CN103151950A - Grid bias power supply of electron beam machining equipment and application structure and application operation method of grid bias power supply - Google Patents
Grid bias power supply of electron beam machining equipment and application structure and application operation method of grid bias power supply Download PDFInfo
- Publication number
- CN103151950A CN103151950A CN2013100862916A CN201310086291A CN103151950A CN 103151950 A CN103151950 A CN 103151950A CN 2013100862916 A CN2013100862916 A CN 2013100862916A CN 201310086291 A CN201310086291 A CN 201310086291A CN 103151950 A CN103151950 A CN 103151950A
- Authority
- CN
- China
- Prior art keywords
- output
- grid
- power supply
- input
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Particle Accelerators (AREA)
Abstract
The invention discloses a grid bias power supply of electron beam machining equipment and an application structure and an application operation method of the grid bias power supply. The grid bias power supply adopts an amplitude modulation, voltage regulation and inversion technique, grid bias voltage and the amplitude control signal of the grid bias voltage can be almost synchronously amplitude-modulated; by adopting a method that two units operate in parallel, the influence caused by an inversion and current conversion process to the output waveform of the grid bias voltage is effectively eliminated; by arranging a filter with a common-mode choke between an inverter and an isolation transformer, common-mode impact signals coming from a high-voltage end are effectively suppressed; by adopting a new method for connecting the grid bias power supply with an accelerating power supply, a cathode power supply and an electron gun, uncontrollable electrons emitted by a cathode can be suppressed when a beam forming electrode discharges.
Description
Technical field
The present invention relates to the electron beam process equipment field, be specifically related to a kind of inclined to one side power supply of grid and application structure and application operation method of electron beam process equipment.
Background technology
The negative electrode of electron-beam generating system divergent bundle has directly-heated type and two kinds of negative electrodes of indirect-heating.The operating state of cathode emission electronic beam current has temperature limiting state and space charge limit state.The saturated electrons beam current density of cathode emission under the temperature limiting state is by formula
Determine i in formula
sBe the saturated electrons beam current density of cathode emission, A
0Be the inferior constant of Richard, T is the thermodynamic temperature of negative electrode, and k is Boltzmann constant,
Be the cathode material work function.Under the space charge limit state, under a certain cathode temperature, the beam current density of cathode emission is by formula
Determine i in formula
spBe the beam current density between anode and cathode under space charge limit, d is cathode and anode spacing, E
aBe accelerating voltage, and i
sp＜i
sEffective emission area of negative electrode and the film hole diameter of bunching electrode and be added in negative electrode and bunching electrode between the grid bias-voltage relevant, the effective diameter on cathode emission surface is by formula
Determine d in formula
kBe the effective diameter on cathode emission surface, d
bBe bunching electrode film hole diameter, E
b0Be the grid bias-voltage value of electronic beam current cut-off, E
bBe the mutually anticathode grid bias-voltage of bunching electrode value.
By above analysis as can be known, cathode emission electronic beam current and cathode material
, negative electrode work temperature, accelerating voltage E between anode and cathode
a, cathode and anode spacing d, the film hole diameter d of bunching electrode
b, cut-off grid bias-voltage E
b0, work grid bias-voltage E
bRelevant.Wherein
, d, d
bAnd E
b0Uncontrollable at work, and E
aGeneral control is in some stationary values.Change the electronic beam current size, can only change cathode temperature T by changing the negative electrode heating power, perhaps change grid bias-voltage E
bChange effective emission area of negative electrode.Require governing speed very fast at electronic beam current, in the electron beam process equipment that Electron Beam Quality is had relatively high expectations, as electron beam welding machine etc., a kind of electronic beam current control modes after adopt more.
in order to solve the quick variation of grid bias-voltage, be that 201110272609.0 Chinese invention patent disclosed " a kind of grid bias power supply that is applicable to the pulsed electron beam welding " and application number are in 201110141331.3 Chinese invention patent disclosed " a kind of be applicable to the grid bias power supply that the superaudio pulsed electron beam welds " at application number, all adopt the method for two grades of bias value alternations, and the change of each grade bias value is to realize by pulse-width modulation (PWM) control method, the middle larger filter circuit of elapsed time constant that needs, so the governing speed of each grade bias value relatively their alternation speed will be slowly many.This two grades of bias value alternate modes, it is inapplicable requiring to regulate occasion (as the electron beam quickly shaping device) continuously fast at electronic beam current.In addition, the connected mode of the conventional inclined to one side power supply of grid and cathode power, accelerating power source and electron gun, in case the electron gun bunching electrode discharges over the ground, in electron gun the mutually anticathode current potential of bunching electrode will be dragged down even might become positive, certainly will cause like this incandescent cathode to launch more not controlled electronics, the discharge process aggravation might cause work piece to scrap and endanger the reliability service of apparatus control system.Referring to Fig. 6.
Between above reason, be necessary structure and the connected mode thereof of the inclined to one side power supply of grid are improved.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of inclined to one side power supply of grid and application structure and application operation method of electron beam process equipment, and the inclined to one side power supply of the grid of this electron beam process equipment can continuously change grid bias-voltage value fast; By improving the connected mode of the inclined to one side power supply of grid and cathode power, accelerating power source and electron gun, when discharging over the ground, the electron gun bunching electrode is conducive to suppress the not controlled electronics of cathode emission.
For addressing the above problem, the present invention is achieved by the following technical solutions:
One, the inclined to one side power supply of the grid of a kind of electron beam process equipment of the present invention mainly is comprised of input rectifying filter unit, A unit, B unit, output filter capacitor, load resistance, inversion waveform generator, grid bias-voltage adjuster, electronic beam current adjuster and central controller; Wherein the structure and parameter of A unit and B unit is consistent, and namely A unit and B unit respectively comprise 1 inverter, 1 filter, 1 isolating transformer and 1 output rectifier bridge; In each unit, the output of inverter connects the input of filter, and the output of filter connects the armature winding of isolating transformer, and the secondary winding of isolating transformer is connected to the ac input end of output rectifier bridge;
The input of input rectifying filter unit connects two groups of alternating currents of outside input, common port and the earth of the positive and negative DC power supply of input rectifying filter unit output join, the positive terminal of output is connected to the collector electrode of N-type power tube in A, B two unit inverters simultaneously, and the negative pole end of output is connected to the collector electrode of P type power tube in A, B two unit inverters simultaneously; After the output parallel connection of the output rectifier bridge of two unit of A, B as the output of the inclined to one side power supply of grid, be attempted by again the output of the inclined to one side power supply of grid after output filter capacitor and load resistance parallel connection, the negative pole of grid inclined to one side power supply output cathode end and accelerating power source joins and is connected to the negative electrode of electron gun, and the bunching electrode of the inclined to one side power supply output negative pole of grid and electron gun joins;
The inversion waveform generator produces the fixing trapezoidal wave signal of two-way waveform, and 2 outputs of inversion waveform generator connect respectively an input control end of A, B two unit inverters; The amplitude of the positive and negative half-wave of above-mentioned every road trapezoidal wave equates, waveform symmetry, flat ripple part 〉=90 °; Two-way trapezoidal wave amplitude equates, waveform is consistent, also share a time sequential pulse and phase difference is 90 °;
Central controller is completed the master control work of whole electron beam process equipment, and the output predetermined signal of grid bias-voltage and the given signal of electronic beam current;
The electronic beam current adjuster is proportional-integral controller, the given signal output part of electronic beam current that 2 inputs of electronic beam current adjuster connect respectively central controller and the output of electronic beam current sample resistance;
Grid bias-voltage adjuster is proportional controller, and 2 inputs of grid bias-voltage adjuster connect respectively the predetermined signal output part of grid bias-voltage of central controller and the output of electronic beam current adjuster; The output of grid bias-voltage adjuster connects another input control end of A, B two unit inverters simultaneously.
