CN203151396U - Multifunctional numerical-control pulse power supply - Google Patents
Multifunctional numerical-control pulse power supply Download PDFInfo
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- CN203151396U CN203151396U CN 201320062883 CN201320062883U CN203151396U CN 203151396 U CN203151396 U CN 203151396U CN 201320062883 CN201320062883 CN 201320062883 CN 201320062883 U CN201320062883 U CN 201320062883U CN 203151396 U CN203151396 U CN 203151396U
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Abstract
The utility model discloses a multifunctional numerical-control pulse power supply. The multifunctional numerical-control pulse power supply comprises a full-bridge inverter circuit, a high-frequency voltage transforming circuit, a secondary rectifying and filtering circuit, a current-equalizing chopper circuit, an EMI filtering circuit, an input soft start circuit, an air cooling system and an auxiliary power supply system. With the multifunctional numerical-control pulse power supply of the utility model adopted, the amplitude, frequency, duty ratio and waveform of output pulses can be adjusted, and output frequency parameters, amplitude parameters, duty ratio parameters and waveform parameters can be continuously adjusted, and therefore, the requirements of different processing conditions can be satisfied. The multifunctional numerical-control pulse power supply of the utility model is advantageous in overall small size, light weight, high efficiency, easiness in implementation, low cost, aid in extensive promotion and application, and great suitability for short electric arc and electric spark machining applications.
Description
Technical field
The utility model relates to the pulse-frequency modulation power technique fields, is specifically related to a kind of multifunctional numerical control pulse power.
Background technology
Short electric arc Machining Technology for Cutting has obtained using widely to the characteristics such as suface processing quality that the processing of high strength, superhard material has high efficiency, high-quality.At present the implementation commonly used of the employed pulse processing power source of short electric arc lathe has two kinds of chopped mode and contravariants.Chopped mode pulse power input stage generally adopts the Industrial Frequency Transformer step-down, and rectifying and wave-filtering is transformed into pulse current by chopper circuit again.This scenario-frame is simple, and cost is lower, but input stage is used Industrial Frequency Transformer, and volume, loss that this has increased the complete machine power supply greatly make power-efficient lower.And the contravariant pulse power adopts the dc switch inversion transformation technique, wherein uses high frequency transformer to make machine volume, weight less, and efficient and power factor (PF) improve greatly, have overcome the shortcoming of using Industrial Frequency Transformer in the chopped mode pulse power.But, the contravariant pulse power also has weak point, in many production processes, usually need the pulse power to provide parameters such as adjustable pulse frequency, duty ratio, output waveform to satisfy different processing conditions, the contravariant pulse power then can not be realized above function, and it can only the paired pulses amplitude carry out suitable adjusting.
The utility model content
At above-mentioned deficiency, the utility model purpose is, the pulse output of a kind of efficient, High Power Factor, low dc ripple coefficient is provided, and can regulate continuously output parameter (frequency, amplitude, duty ratio, waveform), to reach the demand to different processing conditions, be applicable to the multifunctional numerical control pulse power of the various processing conditions of short electric arc.
The utility model for achieving the above object, the technical scheme that provides is:
A kind of multifunctional numerical control pulse power, it comprises one-level modulating unit and the secondary modulating unit that is connected with this one-level modulating unit, described one-level modulating unit comprises full bridge inverter, high frequency transforming circuit and the secondary commutation filter circuit that connects successively, and described secondary modulating unit comprises the current-sharing chopper circuit.
As a kind of improvement of the present utility model, described full bridge inverter comprises bridge inverter main circuit and the busbar voltage buffer capacitor C2～C3 that is made up of 4 IGBT, and this busbar voltage buffer capacitor C2～C3 is connected and forms a busbar voltage buffer-type buffer circuit on the dc bus of described bridge inverter main circuit.
As a kind of improvement of the present utility model, described high frequency transforming circuit comprises that a high frequency transformer and links to each other with this high frequency transformer, and can isolate the capacitor C 4 of the elementary DC component of this high frequency transformer.
