CN205561757U - Motion platform positioning accuracy's device is measured and calibrated - Google Patents
Motion platform positioning accuracy's device is measured and calibrated Download PDFInfo
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- CN205561757U CN205561757U CN201620106362.3U CN201620106362U CN205561757U CN 205561757 U CN205561757 U CN 205561757U CN 201620106362 U CN201620106362 U CN 201620106362U CN 205561757 U CN205561757 U CN 205561757U
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- motion platform
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- positioning precision
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Abstract
The utility model provides a motion platform positioning accuracy's device is measured and calibrated, includes motion platform, is fixed in the last high accuracy scaling ruler of motion platform, locate the measurement camera of high accuracy scaling ruler top and be used for control motion platform's movement control module, motion platform accordings to the operation of the predetermined stride of movement control module, measure the camera absorb predetermine during the stride in the scale mark change -only information of high accuracy scaling ruler, movement control module passes through actual line feed pitch in the scale mark change -only information of high accuracy scaling ruler calculates during necessarily predetermineeing the stride from and the foundation the actual line feed pitch from and the discrepancy adjustment predetermine between the stride predetermine the stride, this application technical scheme simple and practical, greatly reduced the measurement cost.
Description
Technical field
This utility model relates to measure of precision field, particularly relates to measure and calibration motion platform positioning precision
Device.
Background technology
In some automation equipments, the requirement of processing precision of products is more and more higher, motion platform in equipment
Positioning precision will determine that product quality is the most qualified, and positioning precision deficiency will cause fraction defective to rise.Motion is flat
The overall performance of automation equipment is played conclusive effect by the positioning precision of platform.As at laser cutting device
In motion platform during workpiece is carried out cutting processing, the position needing to be accurately positioned workpiece could be real
Existing high-precision cutting, the positioning precision of motion platform directly affects the machining accuracy to workpiece.
At present, the general positioning precision using laser interferometer to measure and calibrate motion platform, but laser
Interferometer is expensive, it is complicated, the most portable to operate, and is not suitable for batch production and the inspection of equipment.
Utility model content
Based on this, it is necessary to provide a kind of and measure and the device of calibration motion platform positioning precision, existing to solve
There is commercial measurement instrument price costliness, operate problem complicated, the most portative.
A kind of device measured and calibrate motion platform positioning precision, including motion platform, is fixed on described fortune
On moving platform demarcate chi, be located at the measurement camera above described demarcation chi and for control described motion put down
The motion-control module of platform, the positioning precision of described demarcation chi is higher than the positioning precision of described motion platform；Institute
Stating the step pitch operating that motion platform is preset according to described motion-control module, step is preset in the picked-up of described measurement camera
The graduation mark change information of described demarcation chi within period, described motion-control module is by described demarcation chi
Graduation mark change information calculate during certain predetermined step pitch in actual travel distance and according to described reality
Deviation value between travel distance and default step pitch adjusts presets step pitch.
Further, described motion platform is provided with driving motor and is controlled by motion-control module, institute
State motion-control module for starting, close described motion platform and setting step pitch for described motion platform.
Preferred as one, described motion-control module receives the measurement data of measurement camera and calculates fortune
The kinematic error value of moving platform, then error amount is sent the motor of motion platform to calibrate the shifting of motion platform
Dynamic precision.
Further, described motion-control module utilizes this error amount to compensate described motion platform, will be inclined
Difference negates post-compensation in described motion-control module, and then calibrates and promote the location of described motion platform
Precision.
Further, the graduation mark of described demarcation chi includes a central point and extends out from this central point
Sideline.
Concrete, the graduation mark graphic designs on described demarcation chi is "×" shape.
Improve as one, if described demarcation chi is inconsistent with the direction of motion of described motion platform: first survey
Measure the length value that the length in the sideline that described "×" shape graduation mark extends is corresponding with the direction of motion, then pass through
Pythagorean theorem calculates the angle theta between the direction of motion and described "×" shape graduation mark；Then, described demarcation
The range ability of chi is multiplied by the cosine value of angle theta and is the actual motion distance of motion platform.
Concrete, described measurement camera uses overall situation exposure CCD camera, and the pixel of described measurement camera is
1600x1200, the size of each pixel is 4.4um, and configuration enlargement ratio is the microlens of 10 times.
