CN110068267A - Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance - Google Patents
Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance Download PDFInfo
- Publication number
- CN110068267A CN110068267A CN201910371558.3A CN201910371558A CN110068267A CN 110068267 A CN110068267 A CN 110068267A CN 201910371558 A CN201910371558 A CN 201910371558A CN 110068267 A CN110068267 A CN 110068267A
- Authority
- CN
- China
- Prior art keywords
- micro
- space
- vision
- measuring system
- nanopositioning stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
This application discloses a kind of space nanometer positionings and detection device and method for evaluating micro-vision measurement performance, including space nanopositioning stage, displacement sensor and controller；Wherein, the trajectory track precision of space nanopositioning stage is better than 10 nanometers, and the measurement accuracy of displacement sensor is better than 2 nanometers, and the two is superior to the measurement accuracy that trajectory track is better than micro-vision measuring system to be evaluated；Space nanopositioning stage carries micro-vision observation object, executes the positioning of particular track and precision, meets micro-vision measurement needs；Displacement sensor detects nanopositioning stage displacement；Controller realizes the movement of space multi-degree-of-freedom nanometer and Real-Time Evaluation micro-vision measurement performance；The application is directed to micro-vision measuring system, realizes a kind of small in size, comprehensive, multi-angle, high-precision and automation versatility evaluating apparatus and method.
Description
Technical field
The present invention relates to accurate and ultra precise measurement field, in particular to a kind of space for evaluating micro-vision measurement performance
Nanometer positioning and detection device and method.
Background technique
A kind of non-contact measuring technology of the micro-vision as novel precise and ultraprecise, has been widely used for ray machine
The fields such as electric system, advanced manufacture and biologic medical.Domestic and international more colleges and universities and research and development institution develop different micro- views
Feel measuring system, realizes micron order/submicron order accurate measurement.
The performance indicator of micro-vision measuring system, including visual field size, resolution ratio, static detection precision, dynamic detection
Precision, bandwidth, measurement stability etc..At this stage, secondary detection, evaluation, calibration etc. are carried out to micro-vision performance indicator, still lacked
The dedicated hardware device and method of weary complete set.High speed, the nanometer of high bandwidth essence may be implemented in space nanopositioning stage
Precise positioning is spent, the displacement sensor of cooperation multichannel, high bandwidth can comprehensively examine micro-vision measuring system
Survey, evaluate, demarcate etc..
In existing public technology, it is only capable of evaluation micro-vision measuring system static measurement precision, evaluation index is more single
One, fail the dynamic measurement precision index reflected under system actual performance, such as friction speed, bandwidth comprehensively；Be only capable of micron/
Submicron-scale evaluates micro-vision measuring system measurement accuracy, not yet realizes the evaluation of nanoscale；The degree of automation is low, greatly
Majority relies on artificial sample, and minority is able to achieve automatic sampling and post-processing, there is no full automatic systemic evaluation method；Not yet mention
The measurement method for estimating stability of micro-vision measuring system out lacks the quantitative evaluation to Measurement reliability, it is most important that,
Existing measuring technique precision is low, can not carry out high-precision test again.
For this purpose, being directed to micro-vision measuring system, it is badly in need of comprehensive one kind, multi-angle, high-precision, small in size and automation
Versatility evaluating apparatus and method.
Summary of the invention
In view of this, the purpose of the present invention is to provide it is a kind of evaluate micro-vision measurement performance space nanometer positioning with
Detection device and method can substantially more assess the performance of micro-vision measuring system.Its concrete scheme is as follows:
A kind of space nanometer positioning and detection device for evaluating micro-vision measurement performance, including space nanometer positioning are flat
Platform, displacement sensor and controller；Wherein, the trajectory track precision of the space nanopositioning stage is described better than 10 nanometers
The measurement accuracy of displacement sensor is better than 2 nanometers, and the trajectory track precision of the space nanopositioning stage is better than to be evaluated
The measurement accuracy of micro-vision measuring system；
The space nanopositioning stage, for carrying the sample to micro-vision observation system observation, described
In micro-vision measuring system measurement range, particular displacement is executed；
Institute's displacement sensors, for detecting the displacement of the space nanopositioning stage；
The controller, displacement and the micro-vision measuring system for the utilization space nanopositioning stage
The microscopic system characteristic coordinates collection for obtaining the sample obtains the micro-vision measuring system according to preset assessment level
Quantitative evaluation result.
Optionally, the space nanopositioning stage includes nanopositioning stage mechanism body and nanopositioning stage movement
Control system；
The nanopositioning stage kinetic control system, for driving the sample carried on the nanopositioning stage
Product execute particular displacement in the micro-vision measuring system measurement range, and the particular displacement includes positioning, repeats to determine
Position and trajectory track；
The nanopositioning stage mechanism body is moved for carrying the sample, and according to the nanopositioning stage
The driving signal of control system moves.
Optionally, institute's displacement sensors, it is described for detecting including three in the flaky electric capacity sensor placed vertically
The displacement of the outer Z/ θ x/ θ y three degree of freedom of space nanopositioning stage plane；Three pass in horizontal positioned cylindrical type capacitor
Sensor, for detecting the displacement of X/Y/ θ z three degree of freedom in the space nanopositioning stage plane.
It optionally, can also include micro-vision measuring system and the fixed device of Auxiliary support；
The micro-vision measuring system, for observing the position of the sample；
The fixed device of the Auxiliary support, for fixing each equipment.