In such scheme, each inverter all comprises 1 multiplier IC1,1 high voltage operational amplifier IC2,1 N-type power tube T1,1 P type power tube T2,2 anti-and diode D1, D2, capacitor C 1, and 4 resistance R 1～R4; The x input of multiplier IC1 connects one road output of inversion waveform generator, and the y input of multiplier IC1 connects the output of grid bias-voltage adjuster, and the output of multiplier IC1 is connected to the in-phase input end of high voltage operational amplifier IC2; The in-phase input end of high voltage operational amplifier IC2 connects the earth through resistance R 1, and the inverting input of high voltage operational amplifier IC2 connects the earth through resistance R 2; The two ends of capacitor C 1 are connected on respectively on the inverting input and output of high voltage operational amplifier IC2; The output of high voltage operational amplifier IC2 is delivered to the base stage of N-type power tube T1 and P type power tube T2 through resistance R 4; The collector electrode of N-type power tube T1 is connected with the output cathode end of input rectifying filter unit, the output negative pole end of the collector electrode input rectifying filter unit of P type power tube T2 is connected, and the emitter of N-type power tube T1 and P type power tube T2 is connected together as the output of inverter; The output voltage of this inverter is fed back to the inverting input of high voltage operational amplifier IC2 from the output of inverter by resistance R 3; Negative electrode anti-and diode D1 connects the collector electrode of N-type power tube T1, and anode anti-and diode D1 connects the emitter of N-type power tube T1; Negative electrode anti-and diode D2 connects the emitter of P type power tube T2, and anode anti-and diode D2 connects the collector electrode of P type power tube T2.
In such scheme, each filter comprises differential mode inductance L1, pressure limiting element Ry1, capacitor C 2 and common mode inductance L2; The input of differential mode inductance L1 connects the output of inverter; The input of the end of the output of differential mode inductance L1 and pressure limiting element Ry1, an end of capacitor C 2 and common mode inductance L2 is connected together, and joins with the earth after another input of the other end of pressure limiting element Ry1, the other end of capacitor C 2 and common mode inductance L2 is connected together again; 2 outputs of common mode inductance L2 are connected to the two ends of the armature winding of isolating transformer.
Two, the inclined to one side power supply of grid of the another kind of electron beam process equipment of the present invention mainly is comprised of input rectifying filter unit, A unit, B unit, output filter capacitor, load resistance and central controller; Wherein the structure and parameter of A unit and B unit is consistent, and namely A unit and B unit respectively comprise an inverter, a filter, an isolating transformer and an output rectifier bridge; In each unit, the output of inverter connects the input of filter, and the output of filter connects the armature winding of isolating transformer, and the secondary winding of isolating transformer is connected to the ac input end of output rectifier bridge;
The input of input rectifying filter unit connects two groups of alternating currents of outside input, common port and the earth of the positive and negative DC power supply of input rectifying filter unit output join, the positive terminal of output is connected to the collector electrode of N-type power tube in A, B two unit inverters simultaneously, and the negative pole end of output is connected to the collector electrode of P type power tube in A, B two unit inverters simultaneously; After the output parallel connection of the output rectifier bridge of two unit of A, B as the output of the inclined to one side power supply of grid, be attempted by again the output of the inclined to one side power supply of grid after output filter capacitor and load resistance parallel connection, the negative pole of grid inclined to one side power supply output cathode end and accelerating power source joins and is connected to the negative electrode of electron gun, and the bunching electrode of the inclined to one side power supply output negative pole of grid and electron gun joins;
Central controller is completed the master control work of whole electron beam process equipment, and fixing trapezoidal wave signal and the inverter output voltage amplitude control signal of output two-way waveform; The amplitude of the positive and negative half-wave of above-mentioned every road trapezoidal wave equates, waveform symmetry, flat ripple part 〉=90 °; Two-way trapezoidal wave amplitude equates, waveform is consistent, also share a time sequential pulse and phase difference is 90 °; Wherein the fixing trapezoidal wave signal output of 2 of central controller waveforms accesses respectively an input control end of A, B two unit inverters, and the inverter output voltage amplitude control signal output of central controller accesses another input control end of A, B two unit inverters simultaneously.
In such scheme, each inverter all comprises 1 multiplier IC1,1 high voltage operational amplifier IC2,1 N-type power tube T1,1 P type power tube T2,2 anti-and diode D1, D2, capacitor C 1, and 4 resistance R 1～R4; The x input of multiplier IC1 connects one road output of inversion waveform generator, and the y input of multiplier IC1 connects the output of grid bias-voltage adjuster, and the output of multiplier IC1 is connected to the in-phase input end of high voltage operational amplifier IC2; The in-phase input end of high voltage operational amplifier IC2 connects the earth through resistance R 1, and the inverting input of high voltage operational amplifier IC2 connects the earth through resistance R 2; The two ends of capacitor C 1 are connected on respectively on the inverting input and output of high voltage operational amplifier IC2; The output of high voltage operational amplifier IC2 is delivered to the base stage of N-type power tube T1 and P type power tube T2 through resistance R 4; The collector electrode of N-type power tube T1 is connected with the output cathode end of input rectifying filter unit, the output negative pole end of the collector electrode input rectifying filter unit of P type power tube T2 is connected, and the emitter of N-type power tube T1 and P type power tube T2 is connected together as the output of inverter; The output voltage of this inverter is fed back to the inverting input of high voltage operational amplifier IC2 from the output of inverter by resistance R 3; Negative electrode anti-and diode D1 connects the collector electrode of N-type power tube T1, and anode anti-and diode D1 connects the emitter of N-type power tube T1; Negative electrode anti-and diode D2 connects the emitter of P type power tube T2, and anode anti-and diode D2 connects the collector electrode of P type power tube T2.
