper sliding rail, a 10 lower sliding rail, a material plate 11, a material supporting sliding block sliding rail 12, a trundle 13, a 14 conductive wheel 15 positioning wheels 16 scanning guns 17 handles and 18 buckle fixing blocks.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects solved by the invention more clear, the invention is further described in detail below with reference to the embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It should be understood that in the description of the present invention, the azimuth or positional relationship indicated by the terms "left", "right", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention, and do not require that the present invention must be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
As shown in fig. 1 to 5, in this embodiment, a semiconductor material plate automatic loading and unloading vehicle is provided, which comprises a vehicle body 1, a material supporting rail mechanism 2, a lifting mechanism 3, a material supporting rail mechanism 4, a material supporting driving mechanism 5, a docking mechanism 6, a control box 7 and a battery 8, wherein the vehicle body 1 is used as a mounting rack and a platform of each mechanism device and structure body, and comprises a vehicle body frame, the vehicle body frame is of an aluminum alloy profile structure, the upper end and the lower end in the vehicle body 1 are respectively provided with an upper sliding rail 9 and a lower sliding rail 10, a material supporting mechanism 4 is arranged between the upper sliding rail 9 and the lower sliding rail 10 in a sliding manner, the material supporting rail mechanism 4 is used for pushing and pulling a material plate 11, the material supporting rail mechanism 2 is arranged on the left side and the right side in the vehicle body 1 in a sliding manner through a material supporting slider sliding rail 12, the material supporting rail mechanism 2 is used for placing the material supporting rail 11, the lifting mechanism 3 is arranged on the two sides of the upper part of the vehicle body 1 and is connected with the material supporting rail mechanism 2, the lifting mechanism 3 is used for driving the material supporting rail mechanism 2 to move up and down to be in a docking with an oven or a transfer station, the push-pull driving mechanism 4 is arranged on the rear part of the vehicle body 1 and is connected with the lower sliding rail 4 is used for driving the oven or the transfer station to be in a docking station flush with the oven, the oven or the transfer station, the battery 7 is arranged on the bottom of the vehicle body 1 is used for controlling the control box 7 is connected with the control box 7, and is used for controlling the electrical loading and unloading mechanism 7 is arranged on the bottom part 1.
In this embodiment, the material supporting rail mechanism 2 includes a material supporting rail mounting frame 21, a material supporting rail 22 and an anti-collision rod 23, wherein the front surface of the material supporting rail mounting frame 21 is horizontally provided with a plurality of material supporting rails 22, and one side of the back surface of the material supporting rail mounting frame 21 is provided with the anti-collision rod 23.
In this embodiment, the material supporting rail 22 is a stainless steel sheet metal structure with a bending angle of 110 °, and two ends of the material supporting rail 22 are stamped to form grooves, the shape of the grooves is conducive to guiding the material plate 11, reducing sliding friction force of the material plate 11 on the material supporting rail 22, the material supporting rails 22 aligned in the material supporting rail mechanisms 2 on the left side and the right side in the vehicle body 1 form a layer of goods channel, and the material plate 11 slides into the goods channel along the material supporting rails 22 for storage.
In this embodiment, the lifting mechanism 3 is a screw-nut transmission, and comprises a lifting servo motor 31, a lifting screw rod 32 and a screw rod sliding block 33, wherein an output shaft of the lifting servo motor 31 is connected with the lifting screw rod 32 through a coupling, the lifting screw rod 32 is in threaded connection with the screw rod sliding block 33, and the screw rod sliding block 33 is fixedly arranged on the material supporting rail mechanism 2.
In this embodiment, the pushing and pulling mechanism 4 includes a pushing and pulling mounting frame 41, a material claw 42, a material claw plate 43 and a material claw lifting mechanism 44, wherein, the top and the bottom of the pushing and pulling mounting frame 41 are respectively provided with an upper slide block 45 and a lower slide block 46, the upper slide block 45 is slidably connected with the upper slide rail 9, the lower slide block 45 is slidably connected with the lower slide rail 10, the front surface of the material claw plate 43 is provided with a plurality of material claws 42, the material claw lifting mechanism 44 is driven by a screw nut, the material claw lifting mechanism 44 is arranged at the back surface of the pushing and pulling mounting frame 41 and is close to the bottom, a rectangular through hole 411 is arranged on the pushing and pulling mounting frame 41, and the material claw screw slide block 441 in the material claw lifting mechanism 44 passes through the rectangular through hole 411 and is fixedly connected with the back surface of the material claw plate 43 to drive the material claw plate 43 to move up and down.