Optionally, the fixed device of the Auxiliary support includes marble gantry support, fixed bracket and optics vibration-isolating platform；
The marble gantry support is put down for the micro-vision measuring system to be fixed on the space nanometer positioning
Right above platform, so that the micro-vision measuring system can observe the sample；
The fixed bracket, for fixing the marble gantry support；
The optics vibration-isolating platform, displacement sensors, the space nanopositioning stage and described solid for carrying
Fixed rack.
Optionally, the micro-vision measuring system, including industrial camera, fixed bracket, microlens and light source.
The invention also discloses a kind of space nanometer positionings and detection method for evaluating micro-vision measurement performance, are applied to
The space nanometer positioning and detection device of evaluation micro-vision measurement performance above-mentioned, comprising:
System calibrating is carried out to sample using micro-vision measuring system, obtains the characteristic coordinates of the sample；
Using space nanopositioning stage, according to predetermined movement path, in the micro-vision measuring system measurement range
The interior control sample is mobile；
The microscopic system characteristic coordinates collection of the sample is obtained using the micro-vision measuring system；
The displacement of the space nanopositioning stage is obtained using displacement sensor；
Using the displacement of the microscopic system characteristic coordinates collection and the space nanopositioning stage, commented according to preset
Estimate criterion, obtains the quantitative evaluation result of the micro-vision measuring system.
Optionally, described to utilize space nanopositioning stage, it controls the sample and is surveyed in the micro-vision measuring system
The process moved in amount range, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset
The sample is moved to next target point by motion path.
Optionally, described to utilize space nanopositioning stage, it controls the sample and is surveyed in the micro-vision measuring system
The process moved in amount range, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset
Motion path carries the sample, moves along a straight line in X, Y or Z-direction.
Optionally, described to utilize space nanopositioning stage, it controls the sample and is surveyed in the micro-vision measuring system
The process moved in amount range, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset
Motion path, according to the mobile sample in the track of multiple types and characteristic size.
Optionally, described to utilize space nanopositioning stage, it controls the sample and is surveyed in the micro-vision measuring system
The process moved in amount range, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset
Motion path is with the mobile sample of different movement velocitys.
Optionally, the displacement using the microscopic system characteristic coordinates collection and the space nanopositioning stage,
According to preset assessment level, the process of the quantitative evaluation result of the micro-vision measuring system is obtained, comprising:
Using the microscopic system characteristic coordinates collection, each microscopic system characteristic coordinates and phase in every group of motion path are obtained
Coordinate difference between adjacent microscopic system characteristic coordinates obtains microscopic system coordinate difference set；
Each microscopic system coordinate difference and the corresponding space nanometer positioning are concentrated using the microscopic system coordinate difference
Deviation between the displacement of platform obtains the quantitatively evaluating of the micro-vision measuring system according to preset assessment level
As a result.
In the present invention, the space nanometer positioning and detection device of micro-vision measurement performance are evaluated, including space nanometer is determined
Bit platform, displacement sensor and controller；Wherein, the trajectory track precision of space nanopositioning stage is better than 10 nanometers, displacement
The measurement accuracy of sensor is better than 2 nanometers, and the trajectory track precision of space nanopositioning stage is better than micro-vision to be evaluated
The measurement accuracy of measuring system；Space nanopositioning stage, for carrying the sample to the observation of micro-vision observation system, aobvious
In micro- vision measurement system measurement range, particular displacement is executed；Displacement sensor, for detecting the position of space nanopositioning stage
Shifting amount；Controller, displacement and micro-vision measuring system for utilizing space nanopositioning stage obtain the micro- of sample
System features coordinate set obtains the quantitative evaluation result of micro-vision measuring system according to preset assessment level.
The present invention is based on space nanopositioning stages and displacement sensor that precision is better than micro-vision measuring system, utilize
Space nanopositioning stage can allow sample according to preset movement path, it is ensured that can be realized test micro-vision measurement
The measurement accuracy of a variety of working situations of system is recycled using the displacement of displacement sensor detection space nanopositioning stage
The microscopic system feature that controller compares the displacement of space nanopositioning stage and micro-vision measuring system obtains sample is sat
Mark collection, finally obtains the quantitatively evaluating of micro-vision measuring system according to preset assessment level according to deviation between the two
As a result, realize comprehensive, multi-angle, automatically with high-precision evaluation.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is that a kind of space nanometer positioning for evaluating micro-vision measurement performance disclosed by the embodiments of the present invention and detection fill
Set structural schematic diagram；
Fig. 2 is a kind of space nanopositioning stage structural schematic diagram disclosed by the embodiments of the present invention；
Fig. 3 is a kind of displacement sensor structure schematic diagram disclosed by the embodiments of the present invention；
Fig. 4 is a kind of Auxiliary support fixture structure schematic diagram disclosed by the embodiments of the present invention；
Fig. 5 is a kind of micro-vision measuring system structural schematic diagram disclosed by the embodiments of the present invention；
Fig. 6 is a kind of space nanometer positioning for evaluating micro-vision measurement performance disclosed by the embodiments of the present invention and detection side
Method flow diagram.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a kind of space nanometer positioning and detection device for evaluating micro-vision measurement performance, ginsengs
It sees figure 1 and figure 2, including space nanopositioning stage 2 and displacement sensor 3；Wherein, the rail of space nanopositioning stage 2
Mark tracks precision and is better than 10 nanometers, and the measurement accuracy of displacement sensor is better than 2 nanometers, and the track of space nanopositioning stage 2 chases after
Track precision is better than the measurement accuracy of micro-vision measuring system 1 to be evaluated；
Space nanopositioning stage 2 is surveyed for carrying the sample 15 to the observation of micro-vision observation system in micro-vision
In 1 measurement range of amount system, particular displacement is executed；
Displacement sensor 3, for detecting the displacement of space nanopositioning stage 2；
Controller 5, for the displacement and the acquisition sample of micro-vision measuring system 1 using space nanopositioning stage 2
15 microscopic system characteristic coordinates collection obtains the quantitatively evaluating knot of micro-vision measuring system 1 according to preset assessment level
Fruit.