As a kind of improvement of the present utility model, the magnetic core of described high frequency transformer adopts soft magnetic ferrite to make.
As a kind of improvement of the present utility model, described secondary commutation filter circuit comprises Xiao Te diode D1～D2, stabilizing inducatnce L1 and big capacity aluminium electroloysis storage capacitor C5, described Xiao Te diode D1 is connected with described stabilizing inducatnce L1 one end respectively with Xiao Te diode D2, this stabilizing inducatnce L1 other end is connected with described capacitor C 5 one ends, and these capacitor C 5 other ends are connected with described high frequency transformer.
As a kind of improvement of the present utility model, described current-sharing chopper circuit is made up of four MOSFET that are in parallel.
As a kind of improvement of the present utility model, it comprises that also three-phase do not control rectification module, and this three-phase is not controlled rectification module and is connected with described full bridge inverter.
As a kind of improvement of the present utility model, it also comprises drive circuit, control board and the single-chip microcomputer that is connected with the secondary modulating unit with the one-level modulating unit.
As a kind of improvement of the present utility model, described single-chip microcomputer is 16 high-speed microprocessor ARM7, and described control board is the integrated control chip UC3879 of phase shift.
As a kind of improvement of the present utility model, it also comprises output circuit, stray inductance Lr and sustained diode 3, described stray inductance Lr one end is connected with the positive pole of output circuit, and the negative pole of this output circuit is connected with the other end of described stray inductance Lr by sustained diode 3.
As a kind of improvement of the present utility model, it also comprises EMI filter circuit, input soft starting circuit, air cooling system, secondary power system.
The beneficial effects of the utility model are: the utility model multifunctional numerical control pulse power adopts contravariant and the chopped mode pulse power to combine, and finishes the numerical control pulse-frequency modulation power supply of two-stage modulation, and prime adopts the contravariant structure, and the back level adopts the chopped mode structure.This pulse power can not only be realized the adjusting to output pulse amplitude, frequency, duty ratio, waveform, to reach the demand to different processing conditions, be applicable to the various processing conditions of short electric arc, and complete machine has, and volume is little, in light weight, the efficient advantages of higher, be easy to realize, cost is low, is beneficial to wide popularization and application.
Description of drawings
Fig. 1 is functional block diagram of the present utility model.
Fig. 2 is main circuit topology of the present utility model.
Fig. 3 is general principles figure of the present utility model.
Embodiment
Embodiment: referring to Fig. 1 to Fig. 3, a kind of multifunctional numerical control pulse power that present embodiment provides, it comprises one-level modulating unit and the secondary modulating unit that is connected with this one-level modulating unit, described one-level modulating unit comprises full bridge inverter, high frequency transforming circuit and the secondary commutation filter circuit that connects successively, and described secondary modulating unit comprises the current-sharing chopper circuit.
Described full bridge inverter comprises bridge inverter main circuit and the busbar voltage buffer capacitor C2～C3 that is made up of 4 IGBT, and this busbar voltage buffer capacitor C2～C3 is connected and forms a busbar voltage buffer-type buffer circuit on the dc bus of described bridge inverter main circuit.Q1～Q4 is the bridge inverter main circuit that four IGBT form, and the high voltage direct current of prime is transformed to the square-wave pulse alternating current of positive and negative symmetry.Circuit adopts the phase-shift PWM controlled mode, and its basic principle is the complementary conducting of two switching tubes, 180 degree of each brachium pontis, differs phase place, i.e. a phase shifting angle between the conducting of two brachium pontis.By regulating the size of this phase shifting angle, regulate the output voltage pulse duration, obtain the ac square-wave voltage of the positive-negative half-cycle symmetry of EDM Generator of Adjustable Duty Ratio at the transformer secondary, reach the purpose of regulating output voltage.The full-bridge inverting structure adopts the soft switch change-over technology of ZVS PWM, utilize the resonance of power tube parasitic capacitance or external capacitor and high frequency transformer former limit leakage inductance or external inductance to realize the no-voltage break-make of power tube, can effectively eliminate the voltage stress of the pipe that opens the light like this, increase the useful life of power device.C2, C3 are respectively the busbar voltage buffer capacitors of front and back brachium pontis, it directly is connected on the dc bus of IGBT inverter, constitute busbar voltage buffer-type buffer circuit, can effectively suppress the peak voltage that the stray inductance by dc bus causes, but do not have directly to shift the effect of IGBT switch stress.