In this embodiment, the push-pull driving mechanism 5 includes a push-pull servo motor 51, a push-pull belt wheel transmission assembly 52 and a push-pull synchronous shaft 53, where the push-pull servo motor 51 is connected with the push-pull synchronous shaft 53 through a coupling, two sets of push-pull belt wheel transmission assemblies 52 are disposed on the push-pull synchronous shaft 53 and drive the push-pull belt wheel transmission assembly 52 to transmit, and the two sets of push-pull belt wheel transmission assemblies 52 are respectively connected to the upper slider 45 and the lower slider 46 and drive the upper slider 45 and the lower slider 46 to slide along the upper slide rail 9 and the lower slide rail 10.
In this embodiment, the docking mechanism 6 is a buckle docking structure, including a buckle 61, a buckle frame 62 and a trip rod 63, the buckle frame 62 is rotatably provided with the buckle 61, the buckle frame 62 is also provided with a buckle photoelectric sensor, one end of the trip rod 63 contacts with the tail end of the buckle 61, the trip rod 63 is pushed to push the buckle 61 open for tripping, and when in docking, the inclined plane of the buckle 61 slides into the buckle fixing block 18 for clamping and fixing.
In this embodiment, the bottom of the vehicle body 1 is further provided with casters 13, conductive wheels 14 and positioning wheels 15, and the conductive wheels 14 are used for eliminating static electricity generated by the truck.
In this embodiment, the top of the vehicle body 1 is further provided with a scanning gun 16 for scanning two-dimensional code information.
In this embodiment, the rear part of the vehicle body 1 is also provided with a handle 17 for pushing the loading cart forward.
In this embodiment, the material plate 11 is a circuit board having a length and width dimension of about half a meter, a thickness of about 20mm, and a weight of about 4 Kg.
In this embodiment, the lifting mechanism 3 and the pushing and pulling driving mechanism 5 are respectively provided with a position sensor for returning to the original point and limiting.
In the embodiment, the vehicle body 1 is provided with the correlation photoelectric sensor up and down for judging whether a material plate exists in a loading and unloading vehicle cargo channel.
In this embodiment, the control box 7 is electrically connected to the lifting mechanism 3, the push-pull driving mechanism 5, the scanning gun 16, the gripper lifting mechanism 44, and various sensor controllers for electrical control of the truck.
In this embodiment, the battery 8 is a high-capacity power battery, and is replaceable for charging.
The working flow of the automatic loading and unloading vehicle is as follows:
first, when the truck approaches the oven or the transfer station, the positioning wheel 15 fixes the left and right positions, the buckle 61 provided by the docking mechanism 6 slides into the buckle fixing block 18 provided on the ground and is hung, the front and rear positions are fixed, and meanwhile, the buckle photoelectric sensor provided on the buckle frame 62 sends out a signal, and the control box 7 judges that the docking is completed.
Then, a scanning gun 16 arranged at the top of the vehicle body 1 is started, the scanning gun 16 scans the two-dimensional code arranged on the oven, the control box 7 obtains preset oven material supporting track height and pitch information, and the lifting mechanism 3 is controlled to adjust the height of the material supporting track mechanism 2 according to the two-dimensional code information so that the material supporting track 22 in the material supporting track mechanism 2 is aligned with the oven material supporting track.
After position adjustment, there are two cases: one is that the automatic loading and unloading car draws the flitch 11 from the oven or other equipment and loads into the car, the control box 7 starts the push-pull material servo motor 51 in the push-pull material actuating mechanism 5, drive the push-pull material actuating mechanism 5 to move along upper slide rail 9 and lower slide rail 10 to near the oven, make the flitch 42 contact the flitch 11 edge and promote a small distance, make all flitch 11 edges contact and align with flitch 42, flitch lifting mechanism 44 drive flitch 43 and flitch 42 to descend, make flitch 42 hang flitch 11, then push-pull material servo motor 51 drive push-pull material actuating mechanism 4 to move backward and draw all flitch 11 along holding the flitch 22 and load into the loading and unloading car, finish and draw the material process.
