CN110224627A - A kind of Multipurpose composite plasma coating grid bias power supply - Google Patents
A kind of Multipurpose composite plasma coating grid bias power supply Download PDFInfo
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- CN110224627A CN110224627A CN201910441985.4A CN201910441985A CN110224627A CN 110224627 A CN110224627 A CN 110224627A CN 201910441985 A CN201910441985 A CN 201910441985A CN 110224627 A CN110224627 A CN 110224627A
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- 238000000576 coating method Methods 0.000 title claims abstract description 24
- 239000011248 coating agent Substances 0.000 title claims abstract description 17
- 239000002131 composite material Substances 0.000 title claims abstract description 15
- 238000007723 die pressing method Methods 0.000 claims abstract description 11
- 230000007704 transition Effects 0.000 claims description 23
- 238000002955 isolation Methods 0.000 claims description 16
- 230000003993 interaction Effects 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 6
- 238000011084 recovery Methods 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 claims description 2
- 230000002452 interceptive effect Effects 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 description 8
- 210000002381 plasma Anatomy 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M11/00—Power conversion systems not covered by the preceding groups
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
- H03K5/22—Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral
- H03K5/26—Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral the characteristic being duration, interval, position, frequency, or sequence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K7/00—Modulating pulses with a continuously-variable modulating signal
- H03K7/10—Combined modulation, e.g. rate modulation and amplitude modulation
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Inverter Devices (AREA)
Abstract
The invention belongs to automatic control technologys and power electronics field, and in particular to a kind of Multipurpose composite plasma coating grid bias power supply.DC negative bias voltage, unipolar pulse back bias voltage, DC stacked unipolar pulse negative bias die pressing type, asymmetric double polar impulse bias mode or the DC stacked bipolar pulse bias of the power supply different output waveform characteristics required for can exporting.And, pulse voltage amplitude, frequency and the duty ratio of back bias voltage are adjustable, the DC voltage magnitude of DC pulse superposition back bias voltage is adjustable, and back bias voltage work is settable in high pressure low current or low-voltage, high-current mode both of which, and positive pulse voltage amplitude and duty ratio are adjustable.
Description
Technical field
The invention belongs to automatic control technologys and power electronics field, and in particular to a kind of Multipurpose composite etc. from
Daughter plated film grid bias power supply.
Background technique
Grid bias power supply is widely used in plasma coating technique, has vital influence to the characteristic of film, no
Same coating process needs the grid bias power supply of different output waveform characteristics and different voltages grade.It is drawn from output waveform characteristic
Point, main DC negative bias voltage source, unipolar pulse negative bias voltage source, DC stacked unipolar pulse negative bias voltage source and non-right
Claim bipolar pulse grid bias power supply, universal grid bias power supply output waveform characteristic is single, and can only possess one such or two
Kind output waveform characteristic, this is just that research coating process brings inconvenience, and different bias plasmas is needed replacing for different process
Source.Therefore, one can work in DC negative bias voltage mode, unipolar pulse negative bias die pressing type, DC stacked unipolar pulse
The grid bias power supply right and wrong of negative bias die pressing type, asymmetric double polar impulse bias mode or DC stacked bipolar pulse bias mode
Often it is necessary to, meanwhile, the power supply can pass through human-computer interaction interface set grid bias power supply 5 kinds of output waveform characteristic Working moulds
Formula sets the pulse voltage amplitude, frequency and duty ratio of back bias voltage, sets the DC voltage magnitude of back bias voltage, sets back bias voltage
Work sets positive pulse voltage amplitude and duty ratio in high pressure low current or low-voltage, high-current mode.