At least one technical scheme above-mentioned that the embodiment of the present application uses can reach following beneficial effect: in fortune
A high-precision calibrating chi is fixed, by calculating described high-precision calibrating in certain predetermined step pitch on moving platform
The actual displacement of chi calculates the actual displacement of described motion platform in default step pitch, thus obtains
Go out the deviation value between described actual displacement and default step pitch, and calibrate described motion with this deviation value
The precision of platform, solves that laser interferometer in prior art is expensive, it is complicated, the most portable to operate,
Be not suitable for the batch production of equipment and the problem of inspection.
Accompanying drawing explanation
Fig. 1 is the schematic layout pattern that the application measured and calibrated motion platform positioning precision device；
Fig. 2 is the plan view demarcating chi that the application measured and calibrated motion platform positioning precision；
Fig. 3 is the flow chart that the application measured and calibrated motion platform positioning precision method.
Detailed description of the invention
Understandable for enabling above-mentioned purpose of the present utility model, feature and advantage to become apparent from, below in conjunction with attached
Detailed description of the invention of the present utility model is described in detail by figure.Elaborate much have in the following description
Body details is so that fully understanding this utility model.But this utility model can be retouched at this to be much different from
The alternate manner stated is implemented, and those skilled in the art can be in the case of this utility model intension
Doing similar improvement, therefore this utility model is not limited by following public specific embodiment.
It should be noted that when element is referred to as " being fixed on ", " being arranged at " another element, and it is permissible
Directly on another element or element placed in the middle can also be there is.When an element is considered as " connection "
Another element, it can be directly to another element or may be simultaneously present centering elements.This
Term " vertical ", " level ", "left", "right" and similar statement that literary composition is used are intended merely to
Descriptive purpose, being not offered as is unique embodiment.
Embodiment 1
As it is shown in figure 1, the device of the measurement of the embodiment of the present application 1 and calibration motion platform positioning precision includes
Motion platform 301, the high-precision calibrating chi 101 being fixed on described motion platform 301, be located at described high-precision
Measuring camera 201 and being used for controlling the motor control mould of described motion platform 301 above scale scale 101
Block C1.Described motion-control module C1 has computing and controls function, and described motion platform 301 is by motor
Driving moves along a straight line, and described motion-control module C1 receives the measurement data of measurement camera 201 and counts
Calculate the kinematic error value of motion platform, then error amount is sent the motor of motion platform 301 to calibrate motion
The mobile accuracy of platform 301.
After described high-precision calibrating chi 101 is fixed on described motion platform 301, described motion platform 301
Amount of movement be i.e. the amount of movement of high-precision calibrating chi 101.The accuracy class of described high-precision calibrating chi 101
Higher than the positioning precision of described motion platform 301, most preferred embodiment is determining of described high-precision calibrating chi 101
Position precision is ten times of motion platform 301, uses the gauge block that microscope is demarcated in the present embodiment, and other are real
Execute and example may be used without other type of calibrating block.
Referring to shown in Fig. 2, the location graphic designs on described high-precision calibrating chi 101 is "×" shape,
Survey is there is when described high-precision calibrating chi 101 cause not parallel with motion platform 301 direction of motion when mounted
During amount error: first pass through the angle theta between sideline and the direction of motion of measuring described "×" shape graduation mark,
I.e. measure the length value that the length in the sideline that described "×" shape graduation mark extends is corresponding with the direction of motion, and
The angle theta between the direction of motion and described "×" shape graduation mark is calculated afterwards by Pythagorean theorem；Now, institute
The range ability L*cos θ stating high-precision calibrating chi 101 is the actual motion distance of motion platform 301.
In other embodiments, the graduation mark on described high-precision calibrating chi 101 is not limited to "×" shape,
Graduation mark possesses a central point and the sideline extended outward from this central point.
Have only to high-precision calibrating chi when needing the positioning precision measuring the motion platform 301 in other direction
Retighten after 101 anglecs of rotation.
Described measurement camera 201 uses the CCD camera of overall situation exposure, can capture swiftly passing object,
Motion platform 301 can move continuously and stop without one step pitch of every stepping, improves measurement and school
The efficiency of quasi-moving platform positioning precision.The pixel of described measurement camera 201 is 1600x1200, each pixel
Size be 4.4um, and configuration enlargement ratio is the microlens of 10 times, and so, each pixel corresponds to
Size on high-precision calibrating chi 101 is that the Pixel-level resolution of 4.4um/10=0.44um, i.e. system is
0.44um.So, the measurement visual field of described measurement camera is: 1600x4.4um=7040um,
1200x4.4um=5280um.