In such scheme, each filter comprises differential mode inductance L1, pressure limiting element Ry1, capacitor C 2 and common mode inductance L2; The input of differential mode inductance L1 connects the output of inverter; The input of the end of the output of differential mode inductance L1 and pressure limiting element Ry1, an end of capacitor C 2 and common mode inductance L2 is connected together, and joins with the earth after another input of the other end of pressure limiting element Ry1, the other end of capacitor C 2 and common mode inductance L2 is connected together again; 2 outputs of common mode inductance L2 are connected to the two ends of the armature winding of isolating transformer.
Three, based on the application structure of the inclined to one side power supply of a kind of grid of the inclined to one side power supply of grid of above-mentioned electron beam process equipment, comprise the inclined to one side power supply of grid, accelerating power source, cathode power, electronic beam current sample resistance, electron gun, discharge inhibitor, the first current-limiting resistance and the second current-limiting resistance; The inclined to one side power supply output negative pole of grid joins by the bunching electrode of the first current-limiting resistance and electron gun, the inclined to one side power supply output cathode of grid joins by the second current-limiting resistance and accelerating power source negative pole, and the discharge inhibitor by three ends between the bunching electrode of the negative pole of accelerating power source, the negative electrode of electron gun and electron gun connects;
Above-mentioned discharge inhibitor mainly is comprised of transformer B1, inductance L 3, resistance R 5, pressure limiting element Ry2, diode D3～D5; Transformer B1 has three windings, wherein to be connected together as the common port of transformer B1 be 0 end of transformer B1 to the Same Name of Ends of the different name end of the Same Name of Ends of the first winding, the second winding and the tertiary winding, and the other end of the first winding, the second winding and the tertiary winding is that transformer B1 the 1st, 2,3 ends join with the anode of diode D3, D4, D5 respectively; After joining, one end of diode D3 negative electrode and resistance R 5 is connected to again the accelerating power source negative pole, one end of the other end of resistance R 5 and inductance L 3 joins, the end of the other end of the negative electrode of diode D4, D5, inductance L 3 and pressure limiting element Ry2 links together and is being connected to the negative electrode of electron gun, is connected to the bunching electrode of electron gun after the other end of pressure limiting element Ry2 and the common port of transformer B1 join again.
In such scheme, pressure limiting element Ry2 is the two-way pressure limiting element that is comprised of piezo-resistance or transition voltage stabilizing didoe.
In such scheme, the second winding of transformer B1 is identical with the 3rd the number of turn.
Four, based on the application operation method of the application structure of the inclined to one side power supply of above-mentioned grid, its detailed process is as follows:
During normal operation, diode D3, D4, D5 bear back-pressure and end, electronic beam current I
ePassage be accelerating power source positive pole → electronic beam current sample resistance → workpiece namely greatly → negative pole of negative electrode → inductance L 3 → resistance R 5 → accelerating power source of electron gun; Electronic beam current I
eProduce during by inductance L 3 and resistance R 5 series arm
Pressure drop, after the stack of the grid bias-voltage of this pressure drop and the inclined to one side power generation of grid, acting in conjunction is on the negative electrode and bunching electrode of electron gun, to electronic beam current I
eForm a quick local negative feedback; Wherein the resistance of resistance R 5 also can be zero;
If bunching electrode discharges over the ground, obstruction due to the first current-limiting resistance and the second current-limiting resistance, the discharging current that flows through the inclined to one side power supply of grid only has a few part, namely the passage of the discharging current of few part be accelerating power source positive pole → electronic beam current sample resistance → electron gun anode namely greatly → negative pole of the bunching electrode of the electron gun → inclined to one side power supply of the first current-limiting resistance → grid → the second current-limiting resistance → accelerating power source; The passage of discharging current of the overwhelming majority be accelerating power source positive pole → electronic beam current sample resistance → electron gun anode namely greatly → negative pole of the first winding of the bunching electrode of electron gun → transformer B1 → diode D3 → accelerating power source; When the transition discharging current passes through the first winding of transformer B1, due to transformer action, to induce induced electromotive force in the second winding of transformer B1 and the tertiary winding, when discharging current increases, the second winding of transformer B1 induces positive electromotive force, be applied to by diode D4 on the negative electrode of electron gun, the tertiary winding of transformer B1 induces negative zeta potential, diode D5 blocking-up; When discharging current reduces, the tertiary winding of transformer B1 induces positive electromotive force, is applied on negative electrode by diode D5, and the second winding of transformer B1 induces negative zeta potential, diode D4 blocking-up.The increase and decrease transformer B1 of discharging current has induced electromotive force to be applied on negative electrode and bunching electrode, and this induced electromotive force plays the effect of grid bias-voltage, suppresses the cathode emission electronics.
Compared with prior art, the present invention has following features:
1, adopt amplitude modulation pressure regulation inversion transformation technique, make almost SAM synchronous amplitude modulation of grid bias-voltage and its amplitude control signal;
2, adopt the mode of two unit parallel runnings, effectively eliminate the inversion commutation course to the impact of grid bias-voltage output waveform;
3, between inverter and isolating transformer, setting has the filter of common mode inductance, thereby has effectively suppressed the common mode impact signal from high-pressure side;
4, the method for attachment of the inclined to one side power supply of new grid and accelerating power source, cathode power and electron gun can suppress the not controlled electronics of cathode emission when bunching electrode discharges.
Description of drawings
Fig. 1 is a kind of structural representation of the inclined to one side supply unit of grid of electron beam process equipment; Number in the figure is: 1, input rectifying filter unit, 2, the inverter of A unit, 3, the filter of A unit, 4, the isolating transformer of A unit, 5, the output rectifier bridge of A unit, 6, output filter capacitor, 7, load resistance, 8, the B unit, 9, inversion waveform generator, 10, grid bias-voltage adjuster, 11, the electronic beam current adjuster, 12, central controller.
Fig. 2 is the circuit theory diagrams of inverter shown in Figure 1.
Fig. 3 is the circuit theory diagrams of filter shown in Figure 1.
Fig. 4 is inversion waveform generator signal output waveform figure shown in Figure 1.
Fig. 5 is the structural representation of the inclined to one side supply unit of grid of another kind of electron beam process equipment; Number in the figure is: 1, input rectifying filter unit, 2, the inverter of A unit, 3, the filter of A unit, 4, the isolating transformer of A unit, 5, the output rectifier bridge of A unit, 6, output filter capacitor, 7, load resistance, 8, the B unit, 12, central controller.
Fig. 6 is the connection layout of the inclined to one side power supply of conventional grid and accelerating power source, cathode power and electron gun.
Fig. 7 is the connection layout of the inclined to one side power supply of grid of the present invention and accelerating power source, cathode power and electron gun; Number in the figure is: 13, cathode power, 14, the negative electrode of electron gun, 15, the bunching electrode of electron gun, 16, electron beam, 17, the anode of electron gun, 18, the inclined to one side power supply of grid, 19, accelerating power source, 20, the electronic beam current sample resistance, 21, the discharge inhibitor, 22, the first current-limiting resistance, the 23, second current-limiting resistance.