Summary of the invention
The purpose of the present invention is in view of the foregoing defects the prior art has, providing the present invention, to provide a kind of multipurpose compound
Formula plasma coating grid bias power supply, power supply DC negative bias voltage of different output waveform characteristics required for can exporting,
Unipolar pulse back bias voltage, DC stacked unipolar pulse negative bias die pressing type, asymmetric double polar impulse bias mode or direct current
It is superimposed bipolar pulse bias.Also, pulse voltage amplitude, frequency and the duty ratio of back bias voltage are adjustable, DC pulse superposition
The DC voltage magnitude of back bias voltage is adjustable, and back bias voltage work can be set in high pressure low current or low-voltage, high-current mode both of which
It sets, positive pulse voltage amplitude and duty ratio are adjustable.
Technical scheme is as follows:
A kind of Multipurpose composite plasma coating grid bias power supply, comprising: AC three phase mains, three-phase main-frequency rectification filter
Wave circuit module, the first DC-DC1/DC2 DC power supplier, the 2nd DC-DC3 DC power supplier, the 3rd DC-DC4 direct current
Source module, the first half-bridge circuit module, the second half-bridge circuit module, single-phase H-bridge circuit module, bridge arm series-parallel transition circuit mould
Block, arc suppressing circuit module, multichannel drive isolation circuit module, contactor control circuit module；
The AC three-phase power output end is connected to the input terminal of three-phase main-frequency current rectifying and wave filtering circuit module, and three-phase main-frequency is whole
The output end of stream filter circuit module is connected respectively to the first DC-DC1/DC2 DC power supplier, the 2nd DC-DC3 DC power supply
The input terminal of module, the 3rd DC-DC4 DC power supplier；
First isolated DC voltage DC1 output end of the first DC-DC1/DC2 DC power supplier is connected to the first half
Bridge circuit module, the second isolated DC voltage DC2 output end of the first DC-DC1/DC2 DC power supplier are connected to the second half
The input terminal of bridge circuit module；
The output end of the 2nd DC-DC3 DC power supplier is connected to the first input end of single-phase H-bridge circuit module；
The output end of the 3rd DC-DC4 DC power supplier is connected to the second input terminal of single-phase H-bridge circuit module；
One input terminal of the bridge arm series-parallel transition circuit module is connected to output end, the bridge of the first half-bridge circuit module
Another input terminal of arm series-parallel transition circuit module is connected to the output end of the second half-bridge circuit module, bridge arm series-parallel conversion
The third input terminal of circuit module is connected to the output end of single-phase H-bridge circuit module, to realize the first half-bridge circuit module, second
Half-bridge circuit module and single-phase H-bridge circuit block coupled in series or parallel, power supply energy output HIGH voltage is small when reaching series connection
Power supply can export the ability of low-voltage and high-current when electric current or parallel connection, meet the needs of coating process；
The output end of the bridge arm series-parallel transition circuit module is connected to the input terminal of arc suppressing circuit module, electric arc
Suppression circuit module output end passes through current sensor and is connected to load；
One output end of the multichannel driving isolation circuit module is connected to the control signal of the first half-bridge circuit module,
One output end of multichannel driving isolation circuit module is connected to the control signal of the second half-bridge circuit module, multichannel driving isolation
One output end of circuit module is connected to the control signal of single-phase H-bridge circuit module, to control the first half-bridge circuit module, the
The switching frequency and duty cycle of switching of the internal switch pipe of two half-bridge circuit modules and single-phase H-bridge circuit module, final control electricity
Source exports 5 kinds of waveforms.
The grid bias power supply further includes current detection circuit module, RS485 bus, MCU and CPLD system, control circuit mould
Block and human-computer interaction interface.
The control output end of the current sensor is connected to the input terminal of current detection circuit module；
The output end of the current detection circuit module is connected to an input of MCU and CPLD system, control circuit module
End；
The control output end of the human-computer interaction interface is connected to an input of MCU and CPLD system, control circuit module
End.
Human-computer interaction interface is by DC negative bias voltage mode, unipolar pulse negative bias die pressing type, DC stacked unipolar pulse
Negative bias die pressing type, asymmetric double polar impulse bias mode or DC stacked bipolar pulse bias mode information and negative bias
The DC voltage magnitude of the pulse voltage amplitude of pressure, frequency, duty ratio and back bias voltage, there are also positive pulse voltage amplitude and duty ratios
Information is transferred to MCU and CPLD system, control circuit module.