When the motor of the described motion-control module C1 described motion platform 301 of startup drives motion platform 301 to transport
After Zhuaning, the step pitch operating that described motion platform 301 sets according to motion-control module C1；Described measurement camera
The 201 graduation mark change informations shooting described high-precision calibrating chi 101, and it is sent to motion-control module C1；
Described motion-control module C1 calculates high-precision calibrating chi 101 described according to described graduation mark change information
Motion platform 301 presets the actual travel distance after step pitch action, and by this actual travel distance and described fortune
The step pitch that dynamic control module C1 sets compares and obtains deviation value Σ δ d；Described motion-control module C1 profit
Compensate described motion platform 301 with this deviation value Σ δ d, deviation value will negate post-compensation to described motor control
In module C1, the setting stride value such as motion-control module C1 is 10mm, the actual row obtained after measurement
Entering distance is 10.05mm, then deviation value Σ δ d is 0.05mm, then negate 0.05mm into-0.05mm
It is given to motion-control module C1, motion-control module C1 transmission 10-0.05=9.95mm instruct, and then
Calibrate and promote the positioning precision of described motion platform 301.
Embodiment 2
It is illustrated in figure 3 measurement and the method for calibration motion platform positioning precision that the embodiment of the present application 2 provides
Flow chart, refer to by fixing a precision on motion platform 301 higher than the height of described motion platform 301
Precision calibration chi 101, then by the reality of high-precision calibrating chi 101 in the measurement default step pitch of camera 201 measurement
Travel distance, and calculate deviation value complement and fill to described motion platform 301 with calibration accuracy.Including following step
Rapid:
S11, transmission enabled instruction make motion platform to set step pitch operating to motion platform.
Described in this step, motion platform is driven by motor, and described motion-control module controls institute by described motor
State the operating of motion platform, including starting, close described motion platform and setting step for described motion platform
Away from etc..
The high-precision calibrating chi that S12, acquisition are fixed on motion platform graduation mark during certain predetermined step pitch
Change information.
High accuracy table scale described in this step is fixed on described motion platform in the movement direction, this step
It is by being positioned at the measurement camera shooting described high accuracy table scale of acquisition above described high-precision calibrating chi one
Surely the graduation mark change information in step pitch is preset.Described certain predetermined step pitch can be to transport at described motion platform
Turn period or the period of several default step pitch of a default step pitch.
The precision of described high-precision calibrating chi, more than the precision of described motion platform, uses micro-in the present embodiment
The gauge block that mirror is demarcated, may be used without other type of calibrating block in other embodiments.
Described measurement camera 201 uses the CCD camera of overall situation exposure, can capture swiftly passing object,
Motion platform 301 can move continuously and stop without one step pitch of every stepping, improves measurement and school
The efficiency of quasi-moving platform positioning precision.The pixel of described measurement camera 201 is 1600x1200, each pixel
Size be 4.4um, and configuration enlargement ratio is the microlens of 10 times, and so, each pixel corresponds to
Size on high-precision calibrating chi 101 is that the Pixel-level resolution of 4.4um/10=0.44um, i.e. system is
0.44um.So, the measurement visual field of described measurement camera is: 1600x4.4um=7040um,
1200x4.4um=5280um.
S13, graduation mark information according to the high-precision calibrating chi of described acquisition calculate in certain predetermined step pitch
Actual travel distance.
In this step, known, according to described during distance between the graduation mark on described high-precision calibrating chi
The mobile quantity of graduation mark can calculate the actual travel distance in this step pitch.
S14, described actual travel distance and described default step pitch are compared acquisition deviation value.
This step be described actual travel distance and described default step pitch are compared after obtain difference, described
Difference can just can be born, and described plus or minus difference is i.e. deviation value Σ δ d.
The deviation value calibration that S15, utilization obtain adjusts the step pitch of described motion platform.
This step includes:
The stride value that described motion platform sets is adjusted by described deviation value；
Stride value after described adjustment is instructed the motor execution sending described motion platform to.