Specifically, the measurement accuracy of micro-vision measuring system 1 is without departing from 50 nanometers in the prior art, so to guarantee
It is enough that the measurement accuracy of micro-vision measuring system 1 is assessed, therefore, using the measurement for being better than micro-vision measuring system 1
The space nanopositioning stage 2 and displacement sensor 3 of precision.
Specifically, space nanopositioning stage 2 is by the mobile example 15 in 1 measurement range of micro-vision measuring system,
Micro-vision measuring system 1 is set to be capable of detecting when sample 15 in the characteristic coordinates of different location, displacement sensor 3 then can be accurate
The distance i.e. displacement of space nanopositioning stage 2 for measuring 2 mobile example 15 of space nanopositioning stage, will show herein
The characteristic coordinates that micro- vision measurement system 1 detects are known as micro-vision characteristic coordinates.
It is understood that since the precision of displacement sensor 3 and space nanopositioning stage 2 is superior to micro-vision inspection
Therefore whether accurate examining system can judge micro-vision characteristic coordinates using the displacement of space nanopositioning stage 2, real
Existing nanoscale evaluation.
Specifically, using the multi-faceted mobility of space nanopositioning stage 2, according to different motion paths, Neng Gourang
Micro-vision measuring system 1 carries out the accuracy test of a variety of working conditions such as static measurement, dynamic measurement and reliability measurement.
Wherein, characteristic coordinates are the benchmark point selected on sample 15 in advance, for example, sample 15 is standard sample
When 15, characteristic coordinates can be center-of-mass coordinate.
It should be noted that the shifting detection characteristic coordinates of displacement sensor 3 are without measuring 15 position of sample, it is only necessary to remember
Record 2 displacement of space nanopositioning stage, can and the differences of micro-vision characteristic coordinates be compared, realize to micro-vision
The accuracy evaluation of measuring system 1.
Specifically, by by the position of the difference of adjacent micro-vision characteristic coordinates and corresponding space nanopositioning stage 2
Shifting amount is made comparisons, and judges whether the two is identical, and deviation is how many when different, is measured according to preset assessment level micro-vision
The precision of system 1 is assessed, and the quantitative evaluation result of micro-vision measuring system 1 is finally obtained；For example, can incite somebody to action in advance
The precision of micro-vision measuring system 1 is divided into multiple ranks, and each rank corresponds to different deviation ranges, by judging phase
Deviation between the adjacent difference of micro-vision characteristic coordinates and the displacement of corresponding space nanopositioning stage 2 falls in that partially
In poor range, corresponding quantitative evaluation result is obtained.
As it can be seen that space nanopositioning stage 2 and position of the embodiment of the present invention based on precision better than micro-vision measuring system 1
Displacement sensor 3 can allow sample 15 according to preset movement path, it is ensured that Neng Goushi using space nanopositioning stage 2
The measurement accuracy for now testing more than a kind of working situation of micro-vision measuring system detects space nanometer positioning using displacement sensor 3
The displacement of platform 2, recycling controller 5 compares the displacement of space nanopositioning stage 2 and micro-vision measuring system 1 obtains
The microscopic system characteristic coordinates collection for taking sample 15 finally obtains aobvious according to deviation between the two according to preset assessment level
The quantitative evaluation result of micro- vision measurement system 1, realize full position, multi-angle, automatically with high-precision evaluation.
It is understood that cooperating different algorithms using identical motion path, commented disclosed in the embodiment of the present invention
The space nanometer positioning and detection device of valence micro-vision measurement performance, additionally it is possible to the error size between algorithms of different is detected,
Not only realize and accurately detected on 1 hardware of micro-vision measuring system, also achieve between algorithms of different laterally with it is vertical
To comparison.
It is understood that space nanopositioning stage 2 can carry sample in space multifreedom motion, primary movement
It can be moved along uniaxial direction, also can use multiaxial motion, for example, moved using six axis, it can how space specifically moves
To be set according to practical application request, it is not limited here.
The embodiment of the invention discloses the space nanometer positionings and detection of a kind of specific evaluation micro-vision measurement performance
Device, relative to a upper embodiment, the present embodiment has made further instruction and optimization to technical solution.It is specific:
Specifically, shown in Figure 2, above-mentioned space nanopositioning stage 2 can specifically include nanopositioning stage mechanism
Ontology 21 and nanopositioning stage kinetic control system 22；
Nanopositioning stage kinetic control system 22, for driving the sample carried in nanopositioning stage mechanism body 21
Product 15 execute particular displacement in 1 measurement range of micro-vision measuring system；
Nanopositioning stage mechanism body 21, for carrying sample 15, and according to nanopositioning stage kinetic control system
22 driving signal movement.