One output end of the MCU and CPLD system, control circuit module is connected to the defeated of multichannel driving isolation circuit module
Enter end, an output end of MCU and CPLD system, control circuit module is connected to the input terminal of contactor control circuit module.
An output end to RS485 bus is connected to a control input of the first DC-DC1/DC2 DC power supplier
End, an output end of RS485 bus are connected to a control signal of the 2nd DC-DC3 DC power supplier, RS485 bus
One output end is connected to a control signal of the 3rd DC-DC4 DC power supplier, and an input terminal of RS485 bus is connected to
One output end of MCU and CPLD system, control circuit module.
MCU the and CPLD system, control circuit module is by the DC voltage of the pulse voltage amplitude of back bias voltage, back bias voltage
Amplitude and positive pulse voltage amplitude information pass through RS485 bus transfer to the first DC-DC1/DC2 DC power supplier, the respectively
Two DC-DC3 DC power suppliers and the 3rd DC-DC4 DC power supplier, to realize the control to electric power output voltage amplitude.
The beneficial effects of the present invention are:
A kind of Multipurpose composite plasma coating grid bias power supply of the invention, can work in DC negative bias voltage mould
Formula, unipolar pulse negative bias die pressing type, DC stacked unipolar pulse negative bias die pressing type, asymmetric double polar impulse bias mode
Or DC stacked bipolar pulse bias mode, by human-computer interaction interface set the pulse voltage amplitude of back bias voltage, frequency and
Duty ratio sets the DC voltage magnitude of back bias voltage, and setting back bias voltage works in high voltage-small current or low-voltage, high-current mode, if
Determine positive pulse voltage amplitude and duty ratio.The powerful function of the grid bias power supply, realizes a tractor serves several purposes, can satisfy big at this stage
The needs of part biases coating process provide convenience for coating process research and production.Positive pulse bias can be neutralized effectively
The positive charge of workpiece surface accumulation, prevents workpiece surface because of arc discharge caused by charge accumulated.First half-bridge circuit module,
The switching tube of two half-bridge circuit modules and single-phase H-bridge circuit inside modules directly controls the waveform that power supply is output in load, opens
Guan Guanneng rapidly switches off electric arc, inhibits arc energy, improves coating quality.
Detailed description of the invention
Fig. 1 is hardware system structure block diagram of the invention.
Fig. 2 is bridge arm series-parallel transition circuit module diagram of the invention.
Fig. 3 is arc suppressing circuit module diagram of the invention.
In figure: 101, AC three phase mains；102, three-phase main-frequency current rectifying and wave filtering circuit module；103, the first DC-DC1/DC2 is straight
Galvanic electricity source module；104, the 2nd DC-DC3 DC power supplier；105, the 3rd DC-DC4 DC power supplier；106, multichannel drives
Isolation circuit module；107, MCU and CPLD system, control circuit module；108, human-computer interaction interface；109, the 3rd DC-DC4 is straight
Galvanic electricity source module；110, the second half-bridge circuit module；111, single-phase H-bridge circuit module；112, contactor control circuit module；
113, arc suppressing circuit module；114, bridge arm series-parallel transition circuit module；115, current sensor；116, current detecting electricity
Road module；117, it loads；118, RS485 bus.
Specific embodiment
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
The embodiment of the present invention provides a kind of Multipurpose composite plasma coating grid bias power supply, comprising: AC three-phase electricity
Source 101, three-phase main-frequency current rectifying and wave filtering circuit module 102, the first DC-DC1/DC2 DC power supplier 103, the 2nd DC-DC3 are straight
Galvanic electricity source module 104, the 3rd DC-DC4 DC power supplier 105, the first half-bridge circuit module 109, the second half-bridge circuit module
110, single-phase H-bridge circuit module 111, bridge arm series-parallel transition circuit module 114, arc suppressing circuit module 113, multichannel driving
Isolation circuit module 106, contactor control circuit module 112, current detection circuit module 116, RS485 bus 118, MCU and
CPLD system, control circuit module 107 and human-computer interaction interface 108.