Referring to shown in Fig. 2, the location graphic designs on described high-precision calibrating chi 101 is "×" shape,
Survey is there is when described high-precision calibrating chi 101 cause not parallel with motion platform 301 direction of motion when mounted
During amount error: first pass through the angle theta between sideline and the direction of motion of measuring described "×" shape graduation mark,
I.e. measure the length value that the length in the sideline that described "×" shape graduation mark extends is corresponding with the direction of motion, and
The angle theta between the direction of motion and described "×" shape graduation mark is calculated afterwards by Pythagorean theorem；Now, institute
The range ability L*cos θ stating high-precision calibrating chi 101 is the actual motion distance of motion platform 301.
In other embodiments, the graduation mark on described high-precision calibrating chi 101 is not limited to "×" shape,
Graduation mark possesses a central point and the sideline extended outward from this central point.
The application measures and the device of calibration motion platform positioning precision fixes a high accuracy on the moving platform
Demarcate chi, calculate by calculating the actual displacement of described high-precision calibrating chi in certain predetermined step pitch
The actual displacement of described motion platform in default step pitch, thus show that described actual displacement is with pre-
If the deviation value between step pitch, and the precision of described motion platform is calibrated with this deviation value, solve existing
In technology, laser interferometer is expensive, it is complicated, the most portable to operate, and the batch not being suitable for equipment is raw
Produce and the problem of inspection.
Each technical characteristic of embodiment described above can combine arbitrarily, for making description succinct, the most right
The all possible combination of each technical characteristic in above-described embodiment is all described, but, if these skills
There is not contradiction in the combination of art feature, is all considered to be the scope that this specification is recorded.
Embodiment described above only have expressed several embodiments of the present utility model, its describe more concrete and
In detail, but therefore can not be interpreted as the restriction to utility model patent scope.It should be pointed out that, it is right
For those of ordinary skill in the art, without departing from the concept of the premise utility, it is also possible to do
Going out some deformation and improvement, these broadly fall into protection domain of the present utility model.Therefore, this utility model is special
The protection domain of profit should be as the criterion with claims.
Claims (8)
1. one kind measure and calibration motion platform positioning precision device, it is characterised in that include motion platform,
Be fixed on described motion platform demarcate chi, be located at the measurement camera above described demarcation chi and for controlling
Making the motion-control module of described motion platform, the positioning precision of described demarcation chi is higher than described motion platform
Positioning precision；The step pitch operating that described motion platform is preset according to described motion-control module, described measurement phase
Machine picked-up is the graduation mark change information of interior described demarcation chi during presetting step pitch, and described motion-control module passes through
The graduation mark change information of described demarcation chi calculate during certain predetermined step pitch in actual travel distance also
Adjust according to the deviation value between described actual travel distance and default step pitch and preset step pitch.
Measurement the most according to claim 1 and the device of calibration motion platform positioning precision, its feature exists
In, described motion platform is provided with driving motor and is controlled by motion-control module, described motor control
Module is used for starting, closing described motion platform and set step pitch for described motion platform.
Measurement the most according to claim 2 and the device of calibration motion platform positioning precision, its feature exists
In, described motion-control module receives the measurement data of measurement camera and calculates the motion of motion platform by mistake
Difference, then error amount is sent the motor of motion platform to calibrate the mobile accuracy of motion platform.
Measurement the most according to claim 3 and the device of calibration motion platform positioning precision, its feature exists
Utilize this error amount to compensate described motion platform in, described motion-control module, will deviation value negate after mend
Repay in described motion-control module, and then calibrate and promote the positioning precision of described motion platform.
Measurement the most according to claim 4 and the device of calibration motion platform positioning precision, its feature exists
In, the graduation mark of described demarcation chi includes a central point and the sideline extended out from this central point.
Measurement the most according to claim 5 and the device of calibration motion platform positioning precision, its feature exists
In, the graduation mark graphic designs on described demarcation chi is "×" shape.
Measurement the most according to claim 6 and the device of calibration motion platform positioning precision, its feature exists
In, if described demarcation chi is inconsistent with the direction of motion of described motion platform: first measure described "×" shape
The length value that the length in the sideline that graduation mark extends is corresponding with the direction of motion, then calculated by Pythagorean theorem
Angle theta between the direction of motion and described "×" shape graduation mark；Then, the range ability of described demarcation chi is taken advantage of
The actual motion distance of motion platform it is with the cosine value of angle theta.