Fig. 8 is the circuit theory diagrams of discharge inhibitor.
Embodiment
Embodiment 1:
The inclined to one side power supply of a kind of grid of electron beam process equipment, as shown in Figure 1, mainly formed by input rectifying filter unit 1, A unit, B unit 8, output filter capacitor 6, load resistance 7, inversion waveform generator 9, grid bias-voltage adjuster 10, electronic beam current adjuster 11 and central controller 12.
Input rectifying filter unit 1: with two groups of alternating currents of outside input become straight positive and negative two DC power supply+V ,-V, common port and the earth of two DC power supply join, positive terminal+V is connected to the collector electrode of N-type power tube T1 in A, B two unit inverters, and negative pole end-V is connected to the collector electrode of P type power tube T2 in A, B two unit inverters.
The structure and parameter of A unit and B unit 8 is consistent, and namely A unit and B unit respectively comprise 1 inverter 2,1 filter 3,1 isolating transformer 4 and 1 output rectifier bridge 5.In each unit, the output of inverter 2 connects the input of filter 3, and the output of filter 2 connects the armature winding of isolating transformer 4, and the secondary winding of isolating transformer 4 is connected to the ac input end of output rectifier bridge 5.After the output rectifier bridge parallel connection of two unit of A, B, as the output of the inclined to one side power supply of grid, the negative pole of grid inclined to one side power supply output cathode end and accelerating power source 19 joins and is connected to the negative electrode 14 of electron gun, and the bunching electrode 15 of the inclined to one side power supply output negative pole of grid and electron gun joins.
At the output of the inclined to one side power supply of grid and connect output filter capacitor 6 and load resistance 7, the capacitance of output filter capacitor 6 is 100-1000pF, because the bunching electrode 15 of electron gun and 14, the negative electrode of electron gun can not form direct current channel, only form little electric capacity, the direct current channel of the inclined to one side power supply of grid is provided by load resistance 7 so, can steady operation.
Inverter 2: as shown in Figure 2, it is mainly by 1 multiplier IC1,1 high voltage operational amplifier IC2, and 1 N-type power tube T1,1 P type power tube T2,2 anti-and diode D1, D2, capacitor C 1, and 4 resistance R 1～R4 form; The x input of multiplier IC1 connects one road output reception of inversion waveform generator 9 from one road signal of inversion waveform generator 9, the output that the y input of multiplier IC1 connects grid bias-voltage adjuster 10 receives the output signal from grid bias-voltage adjuster 11, and multiplier IC1 is 2 input signals rear output U that multiplies each other
1Be U
1=kU
xU
y, its output is connected to the in-phase input end of high voltage operational amplifier IC2; The in-phase input end of high voltage operational amplifier IC2 connects the earth through resistance R 1, and the inverting input of high voltage operational amplifier IC2 connects the earth through resistance R 2; The two ends of capacitor C 1 are connected on respectively on the inverting input and output of high voltage operational amplifier IC2; The output of high voltage operational amplifier IC2 is delivered to the base stage of N-type power tube T1 and P type power tube T2 through resistance R 4; The collector electrode of N-type power tube T1 is connected with the output cathode end+V of input rectifying filter unit 1, and the output negative pole end-V of the collector electrode input rectifying filter unit of P type power tube T2 is connected; The emitter of N-type power tube T1 and P type power tube T2 joins as the output of inverter 2, the output output voltage U of inverter 2
3Fed back to the inverting input of high voltage operational amplifier IC2 by resistance R 3; Negative electrode anti-and diode D1 connects the collector electrode of N-type power tube T1, and anode anti-and diode D1 connects the emitter of N-type power tube T1; Negative electrode anti-and diode D2 connects the emitter of P type power tube T2, and anode anti-and diode D2 connects the collector electrode of P type power tube T2.The working power of high voltage operational amplifier IC2 is ± the 40V DC power supply, due to capacitor C 1 capacitance very little (100pF), capacitor C 1 can be ignored the impact of useful signal, capacitor C 1 only plays the effect of eliminating the vibration of high voltage operational amplifier IC2 high-frequency self-excitation, the circuit of high voltage operational amplifier IC2 is exactly the amplifying circuit that consists of a kind of in-phase end input, the output voltage of inverter 2
Filter 3: as shown in Figure 3, it mainly is comprised of differential mode inductance L1, pressure limiting element Ry1, capacitor C 2 and common mode inductance L2.The output U of inverter 2
3Be connected to the input of differential mode inductance L1, the input of the end of the output of differential mode inductance L1 and pressure limiting element Ry1, an end of capacitor C 2, common mode inductance L2 is connected together, join with the earth after another input of the other end of pressure limiting element Ry1, the other end of capacitor C 2, common mode inductance L2 is connected together, two outputs of common mode inductance L2 are connected to respectively the two ends of the armature winding of isolating transformer 4 again.Common mode inductance L2 on useful difference mode signal without impact, only be used for suppressing the common mode impact signal that the accelerating power source electrion is come by the distributed capacitance coupling of isolating transformer 4, differential mode inductance L1 is used for suppressing inverter 2 outputs to the charging current of capacitor C 2, its inductance value is much smaller than the inductance value of common mode inductance L2, and capacitor C 2 selects 100pF with interior capacitance, avoids 2 pairs of useful signals of differential mode inductance L1 and capacitor C to produce too much loss.The two-way pressure limiting element that pressure limiting element Ry1 is comprised of piezo-resistance or transition voltage stabilizing didoe, voltage limiting value are the highest amplitude of the trapeziodal voltage ripple of 1.2-1.5 inverter 2 outputs doubly.
Isolating transformer 5: secondary winding is connected to the ac input end of output rectifier bridge 5, and it plays the conversion of electric pressure, the transmission of energy and the effect of High-Voltage Insulation isolation.
Inversion waveform generator 9: produce the fixing trapezoidal wave signal of two-way waveform as shown in Figure 4, the amplitude of the positive and negative half-wave of every road trapezoidal wave equates, waveform symmetry, flat ripple part 〉=90 °, two-way trapezoidal wave amplitude is equal, and waveform is consistent, share a time sequential pulse, phase difference is 90 °.2 outputs of inversion waveform generator connect respectively the x input of multiplier IC1 in A, B two unit inverters 2.
Grid bias-voltage adjuster 10: receive the predetermined signal U of grid bias-voltage from central controller 12 outputs
b *With the signal U from 11 outputs of electronic beam current adjuster
b, grid bias-voltage adjuster 10 is U relatively
b *And U
bTwo signals, deviation are output inverter 2 output voltage amplitude control signal U after scale operation
y, U
ySend into simultaneously the y input of multiplier in A, B two unit inverters 2.