101 output end of AC three phase mains is connected to the input terminal of three-phase main-frequency current rectifying and wave filtering circuit module 102, three-phase
The output end of industrial frequency rectifying filter circuit module 102 is connected respectively to the first DC-DC1/DC2 DC power supplier 103, second
The input terminal of DC-DC3 DC power supplier 104, the 3rd DC-DC4 DC power supplier 105.
First isolated DC voltage DC1 output end of the first DC-DC1/DC2 DC power supplier 103 is connected to
Second isolated DC voltage DC2 output end of one half-bridge circuit module 109, the first DC-DC1/DC2 DC power supplier 103 connects
It is connected to the input terminal of the second half-bridge circuit module 110.
It is first defeated to be connected to single-phase H-bridge circuit module 111 for the output end of the 2nd DC-DC3 DC power supplier 104
Enter end.
It is second defeated to be connected to single-phase H-bridge circuit module 111 for the output end of the 3rd DC-DC4 DC power supplier 105
Enter end.
The first half-bridge circuit module 109, the second half-bridge circuit module 110, single-phase H-bridge circuit module 111 and bridge arm
The physical circuit connection schematic diagram of series-parallel transition circuit module 114 is as shown in Figure 2.
The first half-bridge circuit module 109 is in series by two switching tube (MOSFET) Q1 and Q2, VDC1+And VDC1-For
First half-bridge circuit module DC bus-bar voltage input terminal.
The second half-bridge circuit module 110 is in series by two switching tube (MOSFET) Q3 and Q4, VDC2+And VDC2-For
Second half-bridge circuit module DC bus-bar voltage input terminal.
Single-phase H-bridge circuit module 111 is made of four switching tubes (MOSFET) Q5, Q6, Q7 and Q8, and Q5 connects with Q6, Q7
It connects with Q8, the drain electrode of left bridge arm upper switch pipe Q7 and the drain electrode of right bridge arm upper switch pipe Q5 are not connected with, left bridge arm lower switch
The source electrode of pipe Q8 is connected with the source electrode of right bridge arm lower switch pipe Q6, VDC3+And VDC3-For single-phase H-bridge circuit module DC bus electricity
Press first input end, VDC4+And VDC4-For the second input terminal of single-phase H-bridge circuit module DC bus-bar voltage.
The bridge arm series-parallel transition circuit module 114 is by contactor KM1, contactor KM2, contactor KM3, stream mutual inductance
Device TR5 and equal current transformer TR6 is constituted.
The contactor KM1 and contactor KM2 is respectively respectively there are four spacing contact, and there are three spacing contacts by contactor KM3.
1 foot of the KM1 and 1 foot of KM2 are connected with the source electrode of the switching tube Q1 of the first half-bridge circuit module.
7 feet of 3 feet of the KM1,5 feet and KM2 are connected with the source electrode of the switching tube Q2 of the first half-bridge circuit module.
4 feet of the KM1 and 2 feet of KM2 are connected with the source electrode of the switching tube Q4 of the second half-bridge circuit module.
3 feet of the KM2 and 1 foot of KM3 are connected with the source electrode of the switching tube Q3 of the second half-bridge circuit module.
6 feet of the KM1 are connected with the source electrode of the switching tube Q6 of single-phase H-bridge circuit module.
5 feet of the KM2 and 3 feet of KM3 are connected with the source electrode of the switching tube Q5 of single-phase H-bridge circuit module.
4 feet of the KM2 and 8 feet of KM1 are connected with the source electrode of the switching tube Q7 of single-phase H-bridge circuit module.
