CN110196533B - 一种对位曝光装置 - Google Patents
一种对位曝光装置 Download PDFInfo
- Publication number
- CN110196533B CN110196533B CN201910294646.8A CN201910294646A CN110196533B CN 110196533 B CN110196533 B CN 110196533B CN 201910294646 A CN201910294646 A CN 201910294646A CN 110196533 B CN110196533 B CN 110196533B
- Authority
- CN
- China
- Prior art keywords
- pressing plate
- alignment
- mark
- fixed
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910294646.8A CN110196533B (zh) | 2019-04-12 | 2019-04-12 | 一种对位曝光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910294646.8A CN110196533B (zh) | 2019-04-12 | 2019-04-12 | 一种对位曝光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110196533A CN110196533A (zh) | 2019-09-03 |
CN110196533B true CN110196533B (zh) | 2021-07-16 |
Family
ID=67751871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910294646.8A Active CN110196533B (zh) | 2019-04-12 | 2019-04-12 | 一种对位曝光装置 |
Country Status (1)
Country | Link |
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CN (1) | CN110196533B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4666294A (en) * | 1984-12-31 | 1987-05-19 | Klimsch & Co Kg | Apparatus for exposure of both sides of printed circuit plates |
JPS62211657A (ja) * | 1986-03-13 | 1987-09-17 | Oak Seisakusho:Kk | プリント基板の焼付け方法 |
JPH0917710A (ja) * | 1995-06-27 | 1997-01-17 | Matsushita Electric Works Ltd | 露光フィルムの整合方法及び整合装置 |
JP2006084783A (ja) * | 2004-09-16 | 2006-03-30 | Nsk Ltd | 両面露光装置のマスクアライメント方法及びマスクアライメント装置 |
CN201171248Y (zh) * | 2008-02-18 | 2008-12-24 | 川宝科技股份有限公司 | 双面曝光机的对位调整装置 |
CN202904219U (zh) * | 2011-10-28 | 2013-04-24 | 志圣工业股份有限公司 | 夹具装置与曝光平台 |
-
2019
- 2019-04-12 CN CN201910294646.8A patent/CN110196533B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4666294A (en) * | 1984-12-31 | 1987-05-19 | Klimsch & Co Kg | Apparatus for exposure of both sides of printed circuit plates |
JPS62211657A (ja) * | 1986-03-13 | 1987-09-17 | Oak Seisakusho:Kk | プリント基板の焼付け方法 |
JPH0917710A (ja) * | 1995-06-27 | 1997-01-17 | Matsushita Electric Works Ltd | 露光フィルムの整合方法及び整合装置 |
JP2006084783A (ja) * | 2004-09-16 | 2006-03-30 | Nsk Ltd | 両面露光装置のマスクアライメント方法及びマスクアライメント装置 |
CN201171248Y (zh) * | 2008-02-18 | 2008-12-24 | 川宝科技股份有限公司 | 双面曝光机的对位调整装置 |
CN202904219U (zh) * | 2011-10-28 | 2013-04-24 | 志圣工业股份有限公司 | 夹具装置与曝光平台 |
Also Published As
Publication number | Publication date |
---|---|
CN110196533A (zh) | 2019-09-03 |
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Effective date of registration: 20200623 Address after: 518000 workshop 5 / F, 1 / 2 / F, 14 / F, 17 / F, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. Address before: 518000 No. 9988 Shennan Avenue, Shenzhen, Guangdong, Nanshan District Applicant before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Applicant before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. |
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CB02 | Change of applicant information |
Address after: 518000 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Shenzhen Han's CNC Technology Co.,Ltd. Address before: 518000 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Applicant before: SHENZHEN HAN'S CNC SCIENCE AND TECHNOLOGY Co.,Ltd. |
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