Specifically, nanopositioning stage mechanism body 21 can freely transport on X/Y/Z/ θ x/ θ y/ θ z six-freedom degree
It is dynamic, sample 15 can also be driven to carry out compound movement according to actual scene needs, in limited specified freedom degree.
Specifically, shown in Figure 3, upper displacement sensors 3 can be specially displacement sensor 3；
Displacement sensor 3, including three in the flaky electric capacity sensor 32 placed vertically, for detecting nanopositioning stage
The displacement of the outer Z/ θ x/ θ y three degree of freedom of 21 plane of mechanism body；Three are in horizontal positioned cylindrical type capacitance sensor 31,
For detecting the displacement of X/Y/ θ z three degree of freedom in 21 plane of nanopositioning stage mechanism body.
It is understood that displacement sensor 3 is fitted in nanopositioning stage mechanism body 21, so that detection is received
The displacement of rice locating platform mechanism body 21.
It should be noted that nanometer is fixed since displacement sensor 3 may be mounted in nanopositioning stage mechanism body 21
Bit platform mechanism body 21 and displacement sensor 3 are small in size, and nanopositioning stage mechanism body 21 can also be to a certain extent
It shrinking, nanopositioning stage kinetic control system 22 can remotely control nanopositioning stage mechanism body 21, so
The space nanometer positioning and detection device of evaluation micro-vision measurement performance disclosed by the embodiments of the present invention can be put into large size not
In the quick detachable device including micro-vision measuring system 1, realize to the independent measurement of micro-vision measuring system 1, evaluation or
Calibration, at this point, the space nanometer positioning of evaluation micro-vision measurement performance is more flexible with detection device, the scope of application is wider.
Specifically, the space nanometer positioning of evaluation micro-vision measurement performance is also used as individually surveying with detection device
Platform is tried, can also include micro-vision measuring system 1 and the fixed device 4 of Auxiliary support referring to fig. 4 and shown in Fig. 5；
Auxiliary support fixes device 4, for fixing each equipment.
Specifically, the fixed device 4 of Auxiliary support is mainly used for carrying and fixed displacement sensor 3, space nanometer positioning are flat
Each equipment such as platform 2 and micro-vision measuring system 1, it is ensured that whole system is able to maintain stabilization when test, be not in vibration and
Displacement.
Micro-vision measuring system 1, the position for observing samples 15.
Wherein, the fixed device 4 of above-mentioned Auxiliary support can specifically include marble gantry support 41, fixed 42 and of bracket
Optics vibration-isolating platform 43.
Optics vibration-isolating platform 43, for carrying displacement sensor 3, space nanopositioning stage 2 and fixed bracket 42；
Fixed bracket 42, for fixing marble gantry support 41；
Marble gantry support 41, for micro-vision measuring system 1 to be fixed on space nanopositioning stage 2 just
Side, so that micro-vision measuring system 1 can observe sample 15.
Wherein, better stability is capable of providing using the gantry support of marble material.
Wherein, above-mentioned micro-vision measuring system 1 specifically includes industrial camera 11, fixed bracket 42,13 and of microlens
Light source 14.
It is understood that nanopositioning stage kinetic control system 22 and controller 5 did not needed multistability, institute
It can not resided on the fixed device 4 of Auxiliary support, can be carried out with nanopositioning stage kinetic control system 22 and controller 5
Long-range control.
Correspondingly, the embodiment of the invention also discloses a kind of space nanometer positioning for evaluating micro-vision measurement performance and inspections
Survey method, it is shown in Figure 6, applied to it is above-mentioned evaluation micro-vision measurement performance space nanometer positioning and detection device,
This method comprises:
S11: system calibrating is carried out to sample using micro-vision measuring system, obtains the characteristic coordinates of sample.
Specifically, needing to determine the initial position of sample before measurement first, space nanopositioning stage can be in advance by sample
It is moved in the measurement range of micro-vision measuring system, is raised the price due to sample and be better than coordinate points, so being carried out first to sample
System calibrating, the characteristic point of sample, and using the coordinate of this feature point as the characteristic coordinates of sample, and record sample initial position
Initial characteristics coordinate, complete system calibrating.
S12: space displacement locating platform is utilized, according to predetermined movement path, in micro-vision measuring system measurement range
Internal control sample preparation product are mobile.
Specifically, space displacement locating platform can drive the sample of carrying to exist according to preset motion path when measurement
It is moved in micro-vision measuring system measurement range.
S13: the microscopic system characteristic coordinates collection of sample is obtained using micro-vision measuring system.
Specifically, micro-vision measuring system can be obtained persistently according to the preset time interval or preset acquisition method
Take the characteristic coordinates that sample is new, so obtain include one or more microscopic system characteristic coordinates microscopic system characteristic coordinates
Collection.
S14: the displacement of space nanopositioning stage is obtained using displacement sensor.
Specifically, displacement sensor is then also according to preset time interval or preset acquisition method, it is lasting to obtain sky
Between nanopositioning stage displacement.
S15: quasi- according to preset assessment using the displacement of microscopic system characteristic coordinates collection and space nanopositioning stage
Then, the quantitative evaluation result of micro-vision measuring system is obtained.