The negative sense output end that 7 feet of the KM1 are connected with 8 feet of KM2 as bridge arm series-parallel transition circuit module.
1 foot of the TR5 is connected to 2 feet of KM1, and 4 feet of TR5 are connected to 2 feet of KM3, and 2 feet and 3 feet of TR5 are connected to
1 foot of TR6.
4 feet of the TR6 are connected to 4 feet of KM3, and 2 feet and 3 feet of TR6 are connected to 5 feet of KM3.
The positive output end that 6 feet of the KM2 are connected with 6 feet of KM3 as bridge arm series-parallel transition circuit module.
The equal current transformer TR5 and equal current transformer TR6 has a primary side and a secondary side, equal current transformer respectively
1 foot and 3 feet of the primary side of TR5,2 feet and 4 feet of the number of turns and secondary side, 1 foot and 2 feet are Same Name of Ends, and former pair side turn ratio is classified as 1:
1,1 foot and 3 feet of the primary side of equal current transformer TR6,2 feet and 4 feet of the number of turns and secondary side, 1 foot and 2 feet are Same Name of Ends, former pair side
Turn ratio is classified as 1:2.
When the contactor KM1 disconnection, contactor KM3 disconnection, contactor KM2 closed state, the first half-bridge circuit module,
The right bridge arm of second half-bridge circuit module and single-phase H-bridge circuit module series connection, to export high voltage-small current.
When the contactor KM1 closure, contactor KM3 closure, contactor KM2 off-state, the first half-bridge circuit module,
The right bridge arm of second half-bridge circuit module and single-phase H-bridge circuit module is in parallel, to export low-voltage, high-current.
As shown in figure 3, arc suppressing circuit module 113 is made of two inductance and four fast recovery diodes, four fast
Recovery diode is in parallel with resistance and capacitor respectively, and one end of L1 is connected with the anode of D1, the other end of L1 and the cathode of D2
It is connected, the cathode of D1 is connected with the anode of D2, and one end of L2 is connected with the cathode of D3, the other end of L2 and the anode of D4
It is connected, the anode of D3 is connected with the cathode of D4, and the cathode of D2 is connected with the cathode of D3, and D1 anode is arc suppressing circuit
113 input terminal of module, D4 anode are 113 output end of arc suppressing circuit module.
One input terminal of the bridge arm series-parallel transition circuit module 114 is connected to the defeated of the first half-bridge circuit module 109
Outlet, bridge arm series-parallel transition circuit module 114 another input terminal be connected to the output end of the second half-bridge circuit module 110,
The third input terminal of bridge arm series-parallel transition circuit module 114 is connected to the output end of single-phase H-bridge circuit module 111, to realize
First half-bridge circuit module 109, the second half-bridge circuit module 110 and single-phase 111 side of being connected in series or in parallel of H-bridge circuit module
Formula, when reaching series connection power supply energy output HIGH voltage low current or it is in parallel when power supply can export the ability of low-voltage and high-current, meet
The needs of coating process.
The output end of the bridge arm series-parallel transition circuit module 114 is connected to the input of arc suppressing circuit module 113
End, 113 output end of arc suppressing circuit module pass through current sensor 115 and are connected to load 117.
The control output end of the current sensor 115 is connected to the input terminal of current detection circuit module 116.
The output end of the current detection circuit module 116 is connected to the one of MCU and CPLD system, control circuit module 107
Input terminal.
The control output end of the human-computer interaction interface 108 is connected to the one of MCU and CPLD system, control circuit module 107
Input terminal, human-computer interaction interface 108 is by DC negative bias voltage mode, unipolar pulse negative bias die pressing type, DC stacked unipolarity arteries and veins
Negative bias die pressing type, asymmetric double polar impulse bias mode or DC stacked bipolar pulse bias mode information are rushed, and negative
The pulse voltage amplitude (0~1800V) of bias, frequency (20kHz~100kHz), duty ratio (10~80% or 100%) and negative
The DC voltage magnitude (0~600V) of bias, there are also positive pulse voltage amplitude (0~100V) and duty ratio (10~80% or
0%) information is transferred to MCU and CPLD system, control circuit module 107.