Described high frequency transforming circuit comprises that a high frequency transformer and links to each other with this high frequency transformer, and can isolate the capacitor C 4 of the elementary DC component of this high frequency transformer.The magnetic core of described high frequency transformer adopts soft magnetic ferrite to make.Advantages such as this material characteristics is remarkable, has the saturation flux density height, and residual magnetic flux density is low, and magnetic hysteresis loss and eddy current loss are little.In addition, it also is an important content of design of transformer that the magnetic saturation of high frequency transformer suppresses, this power supply is gone here and there on the primary winding after selecting the 800V 20uF electrochemical capacitor parallel connection of two ECO companies for use, and to suppress the bias phenomenon of voltage device, the evidence effect is obvious.High frequency transformer output secondary commutation filter circuit adopts full-wave rectification, and every road rectifying device adopts the parallel connection of a plurality of Xiao Te diode, and its effect also is to play shunting, reduces the current capacity of single diode, improves power output.Diode shunting in parallel is herein mentioned MOSFET shunting in parallel with the preceding paragraph and is had same problem, and that is exactly the effect of current-sharing, and unbalanced certain power tube that will cause of electric current shunting is crossed cause thermal damage.Therefore, power tube is uniformly distributed on the same fan hot plate, it is worked under the same temperature environment, can reach preferably all properties of flow like this, the performance of power supply is also had positive effect.
Referring to Fig. 2, Tr is a high frequency transformer, finishes isolation and the transformation function of power supply front and back level.C4 is every constant current and since inverter output two ends weber value because a variety of causes does not wait the transformer bias phenomenon that causes, cause the power supply cisco unity malfunction, C4 can the elementary DC component of isolating transformer, thereby effectively avoids the bias phenomenon of transformer.
Described secondary commutation filter circuit comprises Xiao Te diode D1～D2, stabilizing inducatnce L1 and big capacity aluminium electroloysis storage capacitor C5, described Xiao Te diode D1 is connected with described stabilizing inducatnce L1 one end respectively with Xiao Te diode D2, this stabilizing inducatnce L1 other end is connected with described capacitor C 5 one ends, and these capacitor C 5 other ends are connected with described high frequency transformer.
Referring to Fig. 2, D1, D2 are secondary rectification Xiao Te diode, form the secondary commutation filter circuit by it, because the large current characteristic of output loop, rectifier diode adopts a plurality of parallel connections, plays the effect of current-sharing, thereby improve the power output of the pulse power.L1, C5 are respectively stabilizing inducatnce and big capacity aluminium electroloysis storage capacitor, and they both can play the effect of mild electric current, also can provide lasting power supply capacity for chopper circuit.
Described current-sharing chopper circuit is made up of four MOSFET that are in parallel.
Referring to Fig. 2, T1～T4 is the current-sharing chopper circuit that four field effect transistor MOSFET compose in parallel, and this current-sharing chopper circuit function provides frequency, EDM Generator of Adjustable Duty Ratio pulse current.Effect in parallel is identical with the Xiao Te diode, and parallel current-sharing improves output power of power supply to reduce the ampacity of single diode.
This functions of modules provides frequency, EDM Generator of Adjustable Duty Ratio pulse current.It is identical that effect in parallel recovers diode soon with Schottky, and parallel current-sharing improves output power of power supply to reduce the ampacity of single diode.
