JP6785674B2 - 光計測装置 - Google Patents

光計測装置 Download PDF

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Publication number
JP6785674B2
JP6785674B2 JP2017011686A JP2017011686A JP6785674B2 JP 6785674 B2 JP6785674 B2 JP 6785674B2 JP 2017011686 A JP2017011686 A JP 2017011686A JP 2017011686 A JP2017011686 A JP 2017011686A JP 6785674 B2 JP6785674 B2 JP 6785674B2
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JP
Japan
Prior art keywords
unit
light
optical circuit
projection
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017011686A
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English (en)
Japanese (ja)
Other versions
JP2018119865A (ja
JP2018119865A5 (enExample
Inventor
大智 渡邊
大智 渡邊
敢人 宮崎
敢人 宮崎
里美 片寄
里美 片寄
渡邉　啓
啓 渡邉
優生 倉田
優生 倉田
笠原　亮一
亮一 笠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
NTT Inc
NTT Inc USA
Original Assignee
Nippon Telegraph and Telephone Corp
Olympus Corp
NTT Inc USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Olympus Corp, NTT Inc USA filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2017011686A priority Critical patent/JP6785674B2/ja
Priority to CN201880006783.0A priority patent/CN110199174B/zh
Priority to PCT/JP2018/002212 priority patent/WO2018139512A1/ja
Priority to DE112018000511.9T priority patent/DE112018000511T5/de
Publication of JP2018119865A publication Critical patent/JP2018119865A/ja
Priority to US16/517,736 priority patent/US20190339069A1/en
Publication of JP2018119865A5 publication Critical patent/JP2018119865A5/ja
Application granted granted Critical
Publication of JP6785674B2 publication Critical patent/JP6785674B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/50—Phase-only modulation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2017011686A 2017-01-25 2017-01-25 光計測装置 Active JP6785674B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2017011686A JP6785674B2 (ja) 2017-01-25 2017-01-25 光計測装置
CN201880006783.0A CN110199174B (zh) 2017-01-25 2018-01-25 光计测装置
PCT/JP2018/002212 WO2018139512A1 (ja) 2017-01-25 2018-01-25 光計測装置
DE112018000511.9T DE112018000511T5 (de) 2017-01-25 2018-01-25 Optische messvorrichtung
US16/517,736 US20190339069A1 (en) 2017-01-25 2019-07-22 Optical measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017011686A JP6785674B2 (ja) 2017-01-25 2017-01-25 光計測装置

Publications (3)

Publication Number Publication Date
JP2018119865A JP2018119865A (ja) 2018-08-02
JP2018119865A5 JP2018119865A5 (enExample) 2020-02-06
JP6785674B2 true JP6785674B2 (ja) 2020-11-18

Family

ID=62977918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017011686A Active JP6785674B2 (ja) 2017-01-25 2017-01-25 光計測装置

Country Status (5)

Country Link
US (1) US20190339069A1 (enExample)
JP (1) JP6785674B2 (enExample)
CN (1) CN110199174B (enExample)
DE (1) DE112018000511T5 (enExample)
WO (1) WO2018139512A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111121651A (zh) * 2018-10-31 2020-05-08 财团法人工业技术研究院 光学测量稳定性控制系统
JP7319084B2 (ja) * 2019-04-26 2023-08-01 株式会社キーエンス 光学式変位計
JP7456736B2 (ja) * 2019-06-28 2024-03-27 株式会社サキコーポレーション 形状測定装置、形状測定装置の形状測定方法および形状測定装置の形状測定プログラム
DE102020203857A1 (de) * 2020-03-25 2021-09-30 Micro-Epsilon Optronic Gmbh Optische Positionierhilfe für einen Abstandssensor, Abstandsmesssystem und entsprechendes Verfahren
WO2024121941A1 (ja) * 2022-12-06 2024-06-13 オリンパスメディカルシステムズ株式会社 干渉縞投影光学系、形状測定装置、及び形状測定方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4498776A (en) * 1982-08-23 1985-02-12 General Motors Corporation Electro-optical method and apparatus for measuring the fit of adjacent surfaces
JPH041505A (ja) * 1990-04-18 1992-01-07 Matsushita Electric Ind Co Ltd ワークの３次元位置計測方法とワークの捕捉方法
JP3009521B2 (ja) * 1990-10-23 2000-02-14 オリンパス光学工業株式会社 計測内視鏡
JPH0933393A (ja) * 1995-07-19 1997-02-07 Sumitomo Electric Ind Ltd 光導波路型回折格子の測定装置
JPH1027376A (ja) * 1996-07-12 1998-01-27 Nikon Corp 光情報検出装置
CN2323388Y (zh) * 1997-12-27 1999-06-09 中国科学院长春物理研究所 集成光学声光矩阵乘法器组件
JP3677444B2 (ja) * 2000-10-16 2005-08-03 住友大阪セメント株式会社 三次元形状測定装置
JP3964687B2 (ja) * 2002-01-24 2007-08-22 富士機械製造株式会社 物体形状認識方法及び装置
JP2009008900A (ja) * 2007-06-28 2009-01-15 Nec Corp シリコン構造体
JP2009020356A (ja) * 2007-07-12 2009-01-29 Nec Corp シリコン構造体
JP2009031150A (ja) * 2007-07-27 2009-02-12 Omron Corp 三次元形状計測装置、三次元形状計測方法、三次元形状計測プログラム、および記録媒体
WO2010132802A2 (en) * 2009-05-14 2010-11-18 Andover Photonics, Inc. Shape measurement using microchip based fringe projection
JP5313983B2 (ja) * 2010-09-07 2013-10-09 日本電信電話株式会社 光モジュール
JP2014102073A (ja) * 2011-03-10 2014-06-05 Sanyo Electric Co Ltd 物体検出装置および情報取得装置
JP5390562B2 (ja) * 2011-06-22 2014-01-15 日本電信電話株式会社 平面型光波回路
JP5582267B1 (ja) * 2014-01-17 2014-09-03 株式会社東光高岳 連続走査型計測装置
JP6348980B2 (ja) * 2014-07-09 2018-06-27 一般社団法人日本建設機械施工協会 コンクリート構造物のひび割れ調査方法およびひび割れ調査システム

Also Published As

Publication number Publication date
DE112018000511T5 (de) 2019-10-02
JP2018119865A (ja) 2018-08-02
CN110199174B (zh) 2021-09-03
US20190339069A1 (en) 2019-11-07
CN110199174A (zh) 2019-09-03
WO2018139512A1 (ja) 2018-08-02

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