One output end of the MCU and CPLD system, control circuit module 107 is connected to multichannel driving isolation circuit module
One output end of 106 input terminal, MCU and CPLD system, control circuit module 107 is connected to contactor control circuit module 112
Input terminal.
One output end of the multichannel driving isolation circuit module 106 is connected to the control of the first half-bridge circuit module 109
One output end of input terminal, multichannel driving isolation circuit module 106 is connected to the control input of the second half-bridge circuit module 110
One output end at end, multichannel driving isolation circuit module 106 is connected to the control signal of single-phase H-bridge circuit module 111, with control
Make opening for the internal switch pipe of the first half-bridge circuit module 109, the second half-bridge circuit module 110 and single-phase H-bridge circuit module 111
Frequency and duty cycle of switching are closed, the final power supply that controls exports 5 kinds of waveforms.
The control that the first DC-DC1/DC2 DC power supplier 103 is connected to an output end of RS485 bus 118
Input terminal processed, an output end of RS485 bus 118 be connected to a control signal of the 2nd DC-DC3 DC power supplier 104,
One output end of RS485 bus 118 is connected to a control signal of the 3rd DC-DC4 DC power supplier 105, RS485 bus
118 input terminal is connected to an output end of MCU and CPLD system, control circuit module 107, MCU and CPLD system control electricity
Road module 107 is by DC voltage magnitude (0~600V) He Zhengmai of the pulse voltage amplitude (0~1800V) of back bias voltage, back bias voltage
It rushes voltage amplitude (0~100V) information and passes through RS485 bus 118 respectively and be transferred to the first DC-DC1/DC2 DC power supplier
103, the 2nd DC-DC3 DC power supplier 104 and the 3rd DC-DC4 DC power supplier 105, to realize to electric power output voltage
The control of amplitude.
Specific embodiment is applied in the present invention, and principle and implementation of the present invention are described, above embodiments
Explanation be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art,
According to the thought of the present invention, there will be changes in the specific implementation manner and application range, in conclusion in this specification
Appearance should not be construed as limiting the invention.
Claims (8)
1. a kind of Multipurpose composite plasma coating grid bias power supply, comprising: AC three phase mains (101), three-phase main-frequency is whole
Flow filter circuit module (102), the first DC-DC1/DC2 DC power supplier (103), the 2nd DC-DC3 DC power supplier
(104), the 3rd DC-DC4 DC power supplier (105), the first half-bridge circuit module (109), the second half-bridge circuit module
(110), single-phase H-bridge circuit module (111), bridge arm series-parallel transition circuit module (114), arc suppressing circuit module (113),
Multichannel drives isolation circuit module (106), contactor control circuit module (112)；
It is characterized by: AC three phase mains (101) output end is connected to three-phase main-frequency current rectifying and wave filtering circuit module (102)
The output end of input terminal, three-phase main-frequency current rectifying and wave filtering circuit module (102) is connected respectively to the first DC-DC1/DC2 DC power supply
Module (103), the 2nd DC-DC3 DC power supplier (104), the 3rd DC-DC4 DC power supplier (105) input terminal；
First isolated DC voltage DC1 output end of the first DC-DC1/DC2 DC power supplier (103) is connected to first
Half-bridge circuit module (109), the second isolated DC voltage DC2 output end of the first DC-DC1/DC2 DC power supplier (103)
It is connected to the input terminal of the second half-bridge circuit module (110)；
It is first defeated to be connected to single-phase H-bridge circuit module (111) for the output end of the 2nd DC-DC3 DC power supplier (104)
Enter end；
It is second defeated to be connected to single-phase H-bridge circuit module (111) for the output end of the 3rd DC-DC4 DC power supplier (105)
Enter end；
One input terminal of the bridge arm series-parallel transition circuit module (114) is connected to the defeated of the first half-bridge circuit module (109)
Outlet, bridge arm series-parallel transition circuit module (114) another input terminal be connected to the output of the second half-bridge circuit module (110)
End, the third input terminal of bridge arm series-parallel transition circuit module (114) are connected to the output end of single-phase H-bridge circuit module (111),