In the present embodiment, the multifunctional numerical control pulse power comprises that also three-phase do not control rectification module, and this three-phase is not controlled rectification module and is connected with described full bridge inverter.
Referring to Fig. 2, ZL represents that three-phase do not control rectification, and C1 is high withstand voltage, big capacity aluminium electroloysis filter capacitor, and their form input stage current rectifying and wave filtering circuit, and three-phase 380V alternating current is transformed to level and smooth high voltage direct current about 514V.This finishing circuit is simple in structure, and has advantages such as DC side output ripple electric current is little.
In the present embodiment, the multifunctional numerical control pulse power also comprises drive circuit, control board and the single-chip microcomputer that is connected with the secondary modulating unit with the one-level modulating unit.Described single-chip microcomputer is 16 high-speed microprocessor ARM7, and described control board is the integrated control chip UC3879 of phase shift.The integrated control chip UC3879 of this phase shift mainly produces four road totem full-bridges and drives signal, and finishes the protection to discharge loop, and to the constant voltage closed-loop control of output voltage.Level copped wave drove the output of signal after single-chip microcomputer was used for finishing, and realized the man-machine interface communication.The drive circuit major function is to finish the power amplification that drives signal to reach the driver's valve value signal of high-power switch device.
In the present embodiment, the multifunctional numerical control pulse power also comprises output circuit, stray inductance Lr and sustained diode 3, described stray inductance Lr one end is connected with the positive pole of output circuit, and the negative pole of this output circuit is connected with the other end of described stray inductance Lr by sustained diode 3.
Referring to Fig. 2, Lr and D3 are respectively the stray inductance of load and cable and the fly-wheel diode in loop.Because the existence of loop and load stray inductance Lr, when a discharge pulse finished, discharge loop appointed that stray inductance is arranged is load discharge, and the effect of D3 then is for discharge loop provides discharge channel, avoided the parallel field effect pipe to bear extracurrent and damaged.
In the present embodiment, the multifunctional numerical control pulse power also comprises EMI filter circuit, input soft starting circuit, air cooling system, secondary power system.
The one-level modulating unit is equivalent to a constant voltage dc source, and the function of finishing is to provide stable adjustable dc voltage for secondary level modulating unit.In fact, this direct voltage also can directly obtain by Industrial Frequency Transformer, but Industrial Frequency Transformer efficient is lower, and the output dc ripple is big, and replaces Industrial Frequency Transformer can avoid above shortcoming effectively by the DC/DC switch converters.Secondary level modulating unit is a current-sharing chopper circuit, adopts a plurality of metal-oxide-semiconductors to compose in parallel, and the function of finishing is to provide lasting current impulse to load, and the frequency of regulating impulse continuously and duty ratio.The DC/DC converter also can be for load provides current impulse, and still the current impulse that is directly provided by this converter has fixing frequency and duty ratio, can not finish the required function of this pulse power.So this power supply adopts two-stage modulation circuit structure, can finish the multi-parameter output function of power supply, can realize the efficient, energy-conservation of power supply again.DC/DC inverter main circuit topology adopts the full-bridge mapped structure, and this structure power output is the twice of half-bridge structure, is the first-selected structure of high power switching power supply.Power conversion device in the full bridge structure adopts the insulated gate bipolar transistor IGBT, this device has plurality of advantages such as switching speed is fast, input impedance is high, drive circuit is simple, hot temperature is good, ampacity is big, blocking voltage height, is the first-selected switching device as high power D C/DC converter.The direct voltage of DC/DC converter comes from three-phase and does not control rectification, adopts three-phase not control rectification module electrical network three-phase electricity rectifying and wave-filtering is obtained.This rectifier system is simple and convenient, and the output dc ripple is low.