Specifically, concentrating each microscopic system characteristic coordinates and adjacent microscopic system special using microscopic system characteristic coordinates
The deviation between coordinate is levied, microscopic system coordinate difference is obtained, in this way could be corresponding with the displacement of space nanopositioning stage, lead to
It crosses and the corresponding displacement of synchronization and microscopic system coordinate difference is compared, microscopic system is judged on the basis of displacement
The deviation of coordinate difference therewith, and then according to preset assessment level, obtain the quantitative evaluation result of micro-vision measuring system, example
Such as, the initiation feature coordinate of sample is (X0, Y0), the characteristic coordinates of the sample after movement are (X1, Y1), calculate △ X1(△X1
=X1-X0), △ Y1(△ Y=Y1-Y0), utilize calculated △ X1With △ Y1, with the displacement △ X of displacement sensor feedback0With
△Y0It makes comparisons, obtains quantitative evaluation result, assessment level may include that the deviation of such as micro-vision measuring system is measured at 1 μm
In grade range, then to be excellent, it is general in 3 μm of order magnitude ranges, is poor outside 3 μm of order magnitude ranges.
As it can be seen that space nanopositioning stage and displacement of the embodiment of the present invention based on precision better than micro-vision measuring system
Sensor can allow sample according to preset movement path, it is ensured that can be realized test using space nanopositioning stage
The measurement accuracy of a variety of working situations of micro-vision system utilizes the displacement of displacement sensor detection space nanopositioning stage
Amount, then compare the displacement of space nanopositioning stage and the microscopic system characteristic coordinates of micro-vision measuring system acquisition sample
Collection, finally obtains the evaluation result of micro-vision measuring system according to preset assessment level according to deviation between the two,
Realize comprehensive, multi-angle, automatically with high-precision evaluation.
Further, above-mentioned to utilize space nanopositioning stage, sample is controlled in micro-vision measuring system measurement range
During interior movement, sample can be according to more to micro-vision measuring system under a variety of working situations of multi-motion path implementation
The test of kind performance, can specifically include S121 to S124；Wherein,
S121: space nanopositioning stage is utilized, in micro-vision measuring system measurement range, according to preset movement
Sample is moved to next target point by path.
Specifically, standard sample 15 is moved to next mesh according to preset motion path by space nanopositioning stage
After punctuate, space nanopositioning stage keeps lockup state, by micro-vision measuring system, calculates the aobvious of the sample after moving
Micro- characteristic coordinates (X1, Y1), calculate microscopic features coordinate difference △ X1(△X1=X1-X0) and △ Y1(△ Y=Y1-Y0)；It calculates
△ X1With △ Y1, with the displacement △ X of displacement sensor feedback0With △ Y0It makes comparisons, micro-vision measurement system can be calculated
It unites in the static measurement error of X and Y-direction.
Certainly, Z axis can also be added in such method, measure, and specific test method is it is not limited here.
Specifically, by the static measurement algorithm for changing different micro-vision measuring system, with above-mentioned same method,
The static measurement error that micro-vision measuring system uses algorithms of different is calculated, the measurement accuracy of algorithms of different can also be evaluated.
S122: space nanopositioning stage is utilized, in micro-vision measuring system measurement range, according to preset movement
Path carries sample and moves along a straight line in X, Y or Z-direction.
Specifically, being maintained at X according to preset motion path by space nanopositioning stage according to unitary variant principle
The linear motion in direction, Y/Z/ θZDirection keeps locking；Micro-vision measuring system, the microscopic features for obtaining sample in real time are sat
Mark, and calculate the microscopic features coordinate set (X of sample1, Y1), (X2, Y2), (X3, Y3) ..., (Xn, Yn), obtain microscopic features coordinate
Difference set △ Y1=Y1-Y0, △ Y2=Y2-Y0, △ Y3=Y3-Y0... ..., △ Yn=Yn-Y0, establish evaluation function f (△ Y1, △ Y2,
△Y3..., △ Yn), evaluate micro-vision measuring system, multiple spot dynamic deviation in the Y direction；Wherein, it is received by controlling space
Rice locating platform, may be implemented different movement velocitys in the X direction, for example, 1 μm/s, 2 μm/s, 4 μm/s, 8 μm/s, 16 μm/
S, 32 μm/s, 64 μm/s etc.；Since nanopositioning stage other kinematic axis in space are locked, so being examined without using displacement sensor
It surveys whether space nanopositioning stage offsets in the Y direction, is defaulted as 0.
Specifically, similarly, can also be kept in the Y direction by space nanopositioning stage according to preset motion path
Linear motion, X/Z/ θZDirection keeps locking, can evaluate micro-vision measuring system, multiple spot dynamic deviation in the X direction
With multi-speed dynamic deviation；Similarly also available when the linear motion for being maintained at Z-direction, micro-vision measuring system is in Z-direction
On multiple spot dynamic deviation and multi-speed dynamic deviation.
Specifically, by replacement dynamic deviation Measurement Algorithm, the foundation indexs such as multiple spot dynamic deviation and multi-speed dynamic deviation,
The measurement accuracy of algorithms of different can also be evaluated.
S123: space nanopositioning stage is utilized, in micro-vision measuring system measurement range, according to preset movement
Path, according to the track mobile example of multiple types and size.
Specifically, according to preset motion path, sample is made to complete multiple types and size by space nanopositioning stage
Motion path, micro-vision measuring system obtains the microscopic features coordinate of sample in real time, obtains the microscopic features coordinate of sample
(X1, Y1), (X2, Y2), (X3, Y3) ..., (Xn, Yn), according to evaluation function f (△ X1, △ X2, △ X3..., △ Xn), evaluation function
f(△Y1, △ Y2, △ Y3..., △ Yn) and space nanopositioning stage displacement quantity set, assess micro-vision measuring system,
Multiple spot dynamic deviation and multi-speed dynamic deviation under different tracing paths.