With realize the first half-bridge circuit module (109), the second half-bridge circuit module (110) and single-phase H-bridge circuit module (111) connect or
Parallel, when reaching series connection power supply energy output HIGH voltage low current or it is in parallel when power supply can export low-voltage and high-current
Ability meets the needs of coating process；
The output end of the bridge arm series-parallel transition circuit module (114) is connected to the input of arc suppressing circuit module (113)
End, arc suppressing circuit module (113) output end pass through current sensor (115) and are connected to load (117)；
One output end of multichannel driving isolation circuit module (106) is connected to the control of the first half-bridge circuit module (109)
Input terminal, the control that an output end of multichannel driving isolation circuit module (106) is connected to the second half-bridge circuit module (110) are defeated
Enter end, an output end of multichannel driving isolation circuit module (106) is connected to the control input of single-phase H-bridge circuit module (111)
End, to control the first half-bridge circuit module (109), the second half-bridge circuit module (110) and single-phase H-bridge circuit module (111)
The switching frequency and duty cycle of switching of internal switch pipe, the final power supply that controls export 5 kinds of waveforms；
The bridge arm series-parallel transition circuit module (114) is by contactor KM1, contactor KM2, contactor KM3, equal current transformer
TR5 and equal current transformer TR6 is constituted；
The contactor KM1 and contactor KM2 is respectively respectively there are four spacing contact, and there are three spacing contacts by contactor KM3；
1 foot of the KM1 and 1 foot of KM2 are connected with the source electrode of the switching tube Q1 of the first half-bridge circuit module (109)；
7 feet of 3 feet of the KM1,5 feet and KM2 are connected with the source electrode of the switching tube Q2 of the first half-bridge circuit module (109)；
4 feet of the KM1 and 2 feet of KM2 are connected with the source electrode of the switching tube Q4 of the second half-bridge circuit module (110)；
3 feet of the KM2 and 1 foot of KM3 are connected with the source electrode of the switching tube Q3 of the second half-bridge circuit module (110)；
6 feet of the KM1 are connected with the source electrode of the switching tube Q6 of single-phase H-bridge circuit module (111)；
5 feet of the KM2 and 3 feet of KM3 are connected with the source electrode of the switching tube Q5 of single-phase H-bridge circuit module (111)；
4 feet of the KM2 and 8 feet of KM1 are connected with the source electrode of the switching tube Q7 of single-phase H-bridge circuit module (111)；
The negative sense output end that 7 feet of the KM1 are connected with 8 feet of KM2 as bridge arm series-parallel transition circuit module (114)；
1 foot of the TR5 is connected to 2 feet of KM1, and 4 feet of TR5 are connected to 2 feet of KM3, and 2 feet and 3 feet of TR5 are connected to TR6
1 foot；
4 feet of the TR6 are connected to 4 feet of KM3, and 2 feet and 3 feet of TR6 are connected to 5 feet of KM3；
The positive output end that 6 feet of the KM2 are connected with 6 feet of KM3 as bridge arm series-parallel transition circuit module (114)；
The contactor KM1 and when contactor KM3 off-state, contactor KM2 closure makes the first half-bridge circuit module, second
The right bridge arm of half-bridge circuit module and single-phase H-bridge circuit module works in series model；
The contactor KM1 and when contactor KM3 closed state, contactor KM2 is disconnected, and makes the first half-bridge circuit module, second
The right bridge arm of half-bridge circuit module and single-phase H-bridge circuit module works in paralleling model；
Arc suppressing circuit module (113) is made of two inductance and four fast recovery diodes, four fast recovery diodes point
Not in parallel with resistance and capacitor, one end of L1 is connected with the anode of D1, and the other end of L1 is connected with the cathode of D2, the yin of D1
Pole is connected with the anode of D2, and one end of L2 is connected with the cathode of D3, and the other end of L2 is connected with the anode of D4, the sun of D3
Pole is connected with the cathode of D4, and the cathode of D2 is connected with the cathode of D3, and D1 anode is arc suppressing circuit module (113) input
End, D4 anode are arc suppressing circuit module (113) output end.