The utility model multifunctional numerical control pulse power realizes that concrete function is as follows:
(1) power supply is to output pulse frequency adjustable range 50HZ-20KHZ;
(2) pulse voltage amplitude adjustable range 3-36V;
(3) pulse duty factor adjustable range 0-90%;
(4) pulse power output current peak value can reach 3000A, and instantaneous power is up to 120KW;
(5) this power supply possesses voltage stabilizing, two kinds of output modes of current stabilization, can switch arbitrarily;
(6) power supply have overvoltage, under-voltage, phase shortage, module failure, overtemperature, output overvoltage, output short-circuit,
Protective circuits such as fault demonstration play real-time protection to power supply.
Referring to Fig. 3, the concrete workflow of the utility model multifunctional numerical control pulse power is as follows:
Three-phase 380V sends into not control rectifier ZL of three-phase behind input inductance L, air switch ZK, input inductance L prevents that the surge current that power initiation is from impacting.An input wherein LH who imports on the live wire is D.C mutual-inductor, and it is to utilize electromagnetic induction principle to measure the input average voltage.EMI prevents the line voltage surge to the infringement of power supply, the pollution that also stops power supply that electrical network is caused on the other hand on the one hand for the filtering of input electrical network.
Three-phase not control rectifier right side has current-limiting resistance R, coil KM and trigger board, and they form power supply input stage soft starting circuit.Its operation principle is: the KM ortho states is off-state, and when the closed power connection of air switch ZK, output is level after current-limiting resistance R sends into, and R prevents surge current.After this, after trigger board detection input voltage tended towards stability, trigger winding KM made its connection, with current-limiting resistance R short circuit, to reduce the loss of power.C1 is the capacitance alminium electrolytic condenser, and for the filtering behind the three phase rectifier, L1 then is inverter circuit input stabilizing inducatnce.
After the three phase rectifier, the full bridge inverter of being formed by insulated gate bipolar transistor IGBT Q1, Q2, Q3, Q4, be the positive and negative doublet impulse alternating current of high frequency with the inversion of the electricity of the smooth direct current after the rectifying and wave-filtering, this part is the power supply core, and the quality of its work directly influences the performance of complete machine power supply.C2 is the buffer condenser of IGBT, it directly is connected on the dc bus of IGBT inverter, constitute the buffer circuit of busbar voltage buffer-type, it can effectively suppress the peak voltage that the stray inductance by dc bus causes, but does not shift the effect of IGBT switch stress.C3, C4 are IGBT parasitic capacitance or external capacitor, and the resonance effect of it and high frequency transformer former limit stray inductance or external inductance can be realized phase shifting control ZVS PWM full-bridge converter.
Tr is high frequency transformer, and it is required low tension with the high-voltage pulse square wave step-down that full-bridge inverting goes out, and the effect that level is isolated before and after playing.C5, C6 are every constant current, prevent the transformer bias phenomenon.M1 is a coil, utilize electromagnetic induction principle with current sampling after, Rg is converted to voltage signal through sampling resistor, sends into current foldback circuit and damages with the overload that guarantees power supply.
After this, the secondary commutation filter circuit of being made up of D1, D2 exchanges action of low-voltage pulse and is converted to pulse direct current.C7 is big capacity alminium electrolytic condenser, and it stores pulse direct current, and for back level chopper circuit provides power source, L2 is stabilizing inducatnce.
The Hall voltage transducer is parallel to the secondary commutation filtering output end, detects electric power output voltage on the one hand, is used for output voltage and shows; Be used for the closed-loop control of constant voltage output on the other hand.Hall current sensor series connection and secondary commutation filtering output end, the size that detects output current is used for output current and shows, also is used for the closed-loop control of constant current output simultaneously.
Afterwards, the current-sharing chopper circuit by T1, T2, T3, T4 form adopts high frequency, super-current power unit MOSFET, finishes the pulse shaping of power supply, belongs to the frequency modulation module of power supply.D is the fly-wheel diode of output circuit, for the usefulness of the load inductance afterflow after the discharge pulse end, avoids the damage of power tube.