Electronic beam current adjuster 11: receive the given signal U of electronic beam current from central controller 12 outputs
e *With the signal U from 20 outputs of electronic beam current sample resistance
e, electronic beam current adjuster 11 is U relatively
e *And U
eTwo signals, deviation is output signal U after the computings such as ratio, integration
bIn addition, electronic beam current adjuster 11 also receives the fault-signal U from external circuit
er, work as U
erIn the time of effectively, the output of electronic beam current adjuster 11 is blocked.
Central controller 12: born by computer or Programmable Logic Controller (PLC), complete the master control work of whole electron beam process equipment, in the present invention, central controller 12 is exported the predetermined signal U of grid bias-voltage by data setting through the D/A conversion
b *With the given signal U of electronic beam current
e *
The connection layout of the inclined to one side power supply 18 of conventional grid and accelerating power source 19, cathode power 13 and electron gun as shown in Figure 6.And the present invention has adopted the application structure of the inclined to one side power supply of grid of above-mentioned electron beam process equipment, as shown in Figure 7.It mainly is comprised of the inclined to one side power supply 18 of grid, accelerating power source 19, cathode power 13, electronic beam current sample resistance 20, electron gun, discharge inhibitor 21, the first current-limiting resistance 22 and the second current-limiting resistance 23.Inclined to one side power supply 18 output negative poles of grid join by the bunching electrode 15 of the first current-limiting resistance 22 with electron gun, inclined to one side power supply 18 output cathodes of grid join with accelerating power source 19 negative poles by the second current-limiting resistance 23, and the discharge inhibitor 21 by three ends between the bunching electrode 15 of the negative pole of accelerating power source 19, the negative electrode of electron gun 14 and electron gun connects.Above-mentioned discharge inhibitor 21 as shown in Figure 8, it mainly is comprised of transformer B1, inductance L 3, resistance R 5, pressure limiting element Ry2, diode D3, diode D4 and diode D5.Transformer B1 has three windings, the second winding is identical with the 3rd the number of turn, it is 0 end of transformer B1 that the different name end of the Same Name of Ends of the first winding, the second winding and the Same Name of Ends of the tertiary winding are connected together as the common port of transformer B1, and the other end of the first winding, the second winding and the tertiary winding is that transformer B1 the 1st, 2,3 ends join with the anode of diode D3, D4, D5 respectively.After joining, one end of diode D3 negative electrode and resistance R 5 is connected to again accelerating power source 19 negative poles, one end of the other end of R5 and inductance L 3 joins, the end of the other end of the negative electrode of diode D4, D5, inductance L 3 and pressure limiting element Ry2 links together at the negative electrode 14 that is connected to electron gun, is connected to the bunching electrode 15 of electron gun after the other end of pressure limiting element Ry2 and the common port of transformer B1 join again.In the present invention, pressure limiting element Ry2 is the two-way pressure limiting element that is comprised of piezo-resistance or transition voltage stabilizing didoe.
The application operation method that inclined to one side power supply 18 application structures of above-mentioned grid realize, its detailed process is as follows:
During normal operation, diode D3, D4, D5 bear back-pressure and end, electronic beam current I
ePassage be accelerating power source 19 positive poles → electronic beam current sample resistance 20 → workpiece namely greatly → negative pole of negative electrode 14 → inductance L 3 → resistance R 5 → accelerating power source 19 of electron gun; Electronic beam current I
eProduce during by inductance L 3 and resistance R 5 series arm
Pressure drop, after the grid bias-voltage stack that the inclined to one side power supply of this pressure drop and grid 18 produces, acting in conjunction is on the negative electrode 14 and bunching electrode 15 of electron gun, to electronic beam current I
eForm a quick local negative feedback; Resistance R 5 resistances can be zero;
If bunching electrode 15 discharges over the ground, obstruction due to the first current-limiting resistance 22 and the second current-limiting resistance 23, the discharging current that flows through the inclined to one side power supply 18 of grid only has a few part, namely the passage of the discharging current of few part be accelerating power source 19 positive poles → electronic beam current sample resistance 20 → electron gun anode 17 namely greatly → negative pole of bunching electrode 15 → the first inclined to one side power supply 18 → the second current-limiting resistance 23 → accelerating power sources 19 of current-limiting resistance 22 → grid of electron gun; The passage of discharging current of the overwhelming majority be accelerating power source 19 positive pole → electronic beam current sample resistance 20 → electron gun anode 17 namely greatly → negative pole of the first winding of bunching electrode 15 → transformer B1 of electron gun → diode D3 → accelerating power source 19; When the transition discharging current passes through the first winding of transformer B1, due to transformer action, to induce induced electromotive force in the second winding of transformer B1 and the tertiary winding, when discharging current increases, the second winding of transformer B1 induces positive electromotive force, be applied to by diode D4 on the negative electrode 14 of electron gun, the tertiary winding of transformer B1 induces negative zeta potential, diode D5 blocking-up; When discharging current reduces, the tertiary winding of transformer B1 induces positive electromotive force, is applied to by diode D5 on the negative electrode 14 of electron gun, and the second winding of transformer B1 induces negative zeta potential, diode D4 blocking-up.The increase and decrease transformer B1 of discharging current has induced electromotive force to be applied on negative electrode 14 and bunching electrode 15, and this induced electromotive force plays the effect of grid bias-voltage, suppresses negative electrode 14 electron emissions.
In implementing 1, the inversion waveform generator 9 of the inclined to one side power supply 18 of the grid of electron beam process equipment, grid bias-voltage adjuster 10, electronic beam current adjuster 11 and central controller 12 be independent cooperating separately, and embodiment 2 with the difference of embodiment 1 is: embodiment 2 is completed inversion waveform generator 9, grid bias-voltage adjuster 10, the whole unifications of electronic beam current adjuster 11 of the inclined to one side power supply 18 of the grid of electron beam process equipment by central controller 12 digitlizations.At this moment, central controller 12 is born by computer.Be that central controller 12 removes the master control work of completing whole electron beam process equipment, also need export the fixing trapezoidal wave signal U of two-way waveform
xA, U
xBWith inverter 2 output voltage amplitude control signal U
yElectronic beam current sampled signal U wherein
eInput central controller, U after the A/D conversion
y, U
xAAnd U
xBSignal is produced and output after the D/A conversion by central controller 12.The corresponding improvement is, the x input of the multiplier IC1 of inverter 2 connects the fixing trapezoidal wave signal output of waveform of No. one central controller 12 of central controller 12, and the y input of multiplier IC1 connects the inverter 2 output voltage amplitude control signal outputs of central controller 12.Referring to Fig. 5.The input rectifying filter unit 1 of embodiment 2, A unit, B unit 8, output filter capacitor 6, load resistance 7 are identical with embodiment 1.