2. a kind of Multipurpose composite plasma coating grid bias power supply as described in claim 1, it is characterised in that: described
Equal current transformer TR5 and equal current transformer TR6 has a primary side and a secondary side respectively, 1 foot of equal current transformer TR5 primary side and
3 feet, 2 feet and 4 feet on secondary side, 1 foot and 2 feet are Same Name of Ends, and former pair side turn ratio is classified as 1:1, the 1 of equal current transformer TR6 primary side
Foot and 3 feet, 2 feet and 4 feet on secondary side, 1 foot and 2 feet are Same Name of Ends, and former pair side turn ratio is classified as 1:2.
3. a kind of Multipurpose composite plasma coating grid bias power supply as described in claim 1, it is characterised in that: described
Grid bias power supply further includes current detection circuit module (116), RS485 bus (118), MCU and CPLD system, control circuit module
(107) and human-computer interaction interface (108).
4. a kind of Multipurpose composite plasma coating grid bias power supply as claimed in claim 3, it is characterised in that: described
The control output end of current sensor (115) is connected to the input terminal of current detection circuit module (116)；
The output end of the current detection circuit module (116) is connected to the one of MCU and CPLD system, control circuit module (107)
Input terminal；
The control output end of the human-computer interaction interface (108) is connected to the one of MCU and CPLD system, control circuit module (107)
Input terminal.
5. a kind of Multipurpose composite plasma coating grid bias power supply as claimed in claim 3, it is characterised in that: man-machine
Interactive interface (108) is by DC negative bias voltage mode, unipolar pulse negative bias die pressing type, DC stacked unipolar pulse negative bias pressing mold
The pulse of formula, asymmetric double polar impulse bias mode or DC stacked bipolar pulse bias mode information and back bias voltage
The DC voltage magnitude of voltage amplitude, frequency, duty ratio and back bias voltage, there are also positive pulse voltage amplitudes and duty cycle information to transmit
To MCU and CPLD system, control circuit module (107).
6. a kind of Multipurpose composite plasma coating grid bias power supply as claimed in claim 4, it is characterised in that: described
One output end of MCU and CPLD system, control circuit module (107) is connected to the input of multichannel driving isolation circuit module (106)
End, an output end of MCU and CPLD system, control circuit module (107) are connected to the defeated of contactor control circuit module (112)
Enter end.
7. a kind of Multipurpose composite plasma coating grid bias power supply as claimed in claim 3, it is characterised in that: described
A control input of the first DC-DC1/DC2 DC power supplier (103) is connected to an output end of RS485 bus (118)
End, an output end of RS485 bus (118) be connected to the 2nd DC-DC3 DC power supplier (104) a control signal,
One output end of RS485 bus (118) is connected to a control signal of the 3rd DC-DC4 DC power supplier (105), RS485
One input terminal of bus (118) is connected to an output end of MCU and CPLD system, control circuit module (107).
8. a kind of Multipurpose composite plasma coating grid bias power supply as claimed in claim 7, it is characterised in that: described
MCU and CPLD system, control circuit module (107) is by the pulse voltage amplitude of back bias voltage, the DC voltage magnitude of back bias voltage and just
Pulse voltage amplitude information pass through respectively RS485 bus (118) be transferred to the first DC-DC1/DC2 DC power supplier (103),
2nd DC-DC3 DC power supplier (104) and the 3rd DC-DC4 DC power supplier (105), to realize to electric power output voltage
The control of amplitude.
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