Wherein, the motion path of multiple types and size, including but not limited to circle, triangle, rectangle and ellipse etc.,
It can be the customized path for meeting site of deployment demand, size only needs to meet in micro-vision measuring system measurement range i.e.
Can, it can arbitrarily set.
Specifically, by replacement dynamic deviation Measurement Algorithm, the foundation indexs such as multiple spot dynamic deviation and multi-speed dynamic deviation,
Measurement accuracy of the algorithms of different in pahtfinder hard tracking can also be evaluated.
S124: space nanopositioning stage is utilized, in micro-vision measuring system measurement range, according to preset movement
Path is with different movement velocity mobile examples.
Specifically, completing one according to preset motion path with different motion speed by space nanopositioning stage
Sub- test loop constitutes a complete test loop by the subcycle of different characteristic parameter, and a subcycle is to execute once
Complete motion path, entire test loop include multiple groups motion path, and speed is different between multiple groups motion path.
Specifically, obtaining evaluation function f (X according to microscopic features coordinate set by the test loop for repeating certain number1,
X2, X3..., Xn) and f (Y1, Y2, Y3..., Yn), evaluation function f (△ X is obtained according to microscopic features coordinate difference set1, △ X2, △
X3..., △ Xn), f (△ Y1, △ Y2, △ Y3..., △ Yn), by by evaluation function f (△ X1, △ X2, △ X3..., △ Xn) and f
(△Y1, △ Y2, △ Y3..., △ Yn) be compared with displacement quantity set, evaluate the stability of micro-vision measuring system.
Wherein, movement velocity, including but not limited to 1 μm/s, 2 μm/s, 4 μm/s, 8 μm/s, 16 μm/s, 32 μm/s, 64 μm/
S etc., preset motion path, including but not limited to circle, triangle, rectangle, ellipse etc. are also possible to meet site of deployment demand
Customized path.
It is understood that above-mentioned carry out multiple groups motion path test when, microscopic features coordinate difference be with same group it is same
Moment, corresponding displacement was compared, and obtained quantitative evaluation result.
It should be noted that above-mentioned S121 to S124 have no it is successive execute sequence, can be executed sequentially, can also be according to reality
Border application demand selectively executes, without being performed simultaneously test method in above-mentioned 4, it is not limited here.
Specifically, above-mentioned S15 utilizes the displacement of microscopic system characteristic coordinates collection and space nanopositioning stage, according to pre-
If assessment level, obtain the process of the quantitative evaluation result of micro-vision measuring system, may include S151 and S152；Its
In,
S151: utilizing microscopic system characteristic coordinates collection, obtain in every group of motion path each microscopic system characteristic coordinates with
Coordinate difference between adjacent microscopic system characteristic coordinates obtains microscopic system coordinate difference set；
S152: each microscopic system coordinate difference and corresponding space nanopositioning stage are concentrated using microscopic system coordinate difference
Displacement between deviation obtain the quantitative evaluation result of micro-vision measuring system according to preset assessment level.
It is understood that sample can be carried in space multifreedom motion, once using space nanopositioning stage
Movement can be moved along uniaxial direction, also can use multiaxial motion, for example, being moved using six axis, specifically how be transported in space
It is dynamic to be set according to practical application request, it is not limited here.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning
Covering non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes that
A little elements, but also including other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged
Except there is also other identical elements in the process, method, article or apparatus that includes the element.
Professional further appreciates that, unit described in conjunction with the examples disclosed in the embodiments of the present disclosure
And algorithm steps, can be realized with electronic hardware, computer software, or a combination of the two, in order to clearly demonstrate hardware and
The interchangeability of software generally describes each exemplary composition and step according to function in the above description.These
Function is implemented in hardware or software actually, the specific application and design constraint depending on technical solution.Profession
Technical staff can use different methods to achieve the described function each specific application, but this realization is not answered
Think beyond the scope of this invention.
Technology contents provided by the present invention are described in detail above, specific case used herein is to this hair
Bright principle and embodiment is expounded, method of the invention that the above embodiments are only used to help understand and its
Core concept；At the same time, for those skilled in the art, according to the thought of the present invention, in specific embodiment and application
There will be changes in range, in conclusion the contents of this specification are not to be construed as limiting the invention.
Claims (12)
1. a kind of space nanometer positioning and detection device for evaluating micro-vision measurement performance, which is characterized in that received including space
Rice locating platform, displacement sensor and controller；Wherein, the trajectory track precision of the space nanopositioning stage is received better than 10
Rice, the measurement accuracy of institute's displacement sensors are better than 2 nanometers, the trajectory track precision of the space nanopositioning stage be better than to
The measurement accuracy of the micro-vision measuring system of evaluation；
The space nanopositioning stage, for carrying the sample to micro-vision observation system observation, described micro-
In vision measurement system measurement range, particular displacement is executed；
Institute's displacement sensors, for detecting the displacement of the space nanopositioning stage；
The controller, displacement and the micro-vision measuring system for utilizing the space nanopositioning stage obtain
The microscopic system characteristic coordinates collection of the sample obtains the amount of the micro-vision measuring system according to preset assessment level
Change evaluation result.