Application operation method for the application structure of the inclined to one side power supply of grid of the application structure of the inclined to one side power supply of grid of the electron beam process equipment of the present embodiment 2 and electron beam process equipment is identical with embodiment 1.
Claims (10)
1. the inclined to one side power supply of the grid of electron beam process equipment is characterized in that: mainly be comprised of input rectifying filter unit (1), A unit, B unit (8), output filter capacitor (6), load resistance (7), inversion waveform generator (9), grid bias-voltage adjuster (10), electronic beam current adjuster (11) and central controller (12); Wherein the structure and parameter of A unit and B unit is consistent, and namely A unit and B unit respectively comprise 1 inverter (2), 1 filter (3), 1 isolating transformer (4) and 1 output rectifier bridge (5); In each unit, the output of inverter (2) connects the input of filter (3), the output of filter (3) connects the armature winding of isolating transformer (4), and the secondary winding of isolating transformer (4) is connected to the ac input end of output rectifier bridge (5);
The input of input rectifying filter unit (1) connects two groups of alternating currents of outside input, common port and the earth of the positive and negative DC power supply of input rectifying filter unit (1) output join, the positive terminal of output is connected to the collector electrode of N-type power tube in A, B two unit inverters (2) simultaneously, and the negative pole end of output is connected to the collector electrode of P type power tube in A, B two unit inverters (2) simultaneously; After the output parallel connection of the output rectifier bridge (5) of two unit of A, B as the output of the inclined to one side power supply of grid, be attempted by again the output of the inclined to one side power supply of grid after output filter capacitor (6) and load resistance (7) parallel connection, the negative pole of grid inclined to one side power supply output cathode end and accelerating power source joins and is connected to the negative electrode (14) of electron gun, and the bunching electrode (15) of the inclined to one side power supply output negative pole of grid and electron gun joins;
Inversion waveform generator (9) produces the fixing trapezoidal wave signal of two-way waveform, and 2 outputs of inversion waveform generator (9) connect respectively an input control end of A, B two unit inverters (2); The amplitude of the positive and negative half-wave of every road trapezoidal wave equates, waveform symmetry, flat ripple part 〉=90 °; Two-way trapezoidal wave amplitude equates, waveform is consistent, also share a time sequential pulse and phase difference is 90 °;
Central controller (12) is completed the master control work of whole electron beam process equipment, and the output predetermined signal of grid bias-voltage and the given signal of electronic beam current;
Electronic beam current adjuster (11) is proportional-integral controller, and 2 inputs of electronic beam current adjuster (11) connect respectively the given signal output part of electronic beam current of central controller (12) and the output of electronic beam current sample resistance;
Grid bias-voltage adjuster (10) is proportional controller, and 2 inputs of grid bias-voltage adjuster (10) connect respectively the predetermined signal output part of grid bias-voltage of central controller (12) and the output of electronic beam current adjuster (11); The output of grid bias-voltage adjuster (10) connects another input control end of A, B two unit inverters (2) simultaneously.
2. the inclined to one side power supply of the grid of electron beam process equipment according to claim 1, it is characterized in that: each inverter all comprises 1 multiplier IC1,1 high voltage operational amplifier IC2,1 N-type power tube T1,1 P type power tube T2,2 anti-and diode D1, D2, capacitor C 1, and 4 resistance R 1～R4;
The x input of multiplier IC1 connects one road output of inversion waveform generator, and the y input of multiplier IC1 connects the output of grid bias-voltage adjuster, and the output of multiplier IC1 is connected to the in-phase input end of high voltage operational amplifier IC2; The in-phase input end of high voltage operational amplifier IC2 connects the earth through resistance R 1, and the inverting input of high voltage operational amplifier IC2 connects the earth through resistance R 2; The two ends of capacitor C 1 are connected on respectively on the inverting input and output of high voltage operational amplifier IC2; The output of high voltage operational amplifier IC2 is delivered to the base stage of N-type power tube T1 and P type power tube T2 through resistance R 4; The collector electrode of N-type power tube T1 is connected with the output cathode end of input rectifying filter unit, and the output negative pole end of the collector electrode input rectifying filter unit of P type power tube T2 is connected; The collector electrode of N-type power tube T1 and P type power tube T2 is connected together as the output of inverter, and the output voltage of this inverter is fed back to the inverting input of high voltage operational amplifier IC2 by resistance R 3; Negative electrode anti-and diode D1 connects the collector electrode of N-type power tube T1, and anode anti-and diode D1 connects the emitter of N-type power tube T1; Negative electrode anti-and diode D2 connects the emitter of P type power tube T2, and anode anti-and diode D2 connects the collector electrode of P type power tube T2.
3. the inclined to one side power supply of the grid of electron beam process equipment according to claim 1, it is characterized in that: each filter comprises differential mode inductance L1, pressure limiting element Ry1, capacitor C 2 and common mode inductance L2;
The input of differential mode inductance L1 connects the output of inverter; The input of the end of the output of differential mode inductance L1 and pressure limiting element Ry1, an end of capacitor C 2 and common mode inductance L2 is connected together, and joins with the earth after another input of the other end of pressure limiting element Ry1, the other end of capacitor C 2 and common mode inductance L2 is connected together again; 2 outputs of common mode inductance L2 are connected to the two ends of the armature winding of isolating transformer.
4. the inclined to one side power supply of the grid of electron beam process equipment is characterized in that: mainly be comprised of input rectifying filter unit (1), A unit, B unit (8), output filter capacitor (6), load resistance (7) and central controller (12); Wherein the structure and parameter of A unit and B unit is consistent, and namely A unit and B unit respectively comprise an inverter (2), a filter (3), an isolating transformer (4) and an output rectifier bridge (5); In each unit, the output of inverter (2) connects the input of filter (3), the output of filter (3) connects the armature winding of isolating transformer (4), and the secondary winding of isolating transformer (4) is connected to the ac input end of output rectifier bridge (5);
The input of input rectifying filter unit (1) connects two groups of alternating currents of outside input, common port and the earth of the positive and negative DC power supply of input rectifying filter unit (1) output join, the positive terminal of output is connected to the collector electrode of N-type power tube in A, B two unit inverters (2) simultaneously, and the negative pole end of output is connected to the collector electrode of P type power tube in A, B two unit inverters (2) simultaneously; After the output parallel connection of the output rectifier bridge (5) of two unit of A, B as the output of the inclined to one side power supply of grid, be attempted by again the output of the inclined to one side power supply of grid after output filter capacitor (6) and load resistance (7) parallel connection, the negative pole of grid inclined to one side power supply output cathode end and accelerating power source joins and is connected to the negative electrode (14) of electron gun, and the bunching electrode (15) of the inclined to one side power supply output negative pole of grid and electron gun joins;
Central controller (12) is completed the master control work of whole electron beam process equipment, and fixing trapezoidal wave signal and the inverter output voltage amplitude control signal of output two-way waveform; The amplitude of the positive and negative half-wave of above-mentioned every road trapezoidal wave equates, waveform symmetry, flat ripple part 〉=90 °; Two-way trapezoidal wave amplitude equates, waveform is consistent, also share a time sequential pulse and phase difference is 90 °; Wherein the fixing trapezoidal wave signal output of 2 waveforms of central controller (12) accesses respectively an input control end of A, B two unit inverters (2), and the inverter output voltage amplitude control signal output of central controller (12) accesses another input control end of A, B two unit inverters (2) simultaneously.