The other is that when the loading and unloading vehicle loads the oven or other equipment, the butt joint, the scanning gun 16 scans, the lifting mechanism 3 adjusts the height of the material supporting rail mechanism 2 to align the material supporting rail 22 in the material supporting rail mechanism 2 with the material supporting rail of the oven or the material supporting rail of other equipment, then the pushing and pulling servo motor 51 drives the pushing and pulling mechanism 4 to push the material plate 11 to be loaded into the oven, the material claw 42 is lifted to be separated from the edge of the material plate 11, and the pushing and pulling mechanism 4 is retracted to the rear part of the loading and unloading vehicle, so that the material pushing process is completed.
When the automatic loading and unloading vehicle is required to leave after finishing working, the trip bar 63 is only required to be kicked by a foot, the buckle 61 is jacked up and tripped by the front end bevel edge of the trip bar 63, and the handle 17 can be pulled to leave the working position.
The above description is only of the preferred embodiments of the present invention and should not be taken as limiting the invention, and therefore, any modifications, equivalents, improvements, etc. made by the present invention and the accompanying drawings should be included in the scope of the present invention.
Claims (4)
1. Semiconductor flitch automatic loading and unloading car, its characterized in that: the electric power supply device comprises a vehicle body, a material supporting rail mechanism, a lifting mechanism, a material pushing and pulling driving mechanism, a butting mechanism, a control box and a battery, wherein an upper sliding rail and a lower sliding rail are respectively arranged at the upper end and the lower end in the vehicle body, the upper sliding rail and the lower sliding rail are arranged between the upper sliding rail and the lower sliding rail in a sliding mode, the material pushing and pulling mechanism is used for pushing and pulling a material plate, the material supporting rail mechanism is arranged at the left side and the right side in the vehicle body in a sliding mode through the material supporting sliding block sliding rail, the material supporting rail mechanism is used for placing the material plate, the lifting mechanism is arranged at the two sides of the upper portion of the vehicle body and is connected with the material supporting rail mechanism, the lifting mechanism is used for driving the material supporting rail mechanism to move up and down and butt joint with an oven or a transfer station in a parallel and level mode, the material pushing and pulling driving mechanism is arranged at the rear portion of the vehicle body and is used for driving the material pushing and pulling mechanism to slide along the upper sliding rail, the butting mechanism is arranged at the bottom of the vehicle body and is used for butting the oven, the transfer station or the production platform is hung and butted with the bottom of the vehicle body, the control box is arranged at the lower portion of the vehicle body and is used for controlling the battery and is connected with the bottom of the electric power supply device
The material supporting rail mechanism comprises a material supporting rail mounting frame, material supporting rails and an anti-collision rod, wherein the front surface of the material supporting rail mounting frame is horizontally provided with a plurality of material supporting rails, and one side of the back surface of the material supporting rail mounting frame is provided with the anti-collision rod;
the material supporting rail is of a stainless steel sheet metal structure with a bending angle of 110 degrees, and two ends of the material supporting rail are punched to form grooves;
the lifting mechanism is screw-nut driven and comprises a lifting servo motor, a lifting screw rod and a screw rod sliding block, wherein an output shaft of the lifting servo motor is connected with the lifting screw rod through a coupler, the lifting screw rod is in threaded connection with the screw rod sliding block, and the screw rod sliding block is fixedly arranged on the material supporting rail mechanism;
the pushing and pulling mechanism comprises a pushing and pulling mounting frame, a material claw plate and a material claw lifting mechanism, wherein an upper sliding block and a lower sliding block are respectively arranged at the top and the bottom of the pushing and pulling mounting frame, the upper sliding block is in sliding connection with the upper sliding rail, the lower sliding block is in sliding connection with the lower sliding rail, the front surface of the material claw plate is provided with a plurality of material claws, the material claw lifting mechanism is driven by a screw nut, the material claw lifting mechanism is arranged at the back surface of the pushing and pulling mounting frame and is close to the bottom, a rectangular through hole is formed in the pushing and pulling mounting frame, and the material claw screw sliding block in the material claw lifting mechanism is fixedly connected to the back surface of the material claw plate through the rectangular through hole to drive the material claw plate to move up and down;
the push-pull driving mechanism comprises a push-pull servo motor, a push-pull belt wheel transmission assembly and a push-pull synchronous shaft, wherein the push-pull servo motor is connected with the push-pull synchronous shaft through a coupler, two groups of push-pull belt wheel transmission assemblies are arranged on the push-pull synchronous shaft and drive the push-pull belt wheel transmission assembly to transmit, and the two groups of push-pull belt wheel transmission assemblies are respectively connected with the upper sliding block and the lower sliding block and drive the upper sliding block and the lower sliding block to slide along the upper sliding rail and the lower sliding rail;
the butt joint mechanism is a buckle butt joint structure.