2. the space nanometer positioning and detection device of evaluation micro-vision measurement performance according to claim 1, feature
It is, the space nanopositioning stage includes nanopositioning stage mechanism body and nanopositioning stage kinetic control system；
The nanopositioning stage kinetic control system, for driving the sample carried on the nanopositioning stage,
In the micro-vision measuring system measurement range, execute particular displacement, the particular displacement include positioning, resetting and
Trajectory track；
The nanopositioning stage mechanism body, for carrying the sample, and according to the nanopositioning stage motion control
The driving signal of system moves.
3. the space nanometer positioning and detection device of evaluation micro-vision measurement performance according to claim 2, feature
It is, institute's displacement sensors, it is fixed for detecting the space nanometer including three in the flaky electric capacity sensor placed vertically
The displacement of the outer Z/ θ x/ θ y three degree of freedom of bit platform plane；Three are in horizontal positioned cylindrical type capacitance sensor, for examining
Survey the displacement of X/Y/ θ z three degree of freedom in the space nanopositioning stage plane.
4. the space nanometer positioning of evaluation micro-vision measurement performance according to any one of claims 1 to 3 and detection fill
It sets, which is characterized in that can also include micro-vision measuring system and the fixed device of Auxiliary support；
The micro-vision measuring system, for observing the position of the sample；
The fixed device of the Auxiliary support, for fixing each equipment.
5. the space nanometer positioning and detection device of evaluation micro-vision measurement performance according to claim 4, feature
It is, the fixed device of the Auxiliary support includes marble gantry support, fixed bracket and optics vibration-isolating platform；
The marble gantry support, for the micro-vision measuring system to be fixed on the space nanopositioning stage just
Top, so that the micro-vision measuring system can observe the sample；
The fixed bracket, for fixing the marble gantry support；
The optics vibration-isolating platform, displacement sensors, the space nanopositioning stage and the fixed branch for carrying
Frame.
6. the space nanometer positioning and detection device of evaluation micro-vision measurement performance according to claim 4, feature
It is, the micro-vision measuring system, including industrial camera, fixed bracket, microlens and light source.
7. a kind of space nanometer positioning and detection method for evaluating micro-vision measurement performance, which is characterized in that be applied to as weighed
Benefit requires the space nanometer positioning and detection device of 1 to 6 described in any item evaluation micro-vision measurement performances, comprising:
System calibrating is carried out to sample using micro-vision measuring system, obtains the characteristic coordinates of the sample；
Using space nanopositioning stage, according to predetermined movement path, in the micro-vision measuring system measurement range internal control
It is mobile to make the sample；
The microscopic system characteristic coordinates collection of the sample is obtained using the micro-vision measuring system；
The displacement of the space nanopositioning stage is obtained using displacement sensor；
It is quasi- according to preset assessment using the displacement of the microscopic system characteristic coordinates collection and the space nanopositioning stage
Then, the quantitative evaluation result of the micro-vision measuring system is obtained.
8. the space nanometer positioning and detection method of evaluation micro-vision measurement performance according to claim 7, feature
It is, it is described to utilize space nanopositioning stage, it controls the sample and is moved in the micro-vision measuring system measurement range
Dynamic process, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset movement
The sample is moved to next target point by path.
9. the space nanometer positioning and detection method of evaluation micro-vision measurement performance according to claim 7, feature
It is, it is described to utilize space nanopositioning stage, it controls the sample and is moved in the micro-vision measuring system measurement range
Dynamic process, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset movement
Path carries the sample, moves along a straight line in X, Y or Z-direction.
10. the space nanometer positioning and detection method of evaluation micro-vision measurement performance according to claim 7, feature
It is, it is described to utilize space nanopositioning stage, it controls the sample and is moved in the micro-vision measuring system measurement range
Dynamic process, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset movement
Path, according to the mobile sample in the track of multiple types and characteristic size.
11. the space nanometer positioning and detection method of evaluation micro-vision measurement performance according to claim 7, feature
It is, it is described to utilize space nanopositioning stage, it controls the sample and is moved in the micro-vision measuring system measurement range
Dynamic process, comprising:
Using the space nanopositioning stage, in the micro-vision measuring system measurement range, according to preset movement
Path is with the mobile sample of different movement velocitys.