5. the inclined to one side power supply of the grid of electron beam process equipment according to claim 4, it is characterized in that: each inverter all comprises 1 multiplier IC1,1 high voltage operational amplifier IC2,1 N-type power tube T1,1 P type power tube T2,2 anti-and diode D1, D2, capacitor C 1, and 4 resistance R 1～R4;
The x input of multiplier IC1 connects one road output of inversion waveform generator, and the y input of multiplier IC1 connects the output of grid bias-voltage adjuster, and the output of multiplier IC1 is connected to the in-phase input end of high voltage operational amplifier IC2; The in-phase input end of high voltage operational amplifier IC2 connects the earth through resistance R 1, and the inverting input of high voltage operational amplifier IC2 connects the earth through resistance R 2; The two ends of capacitor C 1 are connected on respectively on the inverting input and output of high voltage operational amplifier IC2; The output of high voltage operational amplifier IC2 is delivered to the base stage of N-type power tube T1 and P type power tube T2 through resistance R 4; The collector electrode of N-type power tube T1 is connected with the output cathode end of input rectifying filter unit, and the output negative pole end of the collector electrode input rectifying filter unit of P type power tube T2 is connected; The collector electrode of N-type power tube T1 and P type power tube T2 is connected together as the output of inverter, and the output voltage of this inverter is fed back to the inverting input of high voltage operational amplifier IC2 by resistance R 3; Negative electrode anti-and diode D1 connects the collector electrode of N-type power tube T1, and anode anti-and diode D1 connects the emitter of N-type power tube T1; Negative electrode anti-and diode D2 connects the emitter of P type power tube T2, and anode anti-and diode D2 connects the collector electrode of P type power tube T2.
6. the inclined to one side power supply of the grid of electron beam process equipment according to claim 4, it is characterized in that: each filter comprises differential mode inductance L1, pressure limiting element Ry1, capacitor C 2 and common mode inductance L2;
The input of differential mode inductance L1 connects the output of inverter; The input of the end of the output of differential mode inductance L1 and pressure limiting element Ry1, an end of capacitor C 2 and common mode inductance L2 is connected together, and joins with the earth after another input of the other end of pressure limiting element Ry1, the other end of capacitor C 2 and common mode inductance L2 is connected together again; 2 outputs of common mode inductance L2 are connected to the two ends of the armature winding of isolating transformer.
7. based on the application structure of the inclined to one side power supply of grid of electron beam process equipment described in claim 1 or 4, it is characterized in that: comprise electron gun, the inclined to one side power supply of grid (18), accelerating power source (19), cathode power (13), electronic beam current sample resistance (20), discharge inhibitor (21), the first current-limiting resistance (22) and the second current-limiting resistance (23); The inclined to one side power supply of grid (18) output negative pole joins by the bunching electrode (15) of the first current-limiting resistance (22) with electron gun, the inclined to one side power supply of grid (18) output cathode joins by the second current-limiting resistance (23) and accelerating power source (19) negative pole, and the discharge inhibitor (21) by three ends between the negative electrode (14) of the negative pole of accelerating power source (19), electron gun and the bunching electrode (15) of electron gun connects;
Above-mentioned discharge inhibitor (21) mainly is comprised of transformer B1, inductance L 3, resistance R 5, pressure limiting element Ry2, diode D3～D5; Transformer B1 has three windings, wherein to be connected together as the common port of transformer B1 be 0 end of transformer B1 to the Same Name of Ends of the different name end of the Same Name of Ends of the first winding, the second winding and the tertiary winding, and the other end of the first winding, the second winding and the tertiary winding is that transformer B1 the 1st, 2,3 ends join with the anode of diode D3, D4, D5 respectively; After joining, one end of diode D3 negative electrode and resistance R 5 is connected to again accelerating power source (19) negative pole, one end of the other end of resistance R 5 and inductance L 3 joins, the end of the other end of the negative electrode of diode D4, D5, inductance L 3 and pressure limiting element Ry2 links together and is being connected to the negative electrode of electron gun (14), is connected to the bunching electrode (15) of electron gun after the other end of pressure limiting element Ry2 and the common port of transformer B1 join again.
8. the application structure of the inclined to one side power supply of grid of electron beam process equipment according to claim 7, is characterized in that: the two-way pressure limiting element of pressure limiting element Ry2 for being comprised of piezo-resistance or transition voltage stabilizing didoe.
9. the application structure of the inclined to one side power supply of grid of electron beam process equipment according to claim 7, it is characterized in that: the second winding of described transformer B1 is identical with the number of turn of the tertiary winding.