Then be control and the drive part of power supply, control board provides full-bridge to drive signal, drives the full-bridge switch device through drive plate, finishes two closed-loop controls of output voltage electric current and protective circuit etc. in addition.The ARM plate provides switching signal for back level chopper circuit, level switching tube after the light-coupled isolation rear drive of rebound.ARM plate and panel are also realized man-machine interaction, and panel shows for the user provides input button and LED.Can change power supply by button and export parameters such as the frequency of pulse, amplitude, duty ratio, also can show the variation of these parameters by LED.
Be complete machine power supply slave part at last, input stage has six fuse FU1-FU6 among Fig. 3, and three-phase electricity inserts power supply fan behind FU1-FU3, and fan plays the thermolysis of power tube.FU4-FU6 inserts the auxiliary transformer input, for transformer overload provides protection.This power supply accessory power supply adopts three auxiliary transformers, is respectively Tr1, Tr2, Tr3.Two groups of outputs of Tr1 are respectively control board and the power supply of full-bridge drive plate, and Tr2 provides accessory power supply for back level drive plate, and Tr3 provides power supply for rebound, panel, ARM plate.
The utility model multifunctional numerical control pulse power adopts contravariant and the chopped mode pulse power to combine, and finishes the numerical control pulse-frequency modulation power supply of two-stage modulation, and prime adopts the contravariant structure, and the back level adopts the chopped mode structure.This pulse power can not only be realized the adjusting to output pulse amplitude, frequency, duty ratio, waveform, to reach the demand to different processing conditions, be applicable to the various processing conditions of short electric arc, and complete machine has, and volume is little, in light weight, the efficient advantages of higher, be easy to realize, cost is low, is beneficial to wide popularization and application.
The announcement of book and instruction according to the above description, the utility model those skilled in the art can also change and revise above-mentioned execution mode.Therefore, the embodiment that discloses and describe above the utility model is not limited to also should fall in the protection range of claim of the present utility model modifications and changes more of the present utility model.In addition; although used some specific terms in this specification, these terms do not constitute any restriction to the utility model just for convenience of description; other power supply that adopts structure same or similar with it and obtain is all in the utility model protection range.
Claims (10)
1. multifunctional numerical control pulse power, it is characterized in that, it comprises one-level modulating unit and the secondary modulating unit that is connected with this one-level modulating unit, described one-level modulating unit comprises full bridge inverter, high frequency transforming circuit and the secondary commutation filter circuit that connects successively, and described secondary modulating unit comprises the current-sharing chopper circuit.
2. the multifunctional numerical control pulse power according to claim 1, it is characterized in that, described full bridge inverter comprises bridge inverter main circuit and the busbar voltage buffer capacitor C2～C3 that is made up of 4 IGBT, and this busbar voltage buffer capacitor C2～C3 is connected and forms a busbar voltage buffer-type buffer circuit on the dc bus of described bridge inverter main circuit.
3. the multifunctional numerical control pulse power according to claim 1, it is characterized in that, described high frequency transforming circuit comprises that a high frequency transformer and links to each other with this high frequency transformer, and can isolate the capacitor C 4 of the elementary DC component of this high frequency transformer, the magnetic core of described high frequency transformer adopts soft magnetic ferrite to make.
4. the multifunctional numerical control pulse power according to claim 3, it is characterized in that, described secondary commutation filter circuit comprises Xiao Te diode D1～D2, stabilizing inducatnce L1 and big capacity aluminium electroloysis storage capacitor C5, described Xiao Te diode D1 is connected with described stabilizing inducatnce L1 one end respectively with Xiao Te diode D2, this stabilizing inducatnce L1 other end is connected with described capacitor C 5 one ends, and these capacitor C 5 other ends are connected with described high frequency transformer.
5. the multifunctional numerical control pulse power according to claim 4 is characterized in that, described current-sharing chopper circuit is made up of four MOSFET that are in parallel.
6. the multifunctional numerical control pulse power according to claim 1 is characterized in that, it comprises that also three-phase do not control rectification module, and this three-phase is not controlled rectification module and is connected with described full bridge inverter.