Measurement the most according to claim 7 and the device of calibration motion platform positioning precision, its feature exists
In, described measurement camera uses overall situation exposure CCD camera, and the pixel of described measurement camera is 1600x1200,
The size of each pixel is 4.4um, and configuration enlargement ratio is the microlens of 10 times.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620106362.3U CN205561757U (en) | 2016-02-02 | 2016-02-02 | Motion platform positioning accuracy's device is measured and calibrated |
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| CN201620106362.3U CN205561757U (en) | 2016-02-02 | 2016-02-02 | Motion platform positioning accuracy's device is measured and calibrated |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105698726A (en) * | 2016-02-02 | 2016-06-22 | 深圳中科光子科技有限公司 | Method and device for measuring and calibrating motion platform positioning precision |
| CN107907063A (en) * | 2017-11-14 | 2018-04-13 | 湖南文理学院 | A kind of the steel band punching processing detecting system and method for view-based access control model measurement |
| CN108072319A (en) * | 2016-11-07 | 2018-05-25 | 俞庆平 | The Fast Calibration system and scaling method of a kind of motion platform |
| CN108081219A (en) * | 2017-12-07 | 2018-05-29 | 曹建 | The calibration method and system of operation console positioning accuracy |
| CN109767890A (en) * | 2019-03-06 | 2019-05-17 | 深圳市杰普特光电股份有限公司 | Bearing calibration and device repair resistance method and repair resistance machine |
| CN110068267A (en) * | 2019-05-06 | 2019-07-30 | 广东工业大学 | Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance |
| CN110146021A (en) * | 2019-06-20 | 2019-08-20 | 中国科学院地球化学研究所 | A kind of displacement platform resolution ratio and accuracy detecting device and its detection method |
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| CN116907343A (en) * | 2023-07-25 | 2023-10-20 | 广东凯福电子科技有限公司 | Visual detection instrument and detection method for mechanism movement precision |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105698726A (en) * | 2016-02-02 | 2016-06-22 | 深圳中科光子科技有限公司 | Method and device for measuring and calibrating motion platform positioning precision |
| CN105698726B (en) * | 2016-02-02 | 2018-07-31 | 深圳中科光子科技有限公司 | Measure and calibrate the method and apparatus of motion platform positioning accuracy |
| CN108072319A (en) * | 2016-11-07 | 2018-05-25 | 俞庆平 | The Fast Calibration system and scaling method of a kind of motion platform |
| CN108072319B (en) * | 2016-11-07 | 2020-05-22 | 俞庆平 | Rapid calibration system and calibration method for motion platform |
| CN107907063B (en) * | 2017-11-14 | 2020-05-12 | 湖南文理学院 | Steel strip punching processing detection system and method based on vision measurement |
| CN107907063A (en) * | 2017-11-14 | 2018-04-13 | 湖南文理学院 | A kind of the steel band punching processing detecting system and method for view-based access control model measurement |
| CN108081219A (en) * | 2017-12-07 | 2018-05-29 | 曹建 | The calibration method and system of operation console positioning accuracy |
| CN109767890A (en) * | 2019-03-06 | 2019-05-17 | 深圳市杰普特光电股份有限公司 | Bearing calibration and device repair resistance method and repair resistance machine |
| CN110068267A (en) * | 2019-05-06 | 2019-07-30 | 广东工业大学 | Evaluate the space nanometer positioning and detection device and method of micro-vision measurement performance |
| CN110068267B (en) * | 2019-05-06 | 2021-11-26 | 广东工业大学 | Space nanometer positioning and detecting device and method for evaluating microscopic vision measurement performance |
| CN110146021A (en) * | 2019-06-20 | 2019-08-20 | 中国科学院地球化学研究所 | A kind of displacement platform resolution ratio and accuracy detecting device and its detection method |
| CN113091661A (en) * | 2021-03-29 | 2021-07-09 | 中国兵器科学研究院宁波分院 | Test block for acquiring accuracy of measuring aperture position accuracy of CT equipment and measuring method thereof |
| CN116907343A (en) * | 2023-07-25 | 2023-10-20 | 广东凯福电子科技有限公司 | Visual detection instrument and detection method for mechanism movement precision |
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