2. The semiconductor pallet truck of claim 1, wherein: the bottom of the car body is also provided with casters, conductive wheels and positioning wheels, and the conductive wheels are used for eliminating static electricity generated by the loading and unloading car.
3. The semiconductor pallet truck of claim 1, wherein: the top of automobile body still is provided with the scanning rifle that is used for scanning two-dimensional code information.
4. The semiconductor pallet truck of claim 1, wherein: the rear part of the car body is also provided with a handle for pushing the loading and unloading car to advance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910522541.3A CN110255194B (en) | 2019-06-17 | 2019-06-17 | Automatic loading and unloading vehicle for semiconductor material plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910522541.3A CN110255194B (en) | 2019-06-17 | 2019-06-17 | Automatic loading and unloading vehicle for semiconductor material plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110255194A CN110255194A (en) | 2019-09-20 |
| CN110255194B true CN110255194B (en) | 2024-02-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910522541.3A Active CN110255194B (en) | 2019-06-17 | 2019-06-17 | Automatic loading and unloading vehicle for semiconductor material plate |
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| Country | Link |
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| CN (1) | CN110255194B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB456264A (en) * | 1935-11-08 | 1936-11-05 | Andre Maupied | Trolley for the semi-automatic handling of various products such as fresh ceramic products |
| CN206496621U (en) * | 2017-02-22 | 2017-09-15 | 东莞市诠盛塑料有限公司 | A kind of plastic material drying plant |
| CN107549832A (en) * | 2017-10-13 | 2018-01-09 | 潘学勇 | A kind of Chinese medicine Chinese yam peeling section drying plant for treating chronic enteritis |
| CN207943828U (en) * | 2018-03-16 | 2018-10-09 | 上海东富龙科技股份有限公司 | Cantilevered bulk pharmaceutical chemicals tank movement docks trolley |
| CN211168921U (en) * | 2019-06-17 | 2020-08-04 | 深圳市赛弥康电子科技有限公司 | Automatic loading and unloading vehicle for semiconductor material plates |
-
2019
- 2019-06-17 CN CN201910522541.3A patent/CN110255194B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB456264A (en) * | 1935-11-08 | 1936-11-05 | Andre Maupied | Trolley for the semi-automatic handling of various products such as fresh ceramic products |
| CN206496621U (en) * | 2017-02-22 | 2017-09-15 | 东莞市诠盛塑料有限公司 | A kind of plastic material drying plant |
| CN107549832A (en) * | 2017-10-13 | 2018-01-09 | 潘学勇 | A kind of Chinese medicine Chinese yam peeling section drying plant for treating chronic enteritis |
| CN207943828U (en) * | 2018-03-16 | 2018-10-09 | 上海东富龙科技股份有限公司 | Cantilevered bulk pharmaceutical chemicals tank movement docks trolley |
| CN211168921U (en) * | 2019-06-17 | 2020-08-04 | 深圳市赛弥康电子科技有限公司 | Automatic loading and unloading vehicle for semiconductor material plates |
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| Publication number | Publication date |
|---|---|
| CN110255194A (en) | 2019-09-20 |
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