7. the multifunctional numerical control pulse power according to claim 1 is characterized in that, it also comprises drive circuit, control board and the single-chip microcomputer that is connected with the secondary modulating unit with the one-level modulating unit.
8. the multifunctional numerical control pulse power according to claim 7 is characterized in that, described single-chip microcomputer is 16 high-speed microprocessor ARM7, and described control board is the integrated control chip UC3879 of phase shift.
9. the multifunctional numerical control pulse power according to claim 1, it is characterized in that, it also comprises output circuit, stray inductance Lr and sustained diode 3, described stray inductance Lr one end is connected with the positive pole of output circuit, and the negative pole of this output circuit is connected with the other end of described stray inductance Lr by sustained diode 3.
10. the multifunctional numerical control pulse power according to claim 1 is characterized in that, it also comprises EMI filter circuit, input soft starting circuit, air cooling system and secondary power system.
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| CN 201320062883 CN203151396U (en) | 2013-02-05 | 2013-02-05 | Multifunctional numerical-control pulse power supply |
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| CN 201320062883 CN203151396U (en) | 2013-02-05 | 2013-02-05 | Multifunctional numerical-control pulse power supply |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103475258A (en) * | 2013-09-09 | 2013-12-25 | 河海大学常州校区 | High-voltage pulse power supply with adjustable discharge parameters |
| CN103872941A (en) * | 2014-04-02 | 2014-06-18 | 吉林大学 | High-voltage pulse power supply |
| CN103973153A (en) * | 2013-02-05 | 2014-08-06 | 新疆大学 | High-power numerical control pulse frequency modulation power supply of electric arc cutting machine tool |
| CN104038051A (en) * | 2014-05-26 | 2014-09-10 | 株洲变流技术国家工程研究中心有限公司 | Pulsed direct current power supply system |
| CN104128680A (en) * | 2014-07-16 | 2014-11-05 | 广东工业大学 | Electrochemical machining high frequency pulse power source based on SOPC technology |
| CN110855146A (en) * | 2019-11-13 | 2020-02-28 | 北京航空航天大学 | Large-current pulse type inductive energy storage power supply processor |
| CN114362582A (en) * | 2021-12-10 | 2022-04-15 | 核工业西南物理研究院 | Power supply device for high-power pulse magnetron sputtering and control method thereof |
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2013
- 2013-02-05 CN CN 201320062883 patent/CN203151396U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103973153A (en) * | 2013-02-05 | 2014-08-06 | 新疆大学 | High-power numerical control pulse frequency modulation power supply of electric arc cutting machine tool |
| CN103475258A (en) * | 2013-09-09 | 2013-12-25 | 河海大学常州校区 | High-voltage pulse power supply with adjustable discharge parameters |
| CN103475258B (en) * | 2013-09-09 | 2016-08-17 | 河海大学常州校区 | The high-voltage pulse power source of adjustable discharge parameter |
| CN103872941A (en) * | 2014-04-02 | 2014-06-18 | 吉林大学 | High-voltage pulse power supply |
| CN104038051A (en) * | 2014-05-26 | 2014-09-10 | 株洲变流技术国家工程研究中心有限公司 | Pulsed direct current power supply system |
| CN104128680A (en) * | 2014-07-16 | 2014-11-05 | 广东工业大学 | Electrochemical machining high frequency pulse power source based on SOPC technology |
| CN110855146A (en) * | 2019-11-13 | 2020-02-28 | 北京航空航天大学 | Large-current pulse type inductive energy storage power supply processor |
| CN114362582A (en) * | 2021-12-10 | 2022-04-15 | 核工业西南物理研究院 | Power supply device for high-power pulse magnetron sputtering and control method thereof |
| CN114362582B (en) * | 2021-12-10 | 2023-09-08 | 核工业西南物理研究院 | Power supply device for high-power pulse magnetron sputtering and control method thereof |
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