12. the space nanometer positioning and detection method of evaluation micro-vision measurement performance according to claim 7, feature
It is, the displacement using the microscopic system characteristic coordinates collection and the space nanopositioning stage, according to preset
Assessment level obtains the process of the quantitative evaluation result of the micro-vision measuring system, comprising:
Using the microscopic system characteristic coordinates collection, obtains each microscopic system characteristic coordinates in every group of motion path and shown with adjacent
Coordinate difference between micro-system characteristic coordinates obtains microscopic system coordinate difference set；
Each microscopic system coordinate difference and the corresponding space nanopositioning stage are concentrated using the microscopic system coordinate difference
Displacement between deviation obtain the quantitative evaluation result of the micro-vision measuring system according to preset assessment level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910371558.3A CN110068267B (en) | 2019-05-06 | 2019-05-06 | Space nanometer positioning and detecting device and method for evaluating microscopic vision measurement performance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910371558.3A CN110068267B (en) | 2019-05-06 | 2019-05-06 | Space nanometer positioning and detecting device and method for evaluating microscopic vision measurement performance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110068267A true CN110068267A (en) | 2019-07-30 |
| CN110068267B CN110068267B (en) | 2021-11-26 |
Family
ID=67370235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910371558.3A Active CN110068267B (en) | 2019-05-06 | 2019-05-06 | Space nanometer positioning and detecting device and method for evaluating microscopic vision measurement performance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110068267B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113074766A (en) * | 2021-03-19 | 2021-07-06 | 广东工业大学 | Micro-nano visual motion tracking-oriented axial deviation resistance performance evaluation method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0254105A (en) * | 1988-08-19 | 1990-02-23 | Hitachi Constr Mach Co Ltd | Length measuring device |
| JP2000277047A (en) * | 1999-03-24 | 2000-10-06 | Hitachi Ltd | Visual field movement correcting device for scanning electron microscope |
| JP2005249590A (en) * | 2004-03-04 | 2005-09-15 | Yakichi Higo | Characteristic evaluating and testing machine |
| CN101464129A (en) * | 2007-12-17 | 2009-06-24 | 中芯国际集成电路制造(上海)有限公司 | Calibration method for micro-image |
| CN103983205A (en) * | 2014-04-30 | 2014-08-13 | 天津大学 | Composite measurement system and measurement method for micro-array complex surface optical element |
| CN205561757U (en) * | 2016-02-02 | 2016-09-07 | 深圳中科光子科技有限公司 | Motion platform positioning accuracy's device is measured and calibrated |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106770690A (en) * | 2016-12-16 | 2017-05-31 | 贵州航天计量测试技术研究所 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation and calibration method |
-
2019
- 2019-05-06 CN CN201910371558.3A patent/CN110068267B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0254105A (en) * | 1988-08-19 | 1990-02-23 | Hitachi Constr Mach Co Ltd | Length measuring device |
| JP2000277047A (en) * | 1999-03-24 | 2000-10-06 | Hitachi Ltd | Visual field movement correcting device for scanning electron microscope |
| JP2005249590A (en) * | 2004-03-04 | 2005-09-15 | Yakichi Higo | Characteristic evaluating and testing machine |
| CN101464129A (en) * | 2007-12-17 | 2009-06-24 | 中芯国际集成电路制造(上海)有限公司 | Calibration method for micro-image |
| CN103983205A (en) * | 2014-04-30 | 2014-08-13 | 天津大学 | Composite measurement system and measurement method for micro-array complex surface optical element |
| CN205561757U (en) * | 2016-02-02 | 2016-09-07 | 深圳中科光子科技有限公司 | Motion platform positioning accuracy's device is measured and calibrated |
| CN106770690A (en) * | 2016-12-16 | 2017-05-31 | 贵州航天计量测试技术研究所 | A kind of ultrasonic scanning microscope imaging differentiates force characteristic calibrating installation and calibration method |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
Non-Patent Citations (1)
| Title |
|---|
| 徐征等: "机器视觉精密测量中的显微光学聚焦", 《光学精密工程》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113074766A (en) * | 2021-03-19 | 2021-07-06 | 广东工业大学 | Micro-nano visual motion tracking-oriented axial deviation resistance performance evaluation method |
| CN113074766B (en) * | 2021-03-19 | 2023-01-10 | 广东工业大学 | Micro-nano visual motion tracking system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110068267B (en) | 2021-11-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102252637B (en) | Method for detecting flatness of large-scale flange | |
| CN103453848B (en) | Device and method for measuring shape, position and dimension features of machine elements | |
| CN100565115C (en) | The scaling method of multi-position strapping north-seeking system direction effect | |
| CN104215258A (en) | Method and system for measuring precision of angle measurement of vehicle theodolite | |
| CN103017690A (en) | Method for measuring straightness of super-long guide rail | |
| CN100343625C (en) | Measuring splice method and device of large three-dimensional body shape based on splicing target | |
| CN102506895B (en) | Three-dimensional deformation precision inspection device of measuring apparatus | |
| CN111811496B (en) | Oblique non-contact three-dimensional linear velocity and double-shaft dynamic angle measuring system and method | |
| CN102393213A (en) | Space-based detecting and tracking imaging system testing device and testing method | |
| CN104034510A (en) | Portable photoelectric tracking performance detection device | |
| CN104034511A (en) | Detecting method for photoelectric tracking performance | |
| CN103033344B (en) | Optical system focal distance detection method | |
| CN109764806A (en) | Sound state calibrating installation and dynamic and static calibration method for laser tracker | |
| CN110243452A (en) | A kind of electronic balance automatic calibrator | |
| CN109115405A (en) | A kind of centroid measurement method | |
| CN103454070A (en) | Focus performance test method for X-ray combined refraction lens on basis of CCD detection | |
| CN106813600A (en) | A kind of contactless discontinuous plane measurement of planeness system and method | |
| CN1233984C (en) | Large-scale three dimensional shape and appearance measuring and splicing method without being based on adhesive mark | |
| CN110068267A (en) | Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance | |
| CN101813499A (en) | Method and device for calibrating three-dimensional micro tactile sensor | |
| CN105841652A (en) | System and method used for locating tunnel disease | |
| CN103162712B (en) | The crooked compensation method of Circular gratings angle measurement deviation processing and axle system | |
| CN107907164A (en) | A kind of prosthetic robot end effector mechanism dynamic characteristic detection device and method | |
| CN207600515U (en) | A kind of prosthetic robot end effector mechanism dynamic characteristic detection device | |
| CN206420798U (en) | A kind of three-dimensional calibration measurement apparatus for neutron diffraction stress analysis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |