CN110199174B - 光计测装置 - Google Patents

光计测装置 Download PDF

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Publication number
CN110199174B
CN110199174B CN201880006783.0A CN201880006783A CN110199174B CN 110199174 B CN110199174 B CN 110199174B CN 201880006783 A CN201880006783 A CN 201880006783A CN 110199174 B CN110199174 B CN 110199174B
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CN
China
Prior art keywords
unit
light
projection
imaging
optical circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880006783.0A
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English (en)
Chinese (zh)
Other versions
CN110199174A (zh
Inventor
渡边大智
宫崎敢人
片寄里美
渡边启
仓田优生
笠原亮一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entiti Corp
Olympus Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Olympus Corp
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Publication date
Application filed by Nippon Telegraph and Telephone Corp, Olympus Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of CN110199174A publication Critical patent/CN110199174A/zh
Application granted granted Critical
Publication of CN110199174B publication Critical patent/CN110199174B/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/50—Phase-only modulation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
CN201880006783.0A 2017-01-25 2018-01-25 光计测装置 Active CN110199174B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-011686 2017-01-25
JP2017011686A JP6785674B2 (ja) 2017-01-25 2017-01-25 光計測装置
PCT/JP2018/002212 WO2018139512A1 (ja) 2017-01-25 2018-01-25 光計測装置

Publications (2)

Publication Number Publication Date
CN110199174A CN110199174A (zh) 2019-09-03
CN110199174B true CN110199174B (zh) 2021-09-03

Family

ID=62977918

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880006783.0A Active CN110199174B (zh) 2017-01-25 2018-01-25 光计测装置

Country Status (5)

Country Link
US (1) US20190339069A1 (enExample)
JP (1) JP6785674B2 (enExample)
CN (1) CN110199174B (enExample)
DE (1) DE112018000511T5 (enExample)
WO (1) WO2018139512A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111121651A (zh) * 2018-10-31 2020-05-08 财团法人工业技术研究院 光学测量稳定性控制系统
JP7319084B2 (ja) * 2019-04-26 2023-08-01 株式会社キーエンス 光学式変位計
JP7456736B2 (ja) * 2019-06-28 2024-03-27 株式会社サキコーポレーション 形状測定装置、形状測定装置の形状測定方法および形状測定装置の形状測定プログラム
DE102020203857A1 (de) * 2020-03-25 2021-09-30 Micro-Epsilon Optronic Gmbh Optische Positionierhilfe für einen Abstandssensor, Abstandsmesssystem und entsprechendes Verfahren
WO2024121941A1 (ja) * 2022-12-06 2024-06-13 オリンパスメディカルシステムズ株式会社 干渉縞投影光学系、形状測定装置、及び形状測定方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4498776A (en) * 1982-08-23 1985-02-12 General Motors Corporation Electro-optical method and apparatus for measuring the fit of adjacent surfaces
JPH041505A (ja) * 1990-04-18 1992-01-07 Matsushita Electric Ind Co Ltd ワークの３次元位置計測方法とワークの捕捉方法
JP3009521B2 (ja) * 1990-10-23 2000-02-14 オリンパス光学工業株式会社 計測内視鏡
JPH0933393A (ja) * 1995-07-19 1997-02-07 Sumitomo Electric Ind Ltd 光導波路型回折格子の測定装置
JPH1027376A (ja) * 1996-07-12 1998-01-27 Nikon Corp 光情報検出装置
CN2323388Y (zh) * 1997-12-27 1999-06-09 中国科学院长春物理研究所 集成光学声光矩阵乘法器组件
JP3677444B2 (ja) * 2000-10-16 2005-08-03 住友大阪セメント株式会社 三次元形状測定装置
JP3964687B2 (ja) * 2002-01-24 2007-08-22 富士機械製造株式会社 物体形状認識方法及び装置
JP2009008900A (ja) * 2007-06-28 2009-01-15 Nec Corp シリコン構造体
JP2009020356A (ja) * 2007-07-12 2009-01-29 Nec Corp シリコン構造体
JP2009031150A (ja) * 2007-07-27 2009-02-12 Omron Corp 三次元形状計測装置、三次元形状計測方法、三次元形状計測プログラム、および記録媒体
WO2010132802A2 (en) * 2009-05-14 2010-11-18 Andover Photonics, Inc. Shape measurement using microchip based fringe projection
JP5313983B2 (ja) * 2010-09-07 2013-10-09 日本電信電話株式会社 光モジュール
JP2014102073A (ja) * 2011-03-10 2014-06-05 Sanyo Electric Co Ltd 物体検出装置および情報取得装置
JP5390562B2 (ja) * 2011-06-22 2014-01-15 日本電信電話株式会社 平面型光波回路
JP5582267B1 (ja) * 2014-01-17 2014-09-03 株式会社東光高岳 連続走査型計測装置
JP6348980B2 (ja) * 2014-07-09 2018-06-27 一般社団法人日本建設機械施工協会 コンクリート構造物のひび割れ調査方法およびひび割れ調査システム

Also Published As

Publication number Publication date
JP6785674B2 (ja) 2020-11-18
DE112018000511T5 (de) 2019-10-02
JP2018119865A (ja) 2018-08-02
US20190339069A1 (en) 2019-11-07
CN110199174A (zh) 2019-09-03
WO2018139512A1 (ja) 2018-08-02

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Address after: Tokyo, Japan

Patentee after: OLYMPUS Corp.

Country or region after: Japan

Patentee after: Entiti Corp.

Address before: Tokyo, Japan

Patentee before: OLYMPUS Corp.

Country or region before: Japan

Patentee before: NIPPON TELEGRAPH AND TELEPHONE Corp.