10. based on the application operation method of the application structure of the inclined to one side power supply of grid of the described electron beam process equipment of claim 7, it is characterized in that:
During normal operation, diode D3, D4, D5 bear back-pressure and end, electron beam (16) stream I
ePassage be accelerating power source (19) positive pole → electronic beam current sample resistance (20) → workpiece namely greatly → negative pole of the negative electrode (14) of electron gun → inductance L 3 → resistance R 5 → accelerating power source (19); Electron beam (16) stream I
eProduce during by inductance L 3 and resistance R 5 series arm
Pressure drop, after the stack of the grid bias-voltage of this pressure drop and the inclined to one side power generation of grid, acting in conjunction on the negative electrode (14) and bunching electrode (15) of electron gun, is flowed I to electron beam (16)
eForm a quick local negative feedback;
If bunching electrode (15) discharges over the ground, obstruction due to the first current-limiting resistance (22) and the second current-limiting resistance (23), the discharging current that flows through the inclined to one side power supply of grid (18) only has a few part, namely the passage of the discharging current of few part be accelerating power source (19) positive pole → electronic beam current sample resistance (20) → electron gun anode (17) namely greatly → negative pole of bunching electrode (15) → first current-limiting resistance (22) of the electron gun → inclined to one side power supply of grid (18) → second current-limiting resistance (23) → accelerating power source (19); The passage of discharging current of the overwhelming majority be accelerating power source (19) positive pole → electronic beam current sample resistance (20) → electron gun anode (17) namely greatly → negative pole of the first winding of the bunching electrode (15) of electron gun → transformer B1 → diode D3 → accelerating power source (19); When the transition discharging current passes through the first winding of transformer B1, due to transformer action, to induce induced electromotive force in the second winding of transformer B1 and the tertiary winding, when discharging current increases, the second winding of transformer B1 induces positive electromotive force, be applied to by diode D4 on the negative electrode (14) of electron gun, the tertiary winding of transformer B1 induces negative zeta potential, diode D5 blocking-up; When discharging current reduces, the tertiary winding of transformer B1 induces positive electromotive force, is applied to by diode D5 on the negative electrode (14) of electron gun, and the second winding of transformer B1 induces negative zeta potential, diode D4 blocking-up; The increase and decrease transformer B1 of discharging current has induced electromotive force to be applied on the negative electrode (14) and bunching electrode (15) of electron gun, and this induced electromotive force plays the effect of grid bias-voltage, suppresses negative electrode (14) electron emission.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310086291.6A CN103151950B (en) | 2013-03-18 | 2013-03-18 | Grid bias power supply of electron beam machining equipment and application structure and application operation method of grid bias power supply |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310086291.6A CN103151950B (en) | 2013-03-18 | 2013-03-18 | Grid bias power supply of electron beam machining equipment and application structure and application operation method of grid bias power supply |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103151950A true CN103151950A (en) | 2013-06-12 |
| CN103151950B CN103151950B (en) | 2014-11-19 |
Family
ID=48549867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310086291.6A Active CN103151950B (en) | 2013-03-18 | 2013-03-18 | Grid bias power supply of electron beam machining equipment and application structure and application operation method of grid bias power supply |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103151950B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109302065A (en) * | 2018-09-12 | 2019-02-01 | 合肥雷科电子科技有限公司 | A kind of millimeter wave traveling wave tube MPM power module |
| CN110224627A (en) * | 2019-05-24 | 2019-09-10 | 核工业西南物理研究院 | A kind of Multipurpose composite plasma coating grid bias power supply |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3435187A (en) * | 1966-07-14 | 1969-03-25 | Welding Research Inc | Electron beam welding method with feed back control |
| JP2000259048A (en) * | 1999-03-10 | 2000-09-22 | Minolta Co Ltd | Image forming device |
| CN102225490A (en) * | 2011-05-27 | 2011-10-26 | 中国航空工业集团公司北京航空制造工程研究所 | Bias power supply device for supersonic-frequency pulsed electron beam welding |
| CN102357730A (en) * | 2011-09-15 | 2012-02-22 | 北京航空航天大学 | Bias power supply device suitable for pulse electronic beam welding |
| CN203135748U (en) * | 2013-03-18 | 2013-08-14 | 桂林狮达机电技术工程有限公司 | Grid bias power source of electron beam processing equipment, and application structure thereof |
-
2013
- 2013-03-18 CN CN201310086291.6A patent/CN103151950B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3435187A (en) * | 1966-07-14 | 1969-03-25 | Welding Research Inc | Electron beam welding method with feed back control |
| JP2000259048A (en) * | 1999-03-10 | 2000-09-22 | Minolta Co Ltd | Image forming device |
| CN102225490A (en) * | 2011-05-27 | 2011-10-26 | 中国航空工业集团公司北京航空制造工程研究所 | Bias power supply device for supersonic-frequency pulsed electron beam welding |
| CN102357730A (en) * | 2011-09-15 | 2012-02-22 | 北京航空航天大学 | Bias power supply device suitable for pulse electronic beam welding |
| CN203135748U (en) * | 2013-03-18 | 2013-08-14 | 桂林狮达机电技术工程有限公司 | Grid bias power source of electron beam processing equipment, and application structure thereof |
Non-Patent Citations (2)
| Title |
|---|
| 叶汉民: "调幅式PWM型快速栅偏压电源的设计", 《电工技术》 * |
| 莫力林等: "电子束焊机可编程控制器控制系统的设计", 《信息化技术》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109302065A (en) * | 2018-09-12 | 2019-02-01 | 合肥雷科电子科技有限公司 | A kind of millimeter wave traveling wave tube MPM power module |
| CN110224627A (en) * | 2019-05-24 | 2019-09-10 | 核工业西南物理研究院 | A kind of Multipurpose composite plasma coating grid bias power supply |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103151950B (en) | 2014-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9929667B2 (en) | Circuit for direct energy extraction from a charged-particle beam | |
| CN102781152A (en) | Pulsed X-ray generation method and pulsed X-ray generation device | |
| CN102497115A (en) | Control method of normal-pressure low-temperature plasma power supply and power supply device | |
| CN103490661A (en) | All-solid-state high voltage pulse current source with positive and negative pulse output | |
| CN102931867B (en) | Pulse voltage-multiplying generation device with repetition frequency | |
| CN111464067B (en) | High-frequency extremely short electron gun grid regulation pulse power supply system | |
| CN113037125B (en) | Resonance repetition frequency high-voltage pulse power supply for generating low-temperature plasma | |
| CN103281004A (en) | Novel high-power high-voltage pulse power supply circuit | |
| CN103151950B (en) | Grid bias power supply of electron beam machining equipment and application structure and application operation method of grid bias power supply | |
| CN106873043A (en) | The shallow earth's surface magnetic source emitter and its control method of a kind of double-loop feedbackc | |
| Ram et al. | Development of high voltage pulse power supply for microwave tube applications | |
| CN103346677B (en) | A kind of Dynamic Duty Cycle compensation arrangement | |
| CN203135748U (en) | Grid bias power source of electron beam processing equipment, and application structure thereof | |
| CN104506059B (en) | A kind of inverter power supply device for high-power gas charging electron gun | |
| CN112187090B (en) | IPOx framework type high-voltage microsecond pulse power supply based on energy efficiency and stability design model | |
| CN101510732A (en) | Control method for electron beam punching machine acceleration high-voltage power supply and power supply device | |
| Bondarenko et al. | Direct energy and energy storage circuit topologies of DC power supplies for micro resistance welding | |
| CN104009634A (en) | Dielectric barrier discharge type ozone generator power supply based on direct-current interlaced boost and alternating-current resonance network | |
| RU2553574C2 (en) | Microwave generation process based on electron bunch | |
| CN103182596B (en) | Adaptive variable polarity plasma arc welding power supply | |
| JP6116920B2 (en) | Arc machining power supply | |
| CN205753999U (en) | A kind of DC-DC power source converter topology structural circuit | |
| CN105790594B (en) | A kind of DC-DC power source converter topology structural circuit | |
| CN203708136U (en) | Heavy-current direct-current pulsed power supply | |
| CN203800839U (en) | Bootstrap driving unipolar SPWM non-isolated grid-connected inverter circuit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. A24 Elite Science Park, Guilin National High-tech Zone, Guangxi Zhuang Autonomous Region Patentee after: Guilin Shida Technology Co., Ltd. Address before: No. A24 Elite Science Park, Guilin National High-tech Zone, Guangxi Zhuang Autonomous Region Patentee before: Guilin Shida Electrical and Mechanical Technology Engineering Co., Ltd. |